JP2965742B2 - Transfer device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer device for heating a work part and transferring the work part to a target place.

[0002]

2. Description of the Related Art Conventionally, as this type of apparatus, for example,
There is one described in JP-A-1-181965. In this apparatus, as shown in FIG. 9, a device is soldered on a printed circuit board using a reflow furnace. A conventional transfer method will be described by taking the soldering method using the reflow furnace as an example. The reflow method is different from the conventional flow method in which a substrate on which an element is mounted is dipped in a molten solder bath, after applying a creamy solder composed of fine solder particles and paste to a predetermined position on the substrate. The element is placed, heated and melted by infrared rays, and soldered.

In FIG. 9, reference numeral 101 denotes a conveyor;
Denotes a substrate, 103 denotes a heating element, 104 denotes a heating chamber, 105 denotes an inlet side exhaust port, and 106 denotes an outlet side exhaust port. Heating room 10
Numeral 4 is a tunnel-like shape and the inside is hollow in the horizontal direction.
1 runs. On a conveyor 101 that moves at a constant speed v, a substrate 102 on which elements are mounted is heated by a heating element 103 that continuously generates a constant amount of heat. The first half of the heating chamber 104 is a preheating section, and the second half is a main heating section.
Soldered. Then, the soldered product is taken out from the outlet. The inlet-side exhaust port 105 and the outlet-side exhaust port 106 are for preventing solder vapor from being emitted into the room.

[0004]

However, in the transportation by the conveyor 101 as described above, when a stop due to an equipment abnormality occurs, the substrate 102 on which the elements are mounted is left in the heating chamber 104, and the heating time is longer than the normal heating time. Will be heated. For this reason, as shown in FIG.
In the case of thermal transient processing, the workpiece is heated to a temperature higher than a target processing temperature, and there is a possibility that parts may be damaged. Further, even in the case of the heat saturation processing as shown in FIG. 8B, there is no direct connection to the damage of the part, but a difference in the heat history of the part occurs due to the difference in the return time for each abnormal stop. It has a direct effect. As described above, in the conventional transport device, when an abnormal stop occurs,
There is a problem in that the parts being transported may be excessively heated and the reliability of the parts may be reduced. This is not only in this reflow furnace, but also in a heat block heating method in which parts are brought into contact with a heat block and heated.
This is a problem that also occurs.

SUMMARY OF THE INVENTION The present invention has been made in view of such a conventional problem, and it is intended to maintain the reliability of components without excessively heating the components being conveyed even when abnormally stopped. It is an object of the present invention to provide a transfer device, a heating transfer device, and an operation method of the transfer device that can perform the transfer.

[0006]

In order to achieve the above object, according to the present invention, in a mechanism using heat block heating as a heating method, parts are overheated,
In order to prevent the component from being heated for a long time, and to prevent the adverse thermal effect due to the difference in the heat history of the component due to the difference in the heating time at each abnormal stop, the component does not contact the heat block surface when the abnormal stop occurs. .

[0007]

[0008] That is, a transfer device for achieving the above-mentioned object includes a mounting table on which a predetermined processing component is mounted, and a mounting table described above, wherein the mounting table is positioned below the processing component which is heated in contact with the heat block. An initial position, an ascending position at which the workpiece that has risen from the initial position and is in contact with the heat block can be lifted, a ascending position advanced by a certain distance from the ascending position, and a descent from the ascending position. The mounting table moving mechanism that can be moved to a pre-descent position where the workpiece can be lowered to a target place, and the mounting table moving mechanism. Position, the ascending position, the ascending position,
Control means for instructing the mounting table to move again and again in the order of the initial position, transferring the processed component, and receiving an abnormal stop command, instructing the mounting table to move to the ascending position. It is characterized by having.

The operation of separating the work part from the heat block in response to the abnormal stop command may be performed using a mechanism for transporting the work part as described above. A mechanism for separating from the heat block may be provided. As described above, by providing the unique mechanism, the processed component can be separated from the heat block even when the mechanism for transporting the component itself breaks down.

