JPH05150263A - Active matrix type liquid crystal display element - Google Patents

Abstract

PURPOSE:To provide the active matrix type liquid crystal display element which enables picture elements to be increased in density and number by narrowing down intervals of connection pads and electric conductors and is improved in manufacture yield. CONSTITUTION:Connection electric conductors 103 of signal lines in even columns are arranged in a 1st wiring layer and connection electric conductors 101 of signal lines in odd columns are arranged in a 2nd wiring layer. The 1st wiring layer and 2nd wiring layer are insulated by an insulation layer 108. Thus, the electric conductors are distributed and arranged in the two wiring layers, so the number of electric conductors arranged in each wiring layer is a half as large as the number of electric conductors which are arranged in only one layer as before and the electric conductor intervals d3 are doubled. Thus, the occurrence rate of a short-circuit defect and an open-circuit defect in the manufacture process of the connection electric conductors is decreased to greatly improve the manufacture yield.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an active matrix type liquid crystal display device, and is particularly effective in the case of having a high definition pixel and its wiring.

[0002]

2. Description of the Related Art In recent years, in the field of liquid crystal display elements, active matrix type liquid crystal display elements have been actively developed in order to realize high-definition television display and large-scale graphic display, and some of them are already in practical use. Some have been converted.

In this active matrix type liquid crystal display element, a switching element made of a semiconductor is used as a means for controlling the driving of each pixel. Usually, one semiconductor switching element is provided for each pixel, and one scanning line and one signal line for connecting to an external drive circuit are provided.

Such switching elements, scanning lines, signal lines, etc. are usually TFTs for switching elements because of the fact that transmissive display is possible and the area can be easily increased.
(Thin film transistor) and wiring such as scanning lines and signal lines are formed by patterning by photofabrication such as film formation and etching on a transparent insulating substrate such as glass using a transparent conductive film such as ITO. It

FIG. 4 shows the structure of the above-mentioned active matrix type liquid crystal display device.

This active matrix type liquid crystal display element includes an active element substrate 405 in which a TFT 402, a pixel electrode 403 made of a transparent conductive film, and a connection wiring 404 such as a scanning line and a signal line are arranged on a transparent insulating substrate 401.
The active element substrate 405 and the counter substrate 407 are provided with a counter substrate 407 having a counter electrode 406 formed of a transparent conductive film provided opposite to the active element substrate 405, and a liquid crystal composition 408. The liquid crystal composition 408 is sandwiched between these substrates arranged in parallel to each other, and the periphery of these substrates is sealed with a sealing agent 409.

As shown in FIG. 5, the connection wirings 404 such as the above-mentioned scanning lines and signal lines are provided in the peripheral portion outside the pixel region, and the connection pads 410 are provided at the tips thereof.
Is connected to a drive circuit such as an external liquid crystal driver LSI. In addition, the active element substrate 405 shown in FIG.
The cross section at is shown in FIG.

The connection wiring 404 drawn from the pixel region 501 and the connection pad 410 connected to the connection wiring 404 are formed on the insulating substrate 6.
No. 03 gate insulating film 602 is arranged in a single layer.

However, in such a liquid crystal display element, a liquid crystal driver L as a drive circuit to be connected is used.
Since this connection pad must be connected to SI,
Number of output pins per LCD driver LSI 1
About 20 to 240 pads are grouped into one group, and the interval between these pads and the interval d1 of the connection wiring 404 connected thereto are matched with the output pin interval of the liquid crystal driver LSI to obtain the signal in the pixel area. Distance d2 between lines 502
Must be placed closer together.

In recent years, in order to realize high-definition display for televisions, graphic displays, etc., there has been a demand for higher density of pixels and a higher number of pixels of liquid crystal display elements. LCD driver LSI
The number of output pins of the
For example, TAB (Tape Automated Bonding)
The mounting type LCD driver LSI is about 390 μm, CO
In the B (chip on board) type LCD driver LSI
It tends to become narrower, such as around 100 μm. Further, the distance d1 between the connection pad 410 connected to the output pin of such a liquid crystal driver LSI and the connection wiring 404 connected thereto must be further narrowed. In particular, the connection wiring 404 is considerably longer and has a smaller line width than the connection pad 410.

