JP2004340577A - Z-axis guiding device of surface form measuring apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To make compact the height of the Z-axis guiding device of a surface form measuring apparatus, and to reduce the weight of the body of the Z-axis guiding device. <P>SOLUTION: In the Z-axis guiding device of the surface form measuring device, a shaft retaining a detection section for measurement at the tip can travel in upper and lower directions to the body of the guiding device, and an energization means for balancing with the dead weight of the shaft is provided. First and second winding motion transfer supporting members are fixed to the body of the guiding device, and third and fourth winding motion transfer supporting members are fixed to one end of the energization means. The winding motion transfer member, where its one end is fixed to the shaft, is wound in the order of first, third, second, and fourth winding motion transfer supporting members, and the other end of the winding motion transfer member is fixed to the body of the guiding device. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a Z-axis guide device of a surface profile measuring device, and more particularly, to a Z-axis guide of a surface profile measuring device capable of achieving a balance with the own weight of a shaft holding a measurement detecting portion at a tip and achieving a compact outer shape. The present invention relates to a guide device.
[0002]
[Prior art]
Conventionally, as a surface profile measuring device, a surface roughness measuring device (for example, manufactured by Tokyo Seimitsu Co., trade name: Surfcom), a contour shape measuring device (for example, manufactured by Tokyo Seimitsu Co., trade name: contour record), a perfect circle A degree measuring device (for example, manufactured by Tokyo Seimitsu Co., trade name: Roncom), a three-dimensional coordinate measuring device, and the like are known.
[0003]
Many of these surface profile measuring devices relatively move a stylus and an object to be measured while a contact-type stylus (probe) is in contact with the surface of the object to be measured, thereby changing the surface shape of the object to be measured. Measuring. Among them, a roundness measuring device, a three-dimensional coordinate measuring device, and the like require a mechanism for moving the stylus in the Z-axis (moving in the vertical direction).
[0004]
FIG. 5 is a schematic cross-sectional view (right-side cross-sectional view) of the stand 210 of the roundness measuring device 200, and illustrates the configuration of the Z-direction guide unit 244. The Z-direction guide means 244 is configured by driving a nut member screwed to the screw shaft 214 fixed to the movable member 216 by rotation of the screw shaft 214 connected to the motor 252 via the coupling 250. Is done.
[0005]
The roundness measuring device 200 has a configuration in which pulleys 234 and 234 are provided near the upper end of the Z-direction guide 244, and a wire 232 is wound around the pulleys 234 and 234 to balance the mover 216 and the balance weight 230. Has been adopted.
[0006]
That is, the Z-direction guide means 244 is vertically disposed in front of the inside of the stand 210 (left side in FIG. 5). Further, a Z-direction table 241 for supporting an X-direction moving means 246 (indicated by imaginary lines in the figure) is fixed to the mover 216. The balance weight 230 having a weight balanced with the total weight of the mover 216 and the X-direction moving means 246 penetrates a vertically arranged shaft 231 and can move up and down, near the upper end of the Z-direction guide means 244. Are connected to the mover 216 by wires 232 via pulleys 234, 234 provided at the bottom.
[0007]
According to such a configuration, the balance of the weight of the movable element 216 and the total weight of the other components (the Z-direction table 241 and the X-direction moving means 246 in this example) attached to the movable element 216 are substantially the same. The weight 230 balances. Therefore, there is no influence of the weight of the movable member 216 or the like, and the driving thrust is hardly affected by fluctuations and does not cause a guidance accuracy error.
[0008]
On the other hand, in a three-dimensional coordinate measuring apparatus, a balance weight is not used in a configuration in which the Z-direction guide means is balanced, and an air cylinder is often used (for example, see Patent Document 1). This is often due to the requirement that the weight of the main body of the Z-axis guide device that guides the shaft holding the measurement detection unit at the tip in the vertical direction be reduced as much as possible and that it be compact.
[0009]
That is, in the three-dimensional coordinate measuring device, a method of manually contacting the measuring detecting portion with the object to be measured is adopted in many cases, and in order to facilitate this work, the weight of the Z-axis guide device body is reduced as much as possible. This is because compactness is effective.