[0010] Here, the transfer device for achieving the above object is provided with position monitoring means for monitoring the position of the mounting table, and the control means controls the position of the mounting table when the abnormal stop command is received. It is preferable to change the movement route to the ascending position according to the position. Further, in the transport device for achieving the object, when restarting the component transport,
A storage unit is provided for storing a heating time for heating the workpiece in contact with the heat block for the first time, and when the component transport is restarted by the control unit, the mounting table is moved from the raised position to the initial position. It is preferable that the work table be lowered to bring the workpiece into contact with the heat block, and after the heating time has elapsed, the mounting table be raised from the initial position to the raised position.

[0011]

When an abnormal stop command is issued while the workpiece is being heated by contacting the workpiece with the heat block, the separating means receives the command and immediately separates the workpiece from the heat block. For this reason, the processed component is not heated excessively than the normal heating amount, and the reliability of the component can be maintained.

[0012] In a machine equipped with a mounting table, a mounting table moving mechanism, and the like, during a steady operation, the processing part heated while being in contact with the heat block during the process of moving the mounting table from the initial position to the ascending position. Lift. Next, the mounting table moves forward from the raised position to the pre-raising position while lifting the workpiece, and then descends to the pre-lowering position. During this lowering process, the work piece is placed on the next heat block or the next stage. The mounting table on which the workpiece is placed retreats from the pre-descent position and returns to the initial position. At the time of steady operation, this is repeated to carry the processed parts.

When the abnormal stop command is issued, the mounting table moving mechanism moves the mounting table to the ascending position in accordance with an instruction from the control means, and separates the workpiece from the heat block. The moving destination of the mounting table may not be the raised position, but may be the pre-elevating position where the workpiece and the heat block are separated from each other, but when the mounting table is returned to the initial position, the moving destination at the time of the abnormal stop is raised. At the position, since the stage returns to the initial position simply by lowering the mounting table, it is more convenient when the moving destination is in the ascending position at the time of start-up at the time of restarting the conveyance.

By the way, regardless of the position of the mounting table, if the mounting table is raised immediately when an abnormal stop occurs, there is a possibility that the descending parts may be damaged. That is, while the mounting table is moving backward from the pre-down position to the initial position,
If an error occurs, the mounting table immediately rises and the work part is lifted, so the work part is not placed in the proper position on the work table. Various devices and the like provided on the premise of this may not operate normally, and not only the machined parts but also the device and the like may be damaged. Therefore, in order to avoid such danger, a position monitoring means for monitoring the position of the mounting table is provided, and when an abnormality occurs, it is determined that the mounting table is in the middle of retreating from the pre-down position to the initial position. In such a case, the mounting table is retracted and returned to the initial position, and then is raised to reach the raised position.

[0015] In the apparatus provided with the storage means, the time during which the workpiece can reach the target temperature is stored as the heating time for bringing the workpiece into contact with the heat block for the first time and heating the workpiece when transporting is resumed. This not only ensures the temperature required for component processing, but also makes the heating time uniform for each abnormal stop. In addition, if the above operation at the time of abnormal stop can be manually performed, the mounting table is manually moved to the ascending position or the pre-elevating position, and the component is mounted on the mounting table in this state. Therefore, by restarting the normal component conveyance, it is possible to process a part having an intermediate shape that cannot be processed normally. Also, if the driving source for moving the mounting table during normal operation is different from the driving source for moving the mounting table when receiving an abnormal stop command, the driving source during normal operation will fail and become abnormal. Even when a stop command is issued, it is possible to ensure the evacuation operation of the machined component at the time of abnormality.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. The present embodiment is a heating and transporting apparatus configured to include a transporting device that transports a component and a heat block that heats the component. Here, the component comprises a substrate and an electronic element soldered thereto. As shown in FIGS. 1 to 3, the transfer device includes a stand 1 fixed to a gantry (not shown), a base 2 provided on the stand 1 so as to be movable in a vertical direction, and a base 2.
, A slide base 5 provided on the horizontal movement guide 3 via a support guide 4 so as to be movable in the horizontal direction, and a support frame 6 on the slide base 5. Transfer-7 fixed via
And a transfer moving mechanism for moving the transfer 7, and a control device 30 for controlling the transfer moving mechanism.

The transfer 7, as shown in FIG.
It consists of two plates parallel to each other,
Is formed in such a manner that a groove corresponding to the size of the component 21 can be mounted. The heat block 18
Is between the two plates constituting the transfer 7
A plurality are arranged in series.