However, as described above, the connection pad 41
The interval of 0 and the interval d1 of the wiring 404 connected thereto
In the photofabrication process of manufacturing the active element substrate 405, the short circuit defect 503 and the disconnection defect 504 caused by dust or the like between the adjacent wirings particularly frequently occur in the connection wiring 404 due to the narrowing of the active element substrate 405. Has become. And this is the active element substrate 4
This is a major cause of the decrease in the production yield of No. 05.

[0012]

SUMMARY OF THE INVENTION The present invention has been made to solve such a problem, and an object of the present invention is to connect signal lines and scanning lines caused by the narrowing of the spacing between connection pads. Active matrix liquid crystal display that solves the problems of short-circuit defects and disconnection defects between adjacent wiring lines, narrows the spacing between connection pads without decreasing the manufacturing yield, and realizes high pixel density and high pixel count. It is to provide an element.

[0013]

An active matrix type liquid crystal display element of the present invention is arranged so as to intersect with a connection pad for connecting a drive circuit in a matrix form, and a connection wiring is provided to the connection pad for connecting the drive circuit. An active element substrate on which a plurality of scanning lines and a plurality of signal line inspection lines connected to each other, a switching element connected to the scanning line and the signal line, and a pixel electrode connected to the switching element are arranged, In the active matrix type liquid crystal display device having a counter substrate on which a counter electrode facing the pixel electrode is provided, and a liquid crystal composition sandwiched between the active device substrate and the counter substrate, Insulate at least one of the connection wiring to be connected and the connection wiring to be connected to the signal line for each one or for every plurality It is characterized by being disposed in different layers through.

[0014]

With the connection wiring of the plurality of scanning lines and the connection wiring of the plurality of signal lines, one of the two adjacent connection wirings is on the first wiring layer and the other is on the second wiring layer. It is arranged. For example, the connection wirings of the even-numbered scanning lines are arranged in the first wiring layer, and the second wirings are formed thereon with the insulating layer interposed therebetween.
Connection wirings of odd-numbered scanning lines are provided as the wiring layer of. The first wiring layer and the second wiring layer are insulated by the above-mentioned insulating layer. As described above, since the wirings are distributed and arranged in the two wiring layers, the wiring interval of the connection wirings arranged in one wiring layer is set to one layer as in the conventional case. It is twice as large as the wire spacing of the connecting wires.

As described above, since the connection wiring has a wiring distance twice as large as that of the conventional one, the active matrix type liquid crystal display device of the present invention causes short circuit failure and disconnection failure in the process of manufacturing the connection wiring of the active element substrate. The rate can be drastically reduced, and the manufacturing yield can be significantly improved.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of an active matrix type liquid crystal display device of the present invention will be described in detail below with reference to the drawings. Here, the active element substrate, which is the main point of the present invention, will be mainly described.

FIG. 1 is a plan view showing a connection wiring of signal lines and a connection pad connected to the signal wiring of the active matrix type liquid crystal display element of the present invention.

Further, AA ', BB', CC 'in FIG.
2A, 2B and 2 respectively.
It shows in (c).

As shown in FIG. 1, in the active matrix type liquid crystal display device of the present invention, the connection wirings 101 of the odd-numbered signal lines are formed in the peripheral portion of the active element substrate 110, that is, outside the pixel region. The odd-numbered connection pads 102 connected, the even-numbered signal line connection wirings 103, the even-numbered connection pad 104 connected thereto, and the even-numbered signal line connection wirings 103 extend out from the pixel region 111. Through holes 106 for connecting the signal lines 105 in even columns
And through holes 107 for connecting the connection pads 104 in even columns.

