JPH05243889A - Thickness-shear piezoelectric oscillator - Google Patents
Thickness-shear piezoelectric oscillatorInfo
- Publication number
- JPH05243889A JPH05243889A JP4161892A JP4161892A JPH05243889A JP H05243889 A JPH05243889 A JP H05243889A JP 4161892 A JP4161892 A JP 4161892A JP 4161892 A JP4161892 A JP 4161892A JP H05243889 A JPH05243889 A JP H05243889A
- Authority
- JP
- Japan
- Prior art keywords
- thickness
- substrate
- resonance frequency
- axis
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、ＬｉＴａＯ3 単結晶の
Ｘ板を用いて厚みすべり振動させる圧電振動素子に関す
るものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric vibrating element which vibrates in a thickness shear mode using an X plate of LiTaO 3 single crystal.
【０００２】[0002]
【従来の技術】従来、Ｘ軸を法線とする主面を有するＬ
ｉＴａＯ3 単結晶板（Ｘ板）を用いて厚みすべり振動モ
ードの圧電振動素子が既に知られている（例えば、特公
昭６３−５７９６７号）。2. Description of the Related Art Conventionally, L having a principal surface whose normal is the X-axis
A thickness-shear vibration mode piezoelectric vibrating element using an iTaO 3 single crystal plate (X plate) is already known (for example, Japanese Patent Publication No. 63-57967).
【０００３】上述の厚みすべり圧電振動素子は、ＬｉＴ
ａＯ3 の単結晶の短冊状の圧電基板の対向主面に励振電
極を夫々対向させて形成していた。また、基板の結晶方
位は、例えばＸ軸に垂直な面を主面とするＸ板であり、
基板の長手方向が、Ｙ軸及びＺ軸に対して夫々時計方向
に５０°±２°の角度に設定されていた。さらに、圧電
基板の長さＬ、幅Ｗ、厚みＨとした時、Ｌ／Ｈ値を１４
以上に、またＷ／Ｈ値を１．３５〜３．０又は３．８〜
５．０の何れかに設定していた。The above-mentioned thickness-sliding piezoelectric vibrating element is a LiT
The excitation electrodes are formed so as to oppose each other on the opposing main surfaces of the piezoelectric substrate in the shape of a strip of aO 3 single crystal. The crystal orientation of the substrate is, for example, an X plate whose main surface is a plane perpendicular to the X axis,
The longitudinal direction of the substrate was set at an angle of 50 ° ± 2 ° clockwise with respect to the Y axis and the Z axis, respectively. Further, when the length L, the width W, and the thickness H of the piezoelectric substrate are set, the L / H value is 14
In addition to the above, the W / H value is 1.35 to 3.0 or 3.8 to
It was set to any of 5.0.
【０００４】これにより、共振周波数特性のリップルが
抑制でき、高品質の性能が得られるものであった。As a result, ripples in the resonance frequency characteristic can be suppressed and high quality performance can be obtained.
【０００５】[0005]
【従来技術の問題点】しかし、本発明者らが、上述の圧
電基板を用いて、厚みすべり圧電振動素子を作成してみ
ると、共振周波数の近傍、即ち、共振周波数の若干低い
周波数部分に不要なリップルが発生し、さらに、共振周
波数と反共振周波数との間にも不要なリップルが発生し
てしまうことを知見した。この共振周波数の若干低い周
波数部分の不要なリップルの発生原因は、厚みすべり振
動モードの中で、スローモードの影響によって起こるも
のと考えられる。また、共振周波数と反共振周波数の間
の不要なリップルは、従来、考慮されていないが、励振
電極の構造、具体的には両主面の電極の交叉部分の長さ
と基板厚みの不適性によって発生するものと考えられ
る。However, when the inventors of the present invention tried to make a thickness-sliding piezoelectric vibrating element using the above-mentioned piezoelectric substrate, it was found in the vicinity of the resonance frequency, that is, in the frequency portion slightly lower than the resonance frequency. It has been found that unnecessary ripples are generated, and further unwanted ripples are generated between the resonance frequency and the anti-resonance frequency. It is considered that the cause of the unnecessary ripple in the frequency portion slightly lower than the resonance frequency is caused by the influence of the slow mode in the thickness shear vibration mode. Unwanted ripples between the resonance frequency and the anti-resonance frequency have not been taken into consideration in the past, but due to the structure of the excitation electrode, specifically, the length of the intersections of the electrodes on both main surfaces and the inadequacy of the substrate thickness. It is thought to occur.
