JPH0516195B2 - - Google Patents
Info
- Publication number
- JPH0516195B2 JPH0516195B2 JP55170080A JP17008080A JPH0516195B2 JP H0516195 B2 JPH0516195 B2 JP H0516195B2 JP 55170080 A JP55170080 A JP 55170080A JP 17008080 A JP17008080 A JP 17008080A JP H0516195 B2 JPH0516195 B2 JP H0516195B2
- Authority
- JP
- Japan
- Prior art keywords
- junction
- groove
- diode
- semiconductor substrate
- junction surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000005530 etching Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 239000011810 insulating material Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17008080A JPS5793581A (en) | 1980-12-02 | 1980-12-02 | Diode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17008080A JPS5793581A (en) | 1980-12-02 | 1980-12-02 | Diode |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5793581A JPS5793581A (en) | 1982-06-10 |
JPH0516195B2 true JPH0516195B2 (US07935154-20110503-C00018.png) | 1993-03-03 |
Family
ID=15898263
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17008080A Granted JPS5793581A (en) | 1980-12-02 | 1980-12-02 | Diode |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5793581A (US07935154-20110503-C00018.png) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4831023A (US07935154-20110503-C00018.png) * | 1972-07-27 | 1973-04-24 | ||
JPS4977581A (US07935154-20110503-C00018.png) * | 1972-11-27 | 1974-07-26 | ||
JPS50127577A (US07935154-20110503-C00018.png) * | 1974-03-14 | 1975-10-07 | ||
JPS5227274A (en) * | 1975-08-25 | 1977-03-01 | Hitachi Ltd | Semiconductor unit and its manufacturing process |
-
1980
- 1980-12-02 JP JP17008080A patent/JPS5793581A/ja active Granted
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4831023A (US07935154-20110503-C00018.png) * | 1972-07-27 | 1973-04-24 | ||
JPS4977581A (US07935154-20110503-C00018.png) * | 1972-11-27 | 1974-07-26 | ||
JPS50127577A (US07935154-20110503-C00018.png) * | 1974-03-14 | 1975-10-07 | ||
JPS5227274A (en) * | 1975-08-25 | 1977-03-01 | Hitachi Ltd | Semiconductor unit and its manufacturing process |
Also Published As
Publication number | Publication date |
---|---|
JPS5793581A (en) | 1982-06-10 |
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