The transfer moving mechanism includes a driving motor 23 serving as a driving source for moving the transfer 7.
A cam rotation shaft 8 to which the rotational driving force from the drive motor 23 is transmitted, a transfer-up / down movement cam 9 and a transfer-horizontal movement cam 10 fixed to the cam rotation shaft 8, and a transfer-up / down movement A transfer vertical cam follower 13 that contacts the cam surface of the cam 9 and swings about the point O, and a transfer horizontal motion cam follower 14 that contacts the cam surface of the transfer horizontal movement cam 10 and swings about the O 'point. Springs 11 and 12 for urging these cam followers 13 and 14 in the direction of contact with the cam surfaces of the corresponding cams 9 and 10;
A transfer-vertical movement rod 15 and a transfer-horizontal movement rod 16 for transmitting the movements of the transfer rods 3 and 14; an L-shaped guide 17 for converting the vertical movement of the transfer-horizontal movement rod 16 into a horizontal movement;
14 is separated from the corresponding cam surfaces of the cams 9 and 10,
It has a transfer-up cylinder 19 and a transfer-back-up cylinder 20 for moving the corresponding rods 15 and 16 up and down. The cam rotation shaft 8 is provided with an encoder 22 for monitoring the position of the transfer 7. The cylinders 19 and 20 are so-called air cylinders, which can be remotely operated, but can also drive the cylinder head manually.

As shown in FIG. 1, the control device 30 stores a drive circuit 36 for driving the drive motor 23, a drive circuit 37 for operating the cylinders 19 and 20, and various programs and data. RAM 33
And a ROM 32, a CPU 31 for instructing the operation of the drive motor 23, the transfer-up cylinder 19, the transfer-back-up cylinder 20, and the like, and a position signal and an interlock signal from the encoder 22 based on the stored program. Circuit 3
Interface 38 that connects the CPU 31 with the CPU 37
, A keyboard 34, and a CRT 35.

Next, the operation of each mechanism of this embodiment will be described. First, the operation during normal operation will be described. The operation of the transfer moving mechanism at this time is determined by the drive motor 2
By one rotation, the transfer-up / down movement rod 15 and the transfer-up / down movement rod 15 are moved up and down. When the drive motor 21 is driven, the transfer vertical movement cam 9 and the transfer
The cam 10 for horizontal movement rotates, and the cam follower 13 for transfer-up and down movement and the cam follower 14 for transfer-horizontal movement swing around the points O and O 'according to both cam curves. By this swing, the transfer-vertical movement rod 15 and the transfer-horizontal movement rod 16 are moved.
Moves up and down. Transfer horizontal movement rod 16
Is converted into a horizontal movement by the action of the L-shaped guide 17. By the operation of the transfer moving mechanism as described above, the transfer 7 sequentially moves from the initial position A to the ascending position B, the ascending position C, and the ascending position D, as shown in FIG. Return to the initial position A.

Hereinafter, the detailed state at each position and the operation when moving to the next position will be described. At the initial position A of the transfer 7, the component 21 is in contact with the heat block 18, and the component 21 is heated. Further, the transfer 7 has an upper end surface located below the lower surface of the component 21, and is not in contact with the component 21. The operation of the transfer 7 from the initial position A to the ascending position B is as follows.
The rotation of the transfer-up / down movement cam 9 causes the transfer-up / down movement rod 15 to move up. By raising the rod 15, the base 2 and the base 2
The horizontal movement guide 3, the support guide 4, the slide base 5, the frame 6, and the transfer 7, which are fixed to the upper position, rise to the state of the ascending position B. At this time, the transfer 7 moves the heat block 1 during the horizontal movement (forward).
8 has risen to a height that does not interfere with it. Also, the component 21
Indicates that transfer 7
Rests on the heating surface of the heat block 18.

The operation of the transfer 7 from the raised position B to the pre-elevated position C is such that the transfer-horizontal movement rod 16 is lowered by the rotation of the transfer-horizontal movement cam 10, and the lowering operation is performed by the L-shaped guide 17. This is performed by being converted into an operation. By this forward operation, the slide base 5, the frame 6, and the transfer
7 moves forward along the horizontal movement guide 3 to be in the pre-elevation position C. At this time, the component 21 placed on the transfer 7 is horizontally moving to a position directly above the next heat block 18 with the movement of the transfer 7.

