CA2063780A1 - Method and apparatus for continuous sputter coating of fibers - Google Patents

Method and apparatus for continuous sputter coating of fibers

Info

Publication number
CA2063780A1
CA2063780A1 CA002063780A CA2063780A CA2063780A1 CA 2063780 A1 CA2063780 A1 CA 2063780A1 CA 002063780 A CA002063780 A CA 002063780A CA 2063780 A CA2063780 A CA 2063780A CA 2063780 A1 CA2063780 A1 CA 2063780A1
Authority
CA
Canada
Prior art keywords
sputter
fiber
sputtering
vessel
zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002063780A
Other languages
English (en)
French (fr)
Inventor
Harvey N. Rogers, Jr.
Jacques F. Linder
Nicholas Ii Cook
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of CA2063780A1 publication Critical patent/CA2063780A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C25/00—Surface treatment of fibres or filaments made from glass, minerals or slags
    • C03C25/10—Coating
    • C03C25/12—General methods of coating; Devices therefor
    • C03C25/22—Deposition from the vapour phase
    • C03C25/226—Deposition from the vapour phase by sputtering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C25/00—Surface treatment of fibres or filaments made from glass, minerals or slags
    • C03C25/10—Coating
    • C03C25/104—Coating to obtain optical fibres
    • C03C25/106—Single coatings
    • C03C25/1061—Inorganic coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C25/00—Surface treatment of fibres or filaments made from glass, minerals or slags
    • C03C25/10—Coating
    • C03C25/104—Coating to obtain optical fibres
    • C03C25/106—Single coatings
    • C03C25/1061—Inorganic coatings
    • C03C25/1063—Metals
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
  • Surface Treatment Of Glass Fibres Or Filaments (AREA)
CA002063780A 1991-05-20 1992-03-23 Method and apparatus for continuous sputter coating of fibers Abandoned CA2063780A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US702,545 1991-05-20
US07/702,545 US5135554A (en) 1991-05-20 1991-05-20 Method and apparatus for continuous sputter coating of fibers

Publications (1)

Publication Number Publication Date
CA2063780A1 true CA2063780A1 (en) 1992-11-21

Family

ID=24821655

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002063780A Abandoned CA2063780A1 (en) 1991-05-20 1992-03-23 Method and apparatus for continuous sputter coating of fibers

Country Status (8)

Country Link
US (1) US5135554A (enExample)
EP (1) EP0514658A1 (enExample)
JP (1) JPH05202469A (enExample)
KR (1) KR940011128B1 (enExample)
AU (1) AU631331B1 (enExample)
CA (1) CA2063780A1 (enExample)
IL (1) IL101468A0 (enExample)
TW (1) TW198001B (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6680617B2 (en) * 2000-09-20 2004-01-20 Neocera, Inc. Apertured probes for localized measurements of a material's complex permittivity and fabrication method
US20030161601A1 (en) * 2002-02-28 2003-08-28 Ouyang Mike X. Thin film coating process and thin film coated optical components
US20050103620A1 (en) * 2003-11-19 2005-05-19 Zond, Inc. Plasma source with segmented magnetron cathode
WO2005095668A1 (en) * 2004-03-31 2005-10-13 Pirelli Tyre S.P.A. Method and apparatus for producing a metal wire coated with a layer of metal alloy
US7766394B2 (en) * 2006-10-30 2010-08-03 Medtronic, Inc. Breakaway connectors and systems
GB2462843B (en) * 2008-08-22 2013-03-20 Tisics Ltd Coated filaments and their manufacture
CN101730417B (zh) * 2008-10-31 2013-06-05 深圳富泰宏精密工业有限公司 壳体及其制作方法
US10711344B2 (en) * 2017-08-29 2020-07-14 Taichi Metal Material Technology Co., Ltd. Process for making composite product by plating alloy film on carbon fiber core
IT201800006582A1 (it) * 2018-06-22 2019-12-22 Filo metallico con rivestimento anticorrosivo, nonché impianto e procedimento per rivestire un filo metallico
US12467129B2 (en) 2022-11-09 2025-11-11 Battelle Savannah River Alliance, Llc Sputtering apparatus and related systems and methods for sputtering substrates
CN116288212B (zh) * 2023-03-27 2024-10-15 西安工程大学 连续纤维表面的磁控溅射镀膜装置及镀膜方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57205335A (en) * 1981-06-10 1982-12-16 Furukawa Electric Co Ltd:The Manufacture of metal coated optical fiber
JPS58168002A (ja) * 1982-03-30 1983-10-04 Fujikura Ltd 金属コ−ト光フアイバとその製造方法
JPS597350A (ja) * 1982-07-02 1984-01-14 Fuji Photo Optical Co Ltd 分割発光式ストロボ回路
US4726822A (en) * 1984-10-22 1988-02-23 Honeywell Inc. Fast response thermochromatographic capillary columns
US4863576A (en) * 1986-09-04 1989-09-05 Collins George J Method and apparatus for hermetic coating of optical fibers
JP2643149B2 (ja) * 1987-06-03 1997-08-20 株式会社ブリヂストン 表面処理方法
US4842704A (en) * 1987-07-29 1989-06-27 Collins George J Magnetron deposition of ceramic oxide-superconductor thin films
GB2219006A (en) * 1988-05-26 1989-11-29 Rolls Royce Plc Coated fibre for use in a metal matrix
JPH0814021B2 (ja) * 1989-07-20 1996-02-14 松下電器産業株式会社 スパッタ装置
GB9009742D0 (en) * 1990-05-01 1990-06-20 Atomic Energy Authority Uk Production of composite precursor wires by sputter ion-plating onto an electrically conducting filament

Also Published As

Publication number Publication date
AU631331B1 (en) 1992-11-19
IL101468A0 (en) 1992-12-30
EP0514658A1 (en) 1992-11-25
KR920021461A (ko) 1992-12-18
JPH05202469A (ja) 1993-08-10
KR940011128B1 (ko) 1994-11-23
TW198001B (enExample) 1993-01-11
US5135554A (en) 1992-08-04

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Legal Events

Date Code Title Description
EEER Examination request
FZDE Discontinued