JPH0515933Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a filter duct unit used in a clean room.

[Conventional technology]

Conventionally, clean rooms for manufacturing semiconductor wafers, etc., which require a high level of indoor air cleanliness, have been constructed using either the full laminar flow system (full ceiling air flow) shown in Figure 6 or the conventional (partial ceiling air flow system) shown in Figure 7. The balloon method is used.

In the above-mentioned full-surface laminar flow system, as shown in Fig. 6, a ceiling chamber Tc is installed in the upper part of the clean room R, an air supply duct Ds is connected to this ceiling chamber Tc, and a HEPA filter H is installed on the entire lower surface of the ceiling chamber Tc. (High Efficiency
By passing this filter H, the cleanliness of the circulating air a is increased and a descending laminar flow is blown into the clean room R.

In addition, in the conventional method, as shown in Figure 7, a ceiling board is stretched over the top of the clean room R.
A plurality of filter chambers Hc with filters H provided on the bottom surface are arranged at required locations in Tb, and air supply ducts Ds branched to each are guided to the clean room R.
Clean air a with increased purity is blown inward and partially downward.

[The problem that the idea attempts to solve]

However, since conventional air purification means in clean rooms are configured as described above, in the case of the full-surface laminar flow method, the clean air flow is a uniform laminar flow, but Since a chamber is required and a filter must be installed on the entire surface, there are disadvantages in that not only the indoor ceiling becomes low, but also the cost of materials and facility construction increases.

In addition, in the conventional type, the filter part of the filter chamber protrudes from the bottom surface of the ceiling board, and clean air is blown out only in one direction, downward, so vortices are generated on the sides of the protruding part, causing stagnation. However, since there is no circulating airflow, it has the disadvantage that it cannot be cleaned.

The present invention was devised to solve these conventional problems.The purpose of this invention is to not only make it possible to raise the indoor ceiling without the need for a ceiling chamber or filter chamber, but also to improve the air flow by using a rectifying member. To provide a filter duct unit for a clean room, which can obtain a uniform laminar flow of clean air, can be easily manufactured and installed, and can reduce costs.

[Means for solving problems]

A filter duct unit for a clean room according to the present invention includes a support member, a pair of plate frames for connection that have curved portions protruding from both ends of the support member in the longitudinal direction and also serve to hold a filter, and a pair of plate frames. A filter is installed in the curved portion of the plate via a gasket, and a groove for holding the gastight gasket is provided in a portion of the pair of plate frames that contacts the support member, and a groove is provided for holding the gasket for airtightness. The protrusion has a large number of holes for connection.

[Effect]

In the present invention, a filter duct of a predetermined length can be formed via the connection frame, and this filter duct can be installed on the ceiling of the clean room via the support member.

When clean air is sent into the filter duct, the flat part of the filter can blow it out toward the floor of the clean room, and the curved part of the filter can blow out the clean air 180 degrees or 90 degrees below the ceiling surface.

〔Example〕

Hereinafter, embodiments of the present invention will be described based on the drawings.

FIG. 1 shows a first embodiment in which the present invention is applied to a filter duct unit for a ceiling corner, and 1 is the filter duct unit for a ceiling corner.

This ceiling corner filter duct unit 1 has a pair of plate frames 3 having curved portions 3w protruding from both longitudinal ends of a support member 2 formed of a rectangular flat plate having a substantially L-shaped cross section. A filter 4 having one side curved inside is installed via a gasket 5 and fixed by an inner frame 6.

A packing groove 3m is formed on the surface of the L-shaped portion 3l of the plate frame 3 that is in contact with the support member 2, and the packing groove 3m holds the pipe-shaped packing 7 for airtightness when connecting the ceiling corner filter duct unit 1. Curved part 3w
A plurality of countersunk screw holes 3a for attaching countersunk screws 8 for connection are bored at appropriate intervals on the surface. Furthermore, both longitudinal end sides 2h of the support member 2
A plurality of mounting holes 2a are drilled at appropriate intervals in each of the side walls and ceiling of the clean room R for fastening with countersunk screws.

In addition, as shown in Fig. 3a, the ceiling corner filter duct unit 1 is manufactured by punching out the support member 2 and the plate frame 3 from a flat plate, forming a packing groove 3m at the same time, and attaching a countersunk screw for connecting the unit. Hole 3
After drilling the mounting holes 2a and 2a, the outer shell can be formed extremely easily by bending at right angles along the broken lines shown in the figure. In addition, only the main parts near the plate frame 3 were punched twice,
If the mounting hole 2a is separately formed, it can also be formed using a small punching machine.

FIG. 2 shows a second embodiment in which the present invention is applied to a ceiling filter duct unit, and 11 is a ceiling filter duct unit.

As shown in FIG. 2, the ceiling filter duct unit 11 has a rectangular flat plate,
and curved part 1 in the 180 degree direction on both ends in the longitudinal direction.
A pair of plate frames 13 having a D-shaped cross section forming a 3w are provided protrudingly, and a filter 14 having curved sides on both sides is installed in the curved part 13w via packing 15 and fixed by an inner frame 16. .

