JPH05226962A - Oscillator - Google Patents
OscillatorInfo
- Publication number
- JPH05226962A JPH05226962A JP2762592A JP2762592A JPH05226962A JP H05226962 A JPH05226962 A JP H05226962A JP 2762592 A JP2762592 A JP 2762592A JP 2762592 A JP2762592 A JP 2762592A JP H05226962 A JPH05226962 A JP H05226962A
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- ceramic substrate
- thickness
- oscillator
- broadwise
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】この発明は、エネルギー閉じ込め
型の厚みすべり発振子に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an energy trap type thickness shear oscillator.
【0002】[0002]
【従来の技術】従来のエネルギー閉じ込め型の厚みすべ
り発振子は、図4に示すように、セラミック基板41の
長手方向に分極させるとともに、幅方向に平行な表裏の
面に、一部分が互いに相対面する一対の電極42、43
を形成したものである。この厚みすべり発振子は、電極
42、43に電圧を印加することにより、電極42、4
3が重なり合う部分で厚み方向に電界がかけられ、エネ
ルギーが閉じ込められて、厚み方向に振動する。なお、
ここで厚み方向とは、直方体状の基板において、交叉す
る三面のうち、最も長さの短い面の長さ方向をいい、幅
方向とは三面のうち、長さが中である面の長さ方向をい
い、長手方向とは最も長さが長い面の長さ方向をいう
(以下同じ)。2. Description of the Related Art As shown in FIG. 4, a conventional energy trap type thickness shear oscillator is polarized in the longitudinal direction of a ceramic substrate 41 and is partially opposed to each other on the front and back surfaces parallel to the width direction. A pair of electrodes 42, 43
Is formed. This thickness sliding oscillator is applied to electrodes 42, 43 by applying a voltage to electrodes 42, 43.
An electric field is applied in the thickness direction at a portion where 3 overlaps, energy is trapped, and vibration occurs in the thickness direction. In addition,
Here, the thickness direction refers to the length direction of the shortest surface of the three intersecting surfaces in the rectangular parallelepiped substrate, and the width direction refers to the length of the middle surface of the three surfaces. The direction refers to the direction, and the longitudinal direction refers to the length direction of the surface having the longest length (hereinafter the same).
【0003】[0003]
【発明が解決しようとする課題】上記した従来の厚みす
べり発振子は、セラミック基板の板厚のみにより、周波
数が決まり、通常は2〜6MHZの周波数で用いられ
る。2MHZで、厚みが0.6mm程度となる。この厚
みすべり発振子を2MHZよりも低い周波数で振動させ
るためには、素子の厚みが大きくなり、パッケージを含
めた発振子が大型化してしまうという問題があった。The above-mentioned conventional thickness-shear oscillator has a frequency determined only by the thickness of the ceramic substrate, and is usually used at a frequency of 2 to 6 MHZ. At 2 MHZ, the thickness is about 0.6 mm. In order to vibrate this thickness-sliding oscillator at a frequency lower than 2 MHZ, there is a problem that the thickness of the element becomes large and the oscillator including the package becomes large.
【0004】この発明は、上記問題点に着目してなされ
たものであり、2MHZよりも低い周波数で振動させる
ものであっても小型のものが得られる発振子を提供する
ことを目的としている。The present invention has been made in view of the above problems, and an object of the present invention is to provide an oscillator capable of obtaining a small one even if it vibrates at a frequency lower than 2 MHZ.
【0005】[0005]
【課題を解決するための手段及び作用】この発明の発振
子は、直方体の厚みすべり基板の、長手方向に分極さ
せ、かつ幅方向に平行な少なくとも一面に、幅方向に電
界を加えるための一対の電極を形成している。この発明
では、一対の電極間に、電圧を印加すると、幅方向に電
界が生じ、幅方向にエネルギー閉じ込み振動が生じる。
そのため例えば、従来の発振子と同じ厚み、同じ幅のも
のを考えると、基板の厚みよりも幅の方が大きいため、
幅方向にエネルギー閉じ込め振動を生じさせる。この発
明の発振子は、より低い周波数で、振動させることがで
きる。換言すれば、同じ低い周波数で振動させる場合
は、より小型のものが得られる。The oscillator of the present invention comprises a pair of plates for polarizing an electric field in the width direction on at least one surface of the rectangular parallelepiped thickness slide substrate which is polarized in the longitudinal direction and parallel to the width direction. Forming the electrodes of. In this invention, when a voltage is applied between the pair of electrodes, an electric field is generated in the width direction and energy confinement vibration is generated in the width direction.
