AU631331B1 - Method and apparatus for continuous sputter coating of fibers - Google Patents
Method and apparatus for continuous sputter coating of fibers Download PDFInfo
- Publication number
- AU631331B1 AU631331B1 AU16030/92A AU1603092A AU631331B1 AU 631331 B1 AU631331 B1 AU 631331B1 AU 16030/92 A AU16030/92 A AU 16030/92A AU 1603092 A AU1603092 A AU 1603092A AU 631331 B1 AU631331 B1 AU 631331B1
- Authority
- AU
- Australia
- Prior art keywords
- sputter
- fiber
- sputtering
- vessel
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 239000000835 fiber Substances 0.000 title claims description 94
- 238000004544 sputter deposition Methods 0.000 title claims description 85
- 238000000034 method Methods 0.000 title description 23
- 239000000463 material Substances 0.000 claims description 29
- 239000003365 glass fiber Substances 0.000 claims description 23
- 238000000576 coating method Methods 0.000 claims description 21
- 239000011248 coating agent Substances 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 239000011521 glass Substances 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 7
- 238000012681 fiber drawing Methods 0.000 claims description 7
- 239000000356 contaminant Substances 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 description 11
- 239000002184 metal Substances 0.000 description 11
- 239000011253 protective coating Substances 0.000 description 9
- 239000013077 target material Substances 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 238000011109 contamination Methods 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- XOJVVFBFDXDTEG-UHFFFAOYSA-N Norphytane Natural products CC(C)CCCC(C)CCCC(C)CCCC(C)C XOJVVFBFDXDTEG-UHFFFAOYSA-N 0.000 description 4
- 229910001092 metal group alloy Inorganic materials 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 239000006060 molten glass Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000004587 chromatography analysis Methods 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000002318 adhesion promoter Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 229920006240 drawn fiber Polymers 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 239000002783 friction material Substances 0.000 description 1
- 229910001026 inconel Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000011156 metal matrix composite Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
- 230000000930 thermomechanical effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C25/00—Surface treatment of fibres or filaments made from glass, minerals or slags
- C03C25/10—Coating
- C03C25/12—General methods of coating; Devices therefor
- C03C25/22—Deposition from the vapour phase
- C03C25/226—Deposition from the vapour phase by sputtering
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C25/00—Surface treatment of fibres or filaments made from glass, minerals or slags
- C03C25/10—Coating
- C03C25/104—Coating to obtain optical fibres
- C03C25/106—Single coatings
- C03C25/1061—Inorganic coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C25/00—Surface treatment of fibres or filaments made from glass, minerals or slags
- C03C25/10—Coating
- C03C25/104—Coating to obtain optical fibres
- C03C25/106—Single coatings
- C03C25/1061—Inorganic coatings
- C03C25/1063—Metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Or Physical Treatment Of Fibers (AREA)
- Surface Treatment Of Glass Fibres Or Filaments (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US702545 | 1985-02-19 | ||
| US07/702,545 US5135554A (en) | 1991-05-20 | 1991-05-20 | Method and apparatus for continuous sputter coating of fibers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AU631331B1 true AU631331B1 (en) | 1992-11-19 |
Family
ID=24821655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU16030/92A Ceased AU631331B1 (en) | 1991-05-20 | 1992-05-05 | Method and apparatus for continuous sputter coating of fibers |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US5135554A (enExample) |
| EP (1) | EP0514658A1 (enExample) |
| JP (1) | JPH05202469A (enExample) |
| KR (1) | KR940011128B1 (enExample) |
| AU (1) | AU631331B1 (enExample) |
