JPH05125535A - Vapor deposition frame for forming electrode of piezoelectric substance - Google Patents

Abstract

PURPOSE:To facilitate the operation to house crystal pieces in vapor deposition frames and to hold many piezoelectric pieces with uniform force so as to form vapor deposited films with exact positional accuracy and to obtain good vibration characteristics. CONSTITUTION:The piezoelectric pieces 12 are disposed respectively in plural holding holes 13 corresponding to the outside shapes of the piezoelectric pieces 12 bored in a middle frame 11 and 1st and 2nd masks 14, 15 respectively having mask holes 16 are installed along both side plate surfaces of this middle frame 11. Cut grooves 17 to permit the displacement in the plate thickness direction are provided on the outer peripheries of the mask holes 16 of the one mask 15. A retaining frame 18 having tongue pieces 19 to elastically press the outer peripheral parts of the mask holes 16 is installed along the middle frame. Power frames 20, 21 which position the middle frame 11, the respective masks 14, 15 and the retaining frame 18 by means of dowels and tighten these frames and masks integrally in the plate thickness direction are provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vapor deposition frame for forming an electrode of a piezoelectric body used when forming an excitation electrode on the piezoelectric body.

[0002]

2. Description of the Related Art Conventionally, there is known a piezoelectric resonator in which a piezoelectric body is cut at a predetermined angle to be formed into a plate shape, and an electrode made of a metal thin film is formed on the plate surface by vacuum deposition or the like to excite piezoelectric vibration. ing. Such a piezoelectric resonator is widely used as a reference for time, frequency, etc. in many fields of electronic circuits. In particular, quartz resonators using quartz as a piezoelectric body are manufactured and used in large quantities because of their high performance and low cost due to the excellent characteristics of quartz as a piezoelectric body and the progress of manufacturing technology. However, in the process of manufacturing a crystal resonator, when forming an excitation electrode on a crystal piece, for example, a metal such as aluminum, silver, or gold is heated in a vacuum atmosphere to generate metal vapor, and the crystal piece is formed in front of this. Are arranged to form an electrode made of a metal thin film by so-called vacuum deposition.
When the electrodes are formed by such vacuum vapor deposition, a plurality of, for example, several tens of crystal pieces are sandwiched between vapor deposition frames for vapor deposition in order to improve productivity. FIG. 2 is an assembly perspective view showing an example of such a vapor deposition frame, which is composed of an outer frame 1, a middle frame 2 and an outer frame 3. Then, a holding hole 2a corresponding to the outer shape of the crystal piece on which the electrode is to be formed is formed in the middle frame 2,
The crystal piece 4 is arranged here. In addition, in both outer frames 1 and 3,
Mask holes 1a, 3a corresponding to the shapes of the excitation electrodes to be formed on both side plates of the crystal piece 4 are formed. Then, the crystal piece 4 is positioned in the holding hole 2a of the middle frame 2, both outer frames 1 and 3 are arranged on both sides thereof, and screw holes 1b are provided so as to penetrate both outer frames 1 and 3 and the middle frame 2, Screw 5 on 3b, 2b
Are pierced and tightened to be integrated, and the crystal piece 4 is held at a predetermined position.

However, when the quartz pieces 4 are sandwiched between such vapor deposition frames, a tightening force is uniformly applied to each quartz piece 4, and the outer frames 1 and 3 are brought into close contact with the plate surface of the quartz piece 4. There is a need. For this reason, a large number of screws 5 are provided at relatively narrow intervals on the vapor deposition frame and tightened in the thickness direction to integrate them. For example, 60 actually used in the manufacturing process
There is also a vapor deposition frame for holding the individual crystal pieces 4, which is tightened using 15 screws 5. For this reason, the work of putting the crystal piece 4 into the vapor deposition frame and assembling it is extremely troublesome, and it is necessary to prevent unevenness in the tightening force of the large number of screws 5. there were. If the tightening force of the screw 5 is uneven when the vapor deposition frame is assembled, the crystal piece 4 sandwiched therebetween cannot be reliably held, so that the crystal piece 4 moves within the through hole 2a of the middle frame 2. For this reason, for example, when a plurality of electrode films are formed in a layered manner, the position where the electrode films are formed is deviated, and the vibration characteristics are impaired. There were things.

[0004]

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and the work of assembling a crystal piece in a vapor deposition frame can be easily performed, and moreover, it is uniform for a large number of piezoelectric pieces. It is an object of the present invention to provide a vapor deposition frame for forming an electrode of a piezoelectric body, which can be held by various forces, whereby a vapor deposition film can be formed with accurate positional accuracy, and good vibration characteristics can be obtained. To do.

