JPH0516843Y2 - - Google Patents
Info
- Publication number
- JPH0516843Y2 JPH0516843Y2 JP1987180237U JP18023787U JPH0516843Y2 JP H0516843 Y2 JPH0516843 Y2 JP H0516843Y2 JP 1987180237 U JP1987180237 U JP 1987180237U JP 18023787 U JP18023787 U JP 18023787U JP H0516843 Y2 JPH0516843 Y2 JP H0516843Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- setting device
- flow rate
- solenoid valve
- rate setting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005259 measurement Methods 0.000 claims description 10
- 238000010586 diagram Methods 0.000 description 3
- 238000005086 pumping Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987180237U JPH0516843Y2 (US06623731-20030923-C00012.png) | 1987-11-26 | 1987-11-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987180237U JPH0516843Y2 (US06623731-20030923-C00012.png) | 1987-11-26 | 1987-11-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0186434U JPH0186434U (US06623731-20030923-C00012.png) | 1989-06-08 |
JPH0516843Y2 true JPH0516843Y2 (US06623731-20030923-C00012.png) | 1993-05-06 |
Family
ID=31471758
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987180237U Expired - Lifetime JPH0516843Y2 (US06623731-20030923-C00012.png) | 1987-11-26 | 1987-11-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0516843Y2 (US06623731-20030923-C00012.png) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6031393U (ja) * | 1983-08-10 | 1985-03-02 | 三菱重工業株式会社 | 自動フラツシング装置 |
-
1987
- 1987-11-26 JP JP1987180237U patent/JPH0516843Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6031393U (ja) * | 1983-08-10 | 1985-03-02 | 三菱重工業株式会社 | 自動フラツシング装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0186434U (US06623731-20030923-C00012.png) | 1989-06-08 |
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