JPH0514033U - Continuous processing device - Google Patents

Abstract

(57) [Summary] The present invention has a function of ascending and descending in a continuous heat treatment furnace having a detour that performs ascending, traversing, and descending steps in the course of the traverse process, and also has a traverse function in the detour. This is a continuous heat treatment apparatus that eliminates dust generation factors. According to the present invention, in a continuous heat treatment apparatus having a detour that rises and falls, ascending means 2a-1 to 2a-3.
And the descending means 2b-1 to 2b-3 alternately move laterally to continuously feed the object to be processed. [Effect] The factor of dust generation due to sliding in the furnace is eliminated,
It is possible to maintain a cleaner atmosphere.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a continuous heat treatment apparatus, for example, a continuous heat treatment apparatus for continuously performing heat treatment and other treatments in a predetermined atmosphere.

[0002]

[Prior art]

 For heat treatment of semiconductor parts, thick film integrated circuits formed by forming a predetermined circuit pattern on a ceramic substrate by screen printing and baking, or electronic parts such as glass substrates for liquid crystal display devices with alignment films and deflection films formed. In that case, the quality of electronic parts will be greatly deteriorated by the adhesion of dust, so it is necessary to perform heat treatment in a clean atmosphere. Further, in the case where the quality of the object to be treated is deteriorated due to the oxidation or nitridation of the surface, the heat treatment needs to be performed in a vacuum or an atmosphere of an inert gas.

Therefore, as a heat treatment furnace for continuously performing the heat treatment of the electronic parts in a dust-free and clean atmosphere, one having a transfer device that does not generate dust and has no sliding portion in the furnace is proposed. Generally adopted. One example is a continuous heat treatment furnace using a so-called walking beam type transfer mechanism.

However, since all of these types form a considerably long furnace body, there is a problem that the exclusive area of the floor surface becomes large and the production efficiency per required area of the site is hindered. It Therefore, in order to make up for this, in order to effectively utilize the upper space of the furnace body, a method has been adopted in which the furnace body and the transfer mechanism are formed with a detour upward to shorten the total length of the furnace.

FIG. 8 is a schematic vertical cross-sectional view of a main part of the example. Hereinafter, in the description of the prior art, the same parts as those of the invention are denoted by the same reference numerals. That is, a detour consisting of upward ascent, horizontal movement, and descent is formed between the lateral feed sections 1a to 1e of the transport mechanism, and the descending section 1d is passed from the ascending section 1b to the relay lateral feed section 1c at the upper part. The required heat treatment is carried out.

[0006] For horizontal traverse at the lower part, a method such as a walking beam method that does not generate dust is adopted, but as a method of ascending and descending, three points at both ends of the transported object are supported by support materials. Be transported. FIG. 9 and FIG. 10 are schematic plan views of the main part showing this. First, FIG. 9 shows a part of the first half 1a of the lateral feed section to the rising section 1b and a part of the relay section 1c in the upper part. The workpiece W placed on the transverse feed device 21 from the transverse feed portion 1a and conveyed in the traveling direction (arrow) into the rising portion 1b moves up and down in the rising portion 1b. The support member 2a-2 arranged on the feed shaft 2a-1 supports the both ends at three points and pushes it upward.

In the ascending portion 1b, there is provided a rising relay shaft 3a-1 for supporting both side ends of the workpiece W at a position symmetrical to the upper feed shaft 2a-1, and a support provided on the rising relay shaft 3a-1. The material 3a-2 relays the workpiece W pushed up by the support material 2a-2 of the upper feed shaft 2a-1. Although the drive mechanism and the like will be described later, both the upper feed shaft 2a-1 and the rising relay shaft 3a-1 are formed by erected cylindrical poles, and each of them has a plurality of support members 2a at equal intervals and at the same level. -2 and 3a-2 are arranged.

The workpiece W pushed up by the support member 2a-2 of the upper feed shaft 2a-1 in this way is relayed to the support member 3a-2 of the ascending relay shaft 3a-1, and the upper feed shaft 2a. The supporting material 2a-2 of -1 moves down and pushes up the next object W to be processed. At the same time, the upper support member 2a-2 arranged on the upper feed shaft 2a-1 supports the object to be pushed up and relayed, and pushes it up to the next stage in sequence. Thus, the object W to be processed passes through the ascending portion 1b.

