JPH1032446A - Manufacture of oscillator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide the oscillator of high quality by providing an opening larger than the form of an electrode between an oscillator substrate and a mask, executing vapor deposition by interposing spacer which are thicker than the electrode and forming an adjusting electrode without dislocation. SOLUTION: The spacer 22 which is provided with the opening 21 larger than the electrode 20 formed on the upper face of an oscillation part 18 and which is constituted of the stainless material is arranged and the mask 24 which is provided with the opening 23 for forming the electrode 20 on the spacer 22 and which is constituted of the stainless material is arranged on the upper face of the oscillator substrate 16. The spacers 22 and 27 and the masks 24 and 29 are combined to the substrate 16 and they are set in a vapor deposition device. The electrode materials are vapor- deposited and the electrodes 20 and 25 are formed on the upper face and the lower face. Thus, the electrodes 20 and 25 are formed on the upper and lower faces and frequency measurement terminals 30 are brought into contact with the electrode on the lower face of the oscillator substrate 16. Then, the adjusting electrode 31 is formed by vapor deposition again and the oscillator of a prescribed frequency is formed by arranging the spacers 22 and 27 and the masks 24 and 29 as they are while the frequency is measured.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a vibrator used for various electronic devices and communication devices.

[0002]

2. Description of the Related Art As a conventional method of manufacturing a vibrator, a method as shown in FIGS. That is, as shown in FIG. 3, a U-shaped cut groove 2 is provided on a vibrator substrate 1 made of quartz or piezoelectric ceramic so that a plurality of vibrators can be simultaneously formed, and a plurality of vibrating portions 3 are provided at regular intervals. A through hole 4 for forming a through hole is provided near the vibrating section 3, and metal masks 6 and 7 having openings 5 at portions where electrodes are to be formed on the upper and lower surfaces of the vibrator substrate 1 are brought into contact. Then, electrode materials were formed on the upper and lower surfaces of the vibrating part 3 of the vibrator substrate 1 by vapor deposition to form the electrodes 8 and 9.

However, in this state, since a predetermined frequency characteristic cannot be obtained, a spacer 11 having a large opening 10 on the upper surface of the vibrator substrate 1 as shown in FIGS.
A metal mask 13 for adjustment having a small opening 12 is arranged through the electrode, and the measurement terminal 14 is brought into contact with the electrode 9 on the back surface to measure the frequency while adjusting the adjustment electrode 1 on the electrode 8 on the upper surface.
5 was formed by vapor deposition, and those having predetermined characteristics were produced by dividing them into individual vibrators.

[0004]

However, in the above-described method for manufacturing a vibrator, the electrodes 8 and
The step of forming the electrode 9 by vapor deposition and the step of forming the adjustment electrode 15 by vapor deposition need to be performed separately, resulting in poor productivity and consequently high cost of the vibrator. Further, different metal masks 6 and 1 are used in each process.
Since the frequency is adjusted by arranging the electrodes 3 on the vibrator substrate 1 to form electrodes and adjusting the frequency, it is difficult to completely match the positions of the metal masks 6 and 13 and the performance as a vibrator is deteriorated. Had a problem.

SUMMARY OF THE INVENTION An object of the present invention is to provide a method for manufacturing a vibrator which eliminates the above-mentioned drawbacks of the prior art, is excellent in productivity and does not deteriorate in performance.

[0006]

In order to solve the above-mentioned problems, a method of manufacturing a vibrator according to the present invention is directed to a method of manufacturing a vibrator, comprising: A thick spacer is disposed, a mask having an electrode-shaped opening formed through the spacer is disposed, electrodes are formed on both sides of a vibrating portion of the vibrator substrate by vapor deposition, and a frequency measuring terminal is provided on one of the electrodes. Is a method of forming an adjustment electrode on the other electrode by vapor deposition while measuring the frequency by contacting the other electrode. With this method, the adjustment electrode can be formed without replacing the mask, and the productivity is improved. Since it is accurately formed on the electrode formed in advance, no displacement occurs and a vibrator without performance degradation can be obtained.

[0007]

According to the first aspect of the present invention, a spacer having a thickness greater than the thickness of an electrode having an opening larger than the shape of an electrode formed on the upper and lower surfaces of a vibrator substrate is arranged. A mask having an electrode-shaped opening formed through this spacer is arranged, electrodes are formed on both sides of the vibrating part of the vibrator substrate by vapor deposition, and a frequency measuring terminal is brought into contact with one of these electrodes to measure the frequency. While the adjustment electrode is formed on the other electrode by vapor deposition, the method has an excellent productivity and can prevent performance deterioration due to displacement of the adjustment electrode.

According to a second aspect of the present invention, a metal having a surface coated with a non-conductive material is used as a mask to prevent conduction between an electrode formed on a vibrator substrate and the metal mask. In addition, it is possible to form an adjustment electrode while performing correct frequency measurement.

According to a third aspect of the present invention, a mask made of a non-conductive material is used as the mask, and it is possible to obtain a vibrator in which conduction with the electrodes is prevented and the frequency can be accurately adjusted. .

