JP2010066058A - Synchronous movement device and image measuring apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a synchronous movement device capable of reducing effects of a sliding resistance of a following part on positional accuracy of a moving part. <P>SOLUTION: The synchronous movement device includes: an X-slider 53 being the moving part which is movably arranged on an X-beam 52 supported on a frame 2 through a beam support 51; a feed screw shaft 541 rotatably supported by the X-beam 52; a nut member 542 being threadably mounted on the feed screw shaft 541; a floating unit 7 for coupling the X-slider 53 with the nut member 542; and a following slider 82 being the following part which is movably arranged on the frame 2 and connected with the floating unit 7. The floating unit 7 includes: a first member 71 fixed to the X-slider 53; a second member 72 fixed to the nut member 542; and a middle member 73 which is sandwiched between them in order to absorb a vibrating motion of the feed screw shaft 541. The following slider 82 is connected to the second member 72 by using a wire 83. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a synchronous movement device and an image measurement device.

2. Description of the Related Art Conventionally, a slider that is movably provided in an apparatus main body and includes an imager such as a CCD camera and an illuminator that transmits and illuminates an object to be measured, based on image data captured by the imager. 2. Description of the Related Art An image measuring device that measures the shape or size of an object to be measured is known (for example, see Patent Document 1).
In such an image measuring apparatus, conventionally, a feed screw mechanism having a feed screw shaft and a nut member is provided, and a slider fixed to the nut member is provided so as to be movable back and forth in the axial direction of the feed screw shaft. When using the feed screw mechanism, the run-out motion (run-out) of the feed screw shaft that occurs with the rotation of the feed screw shaft is not directly transferred to the slider. A slider is fixed to a nut member through a floating unit. Since the swinging motion of the feed screw mechanism is absorbed by the floating unit, the influence of the swinging motion on the positional accuracy of the slider is reduced.
On the other hand, the illumination means is provided so as to be movable in a direction parallel to the moving direction of the slider. Conventionally, a slider and an illuminating means connected by a wire are used so that the illuminating means follows the imaging means when the slider moves.

JP 2006-266748 A

  However, in the above-described image measuring apparatus, since the slider as the movable part and the illumination means as the follower are connected by a wire, the sliding resistance generated by the movement of the illumination means itself is applied to the slider via the wire. It is transmitted. In order to further improve the measurement accuracy in the image measuring apparatus in which the influence of the swinging degree can be reduced by the aforementioned floating unit, there is a demand for eliminating the influence of the sliding resistance of the illumination means.

  An object of the present invention is to provide a synchronous moving device that can reduce the influence of the sliding resistance of the follower on the positional accuracy of the movable portion and can improve the positional accuracy of the movable portion, and the synchronous moving device. An image measuring apparatus is provided.

  The synchronous movement device of the present invention includes an apparatus main body, a movable part movably provided in the apparatus main body, a feed screw shaft that is rotatably supported by the apparatus main body and moves the movable part by a rotating operation, A nut member screwed to the feed screw shaft; a coupling device that couples the movable portion and the nut member; and a follower portion that is movably provided in the device main body; and by rotation of the feed screw shaft A synchronous movement device that moves the follower in synchronization with the movable portion when the movable portion is moved, wherein the coupling device includes a first member fixed to the movable portion, and the nut. A second member fixed to the member, and the feed screw shaft provided in a plane perpendicular to the axis of the feed screw shaft, provided between the first member and the second member The middle part that absorbs the swing motion of When being configured to have, the following section is characterized by being connected via a connecting member to the second member.

Here, a feed screw mechanism for moving the movable portion is configured by the feed screw shaft and the nut member, and a ball screw mechanism can be exemplified as the feed screw mechanism.
In this configuration, when the movable portion is moved by the feed screw mechanism, the follower portion connected to the second member of the coupling device via the connection member moves following the movable portion. At this time, since the deflection motion (swing) generated with the rotation of the feed screw shaft is absorbed by the intermediate member of the coupling device, it is not necessary to be transmitted to the first member of the coupling device. Furthermore, since the follower is connected to the second member of the coupling device by the connecting member, even if the sliding resistance generated by the movement of the follower itself is transmitted to the second member, it is the same as the deflection motion. The sliding resistance is absorbed by the intermediate member. Thereby, sliding resistance does not have to be transmitted to the first member. Therefore, it is possible to simultaneously suppress the influence on the position accuracy of the movable part due to the swinging motion of the feed screw shaft and the sliding resistance of the follower part, and the position accuracy of the movable part can be improved.