【０００６】本発明は、上述の知見に鑑みて案出された
ものであり、その目的は、ＬｉＴａＯ3 の単結晶の切断
方位、及び該基板の厚みと両主面に形成する電極の互い
の交叉長さを最適に設定することにより、共振周波数及
び／又は反共振周波数の近傍に不要なリップルが発生す
ることのない厚みすべり圧電振動素子を提供することに
ある。The present invention has been devised in view of the above-mentioned findings, and its purpose is to cut the orientation of a single crystal of LiTaO 3 and the thickness of the substrate and the electrodes formed on both main surfaces with respect to each other. It is an object of the present invention to provide a thickness-shear piezoelectric vibrating element in which unnecessary ripples do not occur in the vicinity of the resonance frequency and / or the anti-resonance frequency by optimally setting the crossover length.
【０００７】[0007]
【問題点を解決するための具体的な手段】上述の本発明
の目的を達成するために、本発明は、Ｘ軸を法線とする
主面を有するＬｉＴａＯ3 単結晶のＸ板を用いて、Ｘ面
内でＹ軸から時計回りに４６°±２°の方向を長手方向
とした短冊状の圧電基板の両主面に励振電極を形成した
厚みすべり圧電振動素子であって、両主面の励振電極の
交叉部分の長手方向の長さをｌ、基板の厚みをＨとした
時、ｌ／Ｈ値が１〜１０であることを特徴とする厚みす
べり圧電振動素子である。In order to achieve the above-mentioned object of the present invention, the present invention uses a LiTaO 3 single crystal X plate having a main surface whose normal is the X axis. , A thickness-shear piezoelectric vibrating element in which excitation electrodes are formed on both principal surfaces of a rectangular piezoelectric substrate having a longitudinal direction of 46 ° ± 2 ° clockwise from the Y axis in the X plane. When the length of the crossing portion of the excitation electrode in the longitudinal direction is 1 and the thickness of the substrate is H, 1 / H value is 1 to 10.
【０００８】[0008]
【作用】上述のように、本発明によれば、ＬｉＴａＯ3
単結晶のＸ板を圧電基板として用い、その基板の長手方
向が、Ｘ面内でＹ軸から時計回りに４６°±２°とする
とともに、両主面に形成したこと両主面の励振電極の交
叉部分の長手方向の長さをｌ、基板の厚みをＨとした
時、ｌ／Ｈ値が１〜１０とすることにより、共振周波数
及び／又は反共振周波数の近傍に不要なリップルが全く
発生しない安定した特性の得られる厚みすべり圧電振動
素子となる。As described above, according to the present invention, LiTaO 3
A single crystal X plate is used as a piezoelectric substrate, and the longitudinal direction of the substrate is 46 ° ± 2 ° clockwise from the Y axis in the X plane, and it is formed on both main surfaces. Excitation electrodes on both main surfaces. When the length of the crossing part in the longitudinal direction is 1 and the thickness of the substrate is H, by setting the l / H value to be 1 to 10, there is no unnecessary ripple near the resonance frequency and / or the anti-resonance frequency. It becomes a thickness-shear piezoelectric vibrating element that can obtain stable characteristics that do not occur.
【０００９】これは、圧電基板をその主面をＸ面とし
て、その長手方向をＹ軸から時計回りに４６°±２°と
するとにより、厚みすべり振動モードのスローモードの
影響をなくすことができ、これによって、共振周波数の
付近、具体的には共振周波数よりも低い周波数部分に発
生する不要なリップルを防止できる。This is because the main surface of the piezoelectric substrate is the X surface and the longitudinal direction is 46 ° ± 2 ° clockwise from the Y axis, so that the influence of the slow mode of the thickness shear vibration mode can be eliminated. As a result, it is possible to prevent unnecessary ripples generated near the resonance frequency, specifically, in the frequency portion lower than the resonance frequency.
