JPH05181B2 - - Google Patents

Info

Publication number
JPH05181B2
JPH05181B2 JP16224488A JP16224488A JPH05181B2 JP H05181 B2 JPH05181 B2 JP H05181B2 JP 16224488 A JP16224488 A JP 16224488A JP 16224488 A JP16224488 A JP 16224488A JP H05181 B2 JPH05181 B2 JP H05181B2
Authority
JP
Japan
Prior art keywords
polished
chamber
recovery
inflow chamber
abrasive material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP16224488A
Other languages
English (en)
Japanese (ja)
Other versions
JPH029581A (ja
Inventor
Kazuyuki Egawa
Yoshiki Takahashi
Hiroshi Atsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ATSUJI TETSUKO KK
YOKOKAWA KOJI KK
Original Assignee
ATSUJI TETSUKO KK
YOKOKAWA KOJI KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ATSUJI TETSUKO KK, YOKOKAWA KOJI KK filed Critical ATSUJI TETSUKO KK
Priority to JP16224488A priority Critical patent/JPH029581A/ja
Publication of JPH029581A publication Critical patent/JPH029581A/ja
Publication of JPH05181B2 publication Critical patent/JPH05181B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Working Measures On Existing Buildindgs (AREA)
JP16224488A 1988-06-28 1988-06-28 局部研掃装置 Granted JPH029581A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16224488A JPH029581A (ja) 1988-06-28 1988-06-28 局部研掃装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16224488A JPH029581A (ja) 1988-06-28 1988-06-28 局部研掃装置

Publications (2)

Publication Number Publication Date
JPH029581A JPH029581A (ja) 1990-01-12
JPH05181B2 true JPH05181B2 (enrdf_load_stackoverflow) 1993-01-05

Family

ID=15750731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16224488A Granted JPH029581A (ja) 1988-06-28 1988-06-28 局部研掃装置

Country Status (1)

Country Link
JP (1) JPH029581A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08229823A (ja) * 1995-02-27 1996-09-10 Hec Corp 研掃用ノズル装置
US6343494B2 (en) * 1998-08-11 2002-02-05 Mannesmann Vdo Ag Locking device

Also Published As

Publication number Publication date
JPH029581A (ja) 1990-01-12

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