[0010]
In a Z-axis guide device 1 of a three-dimensional coordinate measuring device as shown in FIG. 6, an air cylinder 3 is adopted, and a moving pulley and a constant pulley are combined, so that the weight of the device main body is reduced as much as possible, and The height has been reduced.
[0011]
In FIG. 6, a shaft 2 holding a measurement detection unit (not shown) at the tip is movable vertically with respect to the guide device 4, and is balanced with its own weight via a wire 5. Fixed pulleys 6 and 7 are fixed to the upper part in the apparatus main body of the Z-axis guide device 1 at predetermined left and right distances, and the tip of a cylinder rod 8 of the air cylinder 3 fixed to the lower part in the apparatus main body is The moving pulley 9 is fixed. A wire 5, one end of which is fixed to the upper end of the shaft 2, is wound around the constant pulley 6, the constant pulley 7, and the moving pulley 9 in this order, and the other end of the wire 5 is fixed to an upper portion in the apparatus main body.
[0012]
According to this configuration, the working distance of the shaft 2 is twice the working distance of the cylinder rod 8 of the air cylinder 3. Thereby, the length of the air cylinder 3 can be reduced, and as a result, the height of the device can be made compact.
[0013]
[Patent Document 1]
JP-A-8-201003
[Problems to be solved by the invention]
However, in the above-described conventional three-dimensional coordinate measuring apparatus, a more compact design that is not restricted by the installation location, particularly the ceiling height, is required. In addition to being compact, there is a demand for further reducing the weight of the apparatus body as much as possible.
[0015]
The present invention has been made in view of such circumstances, and an object of the present invention is to provide a Z-axis guide device of a surface shape measuring device that can achieve the above-described conventional problems.
[0016]
[Means for Solving the Problems]
In order to achieve the above object, the present invention provides an urging device that has a shaft holding a detecting unit for measurement at a tip thereof, which is vertically movable with respect to a guide device main body, and that balances with the own weight of the shaft. In the Z-axis guide device of the surface shape measuring device provided with the means, a first wrapping motion transmission support member and a second wrapping motion transmission support member are fixed to the guide device main body, and the urging is performed. A third wrapping motion transmitting support member and a fourth wrapping motion transmitting support member are fixed to one end of the means, and the wrapping motion transmitting member, one end of which is fixed to the shaft, is connected to the first wrapping motion. A transmission support member, the third wrapping motion transmission support member, the second wrapping motion transmission support member, and the fourth wrapping motion transmission support member. The other end is the guide device book It is fixed to provide a Z-axis guide apparatus of the surface shape measuring apparatus according to claim to.
[0017]
According to the present invention, the winding motion transmitting member having one end fixed to the shaft is the first winding motion transmitting support member fixed to the apparatus main body, and the third winding motion fixing member is fixed to one end of the biasing means. The motion transmission support member, the second wrapping motion transmission support member fixed to the apparatus main body, and the fourth wrapping motion transmission support member fixed to one end of the urging means are wound in this order. The other end of the transmission member is fixed to the guide device main body. Thus, the working distance of the shaft is four times the working distance of the biasing means. As a result, the height of the device can be significantly reduced.
[0018]
In addition, the "surface shape measuring device" refers to a surface roughness measuring device, a contour shape measuring device, a roundness measuring device, a three-dimensional coordinate measuring device, and the like, a detection unit along the surface of the object to be measured. A device that measures the surface shape of the object by relative movement, and includes a device that measures not only the outer surface of the object but also, for example, the inner peripheral surface of a cylindrical object.
[0019]
In addition, a “detection unit” generally employs a contact-type detection unit that performs measurement while bringing a stylus (probe) into contact with the surface of an object to be measured, but is not limited thereto. It also includes a detection unit, for example, a laser type detection unit.
The “winding movement transmitting member” is a mechanical element in the winding transmission in the mechanics, and generally corresponds to a belt, a chain, a wire, or the like. The “winding motion transmission support member” is also a mechanical element in the wrapping transmission, and generally corresponds to a pulley, a belt wheel, a sprocket, or the like.