FIG. 10 shows a part of the upper part from the relay part 1c to the descending part 1d and the second half of the lateral feed 1e. The workpiece W conveyed from the relay section 1c in the upper part along the arrow is transferred into the descending section 1d.

A mechanism exactly the same as that provided in the rising portion 1b is also provided here. That is, the lower feed shaft 2b-1 corresponds to the upper feed shaft 2a-1, and the descending relay shaft 3b-1 corresponds to the ascending relay shaft 3a-1. Similarly, the support members 2b-2 and 3b are also provided. -2 is arranged. Then, these operations are the reverse operations of the above-mentioned upper feed, sequentially feeding the workpiece W downward, and similarly to the first half of the horizontal feed 1a, the latter half of the horizontal feed section which penetrates into the descending section 1d. It is placed on the transverse feed mechanism 23 of 1e.

The upper feed shaft 2a-1 of the ascending portion 1b and its supporting member 2a-2 and the lower feed shaft 2b-1 and its supporting member 2b-2 of the descending portion 1d rotate and move vertically in a certain range. Do the operation. Further, the relay shaft 3a-1, the supporting members 3a-2 and 3b-1, and the supporting member 3b-2, which are provided on both the parts 1b and 1d, also perform a predetermined rotation operation within a certain range. There is. This mechanism is shown in FIGS. 11 and 12.

FIG. 11 is a schematic plan view of a main part of the upper feed shaft 2a-1, the rising relay shaft 3a-1, and the lower feed mechanism 2b-1 and the lower descending relay shaft 3b-1. FIG. 12 is a right side view of the same. Since the other auxiliary mechanisms related to both the upper feed and the lower feed are the same, the same reference numeral is attached to the same member in both figures.

Therefore, first, the upper feed relationship will be described. As shown in the figure, one of the three upper feed shafts 2a-1 erected on each corner of the substantially triangular base 30a having the notch 30a-1 is one side surface of the workpiece W. And the other two are arranged at positions facing the other side surface of the workpiece W. The lower part penetrates through the base 30a and is rotatably mounted via a bearing 6a. Further, sprockets 9a are attached to the respective lower ends, and the three shafts are connected by a chain 18a together with adjacent drive sources.

As described above, a plurality of support members 2a-2 are installed on each shaft at equal intervals and at the same level, and the three support members 2a-2 are rotated by 90 ° by the rotation of the drive source. It is designed to support the side of the processed material. The plurality of support members arranged on each shaft are oriented in the same direction.

Further, a vertical movement mechanism 5a having a built-in ball screw is provided in the central portion of the base 30a, so that the three upper feed shafts 2a-1 erected on the base 30a can be vertically moved at the same time. .. Therefore, when the upper feed is performed, the upper feed shaft 2a-1 is rotated to simultaneously raise the support material 2a-2 toward the object to be processed and push up the object W to be processed, and when the material is lowered, the support material 2a-2 is moved. Rotate 90 ° to the unsupported position to descend, and after the descending is finished, the supporting member 2a-2 is again directed toward the object to be processed for the next feed. By repeating this operation, the workpiece W is sequentially fed upward.

On the other hand, three ascending relay shafts 3a-1 are arranged in a triangle opposite to the upper feed shaft 2a-1 in such a manner that the three relay shafts 3a-1 face both sides of the workpiece W as well. The coaxial 3a-1 is erected on a square base 31a located below the base 30a, and the lower part thereof penetrates the base 31a and is axially mounted on the base 31a via a bearing 13a. Further, a sprocket 14a is attached to the lower end of the coaxial shaft 3a-1, and the three shafts are connected by a chain 17a together with a drive source 15a adjacently provided.

Similarly, each of the shafts 3a-1 is also provided with support members 3a-2 at the same level and at equal intervals, and the support members 3a-2 are also oriented in the same direction by the rotation of the drive source. Therefore, when the support member 2a-2 of the upper feed shaft 2a-1 supports and pushes up the object W to be processed, the support member 3a-2 of the rising relay shaft 3a-1 rotates 90 ° to rotate the object W to be processed. Turn around so you don't block your path. Then, when the upper feed shaft finishes pushing up the workpiece W, the relay shaft 3a-1 returns 90 ° rotation, and the coaxial support member 3a-2 relays the workpiece W. By repeating this operation alternately with the upper feed shaft 2a-1, the work W is conveyed.

