JP3124884U - Joint mechanism and measuring instrument - Google Patents

Abstract

A joint mechanism capable of driving a stage with high accuracy and a measuring instrument are provided.
A stage device of a measuring instrument is provided with a support portion 270 that is movable forward and backward along the axial direction of a first support shaft 260 and rotatable about an axis with respect to a stage mounting portion 250 to which the stage is fixed. And a bar attaching portion 290 to which a friction bar provided so as to be movable back and forth along the axial direction of the second support shaft 280 provided on the support portion 270 and rotatable about the shaft is fixed. As a result, whatever vibration or force is applied to the friction bar, the vibration or force can be prevented from being transmitted to the stage, and the stage can be accurately moved in the advancing / retreating direction of the friction bar.
[Selection] Figure 3

Description

  The present invention includes a joint mechanism for connecting a shaft member and a movable member, in particular, a movable member for placing an object to be measured, and a shaft member for moving the movable member to a position where the object to be measured is measured. The present invention relates to a joint mechanism for connecting a shaft member and a movable member in a measuring instrument, and a measuring instrument including the joint mechanism.

  2. Description of the Related Art Conventionally, a joint mechanism that prevents vibration of a shaft member at a portion that connects the shaft member and a support member that supports the shaft member is known (see, for example, Patent Document 1 and Patent Document 2).

The thing of patent document 1 employ | adopts the structure by which a ball | bowl is provided in the collar part provided in the upper end of a support shaft, and the support shaft is supported by the bearing piece via this ball | bowl.
The one described in Patent Document 2 has a configuration in which a slide pad is provided in contact with an air pad fixed to a cross beam, and a self-aligning ball bearing is provided between the slide pad and a support shaft. Yes. The air pad is provided with a plurality of air holes on the surface that comes into contact with the slide pad, and an air film is formed between the air pad and the slide pad when air is supplied from the outside.

JP 2003-1458581 A JP 2005-230949 A

By the way, in the conventional joint mechanism using only the balls as described in Patent Document 1, it is possible to prevent the vibration in the rotation direction of the support shaft well, but it is not possible to release the force in the radial direction. Problem.
In the configuration using the air pad as described in Patent Document 2, vibration due to the radial force of the support shaft can be prevented by the air film, but vibration due to the force in the rotational direction of the support shaft cannot be released. Is mentioned.

  An object of this invention is to provide the joint mechanism and measuring device which can drive a movable member accurately.

  The joint mechanism of the present invention is a joint mechanism that connects a shaft member provided so as to freely advance and retract along the axial direction and a movable member provided on one end side of the shaft member and movable by the advancement and retraction of the shaft member. The movable member is attached and has a hollow first hollow portion therein, and a movable portion mounting portion in which a first support shaft is provided in the first hollow portion, and the first support shaft, The first support shaft is provided so as to be movable back and forth along the axial direction and rotatable about the first support shaft, and has a hollow second hollow portion therein. A support member having a second support shaft disposed substantially intersecting with the support shaft; and the second support shaft is movable forward and backward along the axial direction of the second support shaft and centered on the second support shaft It is provided so as to be rotatable, and the shaft member is attached. A shaft mounting portion being, characterized by comprising a.

According to this device, the support member can be rotated with respect to the movable member mounting portion and can be moved back and forth along the axial direction of the first support shaft, and the shaft mounting portion can be rotated with respect to the support member. It is provided so as to be able to advance and retract along the axial direction of the second support shaft. For this reason, when the shaft member vibrates in the radial direction, the support member and the movable portion mounting portion move along the axial directions of the first support shaft and the second support shaft. Do not propagate to stage. Even when the shaft member vibrates in the rotational direction, the support member and the shaft mounting portion are rotatably provided on the first support shaft and the second support shaft, so that the vibration of the shaft member can be released and moved. It does not propagate to the member mounting part and the movable member. Therefore, the propagation of the vibration of the shaft member to the movable part mounting portion and the movable member can be well prevented, and the vibration of the movable member can be prevented. Therefore, even if the shaft member vibrates, the movable member can be moved with high accuracy.
Further, the support member is arranged on the first support shaft provided in the first hollow portion inside the movable member attachment portion, and the shaft attachment portion is arranged on the second support shaft provided in the second hollow portion inside the support member. Therefore, an increase in the thickness dimension of the joint mechanism can be prevented and downsizing can be achieved.

