JPH0596054U - Vapor deposition frame for forming electrodes of piezoelectric material - Google Patents

Abstract

(57) [Summary] [Purpose] It is possible to easily place a crystal piece in a vapor deposition frame and to take out the crystal piece from the vapor deposition frame, without causing damage to the crystal piece during such work. Improve productivity. [Structure] A plurality of holding holes for accommodating the piezoelectric body are formed in the plate-shaped middle frame, and mask holes corresponding to the shapes of the electrodes to be formed on the piezoelectric body are formed on both side plate surfaces of the middle frame. In a vapor deposition frame additionally provided with an outer frame, a holding hole 15 for accommodating a piezoelectric piece and a cavity 16 formed on one side in communication with the holding hole
A second inner frame 13 and a second projecting piece 18 attached to the first inner frame so as to be movable back and forth and projecting in the space to press and hold the piezoelectric piece 14 in the holding hole. It is characterized by including the middle frame 17.

Description

[Detailed description of the device]

[0001]

[Industrial application]

 The present invention relates to a vapor deposition frame for forming an electrode of a piezoelectric body used when forming an electrode on the piezoelectric body.

[0002]

[Prior Art]

 BACKGROUND ART Conventionally, there is known a piezoelectric resonator in which a piezoelectric body is cut at a predetermined angle to be formed into a plate shape, and an electrode made of a metal thin film is formed on the plate surface by vacuum vapor deposition to excite piezoelectric vibration. Such a piezoelectric resonator is widely used as a reference for frequency, time, etc. in many fields of electronic circuits. In particular, quartz resonators that use quartz as the piezoelectric body are manufactured and used in large quantities because of their high performance and low cost due to the excellent characteristics of the piezoelectric body of quartz and the progress of manufacturing technology. However, in the process of manufacturing a crystal unit, when forming an excitation electrode on a crystal element, for example, in a vacuum atmosphere, a metal such as aluminum, silver, or gold is heated to generate metal vapor, and the crystal element is formed in front of this. Are arranged to form an electrode made of a metal thin film by so-called vacuum deposition.

When forming electrodes by such vacuum evaporation, in order to improve productivity, a plurality of, for example, several tens of crystal pieces are sandwiched between vapor deposition frames to perform vapor deposition. FIG. 2 is an assembled perspective view showing an example of such a vapor deposition frame, which comprises an outer frame 1, a middle frame 2 and an outer frame 3. Then, a holding hole 2a corresponding to the outer shape of the crystal piece on which the electrode is to be formed is formed in the middle frame 2, and the crystal piece 4 is arranged therein. Further, mask holes 1a and 3a corresponding to the shapes of the excitation electrodes to be formed on both side plates of the crystal blank 4 are formed in both outer frames 1 and 3, respectively. A crystal piece 4 is arranged in the holding hole 2a of the middle frame 2, both outer frames 1 and 3 are arranged on both sides thereof, and screw holes are provided so as to penetrate both outer frames 1 and 3 and the middle frame 2. Screws 5 are attached to 1b, 3b and 2b and tightened to be integrated with each other to hold the crystal piece 4 at a predetermined position. The vapor deposition frame holding the crystal piece 4 is made to face the vapor deposition source in a vacuum atmosphere, for example, so that an electrode made of a thin film of vapor deposition metal is formed in a predetermined region on the plate surface of the crystal piece 4.

Further, in such a crystal unit, the excitation electrode is formed so as to face the central portion of the front and back plate surfaces, and is led out to the peripheral portions of the plate surfaces, and the lead-out ends are held by the holding member. Then, it is held mechanically and electrically led out. However, in the crystal unit, the electrical characteristics change with respect to the crystal axis depending on the direction of the lead electrode. For this reason, for example, in the case of a round plate-shaped crystal piece, the edge of the predetermined crystal axis direction is linearly cut, that is, so-called chord cut is performed to determine the crystal axis direction. Therefore, when placing the crystal pieces in the vapor deposition frame, not only the position but also the direction of the crystal axis must be considered, and the work of placing a large number of crystal pieces in the vapor deposition frame was extremely troublesome and time-consuming. In addition, when the crystal piece was taken out from the vapor deposition frame after forming the electrode by vapor deposition, there was a problem that the corner portion of the crystal piece, particularly the corner of the chord cut, was caught in the holding hole, and the crystal piece was easily cracked or chipped. .

[0005]

[Problems to be solved by the device]

 The present invention has been made in view of the above circumstances, and can easily put a crystal piece in a vapor deposition frame and take out the crystal piece from the vapor deposition frame, and the crystal piece is not damaged during such work. It is an object of the present invention to provide a vapor deposition frame for forming electrodes of a piezoelectric body, which can improve productivity without causing the above.

[0006]

[Means for Solving the Problems]

 According to the present invention, a plurality of holding holes for accommodating a piezoelectric body are formed in a plate-shaped middle frame, and mask holes corresponding to the shapes of electrodes to be formed on the piezoelectric body are formed on both side plate surfaces of the middle frame. In a vapor deposition frame with an attached outer frame, a holding hole for accommodating the piezoelectric piece, a first middle frame communicating with the holding hole and forming a void on one side, and a first middle frame And a second middle frame for pressing and holding the piezoelectric piece in the holding hole with a projecting piece that is provided so as to be able to move forward and backward and that projects in the space.

