JPH0311644Y2 - - Google Patents

Description

[Detailed Description of the Invention] <<Industrial Application Field>> This invention relates to a clean air room of a ceiling blowing type, and in particular to the structure of the ceiling portion that constitutes the blowing surface.

<Prior Art> Conventionally, the ceiling structure of a ceiling-blowing clean air room has a plurality of ceiling frames arranged at the same height in an intersecting manner on the underside of a slab, and a filter frame is installed on top of the ceiling frames.

However, with this structure, it is troublesome to process the intersections between the ceiling frames, it requires a lot of labor to maintain high construction accuracy, the sealing area of the filter frame is large, and the ceiling frames There were problems such as the filter area becoming narrower due to the occupied area.

Therefore, the present applicant previously developed a ceiling structure shown in Japanese Utility Model Application Publication No. 59-70141.

In this structure, the ceiling frames are arranged in parallel in only one direction, and the ceiling frames are connected in the lateral direction by reinforcing members arranged in the attic. Therefore, with this, the area occupied by the ceiling frame can be halved, the effective area of the filter can be increased, and the seal area can be reduced, and there is no need to process the intersections, reducing the labor required to maintain high construction accuracy. can.

<<Problems to be solved by the invention>> Incidentally, wiring cords for lighting fixtures and other electrical appliances are routed in the ceiling, but in order to prevent the cords from coming into contact with the filter surface, The cord was routed along the reinforcing material.

For this reason, if maintenance or a new cord needs to be installed indoors, the filter frame must be removed and the wiring must be routed into the ceiling.

In particular, clean air chambers are used for manufacturing LSIs and VLSIs, and it is necessary to constantly install the latest equipment for manufacturing, and to perform additional wiring and maintenance each time.

Therefore, it is desirable that once constructed clean air rooms do not need to be renovated every time this type of equipment is introduced.

This idea was made based on the above background, and takes the technology previously developed by the applicant one step further to enable new wiring and wiring maintenance in the clean air room without opening the ceiling. The purpose is to

<Means for Solving the Problems> In order to achieve the above object, in this invention, a plurality of ceiling frames are arranged in parallel on the ceiling of the ceiling blowing system at intervals corresponding to the installation intervals of the filter units. A plurality of reinforcing sub-frames are placed between the ceiling frames at appropriate intervals, and a filter frame containing a filter is placed on top of each compartment surrounded by the ceiling frame and the reinforcing sub-frames, and a sealing material is applied to the filter frame. Further, the outer periphery of the subframe is covered with a cover, and the inside of the cover is used as a wiring space.

<<Example>> Hereinafter, an example of this invention will be described in detail using the drawings.

FIG. 1 is a plan view showing a ceiling structure according to this invention.

In the figure, on the ceiling of room A, which is a clean air room surrounded by walls, there are ceiling frames 12 arranged in parallel according to the mounting intervals of filter units, which will be described later. Reinforcing subframes 14 are arranged.

2 to 4 show a part of the structure. The ceiling frames 12 are arranged in parallel at intervals corresponding to the widths of the filter units 16, and the subframes 14 are arranged in parallel with each other at intervals corresponding to the widths of the filter units 16. the ceiling frame 1 for every one or more in the direction;
They are arranged perpendicular to 2.

The filter unit 16 is composed of a rectangular filter frame 18 and a filter element 20 made of a HEPA filter that is housed inside the filter frame 18 in a zigzag-folded state. Both sides of the frame are integrally fixed onto the ceiling frame 12 via a sealing material 22.

In addition, the filter frames 18 are joined in the longitudinal direction by butting each other, and the joints between the filter frames 18 are sealed by filling the notch 18a formed at the lower part of the filter frame 18 with a sealing material 22. is being carried out.

In this case, the sealing material 2 is applied to the longitudinal joint portion of the filter body 18 via the backup material.
2, the notch 18a is not necessarily required.

A streamlined cover 24 for rectifying flow having a substantially U-shaped cross section is fixed to the lower surface of the ceiling frame 12. Further, a flow rectifying streamlined cover 26 is similarly disposed on the lower surface between the joints of the filter frame 18 on the outer periphery of the sub-frame 14.

