JPH0520194B2 - - Google Patents

Info

Publication number
JPH0520194B2
JPH0520194B2 JP62157210A JP15721087A JPH0520194B2 JP H0520194 B2 JPH0520194 B2 JP H0520194B2 JP 62157210 A JP62157210 A JP 62157210A JP 15721087 A JP15721087 A JP 15721087A JP H0520194 B2 JPH0520194 B2 JP H0520194B2
Authority
JP
Japan
Prior art keywords
lens
processing
carbon dioxide
laser
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62157210A
Other languages
English (en)
Japanese (ja)
Other versions
JPS642795A (en
JPH012795A (ja
Inventor
Yoshihide Kanehara
Shuji Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62-157210A priority Critical patent/JPH012795A/ja
Priority claimed from JP62-157210A external-priority patent/JPH012795A/ja
Publication of JPS642795A publication Critical patent/JPS642795A/ja
Publication of JPH012795A publication Critical patent/JPH012795A/ja
Publication of JPH0520194B2 publication Critical patent/JPH0520194B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
JP62-157210A 1987-06-24 炭酸ガスレ−ザ加工モニタ−装置 Granted JPH012795A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62-157210A JPH012795A (ja) 1987-06-24 炭酸ガスレ−ザ加工モニタ−装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62-157210A JPH012795A (ja) 1987-06-24 炭酸ガスレ−ザ加工モニタ−装置

Publications (3)

Publication Number Publication Date
JPS642795A JPS642795A (en) 1989-01-06
JPH012795A JPH012795A (ja) 1989-01-06
JPH0520194B2 true JPH0520194B2 (https=) 1993-03-18

Family

ID=

Also Published As

Publication number Publication date
JPS642795A (en) 1989-01-06

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