[0007]

【Example】

 Hereinafter, an embodiment of the present invention will be described with reference to the perspective view of the main part shown in FIG. 1 and the sectional view shown in FIG. The details will be described. In the figure, numeral 11 is a first outer frame made of a metal plate such as stainless steel, and a large number of mask holes 12 corresponding to the shape of the electrodes to be formed on the crystal piece are formed on the plate surface. Reference numeral 13 denotes a first middle frame, which is also made of a metal plate such as stainless steel and is provided on the plate surface of the outer frame 11 on the upper side in the drawing with a predetermined gap therebetween. The middle frame 13 is provided with a large number of holding holes 15 for accommodating the crystal pieces 14, and a cavity 16 is formed on one side of each holding hole 15 so as to communicate with the holding holes 15. Reference numeral 17 denotes a second middle frame, which is also made of a metal thin plate such as stainless steel and is disposed between the first middle frame 13 and the outer frame 11 so as to be movable back and forth. The second middle frame 17 is provided with a protruding piece 18 that protrudes into the space 16 of the first middle frame 13. The front surface of the protruding piece 18 facing the holding hole 15 is a flat surface parallel to the tangential direction of the holding hole 15. However, the first middle frame 13 is provided with respect to the outer frame 11 with a gap such that a slight margin is added to the thickness of the second middle frame 17 described above through a spacer or the like. . The second middle frame 17 is arranged in this gap so as to be movable back and forth. Therefore, the second middle frame 17 is formed with a long hole 18 in the forward / backward direction at a position corresponding to the spacer to allow the forward / backward movement. A second outer frame 19 is provided on the upper surface of the first middle frame 13 in the figure, and a large number of mask holes 20 corresponding to the shapes of the electrodes to be formed on the crystal piece are also formed in the second outer frame 19. It is set up. When putting the crystal pieces 14 into the respective holding holes 15, the second middle frame 17 is pulled out to widen the distance between the holding holes 15 and the projecting pieces 18, and the crystal pieces 14 are put into the respective holding holes 15. In this state, for example, by tilting and vibrating the frame, the chord-cut side of each crystal piece 14 is brought into contact with the front surface of the protruding piece 18, and the crystal axes of all the crystal pieces 14 are aligned and aligned. You can Then, the second middle frame 17 is pushed in to move each crystal piece 17 into the holding hole 15, and in this state, the second outer frame 19 provided on the upper surface of the first middle frame 13 is integrally tightened with the screw 21. I am trying to attach it.

In this way, when the crystal piece 14 is framed, the projecting piece 18 retracts and the holding hole 15 expands to the void 16 communicating with this holding hole 15, so that the crystal piece 14 can be easily inserted. You can invest. Then, after the crystal pieces 14 are aligned, the protruding piece 18 can be moved forward to surely hold each crystal piece 14 at the predetermined position of the holding hole 15. After the evaporation of the electrodes is completed, the crystal pieces 14 can be released and easily taken out by retracting the projecting piece 18 again, and at this time, no cracks or chips are generated. The present invention is not limited to the above-described embodiment. For example, the second middle frame 17 may be elastically advanced so as to hold the crystal piece 14 in the holding hole 15, for example, be biased by a spring or the like. You can Further, in the above-described embodiment, the crystal pieces 14 put into the holding holes 15 are explained by vibrating and aligning them, but for example, the chord-cut sides of each crystal piece 14 should face the roughly protruding piece 18. For example, by advancing the protruding piece 18, it can be easily aligned in the predetermined crystal axis direction.

[0009]

[Effect of the device]

 As described above in detail, according to the present invention, it is possible to easily put the crystal piece in the vapor deposition frame and to put the crystal piece out of the vapor deposition frame, and at the same time, the crystal piece is not damaged. It is possible to provide a vapor deposition frame for forming electrodes of a piezoelectric body.

[0010]

[Brief description of drawings]

FIG. 1 is a perspective view showing a configuration of a main part of an embodiment of the present invention.

FIG. 2 is a sectional view of a vapor deposition frame of the embodiment shown in FIG.

FIG. 3 is an assembled perspective view showing an example of a conventional vapor deposition frame.

[Explanation of symbols]

 11, 19 Outer frame 13 First middle frame 14 Piezoelectric body 15 Holding hole 16 Void 17 Second middle frame 18 Projecting piece

Claims (1)

[Scope of utility model registration request] 1. An outer frame in which a mask hole corresponding to the shape of an electrode to be formed on the piezoelectric body is formed on both side surfaces of a plate-shaped middle frame having a plurality of holding holes for accommodating the piezoelectric body. In the attached vapor deposition frame, a holding hole for accommodating the piezoelectric piece, a first middle frame communicating with the holding hole and forming a void on one side, and a movable back and forth on one side of the first middle frame A vapor deposition frame for forming an electrode of a piezoelectric body, comprising: a second middle frame that presses and holds the piezoelectric piece in the holding hole with a protruding piece that is provided and protrudes in the space.