The bases 31a of these mechanisms are supported by columns 32a installed at the four corners of the base 33a, and the vertical movement mechanism 5a of the upper feed section including the base 30a also penetrates the base 31a and is at the lower end. The part is fixed to the base 33a.

The mechanism of the upper feed has been described above, but the lower feed is as described above, and the same one as shown in FIGS. 11 and 12 is installed in the descending portion 1b in a form rotated 180 ° and turned in the opposite direction. Has been done. Therefore, each part of the reference numerals other than the reference numerals described in both figures and used for the description of the upper feed has the same function. However, the point that it works differently from the case of the upper feed is that the support member 2a-2 of the upper feed shaft 2a-1 supports the workpiece W while pushing it up to the intermediate support member 3a-2 one step higher. On the other hand, in the lower feed, a member having the same structural function as the upper feed shaft 2a-1 is referred to as the lower feed shaft 2b-1. The function thereof is also to lower the object W to the support member 3b-2 of the relay shaft 3b-1 one step lower while supporting the object W with the support member 2b-2.

The object to be processed, which has been fed upward in the ascending section 1b as described above, is conveyed by another transverse feeding mechanism in the relay section 1c at the upper part until the descending section. 13 and 14 show this, FIG. 13 is a schematic cross-sectional view of a main part, and FIG. 14 is a schematic plan view of the main part.

This device is moved by a drive source (not shown) on a rail 45 provided parallel to the furnace body 1 on a floor surface 44 provided outside the furnace wall. The base 42 of the device is joined to the rail 45 via the wheels 43 at the bottom, and the main arm 40 fixed to the base 42 and the sub-arm 41 movable in the perpendicular direction are provided at the top. The upper portions of both arms are bent in an L shape, and extend into the furnace body from a through groove 46 formed in the side wall of the furnace 1. As shown in the figure, the tip of each arm has support members 40a and 41a in the lower part, and the sub-arm 41 is bifurcated in the furnace to carry the workpiece W while supporting it at three points as shown in FIG. Is.

The functions of the respective parts of the apparatus have been described above. Further, the detailed operation of each part for transferring the object to be processed between the ascending part 1b and the descending part 1d is shown in order in FIG. ~ 16. Each drawing shows a part of the device, but FIG. 15 shows the support member 2a-2 of the upper feed shaft 2a-1 and the support member 3a-2 of the ascending relay shaft 3a-1 in the upper feed process. The operation is represented, and (1) to (9) indicate the order of the operation.

FIG. 16 shows the operation associated with the delivery in the lateral feeding process in the upper part during the transition from the ascending section to the descending section. That is, the operation from the delivery of the upper feed shaft 2a-1 from the support material 2a-2 to the delivery of the lateral feed support 40a at the upper portion to the delivery of the lower feed shaft 2b-1 to the support material 2b-2. Then, (10) to (17) are the order of operations.

FIG. 17 shows the operation of the support member 2b-2 of the lower feed shaft 2b-1 and the support member 3b-2 of the support member 3b-2 of the descending relay shaft 3b-1 in the lower feed process. ) To (26) show the order of operations. The description of each of these drawings will be omitted because it is redundant with the above description.

As described above, as the detour is formed upward in order to reduce the installation area, conventionally, the entire mechanism tends to be complicated. In addition, the horizontal feed mechanism at the upper part becomes a source of dust and results in contaminating the clean atmosphere.Also, heat is forced to escape from the through-grooves on the side wall of the furnace, which causes variations in the temperature inside the furnace, which causes the treated material to be treated. It also results in the deterioration of the quality of the product. Therefore, these improvements such as the simplification of the structure will be a big issue from now on.

[0026]

[The purpose of the device]

 It is an object of the present invention to provide a continuous processing device that requires a clean atmosphere, eliminates a dust source, and has a simplified mechanism.

[0027]

[Device configuration]

 The present invention relates to a continuous heat treatment apparatus for performing a predetermined heat treatment on an object to be processed which is supported by a supporting means and conveyed in a process of horizontal movement, vertical rise, horizontal movement, vertical fall and horizontal movement, in which the raising step is performed. The vertical ascending means and the vertically descending means make horizontal reciprocating movements during the horizontal movement between the lowering step and the lowering step, and the horizontal movement is also performed when the object to be processed is transferred between these two means. The present invention relates to a continuous heat treatment device.

