JPH05118817A - Image processing type measuring apparatus - Google Patents

Abstract

PURPOSE:To obtain an image processing type measuring apparatus which produces little an adverse effect on the precision in positioning of a slider and can cope with its increase in size and increase in speed. CONSTITUTION:Movement of a slider 15 in the X-axis direction is transmitted to an auxiliary illuminating means 34 through the intermediary of a first timing belt 18, a second timing belt 25 disposed in a column and a third timing belt 29 disposed through the lower side of a loading stage 13. Accordingly, vibration accompanying acceleration and deceleration can be made smaller than in a usual structure wherein linkage by three arms is used. Therefore, this constitution has advantages that an effect produced on the precision in positioning of the slider 15 can be lessened and that an increase in speed can be met. Besides, an apparatus can be made compact.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an image processing type measuring machine. Specifically, in the image processing type measuring machine that irradiates the object to be measured placed on the table with illumination light and measures the size and shape of the object to be measured from the image obtained by the irradiation, The present invention relates to an improvement of a mechanism that moves an auxiliary illuminating unit, which is arranged on the opposite side of an image pickup unit, with the image pickup unit intervening.

[0002]

BACKGROUND ART A platform for mounting an object to be measured is provided on a gate-type column so as to be movable in the front-back direction (Y-axis direction), and a slider is provided on the column with respect to the traveling direction of the platform described above. The slider is provided so as to be movable in a direction (X-axis direction) orthogonal to each other, and the slider is provided with an illuminating means for irradiating the object to be measured with illumination light and an image pickup unit so as to be vertically movable (Z-axis direction). There is known an image processing type measuring machine for measuring the size and shape of an object to be measured from an image obtained by the method. For example, a non-contact image measuring coordinate measuring machine and the like are known.

In some non-contact image measuring three-dimensional measuring machines, in order to obtain a clearer image, the stage is made of a translucent material such as glass, and the stage is sandwiched between them. The auxiliary illumination means is arranged on the side opposite to the illumination means and the image pickup section, and the interlocking mechanism is provided for moving the auxiliary illumination means in synchronization with the movement of the slider in the X-axis direction in the X-axis direction. Are known.

The conventional interlocking mechanism has a first slider on the rear portion of the slider.
Of the second arm is connected horizontally (parallel to the Y-axis) to the rear, and a second arm is connected vertically downward (parallel to the Z-axis) to the rear end of the horizontal arm. A third arm whose tip is located below the stage at the lower end of the is connected horizontally (parallel to the Y-axis) to the front, and an auxiliary lighting means is attached upward to the tip of the third arm. This is a structure in which the auxiliary lighting means is moved in the X-axis direction in conjunction with the movement of the slider in the X-axis direction.

[0005]

However, in the conventional interlocking mechanism, since the slider and the auxiliary lighting means are interlocked by using three arms, vibration is generated each time the slider is accelerated or decelerated. It adversely affects the positioning accuracy of the slider. In particular, the larger the movement stroke of the stage in the Y-axis direction, the longer the lengths of the first and third arms must be made. It has a drawback that it cannot cope with the increase in size and speed.

The object of the present invention is to solve the above-mentioned conventional problems, and the positioning accuracy of the slider is not adversely affected, and the measuring machine can be made larger and faster. An object of the present invention is to provide an image processing type measuring machine capable of performing the same.

[0007]

Therefore, an image processing type measuring machine of the present invention is provided with a stage which is provided movably with respect to a column and which is made of a translucent material for placing an object to be measured. An imaging unit provided in the column so as to be movable in a direction orthogonal to the moving direction of the platform described above, and on the side opposite to the imaging unit across the platform described above along the moving direction of the imaging unit. And an endless strip that is rotatably linked with the movement of the image pickup unit, and an endless member that is movably provided and that illuminates the object to be measured with light passing through the object stage. And a transmission unit that moves the auxiliary illumination unit in synchronization with the moving direction of the imaging unit by the rotation of the strip.

[0008]

When the image pickup unit moves along the column in the direction orthogonal to the moving direction of the stage, the endless strip is rotated in association with the movement of the slider. As a result, the auxiliary illuminating unit is moved in synchronization with the moving direction of the imaging unit, so that the positioning accuracy of the slider is not adversely affected,
Therefore, it is possible to cope with an increase in the size and speed of the measuring machine. Further, the size can be reduced as compared with the conventional configuration of three arms.

[0009]

The preferred embodiments of the image processing type measuring machine of the present invention will be described below in detail with reference to the accompanying drawings. 1 is a perspective view showing the outer appearance of the present embodiment, FIG. 2 is a front view thereof, FIG. 3 is a side view thereof, and FIG. 4 is a perspective view showing a main part. In these figures, the base 11 has a column 1
2 is attached, and a stage 13 is provided so as to be movable in the front-rear direction (Y-axis direction) through the column 12. The column 12 has columns 12A and 1 on both sides.
2B and a horizontal beam 12C hung between the upper ends of the columns 12A and 12B on both sides of the column 2B to form a gate shape.
The stage 13 is for mounting an object to be measured on its upper surface.
It is formed in a plate shape from a translucent material such as glass.

A feed screw shaft 14 is supported horizontally and rotatably on a horizontal beam 12C which constitutes the column 12, and a slider 15 which engages with the feed screw shaft 14 is provided on the platform 13. It is provided so as to be movable in a direction (X-axis direction) orthogonal to the moving direction. A motor 16 is connected to one end of the feed screw shaft 14. As a result, when the motor 16 is rotationally driven, the slider 15 is moved in the X-axis direction via the rotation of the feed screw shaft 14.