Then, as shown in the sectional view of FIG.
The connection wiring 103 of the signal lines in the even columns is the insulating substrate 100.
On the surface of the first wiring layer and on the upper layer of the first wiring layer through the insulating layer 108, the connection wiring 1 of the odd-numbered signal lines
01 is arranged as the second wiring layer.

The connection wirings 103 of the signal lines in the even columns are arranged as the first wiring layer on the insulating substrate 100 as described above, and the connection wirings 103 in the even columns extending outward from the pixel region to be connected thereto. Signal line 105 and connection pad 10 in even columns
4 is arranged in the second wiring layer. Therefore, these are connected to the through hole 106 as shown in FIG.
By providing the through hole 107 as shown in (c), the insulating layer 108 is penetrated and connected to the connection wiring 103 of the signal line.

On the other hand, the connection wiring of the scanning line is also laid out in two layers like this signal line.

As described above, since the connecting wirings of the scanning lines and the signal lines of the active matrix type liquid crystal display element of the present invention are formed in two layers, the distance between the adjacent wirings in each wiring layer is as shown in FIG. 1 and FIG. It becomes d3 shown in FIG. 2 (b), which is about twice as wide as the distance d1 when all the wires like the prior art wires are arranged in a plane.

With such a structure, in the active matrix type liquid crystal display device of the present invention, the occurrence rate of short circuit defects in the manufacturing process of the connection wiring is reduced to about 1/2, and the manufacturing yield is greatly improved.

Next, a method of manufacturing the active matrix type liquid crystal display element of the present invention will be described step by step.

FIG. 3 is a diagram showing a manufacturing process of an active element substrate of an active matrix type liquid crystal display element of the present invention.

First, as shown in (1) of FIG. 3, on the insulating substrate 100 made of an insulating material such as glass, the connection wirings 103 of even-numbered columns of signal lines are provided as a first wiring layer. Since the spacing between adjacent wirings of the connection wiring 103 of the signal lines in the even-numbered columns is twice the spacing between the conventional wirings as described above, the probability of occurrence of short circuit failure in the manufacturing process is about 1/2. Becomes Further, at this time, in the pixel region, the gate electrode 201 of the TFT and the scanning line 202
Is provided.

Next, as shown in FIG. 3B, the insulating layer 108 is formed on the connection wirings 103 of the signal lines in the even columns described above.

Then, on the insulating layer 108, in the pixel region, as shown in (3) and (4) of FIG.
A TFT switching element 203 and a pixel electrode 204 composed of an i (amorphous silicon) layer or the like are formed. Then, outside the pixel region, that is, in the peripheral portion of the active element substrate 110, as shown in (5) of FIG. 2, the connection wiring 103 of the above-described even-numbered column signal line is connected to the signal line 105 from the pixel region. Through holes 106 and 107 in the insulating layer above the connection portions and the connection pads with the even-numbered columns of connection pads 104.
To drill. At this time, on the scanning line side (not shown), an opening is formed in the insulating layer on the connection pad arranged in the connection wiring of the scanning line, and the connection pad on the scanning line side is the surface of the insulating layer of the active element substrate 110. It is exposed to and can be connected to the connection pin of the external liquid crystal drive circuit. Since such a step of forming an opening in the insulating layer on the connection pad already exists in the prior art, it is possible to form the through holes 106 and 107 in the same step as the formation of this opening. it can. That is, it is not necessary to separately add a step of forming such through holes 106 and 107.

Next, as shown in (6) of FIG. 2, the signal line 205 is connected as a second wiring layer on the insulating layer 108 in the pixel region, and the signal lines in odd columns are connected outside the pixel region. The wiring 101 and the signal lines 105 in even columns extending from the pixel region
And even-numbered connection pads 104 are arranged. The even-numbered column signal lines 105 extending out from the pixel region are formed by the through holes 106, and the even-numbered column connection pads 10 are formed.
The through holes 107 are arranged so as to be connected to the connection wirings 103 of the signal lines in the even columns.

As described above, the distance between the adjacent connection wirings of the connection wirings 101 of the odd-numbered signal lines arranged in the second wiring layer is twice the distance between the conventional connection wirings.
The probability of occurrence of short circuit failure is about 1/2. In addition, the probability of occurrence of disconnection defects is greatly reduced.