An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is an exploded perspective view showing one step of the method of manufacturing a vibrator according to the present invention, and FIG. 2 is a cross-sectional view showing a state in which an adjustment electrode is formed while measuring the same frequency.

In FIG. 1 and FIG. 2, reference numeral 16 denotes a vibrator substrate formed of a quartz plate or a piezoelectric ceramic plate. The vibrator substrate 16 is formed with a U-shaped cut groove 17 and a plurality of vibrating portions 18 are provided at equal intervals. Further, in the vicinity of the vibrating portion 18, through holes 19 each serving as a through hole are provided.

A vibrating portion 18 is provided on the upper surface of the vibrator substrate 16.
A spacer 22 made of stainless steel or the like provided with an opening 21 having a larger shape than the electrode 20 formed on the upper surface of the substrate is disposed, and made of stainless steel provided with an opening 23 for forming the electrode 20 on the spacer 22. Mask 24
Is arranged.

The lower surface of the vibrator substrate 16 has an opening 2 having a larger shape than the electrode 25 formed on the lower surface of the vibrating portion 18.
A spacer 27 made of stainless steel or the like having a thickness greater than the thickness of the electrode 25 provided with
An opening 28 for forming an electrode 25 on the lower surface is formed on the lower surface of 7.
A mask 29 made of a stainless material or the like provided with is provided.

As described above, the spacer 2 is provided on the vibrator substrate 16.
The electrodes 20 and 25 are formed on the upper and lower surfaces by depositing the electrode material by vapor deposition by setting the combination of the masks 2 and 27 and the masks 24 and 29 in a vapor deposition apparatus.

After the electrodes 20 and 25 are formed on both the upper and lower surfaces in this manner, the above-described spacer is measured while the frequency is being measured by bringing the frequency measuring terminal 30 into contact with the electrode 25 on the lower surface of the vibrator substrate 16 as shown in FIG. 22, 27, masks 24, 29
The adjustment electrode 31 is formed again by vapor deposition on the upper surface in a state where is disposed, and a vibrator having a predetermined frequency is formed.

Thereafter, the vibrator substrate 16 formed collectively is divided into individual vibrators to complete the vibrator.

The spacers 22 and 27 are used as electrodes 20 and 2
5, the electrodes 20 and 25 and the adjustment electrode 31 do not come into contact with the masks 24 and 29 and do not conduct. Preferably, the surface of the stainless steel material is coated with a ceramic material to make it non-conductive.

Further, the masks 24 and 29 themselves may be made of a ceramic material. In addition, although the masks 24 and 29 and the spacers 22 and 27 are separately configured,
If they are integrally formed, the work of attaching them to the vibrator substrate 16 can be significantly simplified.

As described above, the electrodes 20 and 25 are formed with the spacers 22 and 27 and the masks 24 and 29 set on the upper and lower surfaces of the vibrator substrate 16, and then the frequency measurement terminal 30 is formed.
In order to form the adjustment electrode 31 while measuring the frequency with
It is not necessary to reset the masks 24 and 29, and the productivity can be greatly improved. In addition, since the mask 24 is kept as it is, the adjustment electrode 31 does not displace with respect to the electrode 20, and the performance as a vibrator is achieved. Without deteriorating.

[0020]

As described above, according to the method of manufacturing the vibrator of the present invention, the adjustment electrode can be formed while measuring the frequency without replacing the mask, so that the productivity can be greatly improved and the pre-formed electrode can be formed. Since the adjustment electrode can be formed on the formed electrode without displacement, a high-quality vibrator can be provided without deteriorating the performance as a vibrator.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view of a step of forming an electrode in an embodiment of a method of manufacturing a vibrator according to the present invention.

FIG. 2 is a sectional view of a step of forming the adjustment electrode.

FIG. 3 is an exploded perspective view of an electrode forming step in a conventional oscillator manufacturing method.

FIG. 4 is an exploded perspective view when the adjustment electrode is formed.

FIG. 5 is a sectional view showing a state in which the adjustment electrode is formed.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 16 Vibrator board 18 Vibration part 20, 25 Electrode 21, 23, 26, 28 Opening 22, 27 Spacer 24, 29 Mask 30 Frequency measurement terminal 31 Adjustment electrode

Claims (3)

[Claims] 1. A spacer having a thickness greater than the thickness of an electrode having an opening larger than an electrode formed on the upper and lower surfaces of a vibrator substrate, and having an electrode-shaped opening formed through the spacer. An electrode is formed on both surfaces of the vibrating portion of the vibrator substrate by disposing a mask and an adjusting electrode is formed on the other electrode by vapor deposition while measuring the frequency by contacting a frequency measuring terminal to one of the electrodes. A method for manufacturing a vibrator. 2. The method for manufacturing a vibrator according to claim 1, wherein a mask having a non-conductive material coated on a metal surface is used as a mask. 3. The method according to claim 1, wherein the mask is made of a non-conductive material.