Therefore, for example, considering the same thickness and width as a conventional oscillator, the width is larger than the thickness of the substrate.
Causes energy trapping oscillations across the width. The oscillator of the present invention can be vibrated at a lower frequency. In other words, a smaller one is obtained when vibrating at the same low frequency.
【0006】[0006]
【実施例】以下、実施例により、この発明をさらに詳細
に説明する。図1は、この発明の一実施例セラミック発
振子を示し、図1の(a)は、その平面図、図1の
(b)は、その側面図である。図1において、直方体状
の圧電セラミック基板1は、長手方向に分極しており、
また幅方向に平行な面(図1の(b)の紙面表、裏)
に、幅方向に向かい合う部分を持つ電極2、3が形成さ
れている。また表裏の電極2、3は、厚み方向に平行な
面〔図1の(b)の上面と下面〕に形成された導体で、
それぞれ一体的に形成されている。The present invention will be described in more detail with reference to the following examples. 1A and 1B show a ceramic oscillator according to an embodiment of the present invention. FIG. 1A is a plan view thereof, and FIG. 1B is a side view thereof. In FIG. 1, a rectangular parallelepiped piezoelectric ceramic substrate 1 is polarized in the longitudinal direction,
Also, the planes parallel to the width direction (front and back of the paper in FIG.
The electrodes 2 and 3 having portions facing each other in the width direction are formed. The electrodes 2 and 3 on the front and back sides are conductors formed on surfaces parallel to the thickness direction [the upper surface and the lower surface in FIG. 1B),
Each is integrally formed.
【0007】この発振子において、電極2、3間に電圧
を印加すると、電極2と電極3の対向する端縁2a、3
a間に幅方向〔図1の(b)の上下方向〕に電界が発生
し、ここにエネルギーの閉じ込めによる幅方向の振動が
生じる。実施例として、長さL=7.8mm、幅w=
1.2mm、厚みt=0.4mmの発振子で、共振周波
数950KHZ、Qm=200のものが得られた。な
お、この実施例発振子のスプリアス特性を図2に示す。
このスプリアス特性より明らかなように、幅方向のエネ
ルギー閉じ込めの厚みすべり振動になっていて、1次、
3次、5次のモードがあらわれているわけである。In this oscillator, when a voltage is applied between the electrodes 2 and 3, the opposing edges 2a and 3 of the electrodes 2 and 3 are
An electric field is generated between a and in the width direction [up and down direction in FIG. 1 (b)], and vibration in the width direction is generated here due to energy confinement. As an example, length L = 7.8 mm, width w =
A resonator having a resonance frequency of 950 KHZ and Qm = 200 was obtained with a resonator having a thickness of 1.2 mm and a thickness of t = 0.4 mm. The spurious characteristics of the oscillator of this example are shown in FIG.
As is clear from this spurious characteristic, there is a thickness shear vibration of energy trapping in the width direction,
The third and fifth modes are appearing.
【0008】次に、上記実施例発振子の製造方法につい
て説明する。先ず、図3の(a)に示すように、圧電セ
ラミック基板31の幅方向に分極させる。次に厚み方向
上下に電極を設け、周波数を調整する。この周波数調整
は、電極材料の厚み、もしくは、半田レジスト等を塗布
することにより、厚みを変化させて行う。Next, a method for manufacturing the oscillator of the above embodiment will be described. First, as shown in FIG. 3A, the piezoelectric ceramic substrate 31 is polarized in the width direction. Next, electrodes are provided above and below in the thickness direction to adjust the frequency. This frequency adjustment is performed by changing the thickness of the electrode material or by applying a solder resist or the like.