[0020]
In the present invention, it is preferable that the urging means includes a fixed portion fixed to the guide device main body and a movable portion slidable with the fixed portion. In the present invention, it is preferable that the urging means is a cylinder member. This is because the effect of the present invention can be further exhibited if the urging means is composed of the fixed portion and the moving portion.
[0021]
Further, in the present invention, it is preferable that the urging means is disposed at a predetermined inclination angle with respect to a vertical line. If the biasing means, for example, the air cylinder is disposed at a predetermined inclination angle with respect to the vertical line, interference with the constituent members can be avoided, and the effect that the guide device body can be made more compact can be obtained. Also, the effect of increasing the winding angle of the winding motion transmitting member can be obtained.
[0022]
Here, the “vertical line” means a straight line in the direction of gravity, that is, the direction indicated by the thread hanging the object (hereinafter, from Kojien).
[0023]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, preferred embodiments of the Z-axis guide device of the surface profile measuring device according to the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a perspective view showing the whole of the three-dimensional coordinate measuring device 10, and FIGS. 2 and 3 are cross-sectional views of a main part showing a configuration of a Z-axis guide device 18 of the three-dimensional coordinate measuring device 10 shown in FIG. FIG.
[0024]
The three-dimensional coordinate measuring device 10 includes a device gantry 12, a surface plate 14, a portal column 16, a Z-axis guide device 18, a shaft 20, a measuring detector 22, and the like. A surface plate 14 is fixed on the device gantry 12, and guide portions 16A, 16A of a portal column 16 are slidably engaged in the front-rear direction (X direction) near both sides of the surface plate 14. A Z-axis guide device 18 is slidably engaged with the beam portion 16B of the portal column 16 in the left-right direction (Y direction). In the Z-axis guide device 18, the shaft 20 is movable vertically with respect to the guide device main body.
[0025]
2 and 3, the guide device main body is composed of a chassis 30 for fixing each component and a cover 18A covering the outer surface. An air bearing 32, which is a guide member for the shaft 20, is fixed to a lower portion of the chassis 30. A predetermined flow rate of air is supplied to the air bearing 32 from air supply means (not shown), and guides the shaft 20 in the vertical direction (Z-axis direction) in a non-contact state. Note that a rolling bearing (ball spline) may be used instead of the air bearing 32.
[0026]
An air cylinder 34, which is a cylinder member serving as an urging means, is fixed to the right side of the center of the chassis 30. The air cylinder 34 includes a cylinder body 34A, which is a fixed part fixed to the chassis 30 of the guide device body, and a cylinder rod 36, which is a movable part slidable with the cylinder body 34A. The air cylinder 34 is disposed at a predetermined inclination angle θ with respect to a vertical line. The inclination angle θ is not particularly limited, but is preferably in the range of 10 to 45 degrees, and more preferably in the range of 20 to 35 degrees.
[0027]
A stay 38 is fixed to the tip of a cylinder rod 36 of the air cylinder 34. The stay 38 has a pulley 40 as a third wrapping motion transmission support member and a pulley 42 as a fourth wrapping motion transmission support member. Are rotatably fixed side by side.
[0028]
A pulley 44 serving as a first wrapping motion transmission support member and a pulley 46 serving as a second wrapping motion transmission support member are rotatably fixed to the upper portion of the chassis 30 at lower left and upper right positions, respectively. Have been.
[0029]
A wire 50, which is a wrapping motion transmitting member having one end fixed to the shaft 20, is wound around the pulley 44, the pulley 40, the pulley 46, and the pulley 42 in this order, and the other end of the wire 50 is fixed to the upper portion of the chassis 30. I have.
[0030]
With the configuration described above, the pulleys 44 and 46 function as fixed pulleys, and the pulleys 40 and 42 function as moving pulleys. As a result, the working distance of the shaft 20 is four times the working distance of the cylinder rod 36 of the air cylinder 34. Thereby, the length of the air cylinder 34 can be made very short, and as a result, the height of the device can be made compact.
[0031]
This effect can not only reduce the height of the upper end portion of the cover 18A but also reduce the height of the cover 18A as compared with the conventional configuration in which the working distance of the cylinder rod 8 can be set to half the working distance of the shaft 2 as shown in FIG. The height of the lower end of the cover 18A can be increased, and as a result, the cover 18A can be made more compact than the conventional example.