As described above, in the active matrix type liquid crystal display element of the present invention, the connection wirings 103 of the even-numbered columns of signal lines are arranged as the first wiring layer on the insulating substrate 100, and the insulating layer 108 is formed thereon. Connect the odd-numbered signal line connection wirings 101 as the second wiring layer, and distribute the connection wirings that were conventionally placed in one layer on the insulating substrate to the upper and lower two layers. Thus, the distance between adjacent connection wirings in each layer can be doubled from the conventional one.

On the other hand, similarly, on the scanning line side, the connection wiring can be distributed in two layers, that is, upper and lower layers, and the distance between adjacent connection wirings in each layer can be doubled as compared with the conventional one.

As a result, the rate of occurrence of short circuit defects and disconnection defects in the manufacturing process of the connection wiring can be greatly reduced, and the manufacturing yield can be dramatically improved.

Moreover, the connection wiring formed in such two layers of the signal line and the scanning line, as can be understood from the above description, connects the signal line and the scanning line in the pixel region through the insulating layer. Applying the manufacturing method according to the conventional technology, such as arranging in two layers above and below, also outside the pixel area, it is only necessary to change the pattern form of the connection wiring and through hole, and the film formation by the conventional photofabrication technology The manufacturing process such as etching or etching can be used as it is.

Therefore, since the manufacturing yield is significantly improved without adding a special process for forming the connection wiring of the signal line and the scanning line in two layers in this way to the conventional process, the manufacturing cost is dramatically increased. It will be cheaper.

[0037]

As described in detail above, the active matrix type liquid crystal display device of the present invention solves the problems of short circuit and disconnection between adjacent wirings in the signal line and scanning line connection wirings. By realizing the narrowing of the connection pad spacing and the improvement of manufacturing yield,
It is an active matrix type liquid crystal display element that realizes a dramatic reduction in manufacturing cost while realizing high density and high number of pixels of the liquid crystal display element.

[Brief description of drawings]

FIG. 1 is a plan view showing connection wirings of signal lines and connection pads connected to the connection wirings of an active matrix type liquid crystal display element of the present invention.

FIG. 2 is a sectional view of an active element substrate of an active matrix type liquid crystal display element of the present invention.

FIG. 3 is a diagram showing a manufacturing process of an active element substrate of an active matrix type liquid crystal display element of the present invention.

FIG. 4 is a sectional view showing the structure of a conventional active matrix type liquid crystal display element.

FIG. 5 is a plan view showing connection wiring of signal lines and connection pads connected to the connection wiring of a conventional active matrix type liquid crystal display element.

FIG. 6 is a sectional view of an active element substrate of an active matrix type liquid crystal display element of the present invention.

[Explanation of symbols]

100 ……………… Insulation substrate 101 ……………… Connection wiring for odd-numbered signal lines 102 ……………… Connection pad for odd-numbered rows 103 …………… Connection wiring for even-numbered signal lines 104 …… ………… Even-numbered row connection pads 105 ……………… Even-numbered row signal lines 106, 107 extending through the pixel region… Through holes 108 ………… Insulating layer 110 …………. Active element substrate

Claims (1)

[Claims] 1. A plurality of scanning lines and a plurality of signal lines which are arranged so as to intersect with a connection pad for connecting a drive circuit in a matrix and are connected to the connection pad for connecting the drive circuit via a connection wiring. Line, a switching element connected to the scanning line and the signal line, an active element substrate on which a pixel electrode connected to the switching element is arranged, and an opposed substrate on which an opposed electrode opposed to the pixel electrode is arranged. And an active matrix type liquid crystal display element having a liquid crystal composition sandwiched between the active element substrate and the counter substrate, wherein the connection wiring connected to the scanning line and the signal line connected At least one of the connecting wires is arranged in a different layer for each one or for a plurality of wires through an insulating layer. Box-type liquid crystal display element.