JPH0520888B2 - - Google Patents

Info

Publication number
JPH0520888B2
JPH0520888B2 JP62267303A JP26730387A JPH0520888B2 JP H0520888 B2 JPH0520888 B2 JP H0520888B2 JP 62267303 A JP62267303 A JP 62267303A JP 26730387 A JP26730387 A JP 26730387A JP H0520888 B2 JPH0520888 B2 JP H0520888B2
Authority
JP
Japan
Prior art keywords
mask
wafer
alignment
stage
mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62267303A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01108741A (ja
Inventor
Ryoji Tanaka
Hidekazu Kono
Joji Iwata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP62267303A priority Critical patent/JPH01108741A/ja
Publication of JPH01108741A publication Critical patent/JPH01108741A/ja
Publication of JPH0520888B2 publication Critical patent/JPH0520888B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP62267303A 1987-10-21 1987-10-21 マスクとウェハのプリアライメント方法 Granted JPH01108741A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62267303A JPH01108741A (ja) 1987-10-21 1987-10-21 マスクとウェハのプリアライメント方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62267303A JPH01108741A (ja) 1987-10-21 1987-10-21 マスクとウェハのプリアライメント方法

Publications (2)

Publication Number Publication Date
JPH01108741A JPH01108741A (ja) 1989-04-26
JPH0520888B2 true JPH0520888B2 (ko) 1993-03-22

Family

ID=17442954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62267303A Granted JPH01108741A (ja) 1987-10-21 1987-10-21 マスクとウェハのプリアライメント方法

Country Status (1)

Country Link
JP (1) JPH01108741A (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05152186A (ja) * 1991-05-01 1993-06-18 Canon Inc 測定装置及び露光装置及び露光装置の位置決め方法

Also Published As

Publication number Publication date
JPH01108741A (ja) 1989-04-26

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