[0032]
In the present embodiment shown in FIGS. 2 and 3, the air cylinder 34 is disposed at a predetermined inclination angle θ with respect to the vertical line, and as a result, an effect that the cover 18A can be made more compact than the conventional example is obtained. I have. That is, by arranging the air cylinder 34 at a predetermined inclination angle θ with respect to the vertical line, a pulley (constant pulley) can be provided, which is different from the other embodiment shown in FIG. 4 described later and the conventional example shown in FIG. ) Can be omitted, the air cylinder 34 and the like can be moved to the left by that amount, and the cover 18A can be made compact.
[0033]
When the air cylinder 34 is disposed at a predetermined inclination angle θ with respect to the vertical line, and one pulley (constant pulley) is omitted as shown in FIGS. The effect of increasing the winding angle around the pulley 44 can also be obtained.
[0034]
Further, in the Z-axis guide device 18 having the configuration shown in FIGS. 2 and 3, one end of the wire 50 is fixed near the lower end of the shaft 20. In this way, when the cylinder rod 36 of the air cylinder 34 is moved to the lower end, the shaft 20 is substantially housed in the Z-axis guide device 18 as shown in FIG. On the other hand, when the cylinder rod 36 of the air cylinder 34 is moved to the upper end, as shown in FIG. 3, the portion of the shaft 20 other than the portion supported by the air bearing 32 is Exposed. Therefore, the height of the Z-axis guide device 18 including the shaft 20 can be made very compact.
[0035]
In the Z-axis guide device 18 shown in FIGS. 2 and 3, a signal line guide 52 is provided as another component. The signal line guide 52 has a function of guiding a signal line from the measuring detection unit 22 (see FIG. 1) to the chassis 30 side.
[0036]
Next, the operation of the Z-axis guide device 18 will be described. When the three-dimensional coordinate measuring apparatus 10 is started, compressed air is supplied from an air source (not shown), and the air bearing 32 can function. Also, the compressed air supplied from the air source to the air cylinder 34 via an air regulator (not shown) balances the weight of the shaft 20 with the tensile force (biasing force) of the air cylinder 34.
[0037]
Therefore, there is no vertical movement of the shaft 20 in the state shown in FIGS. 2 and 3, and it is easy to manually move the shaft 20 in the vertical direction, and the shaft 20 is manually moved in the vertical direction. Thereafter, there is no change in the vertical position of the shaft 20 with the hand released. Thereby, a normal function as the three-dimensional coordinate measuring device 10 can be secured.
[0038]
When performing an automatic operation via the operation unit 10A shown in FIG. 1, the pulley 44 may be used as a main drive shaft, and the air cylinder 34 is driven. The working distance of 36 is 1/4 of the working distance of the shaft 20, and the drive is easy.
[0039]
Next, another embodiment of the Z-axis guide device of the surface profile measuring apparatus according to the present invention will be described with reference to a cross-sectional view of a main part shown in FIG. 2 and 3 are denoted by the same reference numerals, and detailed description thereof will be omitted.
[0040]
In the Z-axis guide device 18, the air cylinder 34 is arranged in the vertical direction. Therefore, the horizontal distance between the pulley 40, which is the third wrapping motion transmission support member, and the pulley 44, which is the first wrapping motion transmission support member, increases, and the force applied to the pulley 40 and the pulley 42 becomes unbalanced. Therefore, in order to cope with this, a plurality of pulleys 44 as the first wrapping motion transmitting support member are provided.
[0041]
That is, as shown in FIG. 4, the pulley 44A and the pulley 44B are provided side by side, and the wire 50 is wound around both. With this configuration, substantially the same function as that of the Z-axis guide device 18 having the configuration shown in FIGS. 2 and 3 can be obtained.
[0042]
As described above, each example of the embodiment of the Z-axis guide device of the surface shape measuring device according to the present invention has been described. However, the present invention is not limited to the example of the above-described embodiment, and various modes can be adopted. For example, in the example of the embodiment, the pulleys 40 and 42 which are moving pulleys, and the pulleys 44 and 46 which are constant pulleys are provided on different shafts. And the pulleys 44 and 46, which are constant pulleys, may be provided coaxially. If such a configuration is adopted, the Z-axis guide device 18 can be made more compact.