A Z-axis member 17 is provided on the slider 15 so as to be movable in the vertical direction (Z-axis direction), and is provided as a first endless strip provided along the horizontal beam 12C. The timing belt 18 is connected. Z
At the lower end of the shaft member 17, a CCD camera 19 as an imaging unit and an illumination means (not shown) for illuminating the object to be measured with illumination light are provided. The first timing belt 18 includes a pulley 22 rotatably supported on one end of the horizontal beam 12C via a shaft 21 and the horizontal beam 1
It is wound around a pulley 24 that is rotatably supported via a shaft 23 on the other end side of 2C. Therefore, when the slider 15 is moved in the X-axis direction, the first timing belt 18 is rotated.

The second timing belt 25, which is an endless strip vertically hung around one of the columns 12B, and the lower surface of the platform 13 described above are interlocked with the rotation of the first timing belt 18. Passing the side, the columns 12A, 1 on both sides
The third timing belt 29, which is an endless strip and is wound between the lower portions of 2B, is sequentially rotated. Here, the first, second and third timing belts 18, 25 and 29 constitute a transmission means. The second timing belt 25 includes a pulley 24 attached to the shaft 23.
It is wound around between another pulley 26 attached separately from the other and a pulley 28 attached to a shaft 27 which is supported in the lower part of the one pillar 12B in parallel with the shaft 23 at a vertical position. There is. The third timing belt 29 is
Another pulley 30 attached to the shaft 27 separately from the pulley 28, and a pulley 32 attached to a shaft 31 supported in parallel with the shaft 27 in the same horizontal plane at the lower part of the other one of the columns 12A. It is hung around between.

On the upper portion of the third timing belt 29, an auxiliary illuminating means 34 is attached upward through a support member 33 at a position facing the CCD camera 19 with the object stand 13 interposed therebetween. .. Support member 33
Are slidably engaged with a linear guide 35 provided in parallel with the upper portion of the third timing belt 29. As a result, the CCD camera 19 and the auxiliary lighting means 34
And are positioned synchronously.

Next, the operation of this embodiment will be described. In measuring the size and shape of the object to be measured, after the object to be measured is placed on the stage 13, the stage 13 is moved in the Y-axis direction, the slider 15 is moved in the X-axis direction, and the Z-axis member 17 is moved. While moving in the Z-axis direction, the observation portion of the object to be measured is sequentially observed by the CCD camera 19 to perform measurement.

At this time, when the slider 15 moves in one direction in the X-axis direction, for example, in the right direction in FIG. 2, the first timing belt 18 rotates in the clockwise direction in FIG. Then, the second timing belt 25 moves clockwise in FIG.
Further, the third timing belt 29 is rotated clockwise in FIG. As a result, the auxiliary illumination means 34 connected to the third timing belt 29 via the support member 33 moves rightward in FIG. 2 by the amount of movement of the slider 15, so that the CCD camera 19 and the auxiliary illumination means 34 are separated from each other. Positioning can be done synchronously.

Therefore, according to the present embodiment, the slider 15
Since the movement in the X-axis direction is transmitted to the auxiliary lighting means 34 via the first, second and third timing belts 18, 25, 29, compared to the conventional structure in which three arms are interlocked. The vibration associated with acceleration / deceleration can be reduced. Therefore, the influence on the positioning accuracy of the slider 15 can be reduced, and there is an advantage that the measuring machine can be made larger and faster.

Further, the first timing belt 18 is arranged along the slider 15, the second timing belt 25 is arranged in the support column 12, and the third timing belt 29 is arranged on the lower surface of the stage 13. Through the side, the columns 12 on both sides
Since they are arranged between the lower parts of A, they are not exposed to the outside, they are neat and have a good appearance, and they do not interfere with the measurement operation. Moreover, there is an advantage that it can be made compact.

Although the present invention has been described with reference to the preferred embodiment, the present invention is not limited to this embodiment, and various improvements and design changes can be made without departing from the scope of the present invention. Of course it is possible.

For example, in the above embodiment, the slider 15 and the auxiliary illuminating means 34 are interlocked with each other by using the three timing belts 18, 25 and 29. However, in addition to the timing belt, another belt such as a steel belt is used. Alternatively, a wire or the like may be used. Further, although the second timing belt 25 is arranged in the column 12B of the column 12,
This may be arranged inside the column 12A, or may be arranged along the outer surface of the columns 12A and 12B.

[0020]

As described above, according to the image processing type measuring machine of the present invention, there is little adverse effect on the positioning accuracy of the slider, and there is an effect that the measuring machine can be made larger and faster.

[Brief description of drawings]

FIG. 1 is a perspective view showing an appearance of an embodiment of the present invention.

2 is a front view of the device of FIG. 1. FIG.

3 is a side view of the device of FIG. 1. FIG.

FIG. 4 is a perspective view showing a main part of the apparatus of FIG.

[Explanation of symbols]

 11 base 12 column 13 stage 15 slider 18 first timing belt (endless strip) 19 CCD camera (imaging unit) 25 second timing belt (endless strip) 29 third timing belt (endless strip) ) 34 Auxiliary lighting means

Claims (1)

[Claims] 1. A stage which is movably provided with respect to a column and which is made of a translucent material for placing an object to be measured, and a direction perpendicular to the moving direction of the stage on the column. And an image pickup unit movably provided on the opposite side of the image pickup unit with the object platform sandwiched between the image pickup unit and the image pickup unit movably along the moving direction of the image pickup unit. Auxiliary illumination means for irradiating the object to be measured with light and an endless strip that is rotated in association with the movement of the imaging section are provided, and the auxiliary illumination section is moved by the rotation of the endless strip. An image processing-type measuring instrument, comprising: a transmission unit that moves in synchronism with each other.