【0009】続いて、図3の(b)に示すように圧電セ
ラミック基板31を、分極方向に短冊状に切り出し、元
の圧電セラミック基板31よりも、はるかに小型の多く
の圧電セラミック基板32を得る。したがって、この圧
電セラミック基板32は長手方向に分極されていること
になる。次に、図3の(c)に示すように圧電セラミッ
ク基板32〔図3のものを拡大したもの〕の幅方向に平
行な面と厚み方向に平行な面に電極用の導体層33を形
成する。そして、エッチング処理により、電極34、3
5のパターン形成を行って、発振子36を得る。Subsequently, as shown in FIG. 3B, the piezoelectric ceramic substrate 31 is cut into strips in the polarization direction, and many piezoelectric ceramic substrates 32 much smaller than the original piezoelectric ceramic substrate 31 are formed. obtain. Therefore, this piezoelectric ceramic substrate 32 is polarized in the longitudinal direction. Next, as shown in FIG. 3C, the conductor layer 33 for electrodes is formed on the surface parallel to the width direction and the surface parallel to the thickness direction of the piezoelectric ceramic substrate 32 [enlarged version of FIG. 3]. To do. Then, the electrodes 34, 3 are formed by etching.
5 is formed to obtain the oscillator 36.
【0010】[0010]
【発明の効果】この発明によれば、直方体の厚みすべり
基板の、長手方向に分極させ、かつ幅方向に平行な少な
くとも一面に電界を加えるための一対の電極を形成した
ので、一対の電極間に電圧を印加することにより、幅方
向のエネルギー閉じ込めにより振動を得ることができ、
従来のものに比べ、2MHZよりも低い周波数の振動で
素子をより小型にできる。もちろん、エネルギー閉じ込
めであり、電極の重なり部分のみが振動し、両端は振動
していないために、素子の扱いが容易であるという、利
点もある。According to the present invention, since a pair of electrodes for polarizing an electric field in the longitudinal direction and applying an electric field to at least one surface parallel to the width direction of a rectangular parallelepiped thickness-sliding substrate is formed, a space between the pair of electrodes is formed. By applying a voltage to, vibration can be obtained by trapping energy in the width direction,
Compared with the conventional one, the element can be made smaller by vibrating at a frequency lower than 2 MHZ. Of course, there is also an advantage that the device is easy to handle because it is energy confinement, and only the overlapping portions of the electrodes vibrate and both ends do not vibrate.
【図1】この発明の一実施例セラミック発振子を示す図
である。FIG. 1 is a diagram showing a ceramic oscillator according to an embodiment of the present invention.
【図2】同実施例セラミック発振子のスプリアス特性を
示す図である。FIG. 2 is a diagram showing a spurious characteristic of the ceramic oscillator of the example.
【図3】同実施例セラミック発振子の製造方法を説明す
るための図である。FIG. 3 is a drawing for explaining the manufacturing method for the ceramic oscillator according to the embodiment.
【図4】従来の厚みすべり発振子を示す図である。FIG. 4 is a diagram showing a conventional thickness slip oscillator.
1 セラミック基板 2 電極 3 電極 1 Ceramic substrate 2 electrode 3 electrode
Claims (1)
極させ、かつ幅方向に平行な少なくとも一面に、幅方向
に電界を加えるための一対の電極を形成したことを特徴
とする発振子。1. An oscillator characterized in that a pair of electrodes for applying an electric field in the width direction is formed on at least one surface of a rectangular parallelepiped thickness-sliding substrate that is polarized in the longitudinal direction and is parallel to the width direction.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2762592A JPH05226962A (en) | 1992-02-14 | 1992-02-14 | Oscillator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2762592A JPH05226962A (en) | 1992-02-14 | 1992-02-14 | Oscillator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05226962A true JPH05226962A (en) | 1993-09-03 |
Family
ID=12226141
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2762592A Pending JPH05226962A (en) | 1992-02-14 | 1992-02-14 | Oscillator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05226962A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8635899B2 (en) | 2009-07-15 | 2014-01-28 | Rosemount Analytical Inc. | Flame safety system for in SITU process analyzer |
US9797849B2 (en) | 2013-03-29 | 2017-10-24 | Rosemount Analytical Inc. | Method of operation an in SITU process probe |
-
1992
- 1992-02-14 JP JP2762592A patent/JPH05226962A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8635899B2 (en) | 2009-07-15 | 2014-01-28 | Rosemount Analytical Inc. | Flame safety system for in SITU process analyzer |
US8689605B2 (en) | 2009-07-15 | 2014-04-08 | Rosemount Analytical Inc. | Flame safety system for in situ process analyzer |
US9797849B2 (en) | 2013-03-29 | 2017-10-24 | Rosemount Analytical Inc. | Method of operation an in SITU process probe |
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