[0005]

According to the present invention, piezoelectric pieces are arranged in a plurality of holding holes corresponding to the outer shape of a piezoelectric piece formed in an inner frame, and mask holes are respectively formed on both side plate surfaces of the inner frame. First and second masks having the above are additionally provided, and a kerf for allowing displacement in the plate thickness direction is provided on the outer periphery of the mask hole of at least one of the masks, and the outer peripheral portion of the mask hole is elastic in the middle frame direction. It is characterized in that a holding frame having a tongue piece that is pressed against is attached, a middle frame, each mask and the holding plate are positioned by dowels, and a force frame for tightening in the plate thickness direction is provided.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the perspective assembly view shown in FIG. Reference numeral 11 in the drawing denotes an inner frame made of a thin metal plate, and a holding hole 1 corresponding to the outer shape of the piezoelectric piece 12 on which an electrode is to be formed by etching or the like.
3 is drilled. 14 and 15 are the first and
The second mask is attached to both side plate surfaces of the middle frame 11. The first and second masks 14 and 15 are also the inner frame 1
The same metal thin plate as that of No. 1 is provided, and mask holes 16 corresponding to the electrode shapes to be formed on the piezoelectric pieces 12 are formed corresponding to the holding holes 13 formed in the middle frame 11. The kerf 1 is formed on the outer periphery of each mask hole 16 of the second mask 15.
7 is provided to allow displacement in the plate thickness direction. The holding frame 18 is provided outside the second mask 15.
Is attached. The second mask 15 is attached to the holding frame 18.
A tongue piece 19 that elastically presses the outer peripheral portion of each mask hole 16 toward the inner frame 11 is formed. Then, outside the first mask 14 and the holding frame 18, the force frames 20 and 2 are provided.
1 is provided. Dowel 2 is provided on one of the force frames 20 and 21.
2 is provided so as to penetrate through the predetermined positions of the inner frame 11, the masks 14 and 15 and the holding frame 18 in the plate thickness direction to perform positioning, and by two screws 23 (one not shown). It is designed to be tightened together in the plate thickness direction. The opposing surfaces of the force frames may be curved outward so that the pressing force of the force frames 20 and 21 acts evenly.

With such a structure, the force frames 20, 21
Is tightened with two screws 23, so that the vapor deposition frame is not distorted due to variations in the tightening force of the screws 23. Therefore, the tightening force can be uniformly applied to each piezoelectric piece 12, and the tongue piece 19 of the holding frame 18 elastically presses the outer peripheral portion of each mask hole 16 of the second mask 15 toward the middle frame 11. As a result, each piezoelectric piece 12 can be securely held at a predetermined position.
However, since only two screws 23 for holding the force frames 20 and 21 are required, the workability of sandwiching the piezoelectric piece 12 is good, and no special skill is required. Therefore, productivity can be improved, a high-quality metal thin film can be efficiently formed, and a high-performance crystal resonator can be provided at low cost. It should be noted that the present invention is not limited to the above-described embodiment, and for example, in the above-mentioned embodiment, an example using a crystal oscillator using a round plate-shaped crystal piece has been described, but an electrode is formed on a strip-shaped crystal piece. It can also be applied to the case. Further, in the above embodiment, the holding frame 18 is provided outside the second mask.
However, the first and second masks 14 and 1 are provided.
The restraining frames 18 may be provided on the outer sides of the respective parts 5. In this case, it is desirable to form a kerf on the outer peripheral portion of the mask hole of the first mask 14. Further, in the above embodiment, the middle frame 11, the masks 14 and 15, and the holding frame 18 are integrally clamped by the force frames 20 and 21 and tightened by using two screws, but the invention is not limited to this. Without doing
For example, clips may be used for tightening.

[0008]

As described above in detail, according to the present invention, the workability when assembling the piezoelectric pieces in the vapor deposition frame is good, and it is possible to hold a large number of piezoelectric pieces with a uniform force. It is possible to provide a vapor deposition frame for forming electrodes of a piezoelectric body, which can form a vapor deposition film with positional accuracy.

[0009]

[Brief description of drawings]

FIG. 1 is an assembled perspective view showing an example of a vapor deposition frame of the present invention.

FIG. 2 is an assembled perspective view showing an example of a conventional vapor deposition frame.

[Explanation of symbols]

 11 Middle Frame 12 Crystal Piece 13 Through Hole 14, 15 Mask 16 Mask Hole 17 Cut Groove 18 Holding Frame 19 Tongue Piece 20, 21 Force Frame 23 Screw

Claims (1)

[Claims] 1. A plurality of holding holes corresponding to the outer shape of a piezoelectric piece.
The inner frame with the piezoelectric pieces respectively disposed on the inner frame and the inner frames attached to both side plate surfaces of the inner frame.
Corresponds to the electrode shape to be formed on the piezoelectric piece corresponding to the holding hole
First and second masks having a mask hole formed therein, and the mask formed on the outer periphery of the mask hole of at least one of the masks.
A kerf that allows displacement of the mask hole part in the plate thickness direction
With a kerf on the outer periphery of the mask hole.
Elastically presses the outer peripheral portion of each mask hole toward the middle frame.
Inside the press frame with the tongue and the mask and press frame
Dowels that penetrate the frame, each mask frame, and the suppression plate in the plate thickness direction
Positioning and tightening together in the plate thickness direction
A vapor deposition for electrode formation of a piezoelectric body, characterized by comprising:
frame.