The other configurations are almost the same as the ceiling corner filter duct unit 1 described above, including a mounting hole 12a to the ceiling Rt of the clean room R, a packing groove 13m (for the tube type packing 17) in the plate frame 13, and a sealing groove 13m for connecting the unit. Countersunk screw holes 13a are provided respectively.

Further, as shown in FIG. 3b, the ceiling filter duct unit 11 is made by punching out a support member 12 and a plate frame 13 from a flat plate in substantially the same way as the ceiling corner filter duct unit 1 described above. The outer shell can be easily formed by processing.

Next, a case where the ceiling corner filter duct unit 1 and the ceiling filter duct unit 11 according to the present invention configured as described above are applied to a clean room will be explained based on FIG. 4.

First, according to the dimensions of the clean room R, the required number of ceiling corner filter duct units 1 and ceiling filter duct units 11 are connected, respectively, to assemble the ceiling corner filter duct 10 and the ceiling filter duct 20, and the air supply duct Ds is assembled. Cover plates 9 and 19 having connection ports 9a and 19a for connecting the branch duct Db are attached to both ends of the filter ducts 10 and 20 assembled above to close them, and are installed at predetermined positions on the ceiling Rt of the clean room R, respectively. , the branch duct Db is connected to each connection port 9a, 1
Connect to 9a. Next, each filter duct 10,
20, and the rectifying member S is disposed on the ceiling Rt surface.

As a result, the clean room R shown in FIG.
can be formed.

When circulating air A is sent into the clean room R configured in this manner from the branch duct Db of the air supply duct Ds to these filter ducts 10 and 20, the fifth
As shown in the figure, in the clean room R, the clean air a blown out from the filters 4 and 14 is blown out laterally, and the flow direction is guided downward by the rectifying member S, and the air blown out diagonally downward. The flow merges from both sides and heads downward, and the flow blowing downward continues toward the floor, and these are combined to form a descending laminar flow, which does not generate a vortex that stagnates near the ceiling Rt.

Incidentally, the ceiling corner filter duct unit 1 can be used in place of the ceiling filter duct unit 11 by connecting a pair back to back.

Also, when installing the filter duct in the clean room R, the filter ducts 10 and 20 are not assembled, but each filter duct unit 1 and 11 is assembled.
It is also possible to install and connect them one after another to finally form the filter ducts 10 and 20, so that the parts to be handled at one time are smaller and lighter, making the installation work even faster and easier.

[Effect of idea]

As explained above, the present invention has a configuration in which a duct is formed by combining a filter with a curved shape on at least one side with a support member, so that it is possible to not only mold the outer shell but also assemble the filter. It is extremely simple and easy to install, and can be installed efficiently in a clean room, which not only reduces costs, but also requires the provision of ceiling chambers, filter chambers, air supply duct installation sections, etc. Since there is no ceiling, the ceiling inside the room can be made higher.

Also, when blowing clean air into the room,
The blowout area can be expanded horizontally, diagonally, and downward, and the blowout in the horizontal direction can be changed to a downward flow using a rectifying member, so a laminar flow is supplied without causing vortices to accumulate under the ceiling, improving cleanliness. It has many effects such as increasing the

[Brief explanation of drawings]

FIG. 1 is a perspective view of a ceiling corner filter duct unit according to a first embodiment of the present invention. FIG. 2 is a perspective view of a ceiling filter duct unit according to the second embodiment. FIG. 3a is a plan view showing an example of a flat plate for forming the outer shape of a filter duct unit for a ceiling corner. FIG. 3b is a plan view showing an example of a flat plate for forming the outer shape of a ceiling filter duct unit. FIG. 4 is a transparent perspective view of a clean room showing the usage conditions of the first and second embodiments. FIG. 5 is a front view showing the flow of clean air in the clean room. FIG. 6 is a front view showing the general configuration of a clean room using a conventional full-surface laminar flow system. FIG. 7 is a front view showing the general configuration of a conventional conventional clean room. Explanation of symbols of main parts, 1... Filter duct unit for ceiling corner, 11... Filter duct unit for ceiling, 2, 12... Support member, 2a, 1
2a...Mounting hole, 3, 13...Plate frame, 3a, 13
a...hole, 3m, 13m...groove, 3w, 13w...
...Curved portion, 4, 14...Filter, 5, 15...
Patsukin.

Claims (1)

[Scope of utility model registration request] A support member, a pair of connection plate frames having curved portions protruding from both ends of the support member in the longitudinal direction and also serving as filter support, and constructed within the curved portions of the pair of plate frames via packing. A groove is provided in the portion of the pair of plate frames in contact with the supporting member to hold the seal for airtightness, and a number of holes for connection are provided in the protruding portion of the pair of plate frames. A clean room filter duct unit characterized by having a perforation.