JPH05175653A - Manufacture of printed wiring board - Google Patents

Manufacture of printed wiring board

Info

Publication number
JPH05175653A
JPH05175653A JP34046591A JP34046591A JPH05175653A JP H05175653 A JPH05175653 A JP H05175653A JP 34046591 A JP34046591 A JP 34046591A JP 34046591 A JP34046591 A JP 34046591A JP H05175653 A JPH05175653 A JP H05175653A
Authority
JP
Japan
Prior art keywords
hole
plating layer
metal foil
laminated plate
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP34046591A
Other languages
Japanese (ja)
Inventor
Yoshiyuki Kuboi
良行 窪井
Shoichi Fujimori
正一 藤森
Seiji Kobayashi
誠司 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP34046591A priority Critical patent/JPH05175653A/en
Publication of JPH05175653A publication Critical patent/JPH05175653A/en
Withdrawn legal-status Critical Current

Links

Abstract

PURPOSE:To accurately form a miniature circuit. CONSTITUTION:A through hole 3 is formed in a laminated board 2 to both side surfaces of which metal foils 1 are stuck. The board 2 is plated to form a through hole plated layer 4 on the inner periphery of the hole 3. Resin 5 is filled in the hole 3. Then, the surface of the board 2 is etched to etch a plated layer 6 adhered to the surface of the foil 1 by plating. When the layer 6 is removed in a state that the layer 4 is protected with the resin 5 to form a circuit, a thickness of metal to be etched is reduced.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、スルーホールを有する
プリント配線板の製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a printed wiring board having through holes.

【0002】[0002]

【従来の技術】スルーホール3を設けたプリント配線板
を製造するにあたっては、例えば両面に銅箔などの金属
箔1を張った積層板2を用い、先ず図2(a)のように
積層板2にドリル加工等をおこなってスルーホール3を
形成し、次にこの積層板2をメッキ浴に浸漬して無電解
銅メッキ等のメッキ処理をおこなってスルーホール3の
内周にスルーホールメッキ層4を設ける。そして、金属
箔1をエッチング加工して回路パターン以外の部分を除
去することによって、図2(c)のように積層板2の表
面に回路10を形成したプリント配線板を得ることがで
きるものである。このプリント配線板にあっては、スル
ーホール3の内周に設けたスルーホールメッキ層4で表
裏の回路10を導通接続することができる。
2. Description of the Related Art In manufacturing a printed wiring board having through holes 3, for example, a laminated plate 2 having a metal foil 1 such as a copper foil stretched on both sides is used. First, as shown in FIG. 2 is drilled to form a through hole 3, and then the laminated plate 2 is immersed in a plating bath to perform a plating treatment such as electroless copper plating to form a through hole plating layer on the inner periphery of the through hole 3. 4 is provided. Then, by etching the metal foil 1 to remove the portions other than the circuit pattern, it is possible to obtain a printed wiring board having the circuit 10 formed on the surface of the laminate 2 as shown in FIG. 2 (c). is there. In this printed wiring board, the circuits 10 on the front and back sides can be electrically connected by the through hole plating layer 4 provided on the inner periphery of the through hole 3.

【0003】[0003]