In the joint mechanism of the present invention, the movable portion mounting portion includes a first support hole that communicates the first hollow portion and the outside, and the first support shaft is interposed in the first support hole via a ball member. It is preferable to be provided.
According to this device, the first support shaft is provided via the ball member in the first support hole of the movable portion mounting portion. As a result, the first support shaft can move forward and backward along the axial direction and can rotate about the shaft. Therefore, the support member provided on the first support shaft can also move forward and backward along the first support shaft and the first support. It can rotate around the axis. Therefore, it is possible to support the support member so as to be movable back and forth along the axial direction of the first support shaft and to be rotatable about the shaft with a simple configuration.

Furthermore, in the joint mechanism of the present invention, the support member includes a second support hole that communicates the second hollow portion with the outside, and the second support shaft is inserted into the second support hole via a ball member. It is preferable to be provided.
According to this device, the second support shaft is provided in the second support hole of the support member via the ball member. As a result, the second support shaft can move forward and backward along the axial direction and can rotate about the shaft. Therefore, the shaft mounting portion attached to the second support shaft can also move forward and backward along the second support shaft and can rotate freely. Become. Therefore, it is possible to support the shaft mounting portion with a simple configuration so as to be movable back and forth and rotatable along the axial direction of the second support shaft.

And in the joint mechanism of this invention, it is preferable that said 1st support shaft and said 2nd support shaft are arrange | positioned in the state substantially mutually orthogonally crossed.
According to this device, since the first support shaft and the second support shaft are disposed in a state of being substantially orthogonal to each other, no matter which direction the shaft member oscillates and is displaced with respect to the radial direction, Even if it vibrates in any rotation direction, the vibration can be released well. Therefore, it is possible to more reliably prevent the vibration of the movable portion mounting portion and the movable member.

  The measuring device of the present invention is provided on a driving roller that is rotationally driven and a shaft member that is in contact with the driving roller and is movable forward and backward in the axial direction by the rotation of the driving roller, and at one end of the shaft member. A movable member for placing an object, the joint mechanism according to any one of claims 1 to 4 that connects the shaft member and the movable member, and the object to be measured placed on the movable member is measured. Measuring means.

  According to this device, since the shaft member and the movable member are connected by the joint mechanism as described above, the movable member can be moved with high accuracy without error by the movement of the shaft member. Therefore, the movement accuracy of the movable member in the measuring instrument is improved, and the measurement accuracy can be improved.

  Hereinafter, a measuring instrument according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram schematically showing an outline of a measuring instrument according to an embodiment of the present invention. FIG. 2 is a perspective view showing an outline of the stage apparatus according to the present embodiment. FIG. 3 is a cross-sectional view showing an outline of a floating unit as a joint mechanism of the present embodiment.

  In FIG. 1, reference numeral 100 denotes a measuring instrument. The measuring instrument 100 is an object to be measured placed on a stage 210 as a movable member, for example, an electro device, a precision mold, an aspheric lens mold, a MEMS (Micro This is a high-precision measuring instrument that precisely measures the fine shapes of parts such as mechanical component parts, sensors, actuators, and electronic circuits that make up the Electro Mechanical System. The measuring instrument 100 includes a camera device 110 as a measuring unit, a control unit 120, a stage device 200, and the like.

  The camera device 110 is provided to face the stage 210 of the stage device 200. The camera device 110 includes a lens 111 facing the stage surface of the stage 210, and converts the light incident on the lens 111 into image data by an image conversion unit (not shown) and outputs it to the control unit 120 as appropriate.

The control unit 120 is electrically connected to the camera device 110 and the friction unit 230 of the stage device 200. Then, the control unit 120 controls the camera device 110 to acquire an image of the measurement object placed on the stage 210. Further, the control unit 120 controls the friction unit 230 to move the stage 210 of the stage apparatus 200.
Further, the control unit 120 is connected to an input / output terminal (not shown), and is connected to an external device (not shown) such as a personal computer via the input / output terminal. Then, the control unit 120 outputs image data recognized by the camera device 110 to an external device via an input / output terminal, or command information for driving the camera device 110 or the stage device 200 input from the external device. And so on.

  As shown in FIG. 2, the stage apparatus 200 includes a stage 210 as a movable member, a friction bar 220 as a shaft member, a friction unit 230, a floating unit 240 as a joint mechanism, and the like.