  In the synchronous movement device of the present invention, it is preferable that the connection member is a wire.

  According to this configuration, when the follower and the second member are connected by the wire, the extending direction of the wire can be changed relatively easily, so the positional relationship between the movable part and the follower with respect to the apparatus main body. Both can be connected according to Further, the installation space can be made relatively smaller than the belt or chain.

  In the synchronous movement device of the present invention, the follower moves in parallel with the moving direction of the movable part, and maintains a state of being located on an extension in a direction perpendicular to the moving direction of the movable part from the movable part. It is preferable to move while moving.

  According to this configuration, for example, when the object to be measured is disposed between the movable part and the tracking part and the object to be measured is imaged by the imaging means provided in the movable part, the object to be measured is illuminated on the tracking part. By providing the illuminating means to be used, the synchronous movement device of the present invention can be used as a transmission illuminating device that follows the movement of the imaging means. Further, for example, the tool for processing a workpiece is provided in the movable part, the nozzle of the processing oil is provided in the follower, and the synchronous movement device of the present invention is used as a working oil supply mechanism that follows the movement of the tool. It can be used.

  The image measuring apparatus of the present invention is provided between the above-described synchronous movement device, the movable unit and the follower unit, and a mounted unit on which the object to be measured is mounted, the movable unit, An imaging means for imaging the object to be measured; an illuminating means that is provided in the follow-up unit and that illuminates the object to be measured; and a moving mechanism that relatively moves the object to be measured and the imaging means; The shape or dimension of the object to be measured is measured based on the image data picked up by the image pickup means.

  In this configuration, when the image pickup means provided in the movable portion is moved by the feed screw mechanism of the synchronous movement device, the illumination means provided in the follow-up portion can move following the image pickup means. At this time, like the above-described synchronous movement device, the coupling device can simultaneously suppress the influence on the position accuracy of the imaging means due to the swinging motion of the feed screw shaft and the sliding resistance of the illumination means, thereby improving the measurement accuracy. Can be planned.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is an overall perspective view of an image measuring apparatus 1 according to the present embodiment. FIG. 2 is a perspective view showing the positional relationship between the moving mechanism 5 of the optical device 4 and the illumination means 6, omitting the illustration of the gantry 2 and the loading part 3 of the image measuring device 1 in FIG. 1.

As shown in FIG. 1, an image measuring apparatus 1 includes a gantry 2 serving as an apparatus main body, a placing part 3 provided on the gantry 2 so as to be movable in the Y-axis direction, and a subject to be measured, and a subject to be measured. An optical device (imaging means) 4 incorporating a CCD camera for imaging an object, a moving mechanism 5 for moving the optical device 4 in a two-dimensional manner (X-axis direction and Z-axis direction), and a frame 2 The illumination means 6 for transmitting and illuminating the object to be measured (FIG. 2) and the guide mechanism 8 (FIG. 2) for guiding the illumination means 6 in the X-axis direction are configured. Then, the object to be measured is imaged by the CCD camera of the optical device 4 in a state where the object to be measured is transmitted and illuminated by the illumination means 6, and the shape or dimension of the object to be measured can be measured based on the captured image data. ing.
Although the detailed structure of the mounting part 3 is not illustrated, the mounting part 3 includes a main body frame that is driven in the Y-axis direction by a driving mechanism, and a mounting glass 31 fixed on the main body frame. The object to be measured is placed on the placed glass 31.

  In FIG. 1, the moving mechanism 5 is movable along a pair of beam supports 51 erected on both ends of the gantry 2, an X-axis beam 52 erected on the beam support 51, and the X-axis beam 52. And an X-slider 53 as a movable part, and a ball screw mechanism (feed screw mechanism) 54 for feeding the X-slider 53 in the moving direction. Although not shown, the X slider 53 is provided with a Z slider that can move in the Z-axis direction, and the optical device 4 is supported by the Z slider.

