JPH0521320Y2 - - Google Patents

Info

Publication number
JPH0521320Y2
JPH0521320Y2 JP1986121736U JP12173686U JPH0521320Y2 JP H0521320 Y2 JPH0521320 Y2 JP H0521320Y2 JP 1986121736 U JP1986121736 U JP 1986121736U JP 12173686 U JP12173686 U JP 12173686U JP H0521320 Y2 JPH0521320 Y2 JP H0521320Y2
Authority
JP
Japan
Prior art keywords
temperature
surface plate
rotating surface
signal
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986121736U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6330466U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986121736U priority Critical patent/JPH0521320Y2/ja
Publication of JPS6330466U publication Critical patent/JPS6330466U/ja
Application granted granted Critical
Publication of JPH0521320Y2 publication Critical patent/JPH0521320Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP1986121736U 1986-08-08 1986-08-08 Expired - Lifetime JPH0521320Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986121736U JPH0521320Y2 (enrdf_load_stackoverflow) 1986-08-08 1986-08-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986121736U JPH0521320Y2 (enrdf_load_stackoverflow) 1986-08-08 1986-08-08

Publications (2)

Publication Number Publication Date
JPS6330466U JPS6330466U (enrdf_load_stackoverflow) 1988-02-27
JPH0521320Y2 true JPH0521320Y2 (enrdf_load_stackoverflow) 1993-06-01

Family

ID=31011278

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986121736U Expired - Lifetime JPH0521320Y2 (enrdf_load_stackoverflow) 1986-08-08 1986-08-08

Country Status (1)

Country Link
JP (1) JPH0521320Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6056460U (ja) * 1983-09-27 1985-04-19 株式会社東芝 研磨装置

Also Published As

Publication number Publication date
JPS6330466U (enrdf_load_stackoverflow) 1988-02-27

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