【発明が解決しようとする課題】しかし、金属箔1の表
面にはスルーホールメッキ層4を形成する際のメッキ処
理によって図2(b)に示すように金属箔1の表面にも
メッキ層6が形成されており、回路形成をおこうために
は金属箔1に加えてメッキ層6もエッチングする必要が
あり、エッチングの対象となる金属の厚みが厚くなって
いる。例えば18μm厚の金属箔1を用いるとしても、
メッキ処理によってメッキ層6が厚み25μmで付着し
ていると、合計43μmの厚みの金属をエッチングしな
ければならない。そしてこのようにエッチングする金属
の厚みが厚くなれば、エッチング時間が長くなって回路
10の側面がエッチング作用を受けるサイドエッチング
量が増え、この結果回路形成の解像度が悪くなって、微
細回路を高精度で形成することが難しいという問題が生
じるものであった。この対策として、9μm銅箔のよう
な極薄の金属箔を用いることが考えられるが、このよう
な薄い金属箔は取扱いが難しく、コストも高くなって実
用的ではない。
However, as shown in FIG. 2 (b), the plating layer 6 is formed on the surface of the metal foil 1 by the plating treatment when forming the through-hole plating layer 4 on the surface of the metal foil 1. In order to form a circuit, it is necessary to etch not only the metal foil 1 but also the plating layer 6, and the thickness of the metal to be etched is large. For example, even if the metal foil 1 having a thickness of 18 μm is used,
If the plating layer 6 is deposited to a thickness of 25 μm by the plating process, it is necessary to etch the metal having a total thickness of 43 μm. When the thickness of the metal to be etched is increased, the etching time becomes longer, and the side etching amount that the side surface of the circuit 10 receives the etching action increases. As a result, the resolution of the circuit formation deteriorates and the fine circuit is improved. There was a problem that it was difficult to form with high precision. As a countermeasure against this, it is conceivable to use an ultrathin metal foil such as a 9 μm copper foil, but such a thin metal foil is not practical because it is difficult to handle and the cost is high.

【0004】本発明は上記の点に鑑みてなされたもので
あり、微細回路を高精度で形成することができるプリン
ト配線板の製造方法を提供することを目的とするもので
ある。
The present invention has been made in view of the above points, and it is an object of the present invention to provide a method for manufacturing a printed wiring board capable of forming a fine circuit with high accuracy.

【0005】[0005]

【課題を解決するための手段】本発明に係るプリント配
線板の製造方法は、両面に金属箔1を張った積層板2に
スルーホール3を貫通形成し、この積層板2をメッキ処
理してスルーホール3の内周にスルーホールメッキ層4
を設け、スルーホール3内に樹脂5を充填した後に、積
層板2の表面をエッンチング処理して上記メッキ処理に
よって金属箔1の表面に付着されるメッキ層6をエッチ
ングすることを特徴とするものである。
According to a method of manufacturing a printed wiring board according to the present invention, a through hole 3 is formed through a laminated plate 2 having metal foils 1 on both sides, and the laminated plate 2 is plated. Through hole plating layer 4 on the inner circumference of through hole 3
And filling the through hole 3 with the resin 5, and then etching the surface of the laminated plate 2 to etch the plating layer 6 attached to the surface of the metal foil 1 by the plating process. Is.

【0006】[0006]

【作用】スルーホール3内に樹脂5を充填した後に、積
層板2の表面をエッンチング処理してメッキ処理によっ
て金属箔1の表面に付着されるメッキ層6をエッチング
するようにしているために、樹脂5でスルーホールメッ
キ層4を保護した状態で金属箔1の表面のメッキ層6を
除去することができ、回路形成をおこなうにあたってエ
ッチング加工する金属の厚みを薄くすることができる。
Since the through hole 3 is filled with the resin 5, the surface of the laminated plate 2 is subjected to an etching treatment to etch the plating layer 6 attached to the surface of the metal foil 1 by the plating treatment. The plating layer 6 on the surface of the metal foil 1 can be removed with the resin 5 protecting the through-hole plating layer 4, and the thickness of the metal to be etched when forming a circuit can be reduced.

【0007】[0007]

【実施例】以下本発明を実施例によって詳述する。両面
に金属箔1を張った積層板2としては、例えば両面に銅
箔を積層した両面銅張りエポキシ樹脂積層板などを用い
ることができるものであり、まずドリル加工やパンチン
グ加工などをおこなって図1(a)のように積層板2に
表裏に貫通するスルーホール3を形成する。次に、この
積層板2をメッキ浴に浸漬して無電解銅メッキ等のメッ
キ処理をおこなってスルーホール3の内周にスルーホー
ルメッキ層4を設ける。このようにメッキ処理をおこな
うことによって、図1(b)のように金属箔1の表面に
もメッキ層6が付着して設けられることになる。
EXAMPLES The present invention will be described in detail below with reference to examples. As the laminated plate 2 having the metal foil 1 stretched on both sides, for example, a double-sided copper-clad epoxy resin laminated plate having copper foils laminated on both sides can be used. First, a drilling process or a punching process is performed. Through holes 3 are formed in the laminated plate 2 as shown in FIG. Next, this laminated plate 2 is immersed in a plating bath to perform a plating treatment such as electroless copper plating to provide a through hole plating layer 4 on the inner circumference of the through hole 3. By performing the plating process in this way, the plating layer 6 is attached and provided on the surface of the metal foil 1 as shown in FIG. 1B.