[0028]

【Example】

 Embodiments of the present invention will be described below. The transfer system of this example is similar to the conventional technology in that the heat treatment furnace is provided with a detour and the same process is used.However, the transfer of the lateral feed process in the detour is performed by the transfer device of another process. It is a new means because it also doubles as a point. Therefore, since the conventional technique has been described in detail, the features of the device should be clarified by focusing on the points of the device different from the conventional device.

FIG. 1 is a schematic cross-sectional view taken along line I-I in FIG. 2, FIG. 2 is a schematic cross-sectional view taken along line II-II in FIG. 1, and FIG. 3 is a schematic perspective view of FIG.

Also in this example, since the structural functions of the ascending step and the descending step are the same, one of the ascending sides will be mainly described. Also in this example, the heating mechanism is not shown.

First, the furnace body of the present example is provided with a detour path between the ascending section 1b, the upper transit side feeding section 1c, and the descending section 1d between the first half lateral feed section 1a and the second half lateral feed section 1e. The points are the same as before. However, in this example, as described above, a mechanism is adopted in which the horizontal feed process in the upper part is part of another process, that is, the upper feed shaft 2a-1 and the lower feed shaft 2b-1 also serve as this. ..

That is, square pedestals 20a and 20b are arranged at the bottom of the ascending mechanism and the descending mechanism, columns 12a and 12b are erected at the four corners of the pedestal, and a bridge-like floor surface 16 is provided on both pedestals. Has been installed. This is the foundation that supports the various mechanisms that will be explained.

The base 4a-1 of the lifting mechanism forms a V-shaped notch C with the center of the quadrangle facing the direction of travel of the workpiece W, with the opening facing rearward. Further, three upper feed shafts 2a-1 are erected on the base 4a-1 in the same arrangement as the conventional one. The lower part of the upper feed shaft 2a-1 penetrates the base plate 4a-1 as usual, and is axially installed by the bearing 6a. At the lower end of the upper feed shaft 2a-1, sprockets 9a are attached respectively, and together with the adjacent drive source 10a, the chain is formed. It is tied by 18a. In this example, as shown in FIG. 2, the vertical movement mechanism 5a is installed on both sides of the base 4a-1 while avoiding the notch C.

In the present example, the upper feed shaft 2a-1 also has a relay lateral feed function in the upper part, so that a sub-base 4a-2 is further provided. This also has a notch C having the same shape as the base 4a-1, and both of these notches serve as means for avoiding one of the rising relay shafts 3a-1 described later. This notch C is also the reason why the vertical movement mechanism 5a is installed on both sides, and the mechanism 5a is installed on the base of this sub-base 4a-2, connects both bases and has its own drive source adjacent to each other. It is driven by 8a.

The sub-base 4a-2 can be reciprocated along a traveling direction of the furnace 1 on a rail 19 laid on the bridge-like floor surface 16 by wheels 4a-4 provided at a lower portion. The arrow A indicates the movable range.

On the other hand, the sub-base 4a-2 is provided with U-shaped projections 4a-3 from both sides of the notch C opening, and a male screw-shaped drive shaft 4a-5 is threadedly inserted through the lower end of the projection. is doing . The drive shaft 4a-5 has a long tip and is axially mounted on the support shaft 4a-7 below the end of the sub-base 4a-2 on the opposite side, and the other end side is also mounted on the support shaft 4a-8. The sprockets 4a-6 provided on the same side are connected by a chain to the sprockets of the drive source 11a installed on the floor. Therefore, as the drive source 11a rotates, it is guided by the threads of the drive shaft 4a-5 screwed into the protrusion 4a-3 and reciprocates within the movable range A thereof.