As shown in FIG. 2, the X-axis beam 52 is formed to have a pair of side surfaces 521 and 522 orthogonal to the Y-axis direction, and an upper surface 523 and a lower surface 524 orthogonal to the Z-axis direction. A groove portion 525 is formed along the X-axis direction, and is formed in a U-shaped cross section.
The X-slider 53 is formed in a substantially U-shape that covers the three surfaces of the pair of side surfaces 521 and 522 and the upper surface 523 of the X-axis beam 52, and these three surfaces are supported by air bearings and move in the X-axis direction. It is provided as possible.

  The ball screw mechanism 54 is provided in the groove portion 525 of the X-axis beam 52 shown in FIG. 2, and a feed screw shaft 541 that is rotatably supported by the X-axis beam 52 and a nut screwed to the feed screw shaft 541. A member 542 (see FIG. 3), a floating unit 7 as a connecting device for connecting the nut member 542 and the X slider 53, and a motor 543 for rotating the feed screw shaft 541 are provided. When rotated, the X slider 53 is moved in the X-axis direction by the rotating operation.

  The end side of the feed screw shaft 541 is rotatably supported by the X-axis beam 52 by bearings 544 and 545, respectively. The motor 543 is connected to one end of the feed screw shaft 541 via a coupling, a timing belt, or the like.

  In FIG. 2, a guide mechanism 8 for guiding the illumination means 6 in the X-axis direction includes a guide 81 that is long in the X-axis direction and is supported by the gantry 2 on the inner side of the mounting part 3 (see FIG. 1). A follower slider 82 as a follower for sliding the guide 81 in the X-axis direction and a wire 83 as a connecting member for connecting the follower slider 82 to the floating unit 7 are provided. The illumination means 6 is provided on the follower slider 82.

  The floating unit 7 is provided with a wire fixing member 84 for connecting the wire 83. Both ends of the wire 83 are connected to the wire fixing member 84, and the wire 83 extends from the wire fixing member 84 along both directions in the X-axis direction. Hereinafter, the extending path of the wire 83 will be described. The wire 83 having one end connected to the wire fixing member 84 is first extended to the bearing 544 side along the feed screw shaft 541. Then, the direction is changed in the Z-axis direction and extends downward toward one end of the guide 81, and further extends along the guide 81 to the other end (right side in the drawing) of the guide 81. Then, it is folded back at the other end of the guide 81 and extends again to one end (left side in the figure) along the guide 81 again. The follower slider 82 is fixed to an intermediate portion of the wire 83 extending from the other end of the guide 81 toward the one end. Furthermore, the wire 83 is folded back at one end of the guide 81 and extends again to the other end along the guide 81. Then, the direction is changed in the Z-axis direction at the other end of the guide 81 and extends upward toward the bearing 545 on the motor 543 side of the feed screw shaft 541. Further, the wire 83 extends toward the wire fixing member 84 along the feed screw shaft 541, and the other end of the wire 83 is connected to the wire fixing member 84.

  The follower slider 82 is provided on the guide 81 so as to be positioned on a line in the Z-axis direction passing through the objective lens 41 provided in the optical device 4 with respect to the optical device 4 of the X slider 53, and the X slider 53 moves. In doing so, it moves following the X slider 53 while maintaining the positional relationship with the optical device 4. When the feed screw shaft 54 is rotated and the X slider 53 is moved, the follower slider 82 is moved in synchronization with the X slider, and the mounted portion 3 (see FIG. 1) disposed between the optical device 4 and the illumination means 6. (See above) The object to be measured is transmitted and illuminated by the illumination means 6.

  The X slider 53 is formed with a wire through-hole 531 along the X-axis direction through which a wire 83 extending along the feed screw shaft 541 is inserted. By forming the wire through hole 531, the operation of connecting the follower slider 82 and the floating unit 7 with the wire 83 is facilitated, and the wire 83 can be provided without interfering with the X slider 53.

Hereinafter, the connection portion between the wire 83 and the floating unit 7 will be described with reference to FIGS.
FIG. 3 is an enlarged partial perspective view showing the ball screw mechanism 54. 4 is an exploded view of FIG. 3, and FIG. 5 is a cross-sectional view of the ball screw mechanism 54.
As shown in FIGS. 3 to 5, the floating unit 7 is fixed to the mounting portion 532 formed integrally with the X slider 53 inside the X slider 53 with four bolts 74 (FIG. 4). 1 member 71, a second member 72 fixed to the nut member 542 with four bolts 75 and having a feed screw shaft 541 inserted in the center, and the first member 71 and the second member 72. And an intermediate member 73 that absorbs the deflection motion of the feed screw shaft 541 in a plane orthogonal to the axis of the feed screw shaft 541.
As shown in FIG. 5, the attachment portion 532 of the X slider 53 that fixes the first member 71 is provided side by side in the axial direction of the feed screw shaft 541 with respect to the first member 71, and the nut member 542 is provided therein. A storage space 533 for storing the storage space is formed. The nut member 542 is provided side by side in the axial direction with respect to the second member 72, and is connected to a flange portion 722 formed at the end of the second member 72.

