JPH05202469A - ファイバの連続スパッタ被覆方法および装置 - Google Patents

ファイバの連続スパッタ被覆方法および装置

Info

Publication number
JPH05202469A
JPH05202469A JP4127722A JP12772292A JPH05202469A JP H05202469 A JPH05202469 A JP H05202469A JP 4127722 A JP4127722 A JP 4127722A JP 12772292 A JP12772292 A JP 12772292A JP H05202469 A JPH05202469 A JP H05202469A
Authority
JP
Japan
Prior art keywords
sputter
fiber
vessel
coating
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4127722A
Other languages
English (en)
Japanese (ja)
Inventor
Jr Harvey N Rogers
ハーベイ・エヌ・ロジャーズ・ジュニア
Jacques F Linder
ジャック・エフ・リンダー
Ii Nicholas Cook
ニコラス・クック・ザ・セカンド
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of JPH05202469A publication Critical patent/JPH05202469A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C25/00—Surface treatment of fibres or filaments made from glass, minerals or slags
    • C03C25/10—Coating
    • C03C25/12—General methods of coating; Devices therefor
    • C03C25/22—Deposition from the vapour phase
    • C03C25/226—Deposition from the vapour phase by sputtering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C25/00—Surface treatment of fibres or filaments made from glass, minerals or slags
    • C03C25/10—Coating
    • C03C25/104—Coating to obtain optical fibres
    • C03C25/106—Single coatings
    • C03C25/1061—Inorganic coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C25/00—Surface treatment of fibres or filaments made from glass, minerals or slags
    • C03C25/10—Coating
    • C03C25/104—Coating to obtain optical fibres
    • C03C25/106—Single coatings
    • C03C25/1061—Inorganic coatings
    • C03C25/1063—Metals
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Surface Treatment Of Glass Fibres Or Filaments (AREA)
JP4127722A 1991-05-20 1992-05-20 ファイバの連続スパッタ被覆方法および装置 Pending JPH05202469A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US702545 1985-02-19
US07/702,545 US5135554A (en) 1991-05-20 1991-05-20 Method and apparatus for continuous sputter coating of fibers

Publications (1)

Publication Number Publication Date
JPH05202469A true JPH05202469A (ja) 1993-08-10

Family

ID=24821655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4127722A Pending JPH05202469A (ja) 1991-05-20 1992-05-20 ファイバの連続スパッタ被覆方法および装置

Country Status (8)

Country Link
US (1) US5135554A (enExample)
EP (1) EP0514658A1 (enExample)
JP (1) JPH05202469A (enExample)
KR (1) KR940011128B1 (enExample)
AU (1) AU631331B1 (enExample)
CA (1) CA2063780A1 (enExample)
IL (1) IL101468A0 (enExample)
TW (1) TW198001B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021529252A (ja) * 2018-06-22 2021-10-28 オフィシネ マッカフェリイ ソシエタ ペル アチオニ 耐食コーティングを有する金属ワイヤならびに金属ワイヤをコーティングするための装置および方法

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6680617B2 (en) * 2000-09-20 2004-01-20 Neocera, Inc. Apertured probes for localized measurements of a material's complex permittivity and fabrication method
US20030161601A1 (en) * 2002-02-28 2003-08-28 Ouyang Mike X. Thin film coating process and thin film coated optical components
US20050103620A1 (en) * 2003-11-19 2005-05-19 Zond, Inc. Plasma source with segmented magnetron cathode
WO2005095668A1 (en) * 2004-03-31 2005-10-13 Pirelli Tyre S.P.A. Method and apparatus for producing a metal wire coated with a layer of metal alloy
US7766394B2 (en) * 2006-10-30 2010-08-03 Medtronic, Inc. Breakaway connectors and systems
GB2462843B (en) * 2008-08-22 2013-03-20 Tisics Ltd Coated filaments and their manufacture
CN101730417B (zh) * 2008-10-31 2013-06-05 深圳富泰宏精密工业有限公司 壳体及其制作方法
US10711344B2 (en) * 2017-08-29 2020-07-14 Taichi Metal Material Technology Co., Ltd. Process for making composite product by plating alloy film on carbon fiber core
US12467129B2 (en) 2022-11-09 2025-11-11 Battelle Savannah River Alliance, Llc Sputtering apparatus and related systems and methods for sputtering substrates
CN116288212B (zh) * 2023-03-27 2024-10-15 西安工程大学 连续纤维表面的磁控溅射镀膜装置及镀膜方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57205335A (en) * 1981-06-10 1982-12-16 Furukawa Electric Co Ltd:The Manufacture of metal coated optical fiber
JPS58168002A (ja) * 1982-03-30 1983-10-04 Fujikura Ltd 金属コ−ト光フアイバとその製造方法
JPS597350A (ja) * 1982-07-02 1984-01-14 Fuji Photo Optical Co Ltd 分割発光式ストロボ回路
US4726822A (en) * 1984-10-22 1988-02-23 Honeywell Inc. Fast response thermochromatographic capillary columns
US4863576A (en) * 1986-09-04 1989-09-05 Collins George J Method and apparatus for hermetic coating of optical fibers
JP2643149B2 (ja) * 1987-06-03 1997-08-20 株式会社ブリヂストン 表面処理方法
US4842704A (en) * 1987-07-29 1989-06-27 Collins George J Magnetron deposition of ceramic oxide-superconductor thin films
GB2219006A (en) * 1988-05-26 1989-11-29 Rolls Royce Plc Coated fibre for use in a metal matrix
JPH0814021B2 (ja) * 1989-07-20 1996-02-14 松下電器産業株式会社 スパッタ装置
GB9009742D0 (en) * 1990-05-01 1990-06-20 Atomic Energy Authority Uk Production of composite precursor wires by sputter ion-plating onto an electrically conducting filament

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021529252A (ja) * 2018-06-22 2021-10-28 オフィシネ マッカフェリイ ソシエタ ペル アチオニ 耐食コーティングを有する金属ワイヤならびに金属ワイヤをコーティングするための装置および方法

Also Published As

Publication number Publication date
AU631331B1 (en) 1992-11-19
IL101468A0 (en) 1992-12-30
EP0514658A1 (en) 1992-11-25
KR920021461A (ko) 1992-12-18
KR940011128B1 (ko) 1994-11-23
TW198001B (enExample) 1993-01-11
US5135554A (en) 1992-08-04
CA2063780A1 (en) 1992-11-21

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