【００１０】さらに、基板の厚みと電極の交叉部分の長
さ関係、ｌ／Ｈ値を１〜１０とすることにより、電極の
交叉長に起因する不要なリップルを共振周波数と反共振
周波数との間から外すことができる。Furthermore, by setting the relationship between the thickness of the substrate and the length of the intersecting portion of the electrodes and the value of 1 / H to be 1 to 10, unnecessary ripples due to the intersecting length of the electrodes are caused to be different between the resonance frequency and the antiresonance frequency. It can be removed from between.
【００１１】[0011]
【実施例】以下、本発明の厚みすべり圧電振動素子を図
面に基づいて詳説する。図１は、本発明の厚みすべり圧
電振動素子の外観斜視図であり、図２は基板の切断方位
を説明するための図である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The thickness sliding piezoelectric vibration element of the present invention will be described in detail below with reference to the drawings. FIG. 1 is an external perspective view of a thickness-sliding piezoelectric vibrating element of the present invention, and FIG. 2 is a diagram for explaining a cutting direction of a substrate.
【００１２】図において、１０は厚みすべり圧電振動素
子であり、１はＬｉＴａＯ3 から成る圧電単結晶基板
（以下、単に圧電基板という）であり、２、３は夫々主
面に形成した励振電極（以下、単に電極という）であ
る。In the figure, reference numeral 10 is a thickness-shear piezoelectric vibrating element, 1 is a piezoelectric single crystal substrate made of LiTaO 3 (hereinafter, simply referred to as a piezoelectric substrate), and 2 and 3 are excitation electrodes formed on the main surface thereof. Hereinafter, simply referred to as an electrode).
【００１３】圧電基板１は、ＬｉＴａＯ3 の単結晶から
切断されて構成されるものであり、図２に示すように、
その主面がＸ軸を法線とする平面となるように形成さ
れ、さらにその基板１の長手方向が、Ｙ軸から−４６°
±２°、即ち、時計回りに４６°±２°の方向になるよ
うに切断されて構成される。The piezoelectric substrate 1 is constructed by cutting a single crystal of LiTaO 3 , and as shown in FIG.
The main surface is formed so as to be a plane whose normal is the X axis, and the longitudinal direction of the substrate 1 is −46 ° from the Y axis.
± 2 °, that is, cut in a clockwise direction of 46 ° ± 2 °.
【００１４】電極２、３は、圧電単結晶基板１の主面に
異なる端面側から中央部に延びるように形成されてい
る。具体的には、銀、金などの金属材料を薄膜技法によ
って形成されるものであり、その厚みは１μｍ程度であ
る。The electrodes 2 and 3 are formed on the main surface of the piezoelectric single crystal substrate 1 so as to extend from different end faces to the central portion. Specifically, a metal material such as silver or gold is formed by a thin film technique, and its thickness is about 1 μm.
【００１５】尚、上述の厚みすべり厚みすべり圧電振動
素子１０の圧電基板１は長さＬが３．５〜６．４ｍｍで
あり、幅Ｗが０．４〜１．１６ｍｍ、基板の厚みＨが
０．１〜０．２５ｍｍである。また電極２、３は、異な
る端面、例えば電極２が図１の上側主面に、右側の基板
端面から中央部に延びるように、また、電極３が図１の
下側主面に、左側の基板端面から中央部に延びるように
形成され、その両電極２、３の交叉部分の長さがｌが
０．４〜０．９ｍｍと成っている。尚、電極２、３の幅
は実質的に基板１の幅と同一に形成されている。The piezoelectric substrate 1 of the thickness-sliding thickness-sliding piezoelectric vibrating element 10 has a length L of 3.5 to 6.4 mm, a width W of 0.4 to 1.16 mm, and a substrate thickness H. It is 0.1 to 0.25 mm. The electrodes 2 and 3 have different end faces, for example, the electrode 2 extends on the upper main surface of FIG. 1 and extends from the end face of the right substrate to the central portion, and the electrode 3 extends on the lower main surface of FIG. 1 on the left side. It is formed so as to extend from the end surface of the substrate to the central portion, and the length l of the intersecting portion of both electrodes 2 and 3 is 0.4 to 0.9 mm. The electrodes 2 and 3 are formed to have substantially the same width as the substrate 1.