  As the intermediate member 73 of the floating unit 7, for example, a member provided with a joint mechanism arranged in the YZ axis direction can be adopted, and pitching error, yawing error and rolling error in the ball screw mechanism 54 by the joint mechanism. Etc. may be absorbed.

  In FIG. 4, the wire fixing member 84 is screwed to the second member 72 with screws 842 via two spacers 841. The two spacers 841 are screwed into the tap portions 721 (two places) formed on the second member 72. The wire fixing member 84 has attachment holes 843 (two places) for fixing the wire 83 (FIG. 3), and the ends of the wires 83 are connected to the attachment holes 843, respectively. Although the tension of the wire 83 generated along with the movement of the X slider 53 is applied to the second member 72 of the floating unit 7, the tension is not easily transmitted to the first member 71 by the intermediate member 73. As a result, the X slider 53 is not affected by the tension of the wire 83.

  Although not shown, the image measuring apparatus 1 includes a control unit, an input unit such as a keyboard, and an output unit such as a monitor and a printer. The control unit includes a host controller incorporating a motion controller that controls the movement of the CCD camera and an analysis unit that analyzes the shape and dimensions of the object to be measured based on image data captured by the CCD camera.

  In such a configuration, when the object to be measured is placed on the mounting glass 31 shown in FIG. 1 and the optical device 4 is moved according to the part to be measured, the illumination means 6 shown in FIG. It moves following the optical device 4 while transmitting and illuminating, and the object to be measured is imaged by the CCD camera of the optical device 4. Then, the image is analyzed by the analysis unit based on the image data, and the shape, size, etc. of the object to be measured are measured.

  As the synchronous movement device of the present invention, the gantry 2 which is the above-described device main body, an X-axis beam 52 supported on the gantry 2 via a beam support 51, and the X-axis beam 52 can be moved. An X slider 53 which is a movable portion provided, a feed screw shaft 541 rotatably supported by the X-axis beam 52, a nut member 542 screwed to the feed screw shaft 541, an X slider 53 and a nut member 542 Examples include a floating unit 7 that is a connecting device that connects the two, and a follower slider 82 that is movably provided on the gantry 2 and is connected to the floating unit 7 as a follower. The floating unit 7 is interposed between the first member 71 fixed to the X slider 53, the second member 72 fixed to the nut member 542, the first member 71 and the second member 72. The follower slider 82 is configured to be connected to the second member 72 via a wire 83. The intermediate slider 73 is provided to absorb the deflection motion of the feed screw shaft 541.

According to this embodiment, the following effects can be achieved.
(1) When the optical device 4 (FIG. 2) provided on the X slider 53 is moved by the ball screw mechanism 54 shown in FIG. 3, the tracking slider 82 connected to the second member 72 of the floating unit 7 by the wire 83. (FIG. 2) moves following the X slider 53. Thereby, the illumination means 6 provided on the tracking slider 82 can transmit and illuminate the object to be measured in accordance with the position of the optical device in the X-axis direction. At this time, the deflection motion (swing) that occurs as the feed screw shaft 541 rotates is absorbed by the intermediate member 73 of the floating unit 7, so that the deflection motion is not transmitted to the first member 71 of the floating unit 7. I'm sorry. Further, since the follower slider 82 is connected to the second member 72 of the floating unit 7 by the wire 83, even if the sliding resistance of the follower slider 82 with respect to the guide 81 is transmitted to the second member 72, Since the sliding resistance is absorbed by the intermediate member 73 in the same manner as the deflection motion, it is not necessary to be transmitted to the first member 71. Therefore, the influence on the positional accuracy of the X slider 53 due to the swing motion of the feed screw shaft 541 and the sliding resistance of the follower slider 82 can be suppressed at the same time, the positional accuracy of the X slider 53 can be improved, and the measurement accuracy can be improved. Improvements can be made.

