JPH0515933Y2 - - Google Patents
Info
- Publication number
- JPH0515933Y2 JPH0515933Y2 JP1987151020U JP15102087U JPH0515933Y2 JP H0515933 Y2 JPH0515933 Y2 JP H0515933Y2 JP 1987151020 U JP1987151020 U JP 1987151020U JP 15102087 U JP15102087 U JP 15102087U JP H0515933 Y2 JPH0515933 Y2 JP H0515933Y2
- Authority
- JP
- Japan
- Prior art keywords
- ceiling
- filter
- clean room
- duct unit
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000012856 packing Methods 0.000 claims description 8
- 230000003749 cleanliness Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004080 punching Methods 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004887 air purification Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987151020U JPH0515933Y2 (ko) | 1987-01-28 | 1987-10-01 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP982587 | 1987-01-28 | ||
| JP1987151020U JPH0515933Y2 (ko) | 1987-01-28 | 1987-10-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63197621U JPS63197621U (ko) | 1988-12-20 |
| JPH0515933Y2 true JPH0515933Y2 (ko) | 1993-04-27 |
Family
ID=33133201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987151020U Expired - Lifetime JPH0515933Y2 (ko) | 1987-01-28 | 1987-10-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0515933Y2 (ko) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6343621B2 (ko) * | 1984-07-11 | 1988-08-31 | Eaton Corp |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59184919U (ja) * | 1983-05-25 | 1984-12-08 | 東京濾器株式会社 | フイルタエレメント |
| JPS6343621U (ko) * | 1986-09-08 | 1988-03-23 |
-
1987
- 1987-10-01 JP JP1987151020U patent/JPH0515933Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6343621B2 (ko) * | 1984-07-11 | 1988-08-31 | Eaton Corp |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63197621U (ko) | 1988-12-20 |
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