JPS63182906A - Thin piezoelectric resonator and its manufacture - Google Patents
Thin piezoelectric resonator and its manufactureInfo
- Publication number
- JPS63182906A JPS63182906A JP1492087A JP1492087A JPS63182906A JP S63182906 A JPS63182906 A JP S63182906A JP 1492087 A JP1492087 A JP 1492087A JP 1492087 A JP1492087 A JP 1492087A JP S63182906 A JPS63182906 A JP S63182906A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- piezoelectric resonator
- piezoelectric ceramic
- thin piezoelectric
- vibrating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 230000010287 polarization Effects 0.000 claims abstract description 11
- 239000000919 ceramic Substances 0.000 claims abstract description 8
- 229910010293 ceramic material Inorganic materials 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims abstract description 4
- 238000005520 cutting process Methods 0.000 claims description 2
- 239000012528 membrane Substances 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
この発明はICカード等に使用することを目的とする薄
型圧電共振子と、その製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a thin piezoelectric resonator intended for use in IC cards, etc., and a method for manufacturing the same.
〈従来の技術〉
ICカードにおいては、基準発振源になる圧電共振子が
必要であるが、これには例えば厚みが0.5mのような
極めて薄い圧電共振子が必要である。又、周波数は約2
00K t−1z程度のものが必要である。<Prior Art> An IC card requires a piezoelectric resonator to serve as a reference oscillation source, but this requires an extremely thin piezoelectric resonator with a thickness of, for example, 0.5 m. Also, the frequency is about 2
Something of the order of 00K t-1z is required.
〈発明が解決しようとする問題点〉
上記のような圧電共振子として角板、円板状等の広がり
振動を利用したものがあるが、この従来のものは0.5
順のような薄いものを得ることが出来ないという問題が
あった。<Problems to be Solved by the Invention> There are piezoelectric resonators such as those described above that utilize spreading vibration in the shape of a square plate, a disk, etc., but these conventional ones
There was a problem in that it was not possible to obtain something as thin as Jun.
〈問題点を解決するための手段〉
この発明は、上記のような従来の圧電共振子の問題点を
解決するためになされたもので、極薄の圧電磁器素子板
の両側の端面に振動電極を設けた薄型圧電共振子及びそ
の製造方法を提供することを目的とする。<Means for Solving the Problems> The present invention was made in order to solve the problems of the conventional piezoelectric resonators as described above. An object of the present invention is to provide a thin piezoelectric resonator provided with a thin piezoelectric resonator and a method for manufacturing the same.
〈実施例〉
第1図はこの発明の薄型圧電共振子の実施例を示すもの
で、1は極薄の圧電磁器素子板であって、その両側の端
面に振動電極2.3を設けである。<Example> Fig. 1 shows an example of the thin piezoelectric resonator of the present invention, in which 1 is an extremely thin piezoelectric ceramic element plate, and vibrating electrodes 2.3 are provided on both end faces of the plate. .
この薄型圧電共振子4は、第2図、第3図のように、プ
リント基板5の上に若干の隙間を有する状態に半田6に
より固定するもので、7.8はプリント基板5上に設(
ブた回路電極である。As shown in FIGS. 2 and 3, this thin piezoelectric resonator 4 is fixed onto a printed circuit board 5 with a slight gap using solder 6, and 7.8 is mounted on the printed circuit board 5. (
It is a buta circuit electrode.
この場合プリント基板5の回路電極7.8に振!II電
極2.3の中点を第3図のように半田付けすることによ
って、この両振動電極2.3に例えば200K HZの
高周波電圧を印加すると、第3図に鎖線で示すように面
スベリの振動モードとなる。In this case, shake the circuit electrodes 7.8 of the printed circuit board 5! By soldering the middle point of the II electrode 2.3 as shown in Figure 3 and applying a high frequency voltage of, for example, 200 KHz to both vibrating electrodes 2.3, surface slippage will occur as shown by the chain line in Figure 3. vibration mode.
第4図ないし第6図はこの発明の製造方法の実施例を示
づもので、第4図の10は圧電磁器材料で形成した一定
厚みの方形のブロックであって、その両面に分極用の電
極11.12を形成する。4 to 6 show an embodiment of the manufacturing method of the present invention, and numeral 10 in FIG. 4 is a rectangular block of constant thickness made of piezoelectric ceramic material. Form electrodes 11.12.
その後、この両電極11.12に直流高電圧をかけて分
極づる。Thereafter, a high DC voltage is applied to both electrodes 11 and 12 to polarize them.