Figure 5 shows the ceiling frame 12 and streamlined cover 24.
The ceiling frame 12 is a metal extrusion molded body having a substantially rectangular cross section, and locking grooves 12a are formed on both sides of the lower part of the ceiling frame 12. The streamlined cover 24 is made of a transparent or translucent plastic extrusion, and has an engaging piece 24a formed at its upper edge to fit into the locking groove 12a.

In the above configuration, by using the elasticity of the streamlined cover 24 to fit the engaging piece 24a into the locking groove 12a, the streamlined cover 24 can be easily attached to and removed from the lower part of the ceiling frame 12.

When the streamlined cover 24 is installed, as shown in FIG. 3, the airflow descending near the ceiling frame 12 flows along the sides of the streamlined cover 24, resulting in a laminar flow state in this area, causing stagnation and turbulence. It will flow down to the floor side smoothly.

Incidentally, a fluorescent light 28 is fixed to the lower surface of the ceiling frame 12 via a fluorescent light fitting 28a, and its cord 30 is routed inside the hollow interior of the frame 12.

Furthermore, the airflow at the attachment point of the subframe 14 is also rectified by the streamlined cover 26,
It will flow well.

6 and 7 show the detailed structure of the subframe 14. The subframe 14 has a substantially U-shaped cross section, and bracket portions 14a that abut against the side surfaces of the frame 12 are formed at both ends of the subframe 14. Both ends are fixed to the ceiling frame 12 by screwing screws B1 into this bracket portion 14a. When the sub-frames 14 are in a fixed state, lateral wobbling between the ceiling frames 12 is prevented, and the ceiling frames 12 are reinforced.

Note that the above-mentioned fluorescent light 2 is provided in the subframe 14.
The indoor wiring cord 30 for wiring or other equipment is routed through the opening 12b formed in the side surface of the ceiling frame 12.
It is introduced into the hollow interior of.

The streamlined cover 26 has a function of rectifying the airflow, a decorative function, and securing a space for wiring. This streamlined cover 26 is made of an aluminum extrusion molded body, and its lower part is fixed to the subframe 14 via screws B2, and covers the outer periphery of the subframe 14. Cosmetic seal portions 22 are provided on both sides of the upper end of the engaging piece 26a formed at the upper end of the streamlined cover 26.
It abuts against the lower surface of the filter frame 18 of the filter 16 via a.

In the above configuration, the streamlined cover 26 is
Loosening and removing B2 immediately exposes the indoor wiring, making maintenance, additional wiring, or wiring removal extremely easy. Furthermore, since the streamlined cover 26 has a narrow width and has a rectifying function, it does not reduce the effective area of the filter and does not create any airflow stagnation area.

In the embodiment described above, a fluorescent light is arranged on the lower surface of the ceiling frame 12, and the outer periphery of the fluorescent light is covered with a streamlined cover 24.
However, it goes without saying that the lower surface of the ceiling frame 12 may be opened, a lighting fixture may be placed inside the ceiling frame 12, and the opening may be covered with a transparent or translucent cover.

<<Effects of the invention>> As explained in detail in each of the embodiments above, according to this invention, the wiring is routed using the sub-frame at the bottom of the ceiling, so maintenance of the wiring can be done simply by removing the cover. In addition, the effective area of the filter can be increased and the seal area can be decreased, and the construction can be simplified.

[Brief explanation of the drawing]

Fig. 1 is a plan view showing the ceiling structure according to this invention, Fig. 2 is a plan view of the main part, Fig. 3 and Fig. 4 are sectional views taken along lines - and - of Fig. 2, and Fig. 5 is a frame and streamlined structure. FIG. 6 is an exploded perspective view showing the connection relationship with the cover, FIG. 6 is an exploded perspective view showing a more detailed structure of the subframe, and FIG. 7 is a sectional view thereof. A...Clean air room, 12...Ceiling frame, 1
4... Subframe, 16... Filter unit, 18... Filter frame, 20... Filter element, 26... Streamlined cover, 30... Cord.

Claims (1)

[Scope of utility model registration request] A plurality of ceiling frames are arranged in parallel on the ceiling of the ceiling blowing system at intervals corresponding to the installation intervals of the filter units, and a plurality of reinforcing sub-frames are placed between the ceiling frames at appropriate intervals. A filter frame containing a filter is installed on top of each compartment surrounded by the ceiling frame and reinforcing subframe via a sealing material.
Furthermore, covering the outer periphery of the subframe with a cover,
A ceiling structure of a clean air room characterized by a wiring space inside the cover.