JPH0520125B2 - - Google Patents

Info

Publication number
JPH0520125B2
JPH0520125B2 JP60108007A JP10800785A JPH0520125B2 JP H0520125 B2 JPH0520125 B2 JP H0520125B2 JP 60108007 A JP60108007 A JP 60108007A JP 10800785 A JP10800785 A JP 10800785A JP H0520125 B2 JPH0520125 B2 JP H0520125B2
Authority
JP
Japan
Prior art keywords
container
resist liquid
resist
filter
pressurizer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60108007A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61268311A (ja
Inventor
Takao Higuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Priority to JP60108007A priority Critical patent/JPS61268311A/ja
Publication of JPS61268311A publication Critical patent/JPS61268311A/ja
Publication of JPH0520125B2 publication Critical patent/JPH0520125B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Filtration Of Liquid (AREA)
  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP60108007A 1985-05-20 1985-05-20 レジスト液用濾過装置 Granted JPS61268311A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60108007A JPS61268311A (ja) 1985-05-20 1985-05-20 レジスト液用濾過装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60108007A JPS61268311A (ja) 1985-05-20 1985-05-20 レジスト液用濾過装置

Publications (2)

Publication Number Publication Date
JPS61268311A JPS61268311A (ja) 1986-11-27
JPH0520125B2 true JPH0520125B2 (enrdf_load_html_response) 1993-03-18

Family

ID=14473621

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60108007A Granted JPS61268311A (ja) 1985-05-20 1985-05-20 レジスト液用濾過装置

Country Status (1)

Country Link
JP (1) JPS61268311A (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2726281B2 (ja) * 1988-09-30 1998-03-11 東京エレクトロン株式会社 レジスト処理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5161072A (en) * 1974-11-25 1976-05-27 Nippon Kokan Kk Kyusokurokakino seigyohoho

Also Published As

Publication number Publication date
JPS61268311A (ja) 1986-11-27

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term