(2) As shown in FIG. 2, when the follower slider 82 and the second member 72 are connected by the wire 83, the extending direction of the wire 83 can be changed relatively easily. Depending on the positional relationship of the follower slider 82, the wire 83 can be arranged so as not to interfere with the mounted part 3 or the like. Also, the installation space can be made relatively smaller than the belt or chain.

(3) For driving the X-slider 53, the ball screw mechanism 54 with low friction loss and high-accuracy positioning is adopted, and the floating unit 7 for absorbing the deflection motion is provided. Even when the output is increased and the acceleration of the X slider 53 is increased, high measurement accuracy can be maintained and the measurement time can be shortened.

It should be noted that the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
For example, in the above-described embodiment, the ball screw mechanism is exemplified as the feed screw mechanism, but other than the ball screw mechanism may be used as long as the feed screw mechanism moves the X slider by the feed screw shaft and the nut member.
Moreover, although the case where the wire fixing member was used in order to connect a wire to the 2nd member was demonstrated in the said embodiment, it is not restricted to this, You may connect a wire to the 2nd member by another method. .

  In addition, the synchronous movement device of the present invention is not limited to the case of using the image measuring device described above. For example, a tool for processing a workpiece is provided on the movable part, and a nozzle for processing oil is provided on the follower part. Also, the present invention can be applied to a machine tool equipped with a processing oil supply device that follows the movement of a tool through a nozzle.

In addition, the best configuration, method and the like for carrying out the present invention have been disclosed above, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations.
Therefore, the description limited to the shape, material, etc. disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such is included in this invention.

  INDUSTRIAL APPLICABILITY The present invention can be widely used for an image measuring device and a synchronous moving device that moves a follower in synchronization with other movable parts.

1 is an overall perspective view of an image measuring apparatus according to an embodiment of the present invention. The perspective view which shows the moving mechanism and illumination means of the image measuring device of the said embodiment. The partial perspective view which expands and shows the feed screw mechanism in the moving mechanism of the said embodiment. FIG. 4 is an exploded view of the feed screw mechanism of FIG. 3. Sectional drawing of the connection part of the movable part of the moving mechanism of the said embodiment, and a feed screw mechanism.

Explanation of symbols

1. Image measuring device (synchronous moving device)
2 ... Stand (device body)
3 ... Mounted part 4 ... Optical device (imaging means)
5 ... Moving mechanism 6 ... Illuminating means 7 ... Floating unit (connecting device)
53 ... X slider (movable part)
71 ... 1st member 72 ... 2nd member 73 ... Intermediate member 82 ... Follow-up slider (follow-up part)
83 ... Wire (connection member)
541 ... Feed screw shaft 542 ... Nut member.

Claims (4)

The device body;
A movable part movably provided in the apparatus body;
A feed screw shaft that is rotatably supported by the apparatus main body and moves the movable part by a rotating operation;
A nut member screwed onto the feed screw shaft;
A connecting device for connecting the movable part and the nut member;
A synchronously moving device that moves the follower in synchronization with the movable part when the movable part is moved by rotation of the feed screw shaft. There,
The connecting device is
A first member fixed to the movable part;
A second member fixed to the nut member;
An intermediate member that is interposed between the first member and the second member and absorbs the deflection motion of the feed screw shaft in a plane orthogonal to the axis of the feed screw shaft;
Comprising
The follow-up unit is connected to the second member via a connection member. The synchronous mobile device according to claim 1, wherein
The synchronous moving device, wherein the connecting member is a wire. In the synchronous movement apparatus of Claim 1 or Claim 2,
The follower moves in parallel with the moving direction of the movable part, and moves while maintaining a state of being located on an extension in a direction orthogonal to the moving direction of the movable part from the movable part. Synchronous mobile device. A synchronous mobile device according to any one of claims 1 to 3,
A load part provided between the movable part and the follower part, on which the object to be measured is placed;
An imaging means provided on the movable part for imaging the object to be measured;
An illuminating means that is provided in the follow-up unit and illuminates the object to be measured;
A moving mechanism for relatively moving the object to be measured and the imaging means,
An image measuring apparatus for measuring a shape or a dimension of the object to be measured based on image data picked up by the image pickup means.

Images