JPH02264507A - Piezoelectric vibrator device - Google Patents
Piezoelectric vibrator deviceInfo
- Publication number
- JPH02264507A JPH02264507A JP8543989A JP8543989A JPH02264507A JP H02264507 A JPH02264507 A JP H02264507A JP 8543989 A JP8543989 A JP 8543989A JP 8543989 A JP8543989 A JP 8543989A JP H02264507 A JPH02264507 A JP H02264507A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- piezoelectric vibrator
- diaphragm
- vibrator
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims abstract description 7
- 239000011347 resin Substances 0.000 abstract description 9
- 229920005989 resin Polymers 0.000 abstract description 9
- 230000000694 effects Effects 0.000 abstract description 4
- 230000002411 adverse Effects 0.000 abstract description 3
- 230000002542 deteriorative effect Effects 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 3
- 230000006866 deterioration Effects 0.000 abstract description 2
- 229910044991 metal oxide Inorganic materials 0.000 abstract description 2
- 230000010287 polarization Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は３次振動モードのエネルギー閉じ込め型厚みす
べり振動を利用しており、映像２通信機器等のセラミッ
クフィルタとして用いられる圧電振動子装置に関するも
のである。[Detailed Description of the Invention] Industrial Field of Application The present invention utilizes energy-trapped thickness shear vibration in the third vibration mode, and relates to a piezoelectric vibrator device used as a ceramic filter for video communication equipment, etc. be.
従来の技術
■板の圧電振動板に複数個の振動子を構成した従来例の
圧電振動子装置を第５図及び第６図に示す。第５図はそ
の平面図、第６図は第５図のＡ〜八へ面の断面図である
。図において、１は圧電振動板２に形成された圧電振動
子、３は電極、４は各圧電振動子１を区画するための溝
、５はリード線である。2. Prior Art A conventional piezoelectric vibrator device in which a plurality of vibrators are arranged on a piezoelectric vibrating plate is shown in FIGS. 5 and 6. FIG. 5 is a plan view thereof, and FIG. 6 is a sectional view taken along the plane A--8 in FIG. 5. In the figure, 1 is a piezoelectric vibrator formed on a piezoelectric diaphragm 2, 3 is an electrode, 4 is a groove for dividing each piezoelectric vibrator 1, and 5 is a lead wire.
そして、圧電振動子１が振動することにより、この振動
が隣接する圧電振動子１に伝播し悪影響をおよぼすため
、従来例では各振動子１間に溝４を設け、不要な振動が
伝播しないよう工夫している。しかし、溝４を設けるこ
とにより落下強度が劣化し、割れやす（なる上、この溝
４は一度に１個づつの形成であるため、量産性に欠ける
という問題点がある。When the piezoelectric vibrator 1 vibrates, this vibration propagates to the adjacent piezoelectric vibrators 1 and has an adverse effect. Therefore, in the conventional example, a groove 4 is provided between each vibrator 1 to prevent unnecessary vibration from propagating. I'm working on it. However, the provision of the grooves 4 deteriorates the drop strength and makes them more susceptible to breakage (furthermore, since the grooves 4 are formed one at a time, there is a problem that mass productivity is lacking).
発明が解決しようとする課題
本発明は上記の点に鑑み、落下強度が強く、容易に各振
動子を区画し、不要振動が他の振動子に伝播しない圧電
振動子装置を得ることを目的とするものである。Problems to be Solved by the Invention In view of the above-mentioned points, the present invention aims to provide a piezoelectric vibrator device that has strong drop strength, easily partitions each vibrator, and prevents unnecessary vibrations from propagating to other vibrators. It is something to do.
課題を解決するための手段
この課題を解決するために本発明は、圧電振動板の少な
くとも一部に厚さ方向に沿う分極を施こし、この圧電振
動板の両面のうち少なくとも一方の面に複数個の電極を
設け、これらの電極間によって厚みすべり振動のエネル
ギーが閉じ込められる振動子を前記１枚の圧電振動板に
複数個構成し、さらに前記圧電振動板中に構成された各
振動子を区画するための穴が前記圧電振動板に形成され
ており、この穴に樹脂が充填硬化されてなるものである
。Means for Solving the Problem In order to solve this problem, the present invention provides polarization along the thickness direction on at least a portion of the piezoelectric diaphragm, and provides a plurality of polarizations on at least one of both surfaces of the piezoelectric diaphragm. A plurality of oscillators are provided in the piezoelectric diaphragm, and each oscillator formed in the piezoelectric diaphragm is partitioned. A hole for this purpose is formed in the piezoelectric diaphragm, and the hole is filled with resin and hardened.