【００１６】（実験例）本発明者らは、このような構成
をした厚みすべり圧電振動素子の共振特性を測定した。
尚、圧電基板１として、ＬｉＴａＯ3 の単結晶のＸ板を
用いて、さらに長手方向をＹ軸から−４６°の切断方位
のものを用いた。基板１の厚みを０．２ｍｍとし、電極
２、３の交叉部分の長さｌを０．２〜２．０ｍｍ、即
ち、ｌ／Ｈ値が１〜１０とした。(Experimental example) The present inventors measured the resonance characteristics of the thickness-shear piezoelectric vibrating element having such a structure.
As the piezoelectric substrate 1, a LiTaO 3 single crystal X plate was used, and a longitudinal orientation of −46 ° from the Y axis was used. The thickness of the substrate 1 was 0.2 mm, and the length 1 of the intersecting portion of the electrodes 2 and 3 was 0.2 to 2.0 mm, that is, the l / H value was 1 to 10.
【００１７】図３の特性図に示すように、このような構
造の厚みすべり圧電振動素子１０では、共振周波数ｆr
の低い周波数部分には不要なリップルが発生せず、さら
に、共振周波数ｆr と反共振周波数ｆa との間にも不要
なリップルが発生しなかった。As shown in the characteristic diagram of FIG. 3, in the thickness sliding piezoelectric vibrating element 10 having such a structure, the resonance frequency f r
Unwanted ripples is not generated in the low frequency part of the further, unnecessary ripples is not generated even between the resonant frequency f r and the anti-resonance frequency f a.
【００１８】（比較例１）次に、本発明者らは、上述の
実験例と同様の圧電基板１を用いた厚みすべり圧電振動
素子の共振周波数特性を測定した。尚、その電極２、３
の交叉部分の長さｌを２．４ｍｍ、即ち、ｌ／Ｈ値が１
２とした。(Comparative Example 1) Next, the present inventors measured the resonance frequency characteristic of a thickness-shear piezoelectric vibrating element using the same piezoelectric substrate 1 as in the above-described experimental example. The electrodes 2 and 3
The length l of the crossing part of 2.4 mm, that is, the 1 / H value is 1
It was set to 2.
【００１９】その結果、図４に示すように、共振周波数
ｆr よりも若干低い周波数部分での不要なリップルを防
止することができるものの、共振周波数ｆr と反共振周
波数ｆa との間に不要なリップルが発生してしまう。As a result, as shown in FIG. 4, although it is possible to prevent unnecessary ripple at a frequency portion slightly lower than the resonance frequency f r, it is possible to prevent the ripple between the resonance frequency f r and the anti-resonance frequency f a. Unwanted ripple will occur.
【００２０】（比較例２）次に、本発明者らは、従来公
知の圧電基板（ＬｉＴａＯ3 の単結晶のＸ板を用いて、
長手方向をＹ軸から−５０°の切断方位のもの）を用い
た厚みすべり圧電振動素子の共振周波数特性を測定し
た。尚、基板の厚みを０．２ｍｍとし、基板の厚みＨと
電極２、３の交叉部分の長さｌを０．２〜２．０ｍｍ、
即ち、ｌ／Ｈ値が１〜１０とした。Comparative Example 2 Next, the inventors of the present invention used a conventionally known piezoelectric substrate (LiTaO 3 single crystal X plate)
The resonance frequency characteristic of the thickness-sliding piezoelectric vibrating element using the longitudinal direction (cutting direction of −50 ° from the Y axis) was measured. In addition, the thickness of the substrate is 0.2 mm, and the thickness H of the substrate and the length 1 of the intersection of the electrodes 2 and 3 are 0.2 to 2.0 mm,
That is, the l / H value was set to 1-10.