The operation of the transfer 7 from the pre-elevation position C to the pre-descent position D is performed by rotating the transfer-up / down movement cam 9 to lower the transfer-up / down movement rod 15. With the lowering of the transfer-up-and-down movement rod 15, the transfer 7 is lowered to be in the position D before the lowering. At this time, transfer-7
Is lowered to a position where it does not interfere with the component 21 during the horizontal operation (retreat). In addition, the component 21 placed on the transfer 7 is placed on the heat block 18 in front of the heat block 18 placed earlier and moves away from the transfer 7 in the process of lowering the transfer 7.

The operation from the pre-descent position D to the initial position A is as follows.
The transfer-horizontal movement cam 10 is rotated to raise the transfer-horizontal movement rod 16, and this ascending operation is converted by the L-shaped guide 17 into a retreating operation. By this retreating operation, the slide base 5, the frame 6, and the transfer 7 retreat along the horizontal movement guide 3 to be in the state of the initial position A. The transfer 7 and the transfer moving mechanism repeat the above operation according to the instruction of the control device 30 to advance the component 21 to the next step. Here, the next step in the present embodiment is a processing step of removing the electronic element of the heated component from the substrate. In the above description,
As if the transfer-up / down movement cam 9 and the transfer-horizontal movement cam 10 were described to rotate separately, in fact, they rotate integrally with the cam rotation shaft 8 and depend on the shape of each cam surface. The transfer-vertical movement rod 15 and the transfer-horizontal movement rod 16 move up and down as appropriate. Further, the position of the transfer 7 is constantly monitored by an encoder 22 provided on the cam rotation shaft 8.

Next, the operation in the case where an interlock signal is output from a device in the previous step or the above-mentioned processing step will be described. When an interlock signal is issued from another device, the control device 30 receives the interlock signal, and the control device 30
The interface 38 and the circuit 37 from the CPU 31
, A drive command is output to the transfer-up cylinder 19 and the transfer-back cylinder 20. When the transfer-up cylinder 19 and the transfer-back cylinder 20 are driven, the cam followers 13 and 14 separate from the cam surfaces of the cams 9 and 10, and the rods 15 and 16 are moved independently of the rotation of the cams 9 and 10. Moving up and down, the transfer 7 moves.

FIG. 5 shows the above interlock operation.
This will be described in detail with reference to FIG. First, the interlock operation when the transfer 7 is at the pre-descent position D will be described with reference to FIG. As shown in FIG.
When an interlock signal is issued when the transfer 7 is at the pre-descent position D, the transfer ascending cylinder 19 is driven, and the transfer and up-and-down movement cam follower 13 is separated from the cam surface of the transfer and up-and-down movement cam 9, and the transfer is performed. The vertical movement rod 15 moves up. Due to this rise, the transfer 7 becomes as shown in FIG.
As shown in (2), the state becomes the pre-elevation position C, and the component 21 separates from the surface of the heat block 18 in the same manner as the above-described transfer 7 elevating operation. Thereafter, the transfer retraction cylinder 20 is driven, the transfer horizontal movement cam follower 14 is separated from the cam surface of the transfer horizontal movement cam 10, and the transfer horizontal movement rod 16 is raised. By this rise, transfer 7
Retreats in the same manner as the above-described retreating operation in the ascending state, and is in the state of the ascending position B as shown in FIG.

Next, the interlock operation when the transfer 7 is between the initial position A and the pre-descent position D (excluding the period from the pre-descent position D to the initial position A) will be described. The interlock operation in this state is basically the same as the interlock operation when the interlock signal is issued when the transfer 7 is at the pre-descent position D, and includes the transfer ascending cylinder 19 and the transfer retreat. The cylinders 20 are driven in this order, and finally the transfer 7 is brought into the state of the ascending position B. Specifically, for example, when the interlock signal is issued while the transfer 7 is in the state from the initial position A to the ascending position B, first, the transfer ascending cylinder 19 raises the transfer 7 to the ascending position. Change to the state of B. Next, the transfer retraction cylinder 20
Is driven, but the transfer 7 is in a state before advancing (retreating state), and since the transfer horizontal movement rod 16 is at the ascending position, this rod 16 does not move, and the transfer 7 further retreats from here. Never.