上記のように分極処理を施しlζブロック10を完成品
圧電磁器素子板1の振!lJ電極2.3間辺長I11と
一致する間隔の切目13に沿ってカットして第5図のよ
うな棒状体14とする。After polarization treatment is performed as described above, the lζ block 10 is turned into a completed piezoelectric ceramic element plate 1. A rod-shaped body 14 as shown in FIG. 5 is obtained by cutting along the cuts 13 at intervals corresponding to the side length I11 between the IJ electrodes 2.3.
上記のような工程にJ:って得られた棒状体14のまだ
電極を設けていない面に、後に残す電極膜15.16を
形成し、電極11.12は除去する。Electrode films 15 and 16 to be left behind are formed on the surface of the rod-shaped body 14 obtained by performing the above steps on which no electrodes have been provided, and the electrodes 11 and 12 are removed.
その後、第6図のように、横断面方向の切目17に沿っ
て、極り簿りカットするととともに完成品圧電磁器素子
板1の振io電極2.3面に沿う方向の辺長1t(i!
:112)と一致する間隔のa断面方向の切目18に沿
ってカットすると、膜電極膜15.16が、振!ll電
極2.3となって第1図や第6図の左方に示すような薄
型圧電共振子4が多数得られるのである。Thereafter, as shown in FIG. !
:112), the membrane electrode films 15 and 16 are cut along the cuts 18 in the a cross-sectional direction with the interval corresponding to ! 11 electrodes 2.3, and a large number of thin piezoelectric resonators 4 as shown on the left side of FIGS. 1 and 6 are obtained.
〈発明の効果〉
この発明の薄型圧電共振子は上記のように、極薄の圧電
磁器素子板の両側の端面に振動電極を設けるものである
から、0.5iIn以下という極めて薄いにも拘らず、
この薄型圧電共振子の両側の細い振動電極の中央部分に
高周波電圧を印加することにより面スベリ振動モードの
振動が得られる。<Effects of the Invention> As described above, the thin piezoelectric resonator of the present invention has vibrating electrodes on both end faces of an ultra-thin piezoelectric ceramic element plate. ,
By applying a high frequency voltage to the central portion of thin vibrating electrodes on both sides of this thin piezoelectric resonator, vibration in the plane sliding vibration mode can be obtained.
又、この発明の製造方法は、圧電磁器材料により形成し
た一定厚みの方形ブロックの両面に分極用電極を形成す
るものであるから分極処理が容易且つ能率よく行なえる
。Further, in the manufacturing method of the present invention, since polarization electrodes are formed on both sides of a rectangular block of constant thickness formed from a piezoelectric ceramic material, polarization processing can be performed easily and efficiently.
更に、このように分極処理を施したブロックを、分極電
極面と交差する方向に切断面が有するよう所定の間隔に
て平行にカットして角型断面の棒状体を形成し、このカ
ットした棒状体のまだ電極を設けていない広い両側面に
振vJ電極膜を形成するので、振動電極膜の形成が容易
であり、この棒状体を更に縦断面・横断面方向に所定の
寸法でカットしていくものであるから、両側縁に振動電
極を有する極く薄い薄型圧電共振子を容易に製造するこ
とができる等の効果がある。Furthermore, the block that has been polarized in this way is cut in parallel at predetermined intervals so that the cut surface is in the direction intersecting the polarized electrode surface to form a rod-shaped body with a square cross section. Since the vibrating VJ electrode membrane is formed on both wide sides of the body where electrodes have not yet been provided, it is easy to form the vibrating electrode membrane. Since the piezoelectric resonator has many advantages, it is possible to easily manufacture an extremely thin piezoelectric resonator having vibrating electrodes on both side edges.
第1図はこの発明の薄型圧電共振子の実施例を示す斜視
図、第2図はこの発明の薄型圧電共振子のプリント基板
への取付は状態を示す411!Ii側面図、第3図は同
上の平面図、第4図ないし第6図は製造工程を示す斜視
図である。
1・・・圧電磁器素子板 2.3・・・振動1慟
4・・・薄型圧電共振子 11.12・・・分極
用電極1403.棒状体 15.16・
・・電極膜出願人代理人 弁理士 和 1)昭第1
rlA
第2図
第3図
第4図FIG. 1 is a perspective view showing an embodiment of the thin piezoelectric resonator of the present invention, and FIG. 2 is a perspective view showing how the thin piezoelectric resonator of the present invention is mounted on a printed circuit board. Ii side view, FIG. 3 is a plan view of the same as above, and FIGS. 4 to 6 are perspective views showing the manufacturing process. 1... Piezoelectric ceramic element plate 2.3... Vibration 1 4... Thin piezoelectric resonator 11.12... Polarization electrode 1403. Rod-shaped body 15.16・
...Electrode membrane applicant patent attorney Kazu 1) Showai 1
rlA Figure 2 Figure 3 Figure 4
Claims (2)
設けたことを特徴とする薄型圧電共振子。(1) A thin piezoelectric resonator characterized in that vibrating electrodes are provided on both end faces of an ultra-thin piezoelectric ceramic element plate.