【0008】次に、図1(c)のようにスルーホール3
内に樹脂5を充填して穴埋めする。この樹脂5としては
エッチング液に耐えるものであれば特に限定されず何で
も用いることができるが、熱硬化型樹脂や紫外線硬化型
樹脂などが好ましい。このようにスルーホール3内に樹
脂5を充填してスルーホールメッキ層4を保護した後、
積層板2の表面にエッチング処理を施す。このエッチン
グ処理はいわゆるソフトエッチングとしておこなうもの
であり、塩化銅溶液や塩化鉄溶液などのソフトエッチン
グ液に積層板2を浸漬したり、積層板2の表面にソフト
エッチング液をスプレーしたりしてエッチング処理をお
こなう。このように積層板2の表面をエッチング処理す
ることによって、図1(d)に示すように金属箔1の表
面のメッキ層6を除去することができるものであり、さ
らには積層板2に張った金属箔1の表面も全面に亘って
エッチングして金属箔1の厚みが薄くなるようにするの
が好ましい。通常は金属箔1の厚みが10〜18μm程
度になるまでエッチングするのが好ましい。スルーホー
ルメッキ層4は樹脂5で保護されているためにエッチン
グ作用を受けることはない。
Next, as shown in FIG. 1C, the through hole 3
The inside is filled with resin 5 to fill in the holes. The resin 5 is not particularly limited as long as it can withstand the etching liquid, and any resin can be used, but a thermosetting resin, an ultraviolet curing resin, or the like is preferable. In this way, after the resin 5 is filled in the through hole 3 to protect the through hole plating layer 4,
The surface of the laminated plate 2 is etched. This etching process is performed as so-called soft etching, and is performed by immersing the laminated plate 2 in a soft etching solution such as a copper chloride solution or an iron chloride solution or by spraying the soft etching solution on the surface of the laminated plate 2. Perform processing. By etching the surface of the laminated plate 2 in this manner, the plating layer 6 on the surface of the metal foil 1 can be removed as shown in FIG. It is preferable that the entire surface of the metal foil 1 is also etched so that the thickness of the metal foil 1 is reduced. Usually, it is preferable to perform etching until the thickness of the metal foil 1 becomes about 10 to 18 μm. Since the through-hole plating layer 4 is protected by the resin 5, it does not receive an etching action.

【0009】このように積層板2の表面をエッチング処
理した後、回路形成のための加工をおこなう。回路形成
のための加工法としてはエッチング工程を含むものであ
れば特に限定されるものではない。例えば、まず積層板
2の金属箔1の表面にドライフィルムフォトエッチング
レジストをラミネートしたり、電着型フォトエッチング
レジストを電着塗装したりして金属箔1の表面をフォト
エッチングレジストで被覆し、フォトエッチングレジス
トを露光・現像した後、エッチング液に積層板2を浸漬
したり、あるいは積層板2の表面にエッチング液をスプ
レーしたりして金属箔1のフォトエッチングレジストで
被覆されない部分を溶解させることによって、図1
(e)に示すように残存する金属箔1で回路10を形成
することができる。尚、上記樹脂5はこのエッチング工
程の際においてもスルーホールメッキ層4を保護する作
用をなすものであり、樹脂5は回路を形成した後に必要
に応じてカセイソーダ溶液などアルカリに溶解させるこ
とによって除去するようにすればよい。
After the surface of the laminated plate 2 is thus etched, processing for forming a circuit is performed. The processing method for forming the circuit is not particularly limited as long as it includes an etching step. For example, first, a dry film photoetching resist is laminated on the surface of the metal foil 1 of the laminated plate 2, or an electrodeposition type photoetching resist is electrodeposition coated to cover the surface of the metal foil 1 with the photoetching resist, After exposing and developing the photoetching resist, the laminated plate 2 is immersed in an etching solution or the surface of the laminated plate 2 is sprayed with the etching solution to dissolve the portion of the metal foil 1 which is not covered with the photoetching resist. By this, Fig. 1
The circuit 10 can be formed by the remaining metal foil 1 as shown in (e). The resin 5 has a function of protecting the through-hole plating layer 4 even in this etching step, and the resin 5 is removed by dissolving it in an alkali such as caustic soda solution after the circuit is formed, if necessary. You can do it.