When the interlock signal is issued when the transfer 7 is in the range from the raised position B to the pre-raised position C, the transfer raising cylinder 19 is driven as described above, but the transfer vertical moving rod 15 is moved. Is in the raised position, the rod 15 does not move, and the transfer 7 does not rise further from here. Thereafter, the transfer retreat cylinder 20 is driven to retreat the transfer 7, and the ascending position B
State.

As described above, when the interlock signal is issued, the transfer 7 is finally brought to the ascending position of the ascending position B because the component 21 is moved to the heat block 18.
The component 21 is prevented from being excessively heated, and when the component transport is restarted from the interlock state, it is possible to immediately start up from the initial state of the initial position A only by the lowering operation of the transfer 7. Because.

Next, when the transfer 7 is between the pre-descent position D and the initial position A, that is, the transfer 7
The interlock operation when the device performs the backward operation will be described with reference to FIG. As shown in FIG.
When the interlock signal is issued while the transfer 7 is performing the reverse operation, similarly to the interlock operation described above, first, the transfer ascending cylinder 19 is driven, and then the transfer reverse operation is performed. When the cylinder 20 is driven, the part 21
As shown in (c) and (d), the transfer 7 is lifted without being placed at the proper position. For this reason, when restarting component transport from the interlock state,
In accordance with the above-described component conveyance resuming operation, the transfer 7 performs only the lowering operation, so that the component 21 is not placed on the regular heat block 18 as shown in FIG. Since the ascent effect cannot be obtained, and various mechanisms are based on the premise that the component 21 is at the proper position, there is a risk that the component may be damaged.

Therefore, in order to avoid this danger, when the interlock signal is issued while the transfer 7 is performing the reversing operation, the driving order of the cylinders 19 and 20 is changed, and first, the transfer reversing cylinder is changed. After driving the cylinder 20, the transfer cylinder 1
9 is driven. By driving the cylinders 19 and 20 in this manner, the transfer 7 is in the state of the initial position A and then in the state of the ascending position B. Therefore, during the ascending process from the initial position A to the ascending position B, Part 21
Is placed at the proper position of the transfer 7, and the danger as described above can be avoided.

The operation of the CPU 31 when the above interlock signal is issued will be described with reference to the flowchart of FIG. First, when the CPU 31 receives the interlock signal (step 1), it acquires data from the encoder 22 monitoring the position of the transfer 7 and moves the transfer 7 from the initial position A to the pre-descent position D.
It is determined whether or not the time is up to (step 2). Then, when it is determined that the transfer 7 is between the initial position A and the pre-descent position D, first, a drive command is output to the transfer ascending cylinder 19 (step 3). Cylinder 20
, A drive command is output (step 4). When it is determined that the transfer 7 is between the pre-descent position D and the initial position A, a drive command is output to the transfer retraction cylinder 20 (step 5). A drive command is output (step 6). The above operation of the CPU 31 is performed based on a program stored in the ROM 32 or the RAM 33.

Next, a description will be given of an operation when restarting component conveyance after the state of the ascending position B is reached by the interlock operation. When resuming the component conveyance, first, the drive motor 23 is driven to set the positions of the cams 9 and 10 to a position where the transfer 7 can maintain the initial position A, and then the cylinders 19 and 20 are lowered to transfer the transfer 7. To the initial position A. At this time, the cam followers 13 and 14 come into contact with the cams 9 and 10 again by the lowering of the cylinders 19 and 20. When the transfer 7 is lowered to the state of the initial position A, the parts 21
And the heat block 18 come into contact with each other and start heating again.

The heating time at this time depends on the type of the component 21 and the interlock occurrence state.
In the state of the initial position A, after the temperature of the component 21 reaches the target temperature, the transfer 7 moves to the state of the ascending position B. Specifically, for example, when the conveyance is restarted from the heat block 18 closest to the component processing mechanism, the time t _{1 at} which the component 21 reaches the target temperature Tp shown in FIG. Is stored in in this way,
By setting the heating time at the time of resuming the component conveyance to an appropriate value, the temperature required for component processing can be reliably ensured, and the heating time for each abnormal stop can be made uniform.

