JPH0516914B2 - - Google Patents
Info
- Publication number
- JPH0516914B2 JPH0516914B2 JP1246315A JP24631589A JPH0516914B2 JP H0516914 B2 JPH0516914 B2 JP H0516914B2 JP 1246315 A JP1246315 A JP 1246315A JP 24631589 A JP24631589 A JP 24631589A JP H0516914 B2 JPH0516914 B2 JP H0516914B2
- Authority
- JP
- Japan
- Prior art keywords
- ion exchange
- exchange resin
- carbon dioxide
- resin
- dioxide gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 66
- 239000003456 ion exchange resin Substances 0.000 claims description 42
- 229920003303 ion-exchange polymer Polymers 0.000 claims description 42
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 claims description 40
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 33
- 239000001569 carbon dioxide Substances 0.000 claims description 33
- 239000007789 gas Substances 0.000 claims description 31
- 239000011347 resin Substances 0.000 claims description 29
- 229920005989 resin Polymers 0.000 claims description 29
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 12
- 239000012498 ultrapure water Substances 0.000 claims description 12
- 238000002360 preparation method Methods 0.000 claims description 10
- 239000007787 solid Substances 0.000 claims description 10
- 150000002500 ions Chemical class 0.000 claims description 8
- 238000005374 membrane filtration Methods 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 238000011033 desalting Methods 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 238000001223 reverse osmosis Methods 0.000 claims description 5
- 238000001914 filtration Methods 0.000 claims description 4
- 238000000108 ultra-filtration Methods 0.000 claims description 3
- 244000052616 bacterial pathogen Species 0.000 claims description 2
- 230000001954 sterilising effect Effects 0.000 claims description 2
- 238000004659 sterilization and disinfection Methods 0.000 claims description 2
- 150000003839 salts Chemical class 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 34
- 238000004519 manufacturing process Methods 0.000 description 17
- 238000010828 elution Methods 0.000 description 11
- 239000005416 organic matter Substances 0.000 description 11
- 230000000694 effects Effects 0.000 description 8
- 238000010612 desalination reaction Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 239000003729 cation exchange resin Substances 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 5
- 238000005342 ion exchange Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000012153 distilled water Substances 0.000 description 3
- 238000011049 filling Methods 0.000 description 3
- 239000010419 fine particle Substances 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 244000005700 microbiome Species 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000002250 progressing effect Effects 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000003957 anion exchange resin Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000000635 electron micrograph Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000013467 fragmentation Methods 0.000 description 1
- 238000006062 fragmentation reaction Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 229910021655 trace metal ion Inorganic materials 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A20/00—Water conservation; Efficient water supply; Efficient water use
- Y02A20/124—Water desalination
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A20/00—Water conservation; Efficient water supply; Efficient water use
- Y02A20/124—Water desalination
- Y02A20/131—Reverse-osmosis
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
- Treatment Of Water By Ion Exchange (AREA)
- Physical Water Treatments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1246315A JPH02119989A (ja) | 1989-09-25 | 1989-09-25 | イオン交換樹脂を用いた超純水の製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1246315A JPH02119989A (ja) | 1989-09-25 | 1989-09-25 | イオン交換樹脂を用いた超純水の製造装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59019982A Division JPS60166040A (ja) | 1984-02-08 | 1984-02-08 | イオン交換樹脂の調整法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02119989A JPH02119989A (ja) | 1990-05-08 |
| JPH0516914B2 true JPH0516914B2 (enrdf_load_stackoverflow) | 1993-03-05 |
Family
ID=17146730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1246315A Granted JPH02119989A (ja) | 1989-09-25 | 1989-09-25 | イオン交換樹脂を用いた超純水の製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02119989A (enrdf_load_stackoverflow) |
-
1989
- 1989-09-25 JP JP1246315A patent/JPH02119989A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02119989A (ja) | 1990-05-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0215258B2 (enrdf_load_stackoverflow) | ||
| JP3426072B2 (ja) | 超純水製造装置 | |
| JP4765843B2 (ja) | 海水淡水化方法 | |
| TWI808053B (zh) | 超純水製造系統及超純水製造方法 | |
| JPH0790219B2 (ja) | 純水製造装置及び製造方法 | |
| JP3646900B2 (ja) | 硼素含有水の処理装置及び方法 | |
| CN111777244A (zh) | 一种超纯水制备系统及其制备工艺 | |
| CN212425742U (zh) | 一种超纯水制备系统 | |
| JPS62110795A (ja) | 高純度水の製造装置 | |
| JPH1080684A (ja) | 硼素含有水の処理装置及び方法 | |
| JPH0649190B2 (ja) | 高純度水の製造装置 | |
| JP2009240943A (ja) | イオン交換樹脂のコンディショニング方法 | |
| JP3215277B2 (ja) | ほう素を除去した純水又は超純水の製造方法及び装置 | |
| JPH0516914B2 (enrdf_load_stackoverflow) | ||
| JP2514929B2 (ja) | 末端逆浸透膜装置の洗浄方法 | |
| JP3536294B2 (ja) | 純水の製造方法 | |
| JPH0780259A (ja) | 逆浸透膜および逆浸透膜分離素子の処理方法 | |
| KR100689693B1 (ko) | 초순수의 제조방법 | |
| JP2005118712A (ja) | 純水の製造方法 | |
| JP2600476B2 (ja) | 純水製造装置および半導体基板の純水処理方法 | |
| JPH0645037B2 (ja) | 超純水製造方法 | |
| JPH01245893A (ja) | 超純水の製造方法 | |
| JPS6397284A (ja) | 超純水中の微量有機物の除去方法 | |
| JPH062277B2 (ja) | 高純度水の製造装置 | |
| JPH04108588A (ja) | 超純水の製造方法 |