JPH0515933Y2 - - Google Patents

Info

Publication number
JPH0515933Y2
JPH0515933Y2 JP1987151020U JP15102087U JPH0515933Y2 JP H0515933 Y2 JPH0515933 Y2 JP H0515933Y2 JP 1987151020 U JP1987151020 U JP 1987151020U JP 15102087 U JP15102087 U JP 15102087U JP H0515933 Y2 JPH0515933 Y2 JP H0515933Y2
Authority
JP
Japan
Prior art keywords
ceiling
filter
clean room
duct unit
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987151020U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63197621U (h
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987151020U priority Critical patent/JPH0515933Y2/ja
Publication of JPS63197621U publication Critical patent/JPS63197621U/ja
Application granted granted Critical
Publication of JPH0515933Y2 publication Critical patent/JPH0515933Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP1987151020U 1987-01-28 1987-10-01 Expired - Lifetime JPH0515933Y2 (h)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987151020U JPH0515933Y2 (h) 1987-01-28 1987-10-01

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP982587 1987-01-28
JP1987151020U JPH0515933Y2 (h) 1987-01-28 1987-10-01

Publications (2)

Publication Number Publication Date
JPS63197621U JPS63197621U (h) 1988-12-20
JPH0515933Y2 true JPH0515933Y2 (h) 1993-04-27

Family

ID=33133201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987151020U Expired - Lifetime JPH0515933Y2 (h) 1987-01-28 1987-10-01

Country Status (1)

Country Link
JP (1) JPH0515933Y2 (h)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59184919U (ja) * 1983-05-25 1984-12-08 東京濾器株式会社 フイルタエレメント
JPS6343621U (h) * 1986-09-08 1988-03-23

Also Published As

Publication number Publication date
JPS63197621U (h) 1988-12-20

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