【００２１】その結果、図５に示すように、共振周波数
ｆr よりも若干低い周波数部分での不要なリップルが発
生してしまう。尚、共振周波数ｆr と反共振周波数ｆa
との間に不要なリップルは発生しなかった。[0021] As a result, as shown in FIG. 5, unwanted ripple at slightly lower frequency portion occurs than the resonance frequency f r. The resonance frequency f r and the antiresonance frequency f a
There was no unnecessary ripple between and.
【００２２】（比較例３）次に、本発明者らは、比較例
２と同様の圧電基板を用いた厚みすべり圧電振動素子の
共振周波数特性を測定した。尚、基板の厚みを０．２ｍ
ｍとし、基板の厚みＨと電極２、３の交叉部分の長さｌ
を２．４ｍｍ、即ち、ｌ／Ｈ値が１２とした。(Comparative Example 3) Next, the present inventors measured the resonance frequency characteristic of the thickness-shear piezoelectric vibrating element using the same piezoelectric substrate as in Comparative Example 2. The thickness of the substrate is 0.2m
m, the thickness H of the substrate and the length l of the intersection of the electrodes 2 and 3
Was 2.4 mm, that is, the l / H value was 12.
【００２３】その結果、図６に示すように、共振周波数
ｆr よりも若干低い周波数部分での不要なリップルが発
生してしまい、且つ、共振周波数ｆr と反共振周波数ｆ
a との間に不要なリップルも発生してしまう。As a result, as shown in FIG. 6, unnecessary ripples occur at a frequency portion slightly lower than the resonance frequency f r , and the resonance frequency f r and the anti-resonance frequency f r are generated.
Unwanted ripple is also generated between a and.
【００２４】以上の実験例及び各比較例により、共振周
波数ｆr の低い周波数部分に発生する不要なリップル
は、圧電基板１の長手方向の切断方位の差によって発生
するものであり、この不要なリップルはスローモードに
よって発生するものと考えられる。図７は、圧電基板１
の長手方向、即ち、Ｙ軸から時計回りを種々変化させた
時に共振周波数ｆr の低い周波数部分に発生する不要な
リップルのピーク−バレイ（Ｐ／Ｖ）した特性図であ
る。回転角度がＹ軸から４６°の前後では、上述のリッ
プルの発生を極小化することが理解できる。According to the above experimental example and each comparative example, the unnecessary ripple generated in the low frequency portion of the resonance frequency f r is caused by the difference in the cutting direction of the piezoelectric substrate 1 in the longitudinal direction, and this unnecessary ripple is generated. Ripple is considered to be generated by the slow mode. FIG. 7 shows the piezoelectric substrate 1.
Longitudinal, i.e., the peak of the unwanted ripples occurring low frequency portion of the resonant frequency f r when was variously changed clockwise from the Y axis - a valley (P / V) characteristics diagrams. It can be understood that the above-mentioned ripples are minimized when the rotation angle is around 46 ° from the Y axis.
【００２５】また、共振周波数ｆr と反共振周波数ｆa
の間の不要なリップルは、電極２、３の交叉部分の長さ
ｌと基板厚みＨとの関係、ｌ／Ｈ値が１〜１０以外の範
囲で発生するものである。Further, the resonance frequency f r and the anti-resonance frequency f a
The unnecessary ripple between the two is generated in the relation between the length l of the intersecting portion of the electrodes 2 and 3 and the substrate thickness H and the l / H value is in the range other than 1 to 10.
