JPS60241212A - Clean room - Google Patents

Abstract

PURPOSE:To form a high clean region extending over the whole range by enabling a clean down-flow in the whole region of a clean room without forming a dead space. CONSTITUTION:An air housing 16 is installed on the lower side of a filter 14 so as to cover the filter 14. A large number of air flow-down holes 17 having fine diameters are shaped to the lower surface of the housing 16. A plurality of air flow holes 18 are formed to the side surfaces of the housing 16. Consequently, the greater part of clean air passed through the filter 14 are brought to a down- flow state from the air flow-down holes 17. Air flowed out of the air flow holes 18 by utilizing the inner pressure of the housing 16 is brought to the down-flow state in dead space sections. Accordingly, high clean down-flows are obtained extending over the whole region in a clean room, thus improving cleanness.

Description

[Detailed Description of the Invention] [Technical Field] The present invention relates to a clean room! This is a clean room that allows the Samurai to access a wide area off the coast of Takashi with no dead space.

[Background technology]

In micro operations such as semiconductor manufacturing processes, dust present in the air can cause product defects and decrease yields, so clean rooms are used to form clean work areas. In recent years, so-called down-flow clean rooms have been developed in order to improve cleanliness (Electronic Materials 1983 Special Issue, published November 15, 1983, - Kogyo Kenkyukai, pp. 29-37). this is,
By passing air downward (downflow) through a filter installed on the ceiling of the clean room, it is possible to prevent dust from rising in the work area and achieve a high level of cleanliness.

By the way, in this Yuzu clean room, due to the size of the filter installed on the ceiling and its relationship with the supporting roadside, a dead space is created in the downflow, and the problem is that the cleanliness of this area is reduced. As revealed by the inventor, the clean room of this building is constructed by surrounding a plurality of filters 1 formed to predetermined dimensions with a support frame 2, as shown in the conceptual side view of FIG. Attach this filter 1 to frame 4.
A conceivable configuration is to allow air to flow from above or from the side toward the working area 5 below the filter 1.

For this reason, a plane area 6 where the filter 1 does not exist is formed at the location where the support frame 2 supports the side part of the filter l. Therefore, the downward flow of air through the filter 1 is indicated by the arrow Even if it is generated as in A, no downflow is generated in the plane area 6 where the filter does not exist, and a dead space is generated, and the air cleanliness is reduced in this dead space, and air turbulence is generated. This results in problems such as dust being stirred up and undesirable conditions occurring.

In lean rooms like this, when wafers are moved through a series of processing equipment, the wafers do not pass through this dead space, which can lead to problems such as dust adhering to the wafers. The inventor has clearly determined that this makes it easier.

[Purpose of the invention]

An object of the present invention is to provide a clean room that enables clean downflow in all areas of the clean room without creating dead spaces, thereby forming a highly clean area over the entire area.

The above and other objects and novel features of the present invention include:
This will become clear from the description of this BA Specification and the attached drawings.

[Summary of the invention]

A brief overview of the typical inventions disclosed in this application is as follows. By forming a large number of airflow holes in the housing, and forming airflow holes on the side of the housing facing the dead space, most of the clean air that has passed through the filter is air. The air that flows down from the airflow hole and flows out from the air ventilation hole using the internal pressure of the air housing is made into a downflow in the dead space area, thereby providing a highly clean downflow throughout the entire area of the clean room. This is to improve cleanliness.

〔Example〕

Figure 2 is a perspective view of the main parts of the clean room of the present invention;
The figure is a schematic side sectional view thereof. In the figure, 11 is the ceiling wall of the clean room 10.

12 is a filter unit attached to the inner surface of this ceiling wall 11 ◇This filter unit 12 is attached to each support frame 1
A plurality of filters 14 (two in the figure) are supported within each filter unit 3, and each filter unit 12 is arranged in parallel on the inner surface (lower surface) of the ceiling wall 11 in the plane direction. Each filter unit 12 is equipped with a fan (not shown), and the air is forced to flow downward from above the filter 14 or 1111].

The filter 14 has II E P A (High Ef
FicientPaiticle Air) filter is used. A fluorescent lamp 15 for illumination is provided between adjacent portions of each filter unit 12, that is, in a so-called dead space portion.