[0043]
Further, in the example of the embodiment of the present invention, a configuration in which two pulleys that are moving pulleys and two pulleys that are constant pulleys are combined is adopted. Can also be adopted. By employing such a configuration, the working distance of the cylinder member can be further reduced, and the Z-axis guide device 18 can be made more compact.
[0044]
In the example of the embodiment of the present invention, only the air cylinder 34 is shown as the urging means, but other various urging means may be employed. For example, various spring members can be employed as the urging means including the fixed portion fixed to the guide device main body and the movable portion slidable with the fixed portion. Further, it is also possible to simply employ a balance weight as the urging means.
[0045]
In the example of the embodiment of the present invention, the three-dimensional coordinate measuring device has been described. However, the present invention can be applied to other surface shape measuring devices such as a roundness measuring device. This is because the effects of the present invention can be obtained even in such a surface shape measuring apparatus.
[0046]
【The invention's effect】
As described above, according to the present invention, the wrapping motion transmitting member having one end fixed to the shaft is fixed to one end of the first wrapping motion transmitting support member fixed to the apparatus main body and the biasing means. The third wrapping motion transmission support member fixed to the apparatus main body, the fourth wrapping motion transmission support member fixed to one end of the biasing means, and the third wrapping motion transmission support member fixed to the apparatus body. The other end of the winding motion transmitting member is fixed to the guide device main body. Thus, the working distance of the shaft of the urging means is four times the working distance of the urging means. As a result, the height of the device can be significantly reduced.
[Brief description of the drawings]
FIG. 1 is a perspective view showing the entire surface profile measuring device. FIG. 2 is a sectional view of a main part showing the configuration of a Z-axis guide device of the surface profile measuring device shown in FIG. 1. FIG. FIG. 4 is a cross-sectional view of a main part showing a configuration of a Z-axis guide device of a shape measuring device. FIG. 4 is a cross-sectional view of a main portion showing another configuration of a Z-axis guide device of a surface shape measuring device. FIG. 6 is a Z-axis guide device of a conventional three-dimensional coordinate measuring device.
DESCRIPTION OF SYMBOLS 10 ... Three-dimensional coordinate measuring device, 12 ... Device stand, 14 ... Surface plate, 16 ... Gate type support, 18 ... Z-axis guide device, 20 ... Shaft, 22 ... Measurement detection part, 34 ... Air cylinder (biasing means ), 40 ... pulley (third wrapping motion transmission support member), 42 ... pulley (fourth wrapping motion transmission support member), 44 ... pulley (first wrapping motion transmission support member), 46 ... pulley (The second wrapping motion transmitting support member), 50 ... wires (the wrapping motion transmitting member)

Claims (5)

The Z axis of the surface profile measuring device, wherein the shaft holding the measurement detecting portion at the tip is movable in the vertical direction with respect to the guide device main body, and is provided with biasing means for balancing the own weight of the shaft. In the shaft guide device,
A first wrapping motion transmission support member and a second wrapping motion transmission support member are fixed to the guide device body,
A third wrapping motion transmission support member and a fourth wrapping motion transmission support member are fixed to one end of the urging means,
The winding motion transmitting member having one end fixed to the shaft includes the first winding motion transmitting supporting member, the third winding motion transmitting supporting member, the second winding motion transmitting supporting member, and the fourth Wherein the other end of the winding motion transmitting member is fixed to the guide device main body. 2. The Z-axis guide device of the surface profile measuring device according to claim 1, wherein the urging means includes a fixed portion fixed to the guide device main body, and a movable portion slidable with the fixed portion. 3. 3. The Z-axis guide device of the surface shape measuring device according to claim 1, wherein the urging means is a cylinder member. The Z-axis guide device of the surface profile measuring device according to any one of claims 1 to 3, wherein the biasing means is disposed at a predetermined inclination angle with respect to a vertical line. The Z-axis guide device of the surface shape measuring device according to any one of claims 1 to 4, wherein the surface shape measuring device is a three-dimensional coordinate measuring device.

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