【００２６】図８は、横軸にｌ／Ｈ値を変化させた時、
電極２、３の交叉長の幅振動により発生するリップルの
周波数を示したものであり、特に縦軸を周波数定数ｆ・
Ｈ値で示した。ｌ／Ｈ値が１〜１０では、図中の共振領
域内にリップルを外すことができる。FIG. 8 shows that when the 1 / H value is changed on the horizontal axis,
It shows the frequency of the ripple generated by the width vibration of the cross lengths of the electrodes 2 and 3, with the vertical axis representing the frequency constant f ·
The H value is shown. When the l / H value is 1 to 10, ripples can be eliminated in the resonance region in the figure.
【００２７】したがって、共振周波数ｆr よりも若干低
い周波数領域で発生する不要なリップルを防止するに
は、ＬｉＴａＯ3 の単結晶のＸ板であっても、長手方向
の切断方位を−４６°付近と最適化することが重要であ
り、また、さらに、実用に耐えるためには、共振周波数
ｆr と反共振周波数ｆa との間の不要なリップルを解消
すべく、基板１の厚みＨと電極の交叉部分の長さｌの関
係ｌ／Ｈ値が１〜１０に設定することが重要となる。Therefore, in order to prevent unnecessary ripples which occur in a frequency region slightly lower than the resonance frequency fr , even in the case of the LiTaO 3 single crystal X plate, the longitudinal cutting direction is around -46 °. and it is important to optimize, also further to withstand the practical use, in order to eliminate unnecessary ripples between the resonant frequency f r and the anti-resonance frequency f a, the thickness H and the electrode of the substrate 1 It is important to set the relationship 1 / H value of the length l of the intersection part of 1 to 10 to 1.
【００２８】また、本発明者らが、圧電基板１の長手方
向の切断方位を種々検討した結果、Ｙ軸から−４４°〜
−４８°の範囲で切断したものであっても図３に示す特
性と同様な結果が得られた。Further, as a result of various investigations by the present inventors on the cutting direction of the piezoelectric substrate 1 in the longitudinal direction, as a result, the range from -44 ° from the Y axis is shown.
Even when cut in the range of −48 °, the same results as the characteristics shown in FIG. 3 were obtained.
【００２９】以上のように、本発明では、ＬｉＴａＯ3
の単結晶のＸ板を用いて、長手方向をＹ軸から−４６°
±２°の切断方位に設定した圧電基板１上に、電極２、
３の交叉部分の長さｌと基板の厚みＨとの関係、ｌ／Ｈ
値が１〜１０となるように電極２、３を形成することに
より、厚みすべり振動モードのスローモードによる共振
周波数ｆr 付近、即ち、若干低い周波数部分に発生する
不要なリップルが抑制でき、さらに共振周波数ｆr と反
共振周波数ｆa との間の不要なリップルも同時に抑制で
き、これによって、所定共振特性を有する高品質の厚み
すべり圧電振動素子が得られることになる。As described above, according to the present invention, LiTaO 3
Using the single crystal X plate of, the longitudinal direction is -46 ° from the Y axis.
On the piezoelectric substrate 1 set to ± 2 ° cutting direction, the electrode 2,
3, the relationship between the length l of the intersection and the thickness H of the substrate, 1 / H
By value forms electrodes 2 and 3 so that the 10, around the resonance frequency f r by slow mode of thickness shear vibration mode, i.e., can unnecessary ripples occur slightly lower frequency portion is suppressed, further unwanted ripples between the resonant frequency f r and the antiresonance frequency f a can be suppressed at the same time, thereby, high quality thickness shear piezoelectric vibrating element will be obtained having a predetermined resonant characteristics.
【００３０】[0030]
【発明の効果】以上、本発明によれば、共振周波数の近
傍の不要なリップルや共振器周波数と反共振周波数との
間に発生する不要なリップルを抑えることができ、高品
質の厚みすべり圧電振動素子となる。As described above, according to the present invention, unnecessary ripples in the vicinity of the resonance frequency and unnecessary ripples generated between the resonator frequency and the anti-resonance frequency can be suppressed, and a high-quality thickness-slip piezoelectric material can be obtained. It becomes a vibrating element.