| CA (1) | CA2063780A1 (enExample) |
| IL (1) | IL101468A0 (enExample) |
| TW (1) | TW198001B (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6680617B2 (en) * | 2000-09-20 | 2004-01-20 | Neocera, Inc. | Apertured probes for localized measurements of a material's complex permittivity and fabrication method |
| US20030161601A1 (en) * | 2002-02-28 | 2003-08-28 | Ouyang Mike X. | Thin film coating process and thin film coated optical components |
| US20050103620A1 (en) * | 2003-11-19 | 2005-05-19 | Zond, Inc. | Plasma source with segmented magnetron cathode |
| WO2005095668A1 (en) * | 2004-03-31 | 2005-10-13 | Pirelli Tyre S.P.A. | Method and apparatus for producing a metal wire coated with a layer of metal alloy |
| US7766394B2 (en) * | 2006-10-30 | 2010-08-03 | Medtronic, Inc. | Breakaway connectors and systems |
| GB2462843B (en) * | 2008-08-22 | 2013-03-20 | Tisics Ltd | Coated filaments and their manufacture |
| CN101730417B (zh) * | 2008-10-31 | 2013-06-05 | 深圳富泰宏精密工业有限公司 | 壳体及其制作方法 |
| US10711344B2 (en) * | 2017-08-29 | 2020-07-14 | Taichi Metal Material Technology Co., Ltd. | Process for making composite product by plating alloy film on carbon fiber core |
| IT201800006582A1 (it) * | 2018-06-22 | 2019-12-22 | Filo metallico con rivestimento anticorrosivo, nonché impianto e procedimento per rivestire un filo metallico | |
| US12467129B2 (en) | 2022-11-09 | 2025-11-11 | Battelle Savannah River Alliance, Llc | Sputtering apparatus and related systems and methods for sputtering substrates |
| CN116288212B (zh) * | 2023-03-27 | 2024-10-15 | 西安工程大学 | 连续纤维表面的磁控溅射镀膜装置及镀膜方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2219006A (en) * | 1988-05-26 | 1989-11-29 | Rolls Royce Plc | Coated fibre for use in a metal matrix |
| US5006218A (en) * | 1989-07-20 | 1991-04-09 | Matsushita Electric Industrial Co., Ltd. | Sputtering apparatus |
| EP0455408A1 (en) * | 1990-05-01 | 1991-11-06 | United Kingdom Atomic Energy Authority | Coating of filaments by sputter-ion-plating |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57205335A (en) * | 1981-06-10 | 1982-12-16 | Furukawa Electric Co Ltd:The | Manufacture of metal coated optical fiber |
| JPS58168002A (ja) * | 1982-03-30 | 1983-10-04 | Fujikura Ltd | 金属コ−ト光フアイバとその製造方法 |
| JPS597350A (ja) * | 1982-07-02 | 1984-01-14 | Fuji Photo Optical Co Ltd | 分割発光式ストロボ回路 |
| US4726822A (en) * | 1984-10-22 | 1988-02-23 | Honeywell Inc. | Fast response thermochromatographic capillary columns |
| US4863576A (en) * | 1986-09-04 | 1989-09-05 | Collins George J | Method and apparatus for hermetic coating of optical fibers |
| JP2643149B2 (ja) * | 1987-06-03 | 1997-08-20 | 株式会社ブリヂストン | 表面処理方法 |
| US4842704A (en) * | 1987-07-29 | 1989-06-27 | Collins George J | Magnetron deposition of ceramic oxide-superconductor thin films |
-
1991
- 1991-05-20 US US07/702,545 patent/US5135554A/en not_active Expired - Lifetime
-
1992
- 1992-03-23 CA CA002063780A patent/CA2063780A1/en not_active Abandoned
- 1992-04-02 IL IL101468A patent/IL101468A0/xx unknown
- 1992-04-08 EP EP92106089A patent/EP0514658A1/en not_active Withdrawn
- 1992-04-10 TW TW081102812A patent/TW198001B/zh active
- 1992-05-05 AU AU16030/92A patent/AU631331B1/en not_active Ceased
- 1992-05-19 KR KR1019920008443A patent/KR940011128B1/ko not_active Expired - Lifetime
- 1992-05-20 JP JP4127722A patent/JPH05202469A/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2219006A (en) * | 1988-05-26 | 1989-11-29 | Rolls Royce Plc | Coated fibre for use in a metal matrix |
| US5006218A (en) * | 1989-07-20 | 1991-04-09 | Matsushita Electric Industrial Co., Ltd. | Sputtering apparatus |
| EP0455408A1 (en) * | 1990-05-01 | 1991-11-06 | United Kingdom Atomic Energy Authority | Coating of filaments by sputter-ion-plating |
Also Published As
| Publication number | Publication date |
|---|---|
| IL101468A0 (en) | 1992-12-30 |
| EP0514658A1 (en) | 1992-11-25 |
| KR920021461A (ko) | 1992-12-18 |
| JPH05202469A (ja) | 1993-08-10 |
| KR940011128B1 (ko) | 1994-11-23 |
| TW198001B (enExample) | 1993-01-11 |
| US5135554A (en) | 1992-08-04 |
| CA2063780A1 (en) | 1992-11-21 |
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