JPH0516489Y2 - - Google Patents

Info

Publication number
JPH0516489Y2
JPH0516489Y2 JP1986083351U JP8335186U JPH0516489Y2 JP H0516489 Y2 JPH0516489 Y2 JP H0516489Y2 JP 1986083351 U JP1986083351 U JP 1986083351U JP 8335186 U JP8335186 U JP 8335186U JP H0516489 Y2 JPH0516489 Y2 JP H0516489Y2
Authority
JP
Japan
Prior art keywords
inspected
mask
dummy
ray
dummy bar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986083351U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62193553U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986083351U priority Critical patent/JPH0516489Y2/ja
Publication of JPS62193553U publication Critical patent/JPS62193553U/ja
Application granted granted Critical
Publication of JPH0516489Y2 publication Critical patent/JPH0516489Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/30Nuclear fission reactors

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Monitoring And Testing Of Nuclear Reactors (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP1986083351U 1986-05-30 1986-05-30 Expired - Lifetime JPH0516489Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986083351U JPH0516489Y2 (enrdf_load_stackoverflow) 1986-05-30 1986-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986083351U JPH0516489Y2 (enrdf_load_stackoverflow) 1986-05-30 1986-05-30

Publications (2)

Publication Number Publication Date
JPS62193553U JPS62193553U (enrdf_load_stackoverflow) 1987-12-09
JPH0516489Y2 true JPH0516489Y2 (enrdf_load_stackoverflow) 1993-04-30

Family

ID=30936858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986083351U Expired - Lifetime JPH0516489Y2 (enrdf_load_stackoverflow) 1986-05-30 1986-05-30

Country Status (1)

Country Link
JP (1) JPH0516489Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS62193553U (enrdf_load_stackoverflow) 1987-12-09

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