JPH0519642B2 - - Google Patents

Info

Publication number
JPH0519642B2
JPH0519642B2 JP59214799A JP21479984A JPH0519642B2 JP H0519642 B2 JPH0519642 B2 JP H0519642B2 JP 59214799 A JP59214799 A JP 59214799A JP 21479984 A JP21479984 A JP 21479984A JP H0519642 B2 JPH0519642 B2 JP H0519642B2
Authority
JP
Japan
Prior art keywords
light
inspected
light receiving
receiver
reflected light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59214799A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6191508A (ja
Inventor
Kenichi Matsui
Mitsuhito Kamei
Mikio Tachibana
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Nippon Steel Corp
Original Assignee
Mitsubishi Electric Corp
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp, Sumitomo Metal Industries Ltd filed Critical Mitsubishi Electric Corp
Priority to JP21479984A priority Critical patent/JPS6191508A/ja
Publication of JPS6191508A publication Critical patent/JPS6191508A/ja
Publication of JPH0519642B2 publication Critical patent/JPH0519642B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP21479984A 1984-10-12 1984-10-12 表面欠陥検出装置 Granted JPS6191508A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21479984A JPS6191508A (ja) 1984-10-12 1984-10-12 表面欠陥検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21479984A JPS6191508A (ja) 1984-10-12 1984-10-12 表面欠陥検出装置

Publications (2)

Publication Number Publication Date
JPS6191508A JPS6191508A (ja) 1986-05-09
JPH0519642B2 true JPH0519642B2 (enrdf_load_stackoverflow) 1993-03-17

Family

ID=16661712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21479984A Granted JPS6191508A (ja) 1984-10-12 1984-10-12 表面欠陥検出装置

Country Status (1)

Country Link
JP (1) JPS6191508A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE502005001342D1 (de) * 2004-04-01 2007-10-11 Bosch Gmbh Robert Vorrichtung zum dosierten Abfüllen von Schüttgut

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5834011B2 (ja) * 1976-03-17 1983-07-23 日本ビクター株式会社 無接触式ピツクアツプ
JPS593245A (ja) * 1982-06-29 1984-01-09 Mitsubishi Electric Corp 欠陥検査装置

Also Published As

Publication number Publication date
JPS6191508A (ja) 1986-05-09

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