JPS63124737U - - Google Patents

Info

Publication number
JPS63124737U
JPS63124737U JP1521587U JP1521587U JPS63124737U JP S63124737 U JPS63124737 U JP S63124737U JP 1521587 U JP1521587 U JP 1521587U JP 1521587 U JP1521587 U JP 1521587U JP S63124737 U JPS63124737 U JP S63124737U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
coating device
spin
spin chuck
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1521587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521863Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1521587U priority Critical patent/JPH0521863Y2/ja
Publication of JPS63124737U publication Critical patent/JPS63124737U/ja
Application granted granted Critical
Publication of JPH0521863Y2 publication Critical patent/JPH0521863Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1521587U 1987-02-04 1987-02-04 Expired - Lifetime JPH0521863Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1521587U JPH0521863Y2 (enrdf_load_stackoverflow) 1987-02-04 1987-02-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1521587U JPH0521863Y2 (enrdf_load_stackoverflow) 1987-02-04 1987-02-04

Publications (2)

Publication Number Publication Date
JPS63124737U true JPS63124737U (enrdf_load_stackoverflow) 1988-08-15
JPH0521863Y2 JPH0521863Y2 (enrdf_load_stackoverflow) 1993-06-04

Family

ID=30805941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1521587U Expired - Lifetime JPH0521863Y2 (enrdf_load_stackoverflow) 1987-02-04 1987-02-04

Country Status (1)

Country Link
JP (1) JPH0521863Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0521863Y2 (enrdf_load_stackoverflow) 1993-06-04

Similar Documents

Publication Publication Date Title
JPS63124737U (enrdf_load_stackoverflow)
JPH02146829U (enrdf_load_stackoverflow)
JPH02118926U (enrdf_load_stackoverflow)
JPS639130U (enrdf_load_stackoverflow)
JPS63172131U (enrdf_load_stackoverflow)
JPS62101230U (enrdf_load_stackoverflow)
JPS6230336U (enrdf_load_stackoverflow)
JPH042036U (enrdf_load_stackoverflow)
JPH02116731U (enrdf_load_stackoverflow)
JPS62126829U (enrdf_load_stackoverflow)
JPS62140726U (enrdf_load_stackoverflow)
JPS6351435U (enrdf_load_stackoverflow)
JPH033732U (enrdf_load_stackoverflow)
JPH0325239U (enrdf_load_stackoverflow)
JPS6340035U (enrdf_load_stackoverflow)
JPH03106727U (enrdf_load_stackoverflow)
JPH0395652U (enrdf_load_stackoverflow)
JPS62120341U (enrdf_load_stackoverflow)
JPS6426831U (enrdf_load_stackoverflow)
JPS6227779U (enrdf_load_stackoverflow)
JPH01142452U (enrdf_load_stackoverflow)
JPH0465436U (enrdf_load_stackoverflow)
JPS62194759U (enrdf_load_stackoverflow)
JPH0327040U (enrdf_load_stackoverflow)
JPH0192131U (enrdf_load_stackoverflow)