作用
以上本発明により、落下強度を劣化することなく、しか
も容易に低価格で各振動子間の振動による悪影響を取り
除くことができる。As described above, according to the present invention, it is possible to easily remove the adverse effects of vibration between each vibrator at a low cost without deteriorating the drop strength.
実施例
本発明の実施例を図面に基づいて説明する。第３図、第
４図は圧電振動板の説明図であり、６は圧電振動板であ
り、７は電極である。矢印（イ）は分極方向、矢印（ロ
）は電界方向を示す。なお、電極７は第３図のように圧
電振動板６の片面のみに設けてもよいし、第４図のよう
に両面にわたって設けてもよい。Embodiment An embodiment of the present invention will be described based on the drawings. FIGS. 3 and 4 are explanatory diagrams of the piezoelectric diaphragm, where 6 is the piezoelectric diaphragm and 7 is an electrode. The arrow (a) indicates the polarization direction, and the arrow (b) indicates the electric field direction. The electrode 7 may be provided on only one side of the piezoelectric diaphragm 6 as shown in FIG. 3, or may be provided on both sides as shown in FIG.
第３図及び第４図は本発明の一実施例における圧電振動
子装置の構造を示し、第３図は平面図であり、第４図は
第３図のＢ−８’面の断面図である。第３図、第４図に
示すように、圧電振動板６の一方の面（または画面）の
両端部には複数個の電極７が形成されている。そして、
両側の各電極７．７間に３次の厚みすべり振動を用いた
エネルギー閉じ込め型の圧電振動子８が構成されている
。そして、前記各圧電振動子８を区画するための穴が前
記圧電振動板６に形成されており、この穴には圧電振動
板６の熱膨脹係数に近づけるために金属酸化物を含有し
た樹脂９が充填されている。これは、樹脂９により隣接
する振動子８の相互の振動による影響を軽減させるため
である。なお、１０はリード線である。3 and 4 show the structure of a piezoelectric vibrator device according to an embodiment of the present invention, FIG. 3 is a plan view, and FIG. 4 is a sectional view taken along the plane B-8' in FIG. 3. be. As shown in FIGS. 3 and 4, a plurality of electrodes 7 are formed at both ends of one surface (or screen) of the piezoelectric diaphragm 6. As shown in FIGS. and,
An energy trapping type piezoelectric vibrator 8 using third-order thickness shear vibration is constructed between each electrode 7.7 on both sides. A hole is formed in the piezoelectric diaphragm 6 to partition each piezoelectric vibrator 8, and a resin 9 containing a metal oxide is filled in this hole in order to make the thermal expansion coefficient close to that of the piezoelectric diaphragm 6. Filled. This is to reduce the influence of mutual vibration of adjacent vibrators 8 by the resin 9. Note that 10 is a lead wire.
上記圧電振動子の区画方法により、落下強度の劣化を防
ぐことができる上に、あらかじめ圧電振動子を区画する
穴を形成した圧電振動体（ブロック）に分極を施こし、
この穴に樹脂を充填、硬化させた状態で、ダイヤモンド
外周刃にて必要な厚さにスライスするという工法が採用
できるため、量産性にもすぐれている。The piezoelectric vibrator partitioning method described above not only prevents deterioration of drop strength, but also polarizes the piezoelectric vibrator (block) in which holes are formed in advance to partition the piezoelectric vibrator.
The hole is filled with resin, hardened, and then sliced to the required thickness using a diamond peripheral blade, making it highly suitable for mass production.