ックの両面に分極用電極を形成して直流高電圧を印加し
て分極処理を施し、次に該ブロックを分極用電極面と交
差する方向に切断面を有するよう所定の間隔にて平行に
カットして角型断面でその両側面に分極用電極を有する
棒状体を形成し、このカットした棒状体の分極用電極を
形成してない面に振動電極膜を形成したものを更に縦断
面・横断面方向に所定の寸法でカットして両側の端面に
振動電極を設けた薄型圧電共振子を得ることを特徴とす
る薄型圧電共振子の製造方法。(2) Polarizing electrodes are formed on both sides of a rectangular block of constant thickness made of piezoelectric ceramic material, polarization is performed by applying a high DC voltage, and then the block is moved in a direction that intersects with the polarizing electrode surface. A rod-shaped body with a rectangular cross-section and polarization electrodes on both sides is formed by cutting parallel to each other at predetermined intervals so as to have cut surfaces, and on the side of the cut rod-shaped body on which the polarization electrodes are not formed. A method for manufacturing a thin piezoelectric resonator, characterized in that a thin piezoelectric resonator on which a vibrating electrode film is formed is further cut into predetermined dimensions in longitudinal and cross-sectional directions to obtain a thin piezoelectric resonator having vibrating electrodes on both end faces. .
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1492087A JPS63182906A (en) | 1987-01-23 | 1987-01-23 | Thin piezoelectric resonator and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1492087A JPS63182906A (en) | 1987-01-23 | 1987-01-23 | Thin piezoelectric resonator and its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63182906A true JPS63182906A (en) | 1988-07-28 |
Family
ID=11874398
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1492087A Pending JPS63182906A (en) | 1987-01-23 | 1987-01-23 | Thin piezoelectric resonator and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63182906A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05243884A (en) * | 1992-02-27 | 1993-09-21 | Murata Mfg Co Ltd | Polarizing method for piezoelectric body |
-
1987
- 1987-01-23 JP JP1492087A patent/JPS63182906A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05243884A (en) * | 1992-02-27 | 1993-09-21 | Murata Mfg Co Ltd | Polarizing method for piezoelectric body |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH03151705A (en) | Piezoelectric vibration element | |
JPS63182906A (en) | Thin piezoelectric resonator and its manufacture | |
JP3478227B2 (en) | Polarization method of piezoelectric body | |
JPS63182904A (en) | Energy confinement type piezoelectric vibrator component | |
JPH0490610A (en) | Frequency adjusting method for combination piezoelectric porcelain resonators | |
JP3077521B2 (en) | Electrode formation method for electronic device | |
JP2910095B2 (en) | Piezoelectric element and method of manufacturing piezoelectric element | |
JPS6360617A (en) | Manufacture of piezoelectric ceramic resonator | |
JPH05226962A (en) | Oscillator | |
JP2915714B2 (en) | Manufacturing method of piezoelectric ceramic | |
JPH0637567A (en) | Electrode forming method for thick system crystal resonator | |
JPS6392114A (en) | Nanufacture of thickness-shear vibration composite type ceramic filter | |
JP2547980B2 (en) | Ultrasonic transducer and method of manufacturing the same | |
JPH10215012A (en) | Polarization method for sheetlike piezoelectric ceramic | |
JPS6367911A (en) | Piezo-resonator | |
JPS6057711A (en) | Manufacture of longitudinal vibration transducer | |
JPS6218105A (en) | Piezoelectric resonator | |
JPH03212981A (en) | Method for polarization of piezoelectric substrate | |
JPS6148299A (en) | Manufacture of ultrasonic probe | |
JPH04273186A (en) | Polarization method of block-like piezoelectric | |
JPS5852366B2 (en) | Havasu Berria Tsuden Shindoushi | |
JPS6062718A (en) | Piezoelectric element | |
JP3389277B2 (en) | Frequency adjustment method for piezoelectric resonator | |
JPS62271512A (en) | Manufacture of composite longitudinal vibrator | |
JPH05160463A (en) | Method of polarizing piezoelectric plate |