JPH0520194B2 - - Google Patents

Info

Publication number
JPH0520194B2
JPH0520194B2 JP62157210A JP15721087A JPH0520194B2 JP H0520194 B2 JPH0520194 B2 JP H0520194B2 JP 62157210 A JP62157210 A JP 62157210A JP 15721087 A JP15721087 A JP 15721087A JP H0520194 B2 JPH0520194 B2 JP H0520194B2
Authority
JP
Japan
Prior art keywords
lens
processing
carbon dioxide
laser
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62157210A
Other languages
English (en)
Japanese (ja)
Other versions
JPH012795A (ja
JPS642795A (en
Inventor
Yoshihide Kanehara
Shuji Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP62157210A priority Critical patent/JPS642795A/ja
Publication of JPH012795A publication Critical patent/JPH012795A/ja
Publication of JPS642795A publication Critical patent/JPS642795A/ja
Publication of JPH0520194B2 publication Critical patent/JPH0520194B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
JP62157210A 1987-06-24 1987-06-24 Monitoring device for carbonic acid gas laser beam machining Granted JPS642795A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62157210A JPS642795A (en) 1987-06-24 1987-06-24 Monitoring device for carbonic acid gas laser beam machining

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62157210A JPS642795A (en) 1987-06-24 1987-06-24 Monitoring device for carbonic acid gas laser beam machining

Publications (3)

Publication Number Publication Date
JPH012795A JPH012795A (ja) 1989-01-06
JPS642795A JPS642795A (en) 1989-01-06
JPH0520194B2 true JPH0520194B2 (cg-RX-API-DMAC10.html) 1993-03-18

Family

ID=15644617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62157210A Granted JPS642795A (en) 1987-06-24 1987-06-24 Monitoring device for carbonic acid gas laser beam machining

Country Status (1)

Country Link
JP (1) JPS642795A (cg-RX-API-DMAC10.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009072831A (ja) * 2008-12-25 2009-04-09 Bp Corp North America Inc レーザースクライブを形成する装置
JP5463104B2 (ja) * 2009-09-03 2014-04-09 株式会社Ihi検査計測 レーザ溶接装置
JP5912293B2 (ja) * 2011-05-24 2016-04-27 株式会社ディスコ レーザー加工装置
WO2025069364A1 (ja) * 2023-09-29 2025-04-03 株式会社ニコン ビーム走査装置、加工装置及び加工方法

Also Published As

Publication number Publication date
JPS642795A (en) 1989-01-06

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