発明の詳細
な説明したように、本発明にかかる圧電振動子装置によ
れば、落下強度を劣化することなく隣接する圧電振動子
の振動によ、る影響を取除くことができる。また、あら
かじめ圧電振動子を区画する穴を形成した圧電振動板を
分極し、そして穴に樹脂を充填、硬化した状態で必要な
厚さにスライスするという工法が採用でき、量産性が良
いという効果が得られる。As described in detail, the piezoelectric vibrator device according to the present invention can eliminate the influence of vibrations of adjacent piezoelectric vibrators without deteriorating the drop strength. In addition, it is possible to adopt a method of polarizing a piezoelectric diaphragm with holes formed in advance to divide the piezoelectric oscillators, filling the holes with resin, and slicing it to the required thickness after hardening, which has the advantage of good mass production. is obtained.
第１図、第２図はそれぞれ本発明にかかる圧電振動板を
説明する図、第３図は本発明にかかる圧電振動子装置の
平面図、第４図は第３図のＢ−８’面の断面図、第５図
は従来例における圧電振動子装置の平面図、第６図は第
５図のＡ−Ａ ’面の断面図である。
６・・・・・・圧電振動板、７・・・・・・電極、８・
・・・・・圧電振動子、９・・・・・・樹脂。
代理人の氏名 弁理士 粟野重孝 はか１名第
図
第
図
第
図
第
図
第
図1 and 2 are diagrams for explaining a piezoelectric diaphragm according to the present invention, FIG. 3 is a plan view of a piezoelectric vibrator device according to the present invention, and FIG. 4 is a plane B-8' of FIG. 3. 5 is a plan view of a conventional piezoelectric vibrator device, and FIG. 6 is a sectional view taken along the line AA' in FIG. 6... Piezoelectric diaphragm, 7... Electrode, 8...
...Piezoelectric vibrator, 9...Resin. Name of agent: Patent attorney Shigetaka Awano (1 person)
Claims (1)
こし、この圧電振動板の両面のうち少なくとも一方の面
に複数個の電極を設け、これらの電極間によって厚みす
べり振動のエネルギーが閉じ込められる圧電振動子を前
記１枚の圧電振動板に複数個構成し、さらに前記圧電振
動板中に構成された各振動子を区画する穴が前記圧電振
動板に形成されており、この穴に樹脂が充填硬化されて
いることを特徴とする圧電振動子装置。At least a portion of the piezoelectric diaphragm is polarized along the thickness direction, a plurality of electrodes are provided on at least one of both surfaces of the piezoelectric diaphragm, and the energy of thickness shear vibration is confined between these electrodes. A plurality of piezoelectric vibrators are formed on the one piezoelectric diaphragm, and holes are formed in the piezoelectric diaphragm to partition each vibrator formed in the piezoelectric diaphragm. A piezoelectric vibrator device characterized by being filled and hardened.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8543989A JPH02264507A (en) | 1989-04-04 | 1989-04-04 | Piezoelectric vibrator device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8543989A JPH02264507A (en) | 1989-04-04 | 1989-04-04 | Piezoelectric vibrator device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02264507A true JPH02264507A (en) | 1990-10-29 |
Family
ID=13858894
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8543989A Pending JPH02264507A (en) | 1989-04-04 | 1989-04-04 | Piezoelectric vibrator device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02264507A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04240909A (en) * | 1991-01-25 | 1992-08-28 | Murata Mfg Co Ltd | Piezoelectric component |
| JPH0750547A (en) * | 1992-05-11 | 1995-02-21 | Tdk Corp | Higher harmonic mode ceramic trap and trap circuit |
| JP2007081749A (en) * | 2005-09-13 | 2007-03-29 | Nippon Dempa Kogyo Co Ltd | Tuning-fork crystal vibrator |
| JP2010226608A (en) * | 2009-03-25 | 2010-10-07 | Seiko Epson Corp | Bent vibrating piece and oscillator employing the same |
-
1989
- 1989-04-04 JP JP8543989A patent/JPH02264507A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04240909A (en) * | 1991-01-25 | 1992-08-28 | Murata Mfg Co Ltd | Piezoelectric component |
| JPH0750547A (en) * | 1992-05-11 | 1995-02-21 | Tdk Corp | Higher harmonic mode ceramic trap and trap circuit |
| JP2007081749A (en) * | 2005-09-13 | 2007-03-29 | Nippon Dempa Kogyo Co Ltd | Tuning-fork crystal vibrator |
| JP2010226608A (en) * | 2009-03-25 | 2010-10-07 | Seiko Epson Corp | Bent vibrating piece and oscillator employing the same |
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