【0010】上記のように回路10をエッチング加工し
て形成するにあたって、エッチングの対象となるのは金
属箔1のみであってエッチングする金属の厚みは薄い。
従ってエッチング時間が短くて済むことになり、回路1
0の側面がエッチング作用を受けるサイドエッチング量
が少なくなって回路形成の解像度を高めることができ、
微細回路を高精度で形成することができるものである。
ちなみに、18μm厚の銅箔(金属箔1)を張った積層
板2を用い、スルーホールメッキ層4を形成するメッキ
処理の際に金属箔1の表面に25μm厚のメッキ層6が
付着された場合、回路形成の際のエッチング加工の対象
となる金属の厚みは43μmとなり、この厚みの金属を
エッチングするときに発生するサイドエッチング量は約
30μmであり、回路10はライン幅を60μm程度、
ライン間隔を60μm程度に形成するのが限度である。
これに対して、図1(d)のようにハーフエッチングを
おこなって33μmの厚みで金属を除去すると、メッキ
層6が除去されると共に金属箔1の厚みも10μmにな
り、この10μmの金属箔1をエッチングするときに発
生するサイドエッチング量は約10μmであり、回路1
0をライン幅が20μm程度、ライン間隔が20μm程
度に微細に形成することができるものである。
When the circuit 10 is formed by etching as described above, only the metal foil 1 is the object of etching, and the thickness of the metal to be etched is small.
Therefore, the etching time is short and the circuit 1
Since the side etching amount of the side surface of 0 is reduced, the resolution of circuit formation can be increased.
A fine circuit can be formed with high precision.
By the way, using a laminated plate 2 with a copper foil (metal foil 1) having a thickness of 18 μm, a plating layer 6 having a thickness of 25 μm was attached to the surface of the metal foil 1 during the plating process for forming the through-hole plating layer 4. In this case, the thickness of the metal to be etched during the circuit formation is 43 μm, the side etching amount generated when etching the metal having this thickness is about 30 μm, and the circuit 10 has a line width of about 60 μm.
The limit is to form the line interval to about 60 μm.
On the other hand, when the metal is removed to a thickness of 33 μm by half-etching as shown in FIG. 1D, the plating layer 6 is removed and the thickness of the metal foil 1 becomes 10 μm. The side etching amount generated when etching 1 is about 10 μm.
0 can be minutely formed with a line width of about 20 μm and a line interval of about 20 μm.

【0011】[0011]