The stage 210 is formed, for example, in a plate shape, and a stage surface on which the measurement object as described above is placed is formed on the upper surface. A friction bar 220 is connected to one side surface of the stage 210 via a floating unit 240. Then, the stage 210 moves in a predetermined direction as the friction bar 220 moves.
In addition, a movement assist unit having wheels (not shown) is provided on the lower surface side of the stage 210 to assist the movement of the stage 210. In addition, a wheel may not be provided in a movement assistance part, for example, it is good also as a structure provided with the sliding contact part which a sliding groove is formed along the moving direction of the stage 210, and contacts a sliding groove.

  The friction bar 220 is a long bar-shaped member formed in a substantially rectangular cross section. As described above, the stage 210 is connected to one end side of the friction bar 220 via the floating unit 240. On the other hand, the other end side of the friction bar 220 is inserted into the friction unit 230. The friction bar 220 is provided so as to advance and retract along the axial direction by the driving force transmitted from the friction unit 230.

The friction unit 230 includes a case body 231, a drive roller 232 stored inside the case body 231, and a motor (not shown) that drives the drive roller 232 to rotate. An insertion hole through which the friction bar 220 is inserted is provided on the surface of the case body 231 facing the stage 210. The driving roller 232 is a long cylindrical member, and is disposed at substantially the same height as the insertion hole of the case body 231 so as to be rotatable about the axis. It is in contact with the end face. At this time, the drive roller 232 is disposed in a state substantially orthogonal to the axial direction of the friction bar 220 so that the rotation direction and the axial direction of the friction bar 220 are substantially coincident with each other.
As described above, the motor is connected to the control unit 120 and is driven according to an electric signal input from the control unit 120 to drive the drive roller 232 to rotate.

  The floating unit 240 connects the stage 210 and one end of the friction bar 220. As shown in FIG. 3, the floating unit 240 includes a stage mounting portion 250 as a movable portion mounting portion, a first support shaft 260, a support portion 270 as a support member, a second support shaft 280, and a shaft mounting. And a bar attaching portion 290 as a portion.

The stage mounting portion 250 is formed in a substantially rectangular frame shape that opens on the stage 210 side and the friction bar 220 side, for example, by a metal member or the like. One side surface of the stage 210 is brought into contact with the opening of the stage mounting portion 250 on the stage 210 side, and is fixed by, for example, screwing or adhesive. In addition, the frame inner peripheral part of the stage attachment part constitutes the first hollow part of the present invention.
In addition, first support holes 251 communicating the inner and outer peripheries of the frame are formed at approximately the center positions of two opposite sides constituting the frame of the stage mounting portion 250. The first support shafts 260 are inserted into the first support holes 251 through first bearings 252 as ball members, respectively. That is, a first support shaft 260 is provided in the first support hole 251 via the first bearing 252 so as to be able to advance and retract and rotate along the axial direction of the first support hole 251.

  The first support shafts 260 are respectively provided corresponding to the two first support holes 251 provided on the two opposite sides of the stage mounting portion 250 as described above. Therefore, these first support shafts 260 are arranged coaxially. One end portions of the first support shaft 260 on the inner peripheral side of the stage mounting portion 250 are connected to opposite sides of the support portion 270, respectively.

Similar to the stage mounting portion 250, the support portion 270 is formed in, for example, a substantially rectangular frame shape that is opened by a metallic member on the stage 210 side and the friction bar 220 side. It is arrange | positioned in the position separated only by the dimension. At this time, the support portion 270 is disposed so that each side of the frame is substantially parallel to each side of the frame of the stage mounting portion 250. In addition, the gap between the outer peripheral surface of the support portion 270 and the inner peripheral surface of the stage mounting portion 250 is formed to be smaller than the frame thickness of the stage mounting portion 250. As a result, the first support shaft 260 does not fall out of the first support hole 251 when the support portion 270 moves back and forth along the axial direction of the first support shaft 260. In addition, the frame inner peripheral part of this support part 270 comprises the 2nd hollow part of this invention.
The support portion 270 is formed with first support shaft connection holes 271 at positions facing the first support holes 251 of the stage mounting portion 250. The first support shaft connection hole 271 is connected and fixed by inserting one end side of the first support shaft 260.

  Further, a second support hole 272 that communicates between the inside and the outside is formed at approximately the center position of two opposite sides where the first support shaft coupling hole 271 of the support portion 270 is not formed. A second support shaft 280 is inserted through these second support holes 272 via a second bearing 273 as a ball member. That is, a second support shaft 280 is provided in the second support hole 272 via the second bearing 273 so as to be able to advance and retreat along the axial direction of the second support hole 272.

