JP2501989B2 - Measuring machine - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measuring machine. Specifically, the present invention relates to a measuring machine in which a table on which an object to be measured is placed and a column having a measuring element which is placed on the table and which is related to the object to be measured are moved in mutually opposite directions. For example, it can be used for a coordinate measuring machine.

[0002]

BACKGROUND ART For example, in a coordinate measuring machine, a table on which an object to be measured is mounted is fixed to a base or the like, and a column having a measuring element that is involved in the object to be measured is moved in one axial direction of the three-dimensional direction. It can be classified into a moving type three-dimensional measuring machine and a table moving type three-dimensional measuring machine in which a column having a tracing stylus is fixed to a base or the like and a table is moved in one axial direction of the three-dimensional direction.

The former column-moving type three-dimensional measuring machine is provided with a gate-shaped column movably in the front-back direction (Y-axis direction) with respect to a table, and a slider is provided on the horizontal beam of the gate-shaped column with respect to the table. This structure is provided so as to be movable in the left-right direction (X-axis direction), and a spindle having a probe at the lower end is provided on this slider so as to be able to move up and down in the vertical direction (Z-axis direction) with respect to the table.

The latter table moving type three-dimensional measuring machine is provided with a table movable in the front-rear direction (Y-axis direction), and a slider is provided on a horizontal beam of a gate column in the left-right direction (X-axis direction) with respect to the table. ), And a spintor having a measuring element at the lower end is provided on the slider so as to be vertically movable (Z-axis direction) with respect to the table.

[0005]

However, each of the above-described conventional three-dimensional measuring machines has its advantages and disadvantages. First, in the former column moving type three-dimensional measuring machine, when it is attempted to increase the moving speed or acceleration of the gate type column for the purpose of shortening the measuring time, it is necessary to increase the rigidity of each part. Then, the gate column main body and the surroundings of the main body become large, and the weight becomes heavier. Further, in the latter table moving type three-dimensional measuring machine, the installation space needs to be larger than that of the column moving type three-dimensional measuring machine. In other words, if the effective measurement range is the same, the table moving type three-dimensional measuring machine requires an installation space which is at least twice the moving stroke of the table.

[0006] It is an object of the present invention to provide a measuring machine which can solve all the problems of the prior art and can simultaneously shorten the measuring time and save space.

[0007]

Therefore, the measuring machine of the present invention is concerned with a table that is movably provided on a base and has an object to be measured placed on its upper surface, and an object to be measured placed on this table. A column having a measuring element for moving and provided so as to be movable in the same direction as the moving direction of the table; and one driving source, and the table and the column are driven by a driving force from the one driving source. Driving means for moving in mutually opposite directions, a scale provided along one of the table and the column along the moving direction, and one of the table and the column provided opposite to the scale. Displacement detector that includes a detector that detects the relative displacement of the table and the column,
Is provided.

[0008]

When the driving means is driven, the table and the column are moved simultaneously and in the opposite directions, so that the probe provided on the column can be quickly moved to a predetermined measurement site on the object to be measured placed on the table. Can be located at. Therefore, the measurement time can be shortened. In addition, tape
The movement of the bull and the column is done by one drive source.
Therefore, the table and column can be moved using separate drive sources.
You can do it economically compared to the case. Further, the relative movement displacement amount between the table and the column is only one set of displacement detecting means including a scale provided on one of the table and the column and a detector provided on the other of the table and the column. Since it can be obtained by the method, it is possible to detect the relative movement displacement between the table and the column more economically and more quickly than the case where the relative displacement is detected separately.
Further, since the table and the column are moved simultaneously and in opposite directions, the conventional table moving type tertiary
Original measuring machine (Tertiary with only table moved and column fixed)
Installation space can be reduced compared to the original measuring machine . That is, it is possible to save space.

