JPH02119989A - イオン交換樹脂を用いた超純水の製造装置 - Google Patents
イオン交換樹脂を用いた超純水の製造装置Info
- Publication number
- JPH02119989A JPH02119989A JP1246315A JP24631589A JPH02119989A JP H02119989 A JPH02119989 A JP H02119989A JP 1246315 A JP1246315 A JP 1246315A JP 24631589 A JP24631589 A JP 24631589A JP H02119989 A JPH02119989 A JP H02119989A
- Authority
- JP
- Japan
- Prior art keywords
- ion exchange
- exchange resin
- resin
- carbon dioxide
- remove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A20/00—Water conservation; Efficient water supply; Efficient water use
- Y02A20/124—Water desalination
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A20/00—Water conservation; Efficient water supply; Efficient water use
- Y02A20/124—Water desalination
- Y02A20/131—Reverse-osmosis
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
- Treatment Of Water By Ion Exchange (AREA)
- Physical Water Treatments (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1246315A JPH02119989A (ja) | 1989-09-25 | 1989-09-25 | イオン交換樹脂を用いた超純水の製造装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1246315A JPH02119989A (ja) | 1989-09-25 | 1989-09-25 | イオン交換樹脂を用いた超純水の製造装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59019982A Division JPS60166040A (ja) | 1984-02-08 | 1984-02-08 | イオン交換樹脂の調整法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH02119989A true JPH02119989A (ja) | 1990-05-08 |
JPH0516914B2 JPH0516914B2 (enrdf_load_stackoverflow) | 1993-03-05 |
Family
ID=17146730
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1246315A Granted JPH02119989A (ja) | 1989-09-25 | 1989-09-25 | イオン交換樹脂を用いた超純水の製造装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02119989A (enrdf_load_stackoverflow) |
-
1989
- 1989-09-25 JP JP1246315A patent/JPH02119989A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPH0516914B2 (enrdf_load_stackoverflow) | 1993-03-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS60166040A (ja) | イオン交換樹脂の調整法 | |
JP6907514B2 (ja) | 超純水製造システム及び超純水製造方法 | |
CN107001075A (zh) | 超纯水制造装置以及超纯水制造方法 | |
CN212425742U (zh) | 一种超纯水制备系统 | |
JPS62110795A (ja) | 高純度水の製造装置 | |
JPH10216721A (ja) | 超純水製造装置 | |
JPH02119989A (ja) | イオン交換樹脂を用いた超純水の製造装置 | |
JP2005246126A (ja) | 純水又は超純水の製造装置及び製造方法 | |
JP2514929B2 (ja) | 末端逆浸透膜装置の洗浄方法 | |
JP3215277B2 (ja) | ほう素を除去した純水又は超純水の製造方法及び装置 | |
JPH0780259A (ja) | 逆浸透膜および逆浸透膜分離素子の処理方法 | |
JP2950621B2 (ja) | 超純水の製造方法 | |
JP2007083132A (ja) | 陰イオン交換樹脂からの有機物溶出低減方法 | |
JP4760648B2 (ja) | 純水製造装置 | |
JPH1085740A (ja) | 超純水製造装置 | |
JPH0780260A (ja) | 逆浸透膜および逆浸透膜分離素子の処理方法 | |
JP2007152235A (ja) | 液浸露光装置用超純水の製造方法及び装置 | |
JP7704618B2 (ja) | オゾン水製造方法及びオゾン水製造システム | |
JP3645007B2 (ja) | 超純水製造装置 | |
JP2600476B2 (ja) | 純水製造装置および半導体基板の純水処理方法 | |
JPH0515790A (ja) | 新規の中空糸状イオン吸着膜構造体 | |
JP3674475B2 (ja) | 純水の製造方法 | |
JPH01245893A (ja) | 超純水の製造方法 | |
KR100689693B1 (ko) | 초순수의 제조방법 | |
JPH0829317B2 (ja) | 超純水の製造方法およびその製造方法に用いる装置 |