JPH0521244Y2 - - Google Patents
Info
- Publication number
- JPH0521244Y2 JPH0521244Y2 JP7232988U JP7232988U JPH0521244Y2 JP H0521244 Y2 JPH0521244 Y2 JP H0521244Y2 JP 7232988 U JP7232988 U JP 7232988U JP 7232988 U JP7232988 U JP 7232988U JP H0521244 Y2 JPH0521244 Y2 JP H0521244Y2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- ion lens
- ion
- rear chamber
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000002500 ions Chemical class 0.000 claims description 52
- 238000009616 inductively coupled plasma Methods 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 18
- 239000007789 gas Substances 0.000 description 11
- 229910052786 argon Inorganic materials 0.000 description 9
- 238000009792 diffusion process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000006199 nebulizer Substances 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7232988U JPH0521244Y2 (fi) | 1988-05-31 | 1988-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7232988U JPH0521244Y2 (fi) | 1988-05-31 | 1988-05-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01176359U JPH01176359U (fi) | 1989-12-15 |
| JPH0521244Y2 true JPH0521244Y2 (fi) | 1993-05-31 |
Family
ID=31297501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7232988U Expired - Lifetime JPH0521244Y2 (fi) | 1988-05-31 | 1988-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521244Y2 (fi) |
-
1988
- 1988-05-31 JP JP7232988U patent/JPH0521244Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01176359U (fi) | 1989-12-15 |
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