  As described above, the second support shaft 280 is inserted into the second support hole 272 of the support portion 270 so as to be substantially orthogonal to the first support shaft 260, and is provided so as to be movable forward and backward along the axial direction. ing. The second support shaft 280 communicates with the bar attaching portion 290 and fixes the bar attaching portion 290 at a substantially central position.

The bar attaching part 290 is formed in a substantially rectangular shape in cross section, and is arranged on the inner peripheral side of the support part 270 at a position separated from the inner peripheral surface of the frame by a predetermined dimension.
A second support shaft communication hole 291 is provided at a position facing the second support hole 272 of the support portion 270 of the bar mounting portion 290. The second support shaft communication hole 291 is formed so as to communicate from the side facing one of the second support holes 272 to the side facing the other second support hole. The second support shaft 280 is connected and fixed.
Further, the gap dimension between the bar attaching part 290 and the support part 270 is formed smaller than the frame thickness dimension of the support part 270. As a result, the second support shaft 280 does not fall out of the second support hole 272 when the bar mounting portion 290 advances and retracts along the axial direction of the second support shaft 280.
Further, the friction bar 220 is brought into contact with the end surface of the bar mounting portion 290 on the friction bar 220 side and fixed by, for example, screwing or adhesive.

[Operation of measuring instrument]
Next, the operation of the stage apparatus 200 in the operation of the measuring device 100 will be described.

When the measuring apparatus 100 is activated and a request signal for moving the stage 210 is input from the control unit 120 to the stage apparatus 200, for example, the stage apparatus 200 drives the motor of the friction unit 230 in response to the request signal. Thus, the drive roller 232 is driven to rotate.
As a result, the friction bar 220 in contact with the drive roller 232 moves forward and backward along the axial direction according to the rotation direction of the drive roller 232, and the stage 210 also moves forward and backward according to the movement of the friction bar 220.

At this time, when the friction bar 220 vibrates in the radial direction around the axis, that is, in the radial direction, the support portion 270 and the bar mounting portion 290 of the floating unit 240 are connected to the first support shaft 260 and the second support shaft 280. Move along the axial direction.
For example, when the friction bar 220 vibrates along the axial direction of the first support shaft 260, the support portion 270 moves forward and backward along the first support shaft 260. Further, when the friction bar 220 vibrates along the axial direction of the second support shaft 280, the bar mounting portion 290 moves forward and backward along the second support shaft 280. Furthermore, even when the friction bar 220 vibrates in the radial direction between the axial direction of the first support shaft 260 and the axial direction of the second support shaft 280, the support portion 270 and the bar mounting portion 290 are respectively It moves along the axial direction of the second support shaft 280, and the vibration is released. Thereby, the vibration of the friction bar 220 is not transmitted to the stage mounting portion 250 and the stage 210.

Further, when a rotational force is applied due to displacement of the end of the friction bar 220 on the friction unit 230 side, the support portion 270 and the bar mounting portion 290 of the floating unit 240 are connected to the first support shaft 260 and the first support shaft 260, respectively. The two support shafts 280 are rotated about the center.
For example, when a rotational force is applied to the friction bar 220 because the contact surface of the friction bar 220 with the drive roller 232 is shifted in the axial direction of the drive roller 232, the bar mounting portion 290 is moved to the second support shaft 280. Rotate around. When the friction bar 220 is separated from the peripheral surface of the drive roller 232 and a force in the rotational direction is applied to the friction bar 220, the support portion 270 rotates about the first support shaft 260. Further, when the friction bar 220 is displaced in the axial direction of the driving roller 232 and is separated from the peripheral surface of the driving roller 232, the support portion 270 rotates about the first support shaft 260 and the bar mounting portion 290. Rotates about the second support shaft 280, and the rotational force is released. As a result, the rotational force of the friction bar 220 is released, and the force is not transmitted to the stage mounting portion 250 and the stage 210.

