JPH0521244Y2 - - Google Patents

Info

Publication number
JPH0521244Y2
JPH0521244Y2 JP7232988U JP7232988U JPH0521244Y2 JP H0521244 Y2 JPH0521244 Y2 JP H0521244Y2 JP 7232988 U JP7232988 U JP 7232988U JP 7232988 U JP7232988 U JP 7232988U JP H0521244 Y2 JPH0521244 Y2 JP H0521244Y2
Authority
JP
Japan
Prior art keywords
chamber
ion lens
ion
rear chamber
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP7232988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01176359U (pm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7232988U priority Critical patent/JPH0521244Y2/ja
Publication of JPH01176359U publication Critical patent/JPH01176359U/ja
Application granted granted Critical
Publication of JPH0521244Y2 publication Critical patent/JPH0521244Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP7232988U 1988-05-31 1988-05-31 Expired - Lifetime JPH0521244Y2 (pm)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7232988U JPH0521244Y2 (pm) 1988-05-31 1988-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7232988U JPH0521244Y2 (pm) 1988-05-31 1988-05-31

Publications (2)

Publication Number Publication Date
JPH01176359U JPH01176359U (pm) 1989-12-15
JPH0521244Y2 true JPH0521244Y2 (pm) 1993-05-31

Family

ID=31297501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7232988U Expired - Lifetime JPH0521244Y2 (pm) 1988-05-31 1988-05-31

Country Status (1)

Country Link
JP (1) JPH0521244Y2 (pm)

Also Published As

Publication number Publication date
JPH01176359U (pm) 1989-12-15

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