In this embodiment, the cylinders 19, 20
Can be manually driven, so that the cylinders 19 and 20 are manually driven while the operation is being prepared, and the transfer 7 is set to the ascending position B or the ascending position C. At this time, the parts are supplied to the transfer 7 Then, by restarting the normal component conveyance, it is possible to process a part having an intermediate shape that cannot be processed normally.

[0036] As described above, according to this embodiment, as shown in FIG. 8 (a), even in the heating required a temperature profile showing the heating transient, when the abnormal stop occurs, excess heat exceeds the processing time t ₀ It is possible to avoid thermal damage to the component 21 caused by this. Further, as shown in FIG. 8 (b), even in the heating that requires a temperature profile indicating thermal saturation, the thermal saturation time (t ₀ −t ₁ ) at the time of occurrence of an abnormality
Can be shortened, and a thermal adverse effect due to a difference in thermal history of components can be prevented. In addition, when restarting component transport from the interlock state, the time from when the component contacts the heat block surface to when transport is restarted, that is, the heating time is set to the time when the component reaches the target temperature. Even if an interlock occurs, the target temperature can be ensured, and stable processing can always be performed.

In this embodiment, the processing step is a step of removing the electronic element soldered to the substrate from the substrate, but may be a step of soldering the electronic element to the substrate. Further, in this embodiment, in order to reduce the device manufacturing cost and reduce the size of the device, the mechanism for performing the operation during the normal operation and the mechanism for performing the interlock operation are basically shared. However, these mechanisms may be made independent so as to be able to cope with a failure of the mechanism that performs the operation during the steady operation.

[0038]

According to the present invention, even during an abnormal stop, the parts being transported are not heated excessively, and the reliability of the parts can be maintained.

[Brief description of the drawings]

FIG. 1 is an overall configuration diagram of a heating and conveying device according to an embodiment of the present invention.

FIG. 2 is a view taken in the direction of the arrow II in FIG.

FIG. 3 is a view taken in the direction of the arrow III in FIG. 1;

FIG. 4 is an explanatory diagram for explaining an operation at the time of a steady operation of the transport device of one embodiment according to the present invention.

FIG. 5 is an explanatory diagram for explaining an interlock operation of the transport device according to the embodiment of the present invention.

FIG. 6 is an explanatory diagram for explaining inadequacy of an interlock operation.

FIG. 7 is a flowchart illustrating an operation when the CPU of the transport device according to the embodiment of the present invention receives an interlock signal.

FIG. 8 is a graph showing a profile of a heating temperature of a component.

FIG. 9 is a sectional view of a conventional heating and conveying device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Stand, 2 ... Base, 3 ... Guide for horizontal movement, 4 ...
Support guide, 5 ... slide base, 6 ... frame, 7 ...
Transfer, 8: cam rotation shaft, 9: transfer vertical movement cam, 10: transfer horizontal movement cam, 1
DESCRIPTION OF SYMBOLS 1 ... Spring, 12 ... Spring, 13 ... Transfer vertical movement cam follower, 14 ... Transfer horizontal movement cam follower, 15 ... Transfer vertical movement rod, 16 ... Transfer horizontal movement rod, 17 ... L-shaped guide, 18
... Heat block, 19 ... Transfer ascending cylinder, 20 ... Transfer retract cylinder, 21 ...
Machined parts, 22 ... Encoder, 23 ... Drive motor, 30
... Control device, 31 ... CPU, 32 ... ROM, 33 ... RA
M.

Continuation of the front page (58) Field surveyed (Int. Cl. ⁶ , DB name) B65G 25/00-25/12 B65G 43/02 H05K 3/32-3/34 B23K 1/008

Claims (1)

(57) [Claims] 1. A mounting table on which a predetermined processing component is mounted; an initial position lower than the processing component heated in contact with a heating block; An ascending position at which the workpiece in contact with the heat block can be lifted, a ascending position advanced by a certain distance from the ascending position, and a descent from the ascending position to lower the machined part to a target location A mounting table moving mechanism that can be moved to a pre-descent position that can be moved; and a mounting table moving mechanism, when the stationary operation is performed, the initial position, the ascending position, the ascending position, and the ascending position. Again, instructing the mounting table to move repeatedly in the order of the initial position, transporting the processed component, and receiving an abnormal stop command, instructing the mounting table to move to the ascending position. Conveying apparatus characterized by and a control means.