[Effects of Embodiment]
According to 1st Embodiment mentioned above, there can exist the following effects.
(1) In the stage apparatus 200 of the measuring instrument 100, the support portion 270 can move forward and backward along the axial direction of the first support shaft 260 with respect to the stage mounting portion 250 to which the stage 210 is fixed, and can rotate about the axis. A bar mounting portion 290 to which the friction bar 220 is fixed is provided to the support portion 270 so as to be movable back and forth along the axial direction of the second support shaft 280 and to be rotatable about the axis.
Therefore, when the friction bar 220 vibrates in the radial direction, the support portion 270 and the bar mounting portion 290 move along the first support shaft 260 and the second support shaft 280, respectively, and the vibration is transmitted to the stage 210. Can be prevented. Further, when a rotational force is applied to the friction bar 220, the support portion 270 and the bar mounting portion 290 rotate about the first support shaft 260 and the second support shaft 280, respectively, and the rotational force is applied to the stage 210. Can prevent transmission. Therefore, even if any vibration or force is applied during the movement of the friction bar 220, the vibration or force can be prevented from being transmitted to the stage 210, and the stage 210 can be moved in the advancing / retreating direction of the friction bar 220 with high accuracy. . Therefore, the object to be measured placed on the stage 210 can be accurately measured by the camera device 110.
In addition, the stage attaching part 250 and the supporting part 270 are formed in a frame shape, the supporting part 270 is provided on the inner peripheral side of the stage attaching part 250, and the bar attaching part 290 is provided on the inner peripheral side of the supporting part 270. . For this reason, the increase in the thickness dimension of the floating unit 240 can be suppressed, and it can respond to size reduction.

  (2) The first support shaft 260 is inserted into the first support hole 251 provided in the stage mounting portion 250 via the first bearing 252. For this reason, the first support shaft 260 can be easily attached to the stage attaching portion 250 so as to be movable forward and backward. Therefore, by fixing the support portion 270 to the first support shaft 260, the support portion 270 is supported by a simple configuration so that the support portion 270 can move forward and backward along the axial direction of the first support shaft 260 and can rotate about the shaft. be able to.

  (3) The second support shaft 280 is inserted through the second support hole 272 provided in the support portion 270 via the second bearing 273. For this reason, the 2nd support shaft 280 can be easily attached to the support part 270 so that advancement / retraction and rotation are possible. Therefore, by fixing the bar mounting portion 290 to the second support shaft 280, the bar mounting portion 290 can be moved forward and backward along the axial direction of the second support shaft 280 with a simple configuration and rotatable about the axis. Can be supported.

  (4) The first support shaft 260 and the second support shaft 280 are disposed substantially orthogonal to each other. Therefore, even if the friction bar 220 is vibrated and displaced in any direction in the radial direction, and no matter which direction the rotational force is applied, these vibrations and rotational force can be released. That is, when the friction bar 220 vibrates in any direction between the axial direction of the first support shaft 260 and the axial direction of the second support shaft 280, the first support shaft 260 and the second support shaft 280 are axially moved. By advancing and retracting, this vibration can be easily released. Even if the contact position of the friction bar 220 with the drive roller 232 is displaced in the axial direction of the drive roller 232 and away from the circumferential surface of the drive roller 232, the support portion 270 and the bar mounting portion 290 are not moved. By rotating around the first support shaft 260 and the second support shaft 280, vibration can be easily released by this displacement. Therefore, vibration of the stage 210 can be prevented more reliably, and the stage 210 can be moved with higher accuracy.

[Modification of Embodiment]
The present invention has been described with reference to preferred embodiments. However, the present invention is not limited to these embodiments, and various improvements and design changes can be made without departing from the scope of the present invention. Is possible.

  For example, in the above-described embodiment, the example in which the gap dimension between the stage mounting part 250 and the support part 270 is formed smaller than the thickness dimension of the stage mounting part 250 is shown, but the present invention is not limited to this. That is, the gap dimension between the stage mounting portion 250 and the support portion 270 may be such that the first support shaft 260 does not fall out of the first support hole 251 when the support portion 270 moves forward and backward along the first support shaft 260. For example, if the length dimension of the first support shaft 260 is increased, the gap dimension between the stage attachment part 250 and the support part 270 may be formed larger than the thickness dimension of the stage attachment part 250. . Similarly, the gap dimension between the support part 270 and the bar attaching part 290 may be a dimension that the second support shaft 280 does not fall out of the second support hole 272. For example, the long dimension of the second support shaft 280 is increased. The gap dimension between the support part 270 and the bar attaching part 290 may be formed larger than the thickness dimension of the support part 270.

  In the above embodiment, the stage mounting portion 250 and the support portion 270 of the floating unit 240 are formed in a substantially rectangular frame shape, and the bar mounting portion 290 is formed in a substantially rectangular cross section. It is not limited. For example, the stage attachment part 250 and the support part 270 may be formed in a substantially circular frame shape, and the bar attachment part 290 may be formed in a substantially disk shape.

