KR940011128B1 - 섬유를 연속적으로 스퍼터 피복하기 위한 장치 - Google Patents

섬유를 연속적으로 스퍼터 피복하기 위한 장치 Download PDF

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Publication number
KR940011128B1
KR940011128B1 KR1019920008443A KR920008443A KR940011128B1 KR 940011128 B1 KR940011128 B1 KR 940011128B1 KR 1019920008443 A KR1019920008443 A KR 1019920008443A KR 920008443 A KR920008443 A KR 920008443A KR 940011128 B1 KR940011128 B1 KR 940011128B1
Authority
KR
South Korea
Prior art keywords
sputtering
fiber
sputter
fibers
zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1019920008443A
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English (en)
Korean (ko)
Other versions
KR920021461A (ko
Inventor
엔. 로저스 2세 하비
에프. 린더 재키스
쿠크 2세 니콜라스
Original Assignee
휴즈 에어크라프트 캄파니
원다 케이. 덴슨-로우
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 휴즈 에어크라프트 캄파니, 원다 케이. 덴슨-로우 filed Critical 휴즈 에어크라프트 캄파니
Publication of KR920021461A publication Critical patent/KR920021461A/ko
Application granted granted Critical
Publication of KR940011128B1 publication Critical patent/KR940011128B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C25/00—Surface treatment of fibres or filaments made from glass, minerals or slags
    • C03C25/10—Coating
    • C03C25/12—General methods of coating; Devices therefor
    • C03C25/22—Deposition from the vapour phase
    • C03C25/226—Deposition from the vapour phase by sputtering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C25/00—Surface treatment of fibres or filaments made from glass, minerals or slags
    • C03C25/10—Coating
    • C03C25/104—Coating to obtain optical fibres
    • C03C25/106—Single coatings
    • C03C25/1061—Inorganic coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C25/00—Surface treatment of fibres or filaments made from glass, minerals or slags
    • C03C25/10—Coating
    • C03C25/104—Coating to obtain optical fibres
    • C03C25/106—Single coatings
    • C03C25/1061—Inorganic coatings
    • C03C25/1063—Metals
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Surface Treatment Of Glass Fibres Or Filaments (AREA)
KR1019920008443A 1991-05-20 1992-05-19 섬유를 연속적으로 스퍼터 피복하기 위한 장치 Expired - Lifetime KR940011128B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/702,545 US5135554A (en) 1991-05-20 1991-05-20 Method and apparatus for continuous sputter coating of fibers
US702,545 1991-05-20

Publications (2)

Publication Number Publication Date
KR920021461A KR920021461A (ko) 1992-12-18
KR940011128B1 true KR940011128B1 (ko) 1994-11-23

Family

ID=24821655

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920008443A Expired - Lifetime KR940011128B1 (ko) 1991-05-20 1992-05-19 섬유를 연속적으로 스퍼터 피복하기 위한 장치

Country Status (8)

Country Link
US (1) US5135554A (enExample)
EP (1) EP0514658A1 (enExample)
JP (1) JPH05202469A (enExample)
KR (1) KR940011128B1 (enExample)
AU (1) AU631331B1 (enExample)
CA (1) CA2063780A1 (enExample)
IL (1) IL101468A0 (enExample)
TW (1) TW198001B (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6680617B2 (en) * 2000-09-20 2004-01-20 Neocera, Inc. Apertured probes for localized measurements of a material's complex permittivity and fabrication method
US20030161601A1 (en) * 2002-02-28 2003-08-28 Ouyang Mike X. Thin film coating process and thin film coated optical components
US20050103620A1 (en) * 2003-11-19 2005-05-19 Zond, Inc. Plasma source with segmented magnetron cathode
BRPI0418686B1 (pt) * 2004-03-31 2013-07-23 método e aparelho para produzir um fio de aço revestido
US7766394B2 (en) * 2006-10-30 2010-08-03 Medtronic, Inc. Breakaway connectors and systems
GB2462843B (en) * 2008-08-22 2013-03-20 Tisics Ltd Coated filaments and their manufacture
CN101730417B (zh) * 2008-10-31 2013-06-05 深圳富泰宏精密工业有限公司 壳体及其制作方法
US10711344B2 (en) * 2017-08-29 2020-07-14 Taichi Metal Material Technology Co., Ltd. Process for making composite product by plating alloy film on carbon fiber core
IT201800006582A1 (it) * 2018-06-22 2019-12-22 Filo metallico con rivestimento anticorrosivo, nonché impianto e procedimento per rivestire un filo metallico
US12467129B2 (en) 2022-11-09 2025-11-11 Battelle Savannah River Alliance, Llc Sputtering apparatus and related systems and methods for sputtering substrates
CN116288212B (zh) * 2023-03-27 2024-10-15 西安工程大学 连续纤维表面的磁控溅射镀膜装置及镀膜方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57205335A (en) * 1981-06-10 1982-12-16 Furukawa Electric Co Ltd:The Manufacture of metal coated optical fiber
JPS58168002A (ja) * 1982-03-30 1983-10-04 Fujikura Ltd 金属コ−ト光フアイバとその製造方法
JPS597350A (ja) * 1982-07-02 1984-01-14 Fuji Photo Optical Co Ltd 分割発光式ストロボ回路
US4726822A (en) * 1984-10-22 1988-02-23 Honeywell Inc. Fast response thermochromatographic capillary columns
US4863576A (en) * 1986-09-04 1989-09-05 Collins George J Method and apparatus for hermetic coating of optical fibers
JP2643149B2 (ja) * 1987-06-03 1997-08-20 株式会社ブリヂストン 表面処理方法
US4842704A (en) * 1987-07-29 1989-06-27 Collins George J Magnetron deposition of ceramic oxide-superconductor thin films
GB2219006A (en) * 1988-05-26 1989-11-29 Rolls Royce Plc Coated fibre for use in a metal matrix
JPH0814021B2 (ja) * 1989-07-20 1996-02-14 松下電器産業株式会社 スパッタ装置
GB9009742D0 (en) * 1990-05-01 1990-06-20 Atomic Energy Authority Uk Production of composite precursor wires by sputter ion-plating onto an electrically conducting filament

Also Published As

Publication number Publication date
TW198001B (enExample) 1993-01-11
CA2063780A1 (en) 1992-11-21
KR920021461A (ko) 1992-12-18
EP0514658A1 (en) 1992-11-25
IL101468A0 (en) 1992-12-30
JPH05202469A (ja) 1993-08-10
AU631331B1 (en) 1992-11-19
US5135554A (en) 1992-08-04

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A201 Request for examination
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19920519

PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 19920519

Comment text: Request for Examination of Application

PG1501 Laying open of application
G160 Decision to publish patent application
PG1605 Publication of application before grant of patent

Comment text: Decision on Publication of Application

Patent event code: PG16051S01I

Patent event date: 19941031

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 19950215

NORF Unpaid initial registration fee
PC1904 Unpaid initial registration fee