JPH0518840Y2 - - Google Patents
Info
- Publication number
- JPH0518840Y2 JPH0518840Y2 JP725787U JP725787U JPH0518840Y2 JP H0518840 Y2 JPH0518840 Y2 JP H0518840Y2 JP 725787 U JP725787 U JP 725787U JP 725787 U JP725787 U JP 725787U JP H0518840 Y2 JPH0518840 Y2 JP H0518840Y2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic pole
- pole piece
- cylindrical member
- lens
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 claims description 17
- 230000005284 excitation Effects 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000001000 micrograph Methods 0.000 description 5
- 238000011109 contamination Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP725787U JPH0518840Y2 (US20090163788A1-20090625-C00002.png) | 1987-01-21 | 1987-01-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP725787U JPH0518840Y2 (US20090163788A1-20090625-C00002.png) | 1987-01-21 | 1987-01-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63117049U JPS63117049U (US20090163788A1-20090625-C00002.png) | 1988-07-28 |
| JPH0518840Y2 true JPH0518840Y2 (US20090163788A1-20090625-C00002.png) | 1993-05-19 |
Family
ID=30790544
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP725787U Expired - Lifetime JPH0518840Y2 (US20090163788A1-20090625-C00002.png) | 1987-01-21 | 1987-01-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0518840Y2 (US20090163788A1-20090625-C00002.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110431649A (zh) * | 2017-03-29 | 2019-11-08 | 株式会社日立高新技术 | 带电粒子束装置 |
-
1987
- 1987-01-21 JP JP725787U patent/JPH0518840Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110431649A (zh) * | 2017-03-29 | 2019-11-08 | 株式会社日立高新技术 | 带电粒子束装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63117049U (US20090163788A1-20090625-C00002.png) | 1988-07-28 |
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