JPH0518841Y2 - - Google Patents
Info
- Publication number
- JPH0518841Y2 JPH0518841Y2 JP1653286U JP1653286U JPH0518841Y2 JP H0518841 Y2 JPH0518841 Y2 JP H0518841Y2 JP 1653286 U JP1653286 U JP 1653286U JP 1653286 U JP1653286 U JP 1653286U JP H0518841 Y2 JPH0518841 Y2 JP H0518841Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- potential
- center
- cylindrical body
- secondary electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 6
- 230000005684 electric field Effects 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 2
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 150000002500 ions Chemical group 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1653286U JPH0518841Y2 (cs) | 1986-02-07 | 1986-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1653286U JPH0518841Y2 (cs) | 1986-02-07 | 1986-02-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62129759U JPS62129759U (cs) | 1987-08-17 |
| JPH0518841Y2 true JPH0518841Y2 (cs) | 1993-05-19 |
Family
ID=30808473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1653286U Expired - Lifetime JPH0518841Y2 (cs) | 1986-02-07 | 1986-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0518841Y2 (cs) |
-
1986
- 1986-02-07 JP JP1653286U patent/JPH0518841Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62129759U (cs) | 1987-08-17 |
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