With this reciprocating movement, the base 4a-1, which is connected to the sub-base 4a-2 via the vertical movement mechanism 5a, is also integrated as a whole, including the upper feed shaft 2a-1 provided upright. Move back and forth. A support member 2a-2 is arranged on each of the upper feed shafts 2a-1 as in the conventional case. Here, the difference of this example from the conventional one is that a support member 2a-3 dedicated to transverse feed is provided immediately above the uppermost support member 2a-2. As shown in FIG. 3, the supporting member 2a-3 has a different orientation from the other supporting members 2a-2. The supporting material 2a-3 faces sideways when the other supporting material 2a-2 supports the object W to be processed, and the other supporting material 2a-2 finishes pushing up the object W to be processed. Even when it goes down, it does not come into contact with the material W to be processed by changing to another direction.

FIG. 4 shows this relationship and is a plan view of the supporting portion. As shown in the figure, a support member 2a-2 and a lateral feed support member 2a-3 are fixed to the upper feed shaft 2a-1 at an angle of 120 ° C. Therefore, when the coaxial shaft 2a-1 intermittently repeats the rotation of 120 ° in the direction of the arrow, the respective support members change their orientations in the order of (a), (b) and (c) in FIG. First, in the state of (a), the support member 2a-2 supports and pushes up the workpiece W, then rotates 120 ° and descends, and the next rotation causes the transverse feed support member 2a-3 to reach the uppermost position. Only the object W to be processed is supported and laterally fed.

On the other hand, the rising relay shaft 3a-1 in this example is different from the conventional one, and as clearly shown in FIGS. 2 and 3, one of the three shafts arranged in a triangle is the apex of the triangle. It is located at the deepest part of the notch C of the base plate 4a-1 and the sub-base 4a-2, and stands on the floor 16 at a position that intersects at right angles with the triangular arrangement of the upper feed shaft 2a-1. Has been set up. As in the conventional case, this also penetrates through the floor 16 and is axially installed on the bearing 13a, and each sprocket 14a at the lower end is connected by a chain 17a to an adjacent drive source 15a.

A support member 3a-2 is arranged on the upper portion as in the conventional case, and the workpiece W carried by the support member 2a-2 of the upper feed shaft 2a-1 is relayed. As for the rotation of the rising relay shaft 3a-1, the workpiece W is relayed while intermittently rotating clockwise by 180 °.

The rotation of the upper feed shaft 2a-1 and the rising relay shaft 3a-1 are controlled by sensors (not shown), but this control is performed not only by the two members but also in the first half and the second half of the furnace 1. It is designed to be performed in a certain pattern including horizontal feed.

By the functions described above, the workpiece W sequentially carried in the ascending portion 1b upward is relayed to the support member 3a-2 of the uppermost ascending relay shaft 3a-1. , The horizontal feed support member 2a-3 located at the uppermost portion of the upper feed shaft 2a-1, and is carried into the upper relay unit 1c. The lateral feed mechanism by the upper feed shaft 2a-1 is as described above. The workpiece W carried into the section 1c is once placed on the support member 24 provided on the upper surface of the intermediate partition wall 1f, and the transported upper feed shaft 2a-1 returns to its original position.

As described above, also in this example, inside the descending portion 1d, exactly the same mechanical functions as those of the internal mechanism of the ascending portion 1b, which have been described in detail above, are provided in the form of a positive and negative opposition in the form rotated by 180 °. It is installed facing each other. Therefore, at the same time when the upper feed shaft 2a-1 returns to its original position, the lower feed shaft 2b-1 moves from the opposite side into the relay section 1c so that the workpiece W is picked up. come. Thereafter, the lower feed mechanism sequentially feeds the workpieces W downward by the operation opposite to the operation of the upper feed shaft 2a-1 to carry the workpiece W to the portion, and the workpiece W is transferred to the transport device 23 of the horizontal feed portion in the latter half.

FIG. 5 is a stepwise illustration of the relationship between the object W to be processed, which extends from the ascending portion 1b side at the uppermost stage to the descending portion 1d at the opposite side, and each supporting material supporting the same. Is. That is, FIG. 3A shows that the workpiece W is supported by the support member 3a-2 of the ascending relay shaft 3a-1 immediately before being transferred to the lateral feed support member 2a-3 of the upper feed shaft 2a-1. It is in a state of being. FIG. 2B shows a state in which the workpiece W has been transferred to the transverse feed support member 2a-3 and moved to the upper surface of the partition wall 1f. In the same figure (c), the horizontal feed support member 2b-3 of the lower feed shaft 2b-1 on the descending portion 1d side moves to the upper part of the intermediate partition wall 1f and supports the workpiece W. is there. In the same figure (d), the lower feed shaft 2b-1 has returned to the lower position of the lower end, and the workpiece W is inherited by the uppermost supporting member 3b-2 of the lower relay shaft 3b-1.