  Further, the stage mounting portion 250 may be formed in a substantially box shape that is open only within the moving range of the support portion 270 on the friction bar 220 side, and the stage 210 side is not opened, and the entire surface is in contact with the stage 210. Good.

  Furthermore, although the example in which the first support shaft 260 is provided on the stage mounting portion 250 so as to be movable back and forth in the axial direction and rotatable is shown, the first support shaft 260 is fixed to the stage mounting portion 250, and the support portion 270 may be configured to be movable forward and backward and rotatable in the axial direction of the first support shaft 260 via a bearing or the like, for example. Similarly, the second support shaft 280 may be fixed to the support portion 270, and the bar mounting portion 290 may be provided so as to be movable back and forth and rotatable along the axial direction of the second support shaft 280 via a bearing or the like.

  In the above-described embodiment, the object to be measured is placed on the stage 210, and the floating unit 240 which is the joint mechanism of the present invention is provided on the stage apparatus 200 of the measuring instrument 100 that measures the object to be measured with the camera device 110. Although the configuration is shown, the present invention is not limited to this. For example, any configuration may be used as long as the movable member is advanced and retracted by a shaft member, such as a tray in a conveyance device in which the tray moves forward and backward with respect to the main body and a bar joint that moves the tray You may apply to an apparatus.

The best configuration for carrying out the present invention has been disclosed in the above description, but the present invention is not limited to this. That is, although the present invention has been illustrated and described with particular reference to particular embodiments, it will be understood that the present invention is not limited to the embodiments described above without departing from the scope of the technical idea and purpose of the present invention. Various modifications can be made by those skilled in the art in terms of materials, quantity, and other detailed configurations.
Therefore, the description limited to the shape, material, etc. disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such is included in this invention.

  The present invention relates to a joint mechanism that connects a shaft member and a movable member, and in particular, a joint mechanism that connects a stage on which a measurement object is placed and a friction bar that moves the stage to a position where the measurement object is measured. It can be used for measuring instruments equipped with

The block diagram which shows typically the outline of the measuring device which concerns on one embodiment of this invention. The perspective view which shows the outline of the stage apparatus which concerns on this Embodiment. Sectional drawing which shows the outline of the floating unit as a joint mechanism of this Embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 100 ... Measuring device, 110 ... Camera apparatus as measuring means, 210 ... Stage as movable member, 220 ... Friction bar as shaft member, 232 ... Drive roller, 240 ... Floating unit as joint mechanism, 250 ... Mounting of movable part Stage mounting portion as a part, 251 ... first support hole, 252 ... first bearing as a ball member, 260 ... first support shaft, 270 ... support part as a support member, 272 ... second support hole, 273 ... ball Second bearing as member, 280... Second support shaft, 290... Bar mounting portion as shaft mounting portion.

Claims (5)

A joint mechanism for connecting a shaft member provided to be movable back and forth along the axial direction and a movable member provided on one end side of the shaft member and movable by the advance and retreat of the shaft member,
The movable member is attached, and has a hollow first hollow portion inside, and a movable portion attachment portion in which a first support shaft is provided in the first hollow portion,
The first support shaft is provided so as to be movable back and forth along the axial direction of the first support shaft and rotatable about the first support shaft, and has a hollow second hollow portion therein. A support member having a second support shaft disposed in a state substantially intersecting the first support shaft in two hollow portions;
A shaft mounting portion that is provided on the second support shaft so as to be movable back and forth along the axial direction of the second support shaft and rotatable about the second support shaft, and to which the shaft member is attached,
A joint mechanism characterized by comprising The joint mechanism according to claim 1,
The movable part mounting part includes a first support hole that communicates the first hollow part and the outside,
The first support shaft is provided in the first support hole via a ball member. The joint mechanism according to claim 1 or 2,
The support member includes a second support hole that communicates the second hollow portion with the outside.
The second support shaft is provided in the second support hole via a ball member. The joint mechanism according to any one of claims 1 to 3,
The joint mechanism, wherein the first support shaft and the second support shaft are disposed in a state of being substantially orthogonal to each other. A driving roller that is driven to rotate, and a shaft member that is in contact with the driving roller and is movable forward and backward in the axial direction by rotation of the driving roller;
A movable member which is provided at one end of the shaft member and places an object to be measured;
The joint mechanism according to any one of claims 1 to 4, which connects the shaft member and the movable member,
Measuring means for measuring the object to be measured placed on the movable member;
A measuring instrument characterized by comprising.

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