【発明の効果】上記のように本発明は、両面に金属箔を
張った積層板にスルーホールを貫通形成し、この積層板
をメッキ処理してスルーホールの内周にスルーホールメ
ッキ層を設け、スルーホール内に樹脂を充填した後に、
積層板の表面をエッンチング処理して上記メッキ処理に
よって金属箔の表面に付着されるメッキ層をエッチング
するようにしたので、樹脂でスルーホールメッキ層を保
護した状態で金属箔の表面のメッキ層を除去することが
できるものであり、回路形成をおこなうにあたってメッ
キ層をエッチングする必要がなくエッチング加工する金
属の厚みを薄くすることができるものであって、微細回
路を高精度で形成することができるものである。
As described above, according to the present invention, a through hole is formed through a laminated plate having metal foils on both sides, and the laminated plate is plated to form a through hole plating layer on the inner periphery of the through hole. After filling the resin in the through hole,
Since the plating layer attached to the surface of the metal foil by the above plating treatment is etched by etching the surface of the laminated plate, the plating layer on the surface of the metal foil is protected with the resin protecting the through-hole plating layer. Since it can be removed, it is possible to reduce the thickness of the metal to be etched without the need to etch the plating layer when forming a circuit, and it is possible to form a fine circuit with high accuracy. It is a thing.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例を示すものであり、(a),
(b),(c),(d),(e)はそれぞれ一部の断面
図である。
FIG. 1 shows an embodiment of the present invention (a),
(B), (c), (d), (e) is a partial sectional view, respectively.

【図2】従来例を示すものであり、(a),(b),
(c)はそれぞれ一部の断面図である。
FIG. 2 shows a conventional example, and includes (a), (b),
(C) is a partial cross-sectional view.

【符号の説明】[Explanation of symbols]

1 金属箔 2 積層板 3 スルーホール 4 スルーホールメッキ層 5 樹脂 6 メッキ層 1 Metal Foil 2 Laminated Plate 3 Through Hole 4 Through Hole Plating Layer 5 Resin 6 Plating Layer

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 両面に金属箔を張った積層板にスルーホ
ールを貫通形成し、この積層板をメッキ処理してスルー
ホールの内周にスルーホールメッキ層を設け、スルーホ
ール内に樹脂を充填した後に、積層板の表面をエッンチ
ング処理して上記メッキ処理によって金属箔の表面に付
着されるメッキ層をエッチングすることを特徴とするプ
リント配線板の製造方法。
1. A through hole is formed through a laminated plate having metal foils on both sides, and the laminated plate is plated to form a through hole plating layer on the inner periphery of the through hole, and the through hole is filled with resin. After that, the surface of the laminate is subjected to an etching treatment, and the plating layer adhered to the surface of the metal foil by the above-mentioned plating treatment is etched, thereby producing a printed wiring board.
JP34046591A 1991-12-24 1991-12-24 Manufacture of printed wiring board Withdrawn JPH05175653A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34046591A JPH05175653A (en) 1991-12-24 1991-12-24 Manufacture of printed wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34046591A JPH05175653A (en) 1991-12-24 1991-12-24 Manufacture of printed wiring board

Publications (1)

Publication Number Publication Date
JPH05175653A true JPH05175653A (en) 1993-07-13

Family

ID=18337227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34046591A Withdrawn JPH05175653A (en) 1991-12-24 1991-12-24 Manufacture of printed wiring board

Country Status (1)

Country Link
JP (1) JPH05175653A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5591353A (en) * 1994-08-18 1997-01-07 Texas Instruments Incorporated Reduction of surface copper thickness on surface mount printed wire boards with copper plated through holes by the chemical planarization method
JP2002237665A (en) * 2001-02-09 2002-08-23 Hitachi Chem Co Ltd Printed circuit board and its manufacturing method
JP2010067897A (en) * 2008-09-12 2010-03-25 Hitachi Chem Co Ltd Method of manufacturing printed circuit board

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5591353A (en) * 1994-08-18 1997-01-07 Texas Instruments Incorporated Reduction of surface copper thickness on surface mount printed wire boards with copper plated through holes by the chemical planarization method
JP2002237665A (en) * 2001-02-09 2002-08-23 Hitachi Chem Co Ltd Printed circuit board and its manufacturing method
JP4662097B2 (en) * 2001-02-09 2011-03-30 日立化成工業株式会社 Method for manufacturing printed wiring board
JP2010067897A (en) * 2008-09-12 2010-03-25 Hitachi Chem Co Ltd Method of manufacturing printed circuit board

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Legal Events

Date Code Title Description
A300 Withdrawal of application because of no request for examination

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 19990311