[0009]

The preferred embodiments of the measuring machine according to the present invention will now be described in detail with reference to the accompanying drawings.
FIG. 1 is a front view of the coordinate measuring machine according to the present embodiment, FIG. 2 is a partially cutaway plan view, and FIG. 3 is a side view thereof.

In these figures, 1 is a base having legs 2. On the upper surface of the base 1, its width direction (X-axis direction)
The first groove 3A is located at a substantially intermediate position, and the second groove 3B is located closer to one end face in the width direction than the first groove 3 is.
It is formed along the (axial direction). In the first groove 3A, a first ball screw shaft 5 is rotatably arranged along a Y-axis direction via a bearing (not shown), and
A table 6 on which an object to be measured is placed is screwed onto the first ball screw shaft 5. The table 6 has the first groove 3
It is supported on the upper surface of the base 1 across A and is provided so as to be movable in the Y-axis direction while being restricted from moving in the X-axis direction by both side walls of the first groove 3A. Reference numeral 7 is an air bearing device provided between the base 1 and the table 6.

A second ball screw shaft 11 is rotatably disposed in the second groove 3B via a bearing (not shown) and parallel to the first ball screw shaft 5, and A portal column 12 is screwed onto the second ball screw shaft 11. The gate-shaped column 12 is a pair of columns 12 provided on both sides of the upper surface of the base 1 so as to be movable in the Y-axis direction.
A and 12B and a beam 12C hung between the upper ends of the columns 12A and 12B are formed in a gate shape.
A rail 4 formed between the second groove 3B and one end surface in the width direction of the base 1 is engaged with the lower end portion of the column 12B from above and is movable in the Y-axis direction using the rail 4 as a guide. Groove 1
3 are formed. Reference numeral 14 is an air bearing device provided between the rail 4 of the base 1 and the concave groove 13 of the support column 12B. A slider 15 is provided on the beam 12C as a base 1.
The slider 17 is provided so as to be movable in the X-axis direction, and the slider 15 has a spindle 17 having a probe 16 at the lower end, which is involved in the object to be measured, and is vertically movable in the vertical direction (Z-axis direction) of the base 1. It is provided in.

A motor 21 as a drive source is connected to the rear end of the first ball screw shaft 5. Further, the first ball screw shaft 5 and the second ball screw shaft 11 are formed in reverse threads to each other and are connected via the timing belt 22. Therefore, when the motor 21 is driven, the table 6 screwed to the first ball screw shaft 5 and the gate column 12 screwed to the second ball screw shaft 11 are simultaneously moved in opposite directions. Here, the first ball screw shaft 5, the second ball screw shaft 11,
The motor 21 and the timing belt 22 constitute drive means 23 for moving the table 6 and the gate-shaped column 12 in opposite directions.

Displacement detecting means 31 is provided between the table 6 and the gate column 12. The displacement detecting means 31 is the Y of the table 6 and the gate column 12.
The amount of relative movement displacement in the axial direction is detected, and the scale 32 is provided on one end surface side of the table 6 along the Y-axis direction, and the scale 32 is opposed to the support column 12B side of the gate-shaped column 12. And a detector 33 provided as above. In addition, although not shown, X-axis displacement detecting means for detecting the displacement amount of the slider 15 in the X-axis direction and Z-axis displacement detecting means for detecting the displacement amount of the spintor 17 in the Z-axis direction. Are provided respectively.

Next, the operation of this embodiment will be described. In the measurement, after the object to be measured is placed on the upper surface of the table 6, the table 6 and the gate column 12 are moved in the Y-axis direction, the slider 15 is moved in the X-axis direction, and the spindle 17 is moved in the Z-axis direction. , The contact point 16 is sequentially brought into contact with the measurement site of the object to be measured, and the respective axial directions (X, Y, Z
The size and shape of the object to be measured is measured from the amount of displacement in the axial direction).

Here, the table 6 and the gate-shaped column 12
To move the Y axis direction, the motor 21 is driven. Then, the first ball screw shaft 5 and the second ball screw shaft 11 rotate in the same direction, but the first ball screw shaft 5 and the second ball screw shaft 11 are formed in opposite threads. Therefore, the table 6 screwed to the first ball screw shaft 5 and the gate column 1 screwed to the second ball screw shaft 11
2 and 2 are moved simultaneously and in opposite directions. Therefore,
Compared with the case where only one of them moves, the time required for the movement can be shortened to 1/2.

When the table 6 and the gate column 12 move in opposite directions, the scale 32 and the detector 33 move relative to each other while facing each other. Therefore, the table 6 and the gate are detected from the values detected by the detector 33. Y with mold column 12
The amount of relative movement displacement in the axial direction can be detected.

Therefore, according to the present embodiment, the table 6 and the gate-shaped column 12 are provided so as to be movable in the Y-axis direction, and the driving means for simultaneously moving the table 6 and the gate-shaped column 12 in opposite directions. Since 23 is provided, when the driving means 23 is driven, the table 6 and the gate-shaped column 12 are simultaneously moved in opposite directions. Therefore, when only one of the table 6 and the gate-shaped column 12 moves. In comparison, the time required for movement can be reduced to half. Therefore, the measurement time can be shortened.

Further, since the table 6 and the gate-shaped column 12 are constructed so that they can be moved in opposite directions to each other, the conventional table can be used.
Mobile three-dimensional measuring machine (only table moves, column
However , the installation space can be reduced compared to a fixed CMM) . That is, it is possible to save space.

Further, the driving means 23 has a first ball screw shaft 5 with which the table 6 is screwed, a second ball screw shaft 11 with which the gate column 12 is screwed, and the first ball screw shaft 5 described above. The motor 21 connected to the two ball screw shafts 5 and 11
It is composed of a timing bell 22 that connects the table 6 and the gate column 12 by one motor.
And can be moved simultaneously and in opposite directions.

Further, since the scale 32 is attached to the table 6 along the Y-axis direction, and the detector 33 is provided on the support column 12B side of the gate-shaped column 12 so as to face the scale 32, the table is constituted by one set of detecting means. Since it is possible to detect the relative movement displacement amount of the 6 and the gate column 12 in the Y-axis direction, it is possible to detect economically and quickly. Moreover, there is no need to increase the number of control axes by one.

Although the present invention has been described with reference to the preferred embodiment, the present invention is not limited to this embodiment, and various improvements and design changes can be made without departing from the gist of the present invention. Of course it is possible.

For example, in the above-described embodiment, the first ball screw shaft 5 and the second ball screw shaft 11 are formed as threads opposite to each other. However, for example, a first ball screw mechanism or another interlocking mechanism may be used to form the first ball screw shaft. If the screw shaft 5 and the second ball screw shaft 11 are configured to rotate in opposite directions, the screw directions of the first ball screw shaft 5 and the second ball screw shaft 11 can be formed to be the same. .

Further, in the above embodiment, the scale 32 is attached to the table 6 along the Y-axis direction, and the detector 33 is attached to the support column 12B side of the gate column 12 with the scale 32.
However, conversely, the scale 32 may be attached to the gate column 12 side along the Y-axis direction and the detector 33 may be provided on the table 6.

In the above embodiment, the coordinate measuring machine has been described, but the present invention is not limited to this, and is applicable to all measuring machines in which the table on which the object to be measured is placed and the column having the measuring element move relative to each other. Can be applied.

[0025]

As described above, according to the measuring machine of the present invention,
Since the table and the column are moved in opposite directions at the same time, the measuring time can be shortened and the space can be saved as compared with the case where only one is moved.

[Brief description of drawings]

FIG. 1 is a front view showing an embodiment of the present invention.

2 is a plan view of the measuring machine of FIG. 1. FIG.

3 is a side view of the measuring machine in FIG. 1. FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Base 6 Table 12 Gate type column 16 Measuring element 21 Motor (driving source) 