【図面の簡単な説明】[Brief description of drawings]
【図１】本発明の厚みすべり圧電振動素子の斜視図であ
る。FIG. 1 is a perspective view of a thickness sliding piezoelectric vibration element of the present invention.
【図２】本発明の厚みすべり圧電振動素子に使用する圧
電基板の結晶方位を説明する図である。FIG. 2 is a diagram illustrating the crystal orientation of a piezoelectric substrate used in the thickness-shear piezoelectric vibrating element of the present invention.
【図３】本発明の厚みすべり圧電振動素子の共振特性を
示す特性図である。FIG. 3 is a characteristic diagram showing resonance characteristics of the thickness-sliding piezoelectric vibrating element of the present invention.
【図４】比較例の共振特性を示す特性図である。FIG. 4 is a characteristic diagram showing a resonance characteristic of a comparative example.
【図５】従来の共振特性を示す特性図である。FIG. 5 is a characteristic diagram showing a conventional resonance characteristic.
【図６】従来の共振特性を示す特性図である。FIG. 6 is a characteristic diagram showing a conventional resonance characteristic.
【図７】切断方位とリップルの発生との関係を示す特性
図である。FIG. 7 is a characteristic diagram showing the relationship between the cutting direction and the occurrence of ripples.
【図８】ｌ／Ｈ値とリップルの発生との関係を示す特性
図である。FIG. 8 is a characteristic diagram showing the relationship between the 1 / H value and the occurrence of ripples.
１０・・・・・・厚みすべり圧電振動素子 １・・・・・・・圧電基板 ２、３・・・・・電極 10 ··· Thickness-slip piezoelectric vibrating element 1 ···· Piezoelectric substrate 2, 3 ·· Electrode
Claims (1)
Ｏ3 単結晶板を用いて、Ｙ軸から時計回りに４６°±２
°の方向を長手方向に切断した短冊状圧電基板の両主面
に励振電極を形成した厚みすべり圧電振動素子であっ
て、両主面の励振電極の交叉部分の長手方向の長さを
ｌ、基板の厚みをＨとした時、ｌ／Ｈ値が１〜１０であ
ることを特徴とする厚みすべり圧電振動素子。1. LiTa having a main surface whose normal is the X-axis
Using O 3 single crystal plate, 46 ° ± 2 clockwise from Y axis
A thickness-shear piezoelectric vibrating element in which excitation electrodes are formed on both principal surfaces of a strip-shaped piezoelectric substrate whose longitudinal direction is cut in the direction of 0 °, and the crosswise portion of the excitation electrodes on both principal surfaces has a longitudinal length of l, A thickness-sliding piezoelectric vibrating element having a 1 / H value of 1 to 10 when the thickness of the substrate is H.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4161892A JPH05243889A (en) | 1992-02-27 | 1992-02-27 | Thickness-shear piezoelectric oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4161892A JPH05243889A (en) | 1992-02-27 | 1992-02-27 | Thickness-shear piezoelectric oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH05243889A true JPH05243889A (en) | 1993-09-21 |
Family
ID=12613331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4161892A Pending JPH05243889A (en) | 1992-02-27 | 1992-02-27 | Thickness-shear piezoelectric oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH05243889A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002067424A1 (en) * | 2001-02-19 | 2002-08-29 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibrator, ladder-type filter using this piezoelectric vibrator and double-mode piezoelectric filter |
| US6967432B2 (en) | 2001-12-04 | 2005-11-22 | Murata Manufacturing Co., Ltd. | Piezoelectric shear resonator, composite piezoelectric shear resonator, and piezoelectric resonator component |
| JP2007124441A (en) * | 2005-10-31 | 2007-05-17 | Epson Toyocom Corp | Mesa piezoelectric vibration chip |
| JP2010062723A (en) * | 2008-09-02 | 2010-03-18 | Epson Toyocom Corp | At-cut crystal vibrating piece, at-cut crystal vibrator and oscillator |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59127413A (en) * | 1983-01-11 | 1984-07-23 | Nippon Dempa Kogyo Co Ltd | Lithium tantalate oscillator |