On the other hand, below each filter unit 12, a shallow box-shaped air housing 16 is provided so as to cover the lower surface of the filter 14.
is attached airtight. However, it is not provided in the dead space portion. The lower surface 16aK of the air housing 16 is formed with a large number of small-diameter punching holes 17 as air flow holes, so that the air that has passed through the filter 14 flows down through the punched holes 17. Furthermore, the side surface in the direction in which the air housings 16 are arranged side by side, in other words, the side surface 1 facing the dead space portion
A plurality of air passage holes 18 having a slightly larger diameter are formed in 6b. In the case of a joint, each communication hole 18 of the adjacent housing
form itK, which are opposite to each other.

Therefore, according to this configuration, when the filter unit 12 is operated, air is forced to flow from above to below the filter 14 by a fan (not shown), and the filter 12 is forced to flow from above to below.
The purified air is passed through the air housing 16 into the air housing 16. Further, most of the air is blown straight downward from the housing lower surface 16a through the punched holes 17, and becomes down 70-, which is then stored inside the clean room 10.
A single current is passed through the work area. On the other hand, since the punching hole 17 has a minute diameter inside the air blowfish 16, resistance to the airflow is generated, which causes internal pressure to occur within the housing. Therefore, some of the air in the housing 16 is blown out laterally from the air passage hole 18 on the side surface 16b due to the internal pressure, and the air flows from the adjacent housings collide with each other and then flow straight downward. It will be done. As a result, a downflow of clean air is obtained even in the dead space area, and together with the downflow directly under the filter mentioned above, a downflow of clean air is obtained in the entire area of the clean room, improving the air cleanliness in the clean room. can be significantly improved.

〔effect〕

(1) An air housing is provided on the underside of the filter, and a large number of air flow holes are formed on the bottom surface of the housing, while air flow holes are formed on the side of the air housing, so that air passing through the filter Not only does clean air flow as a downflow directly under the filter, but also in dead spaces where there is no filter, a downflow is obtained by the air from the air ventilation holes, resulting in high cleanliness throughout the clean room. The cleanliness inside the room can be improved by obtaining a downflow of air (2) Since the structure is such that an air housing having a flow hole and a flow hole is attached to the bottom of the filter, the filter and the filter The unit does not require any structural changes;
Conventional clean rooms can be easily improved.〇(3) Downflow can be obtained even by installing blood lamps in areas corresponding to dead spaces, and there is no problem with lighting.

(4) Downflow is obtained even in areas where there is no filter, so even when the wafer shade is moved over a series of processing equipment, a clean air can be obtained throughout the line, preventing dust from falling onto the wafer. , the adhesion of foreign matter can be prevented.

Although the invention made by the present inventor has been specifically explained based on examples, the present invention is not limited to the above examples, and may be modified in any way without departing from the gist thereof. Needless to say. Even if the filters are arranged side by side in the longitudinal and lateral directions of the plane, as in 1F, the same method can be applied, and the flow holes and communication holes formed in the air housing may be formed in the shape of slits. Further, the airflow hole on the side surface of the air housing may be provided with a louver or the like so that the air can flow immediately downward.

[Application field]

- The inventions described above mainly relate to semiconductors, which is the field of application to which the inventions made by the present inventors are based.

Although the description has been made regarding the case where the present invention is applied to a clean room for processing body wafers, the present invention is not limited thereto, and can be applied to clean rooms and clean benches for various purposes.

[Brief explanation of drawings]

FIG. 1 is a schematic side view for explaining the defects of the conventional structure, FIG. 2 is a perspective view of the bottom part of the clean room of the present invention, and FIG. 3 is a schematic side sectional view thereof. lO...Clean room, 11...Ceiling wall, 12.
...Filter unit, 13...Support frame, 14...
Filter, 15...Fluorescent lamp, 16...Air housing, 17...Air flow hole, 18...Air ventilation hole〇Representative Patent Attorney Akio Takahashi Figure 1 Figure 2 Figure Mi 1 ,−

Claims (1)

[Scope of Claims] 1. In a clean room where filter units are installed in parallel on the ceiling and clean air is caused to flow down through the filters of the filter units, an air harassment rack is provided below the filters (i+tl). , A clean room where a large number of small diameter air flow holes are formed on the bottom surface of the housing, and the first few air flow holes are formed on the side surface of the housing. 2. Small diameter. The clean room according to claim 1, wherein the air passage holes are punched holes. 3. The air passage holes of adjacent air housings are formed to face each other, and the air blown out from each housing is The clean room according to claim 1 or 2, wherein the air flow holes collide with each other and flow downwards. 4. The air passage hole is a so-called dead space between filter units arranged in parallel. The clean room according to any one of claims 1 to 3, wherein the clean room is formed on a side surface of the housing facing the portion.