FIG. 6 and FIG. 7 show the movement of each support member and the like in the process of FIG. 5 more finely by one support member. And (10) to (19) show the order of migration.

By using the transfer mechanism in the relay lateral feed section 1c as shown in FIGS. 1 to 3 and FIGS. 5 to 7, the sliding portion can be provided away from the furnace body, and the sliding can be performed safely and The workpiece W can be conveyed without dust.

Although the embodiments of the present invention have been described above, various other modifications are conceivable due to the technical idea of the present invention. For example, the up-and-down vertical movement mechanism may adopt a pan tag rough type jack system. Further, as a method of laterally moving the upper feed shaft and the lower feed shaft, a method of combining a rack and a pinion can be adopted.

[0048]

[Effect of the device]

 In the present invention, the upper feed mechanism and the lower feed mechanism also have a lateral feed function, so that the mechanism is simplified overall. In addition, the fact that there is no need for a special mechanism for horizontal feed at the top eliminates the cause of dust generation, and makes it possible to maintain a cleaner atmosphere.

[Brief description of drawings]

FIG. 1 is a schematic cross-sectional view (cross-sectional view taken along line I-I of FIG. 2) of a continuous heat treatment apparatus of an example.

FIG. 2 is a schematic sectional view taken along line II-II in FIG.

FIG. 3 is a partial schematic perspective view of the same apparatus with a part broken away.

FIG. 4 is a plan view showing a movement of a support member due to rotation.

FIG. 5 is a diagram showing the states of the object to be processed and the support material in a stepwise manner from the ascending portion to the descending portion.

FIG. 6 is a view showing the front stage of the movement of the object to be processed and the support material in the state of FIG. 5 in a further subdivided manner.

FIG. 7 is a diagram showing the latter part of the movement of the object to be processed and the support material in the state of FIG. 5 in a further subdivided manner.

FIG. 8 is a schematic vertical sectional view of a conventional device.

FIG. 9 is a partial schematic plan view of the same.

FIG. 10 is a schematic plan view of another portion of the same.

FIG. 11 is a schematic plan view of the main parts of the upper feed mechanism and the lower feed mechanism.

FIG. 12 is a right side view of the same.

FIG. 13 is a schematic sectional view of a lateral feed mechanism of a conventional device.

FIG. 14 is a schematic plan view of the same.

FIG. 15 is a diagram showing the movement of the support material and the object to be processed in the ascending process in detail.

FIG. 16 is a diagram showing the movement of the support material and the object to be processed in the horizontal feeding process in detail.

FIG. 17 is a diagram showing the movement of the support material and the object to be processed in the descending step in a subdivided manner.

[Explanation of symbols]

 1 Continuous Heat Treatment Furnaces 1a, 1e Horizontal Feeding Part 1b Ascending Part 1c Upper Transit Transverse Feeding Part 1d Lowering Part 1f Partitioning Part 2a-1, 2b-1 Upper Feeding Shaft 2a-2, 2b-2 Ascending Support Material 2a-3 2b-3 Upper lateral feed support material 3a-1, 3b-1 Lower feed shaft 3a-2, 3b-2 Downward support material 4a-1, 4b-1, 30a, 30b, 31a, 31b Base material 4a-2, 4b-2 Sub-base 5a, 5b Vertical movement mechanism 4a-5 Drive shaft 16 Floor 19 Rail 21, 23 Traverse device 24 Support material 33 Base 40 Main arm 41 Subarm W Workpiece A, B Moving range C Notch

Claims (1)

[Scope of utility model registration request] 1. A continuous processing apparatus which performs a predetermined process on an object to be processed which is supported by a supporting means and which is conveyed in the steps of horizontal movement, vertical rising, horizontal movement, vertical lowering and horizontal movement,
During the horizontal movement between the ascending step and the descending step, the vertical ascending means and the vertical descending means respectively perform horizontal reciprocating movements, and the object to be processed is transferred between these means so that the object is also horizontally conveyed. A continuous processing device characterized by the above.