| JPS59182617A (en) * | 1983-03-31 | 1984-10-17 | Fujitsu Ltd | Lithium tantalate oscillator |
| JPS62264710A (en) * | 1986-05-12 | 1987-11-17 | Fujitsu Ltd | Piezoelectric vibrating element |
| JPH01152809A (en) * | 1987-12-10 | 1989-06-15 | Matsushima Kogyo Co Ltd | Piezoelectric vibrator |
-
1992
- 1992-02-27 JP JP4161892A patent/JPH05243889A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59127413A (en) * | 1983-01-11 | 1984-07-23 | Nippon Dempa Kogyo Co Ltd | Lithium tantalate oscillator |
| JPS59182617A (en) * | 1983-03-31 | 1984-10-17 | Fujitsu Ltd | Lithium tantalate oscillator |
| JPS62264710A (en) * | 1986-05-12 | 1987-11-17 | Fujitsu Ltd | Piezoelectric vibrating element |
| JPH01152809A (en) * | 1987-12-10 | 1989-06-15 | Matsushima Kogyo Co Ltd | Piezoelectric vibrator |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002067424A1 (en) * | 2001-02-19 | 2002-08-29 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibrator, ladder-type filter using this piezoelectric vibrator and double-mode piezoelectric filter |
| US6992424B2 (en) | 2001-02-19 | 2006-01-31 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric vibrator ladder-type filter using piezoeletric vibrator and double-mode piezolectric filter |
| US6967432B2 (en) | 2001-12-04 | 2005-11-22 | Murata Manufacturing Co., Ltd. | Piezoelectric shear resonator, composite piezoelectric shear resonator, and piezoelectric resonator component |
| DE10256708B4 (en) * | 2001-12-04 | 2009-01-02 | Murata Manufacturing Co., Ltd., Nagaokakyo | Piezoelectric shear resonator and composite piezoelectric shear resonator |
| JP2007124441A (en) * | 2005-10-31 | 2007-05-17 | Epson Toyocom Corp | Mesa piezoelectric vibration chip |
| JP4572807B2 (en) * | 2005-10-31 | 2010-11-04 | エプソントヨコム株式会社 | Mesa-type piezoelectric vibrating piece |
| JP2010062723A (en) * | 2008-09-02 | 2010-03-18 | Epson Toyocom Corp | At-cut crystal vibrating piece, at-cut crystal vibrator and oscillator |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4665282B2 (en) | AT cut crystal unit | |
| JP2008236439A (en) | Quartz oscillating piece | |
| US5541469A (en) | Resonator utilizing width expansion mode | |
| JP2000269774A (en) | Piezoelectric vibrator and piezoelectric resonance component | |
| JPS6013608B2 (en) | Thickness sliding piezoelectric vibrator | |
| JPH05243889A (en) | Thickness-shear piezoelectric oscillator | |
| JPS6357967B2 (en) | ||
| JP2001007677A (en) | Crystal vibrator | |
| JP2855208B2 (en) | LiTaO 3 Lower piezoelectric resonator | |
| JPS58136125A (en) | Coupled crystal oscillator | |
| JPS6098711A (en) | Thickness-shear vibrator | |
| JPH08154032A (en) | Piezoelectric resonator | |
| JPH04222108A (en) | Thickness-shear vibrator | |
| JP3341407B2 (en) | Edge reflection type surface acoustic wave device | |
| JPS6058709A (en) | Piezoelectric vibrator | |
| JPS58141021A (en) | Thickness sliding crystal oscillator | |
| JP3176642B2 (en) | KT cut crystal unit | |
| JPH0344451B2 (en) | ||
| JP3159982B2 (en) | Rectangular AT-cut crystal unit | |
| JP3258070B2 (en) | Crystal oscillator | |
| JPH032991Y2 (en) | ||
| JPS62239707A (en) | Crystal resonator | |
| JPS5824969B2 (en) | Atsuden Jixindoushi | |
| JPH07202628A (en) | Piezoelectric resonator | |
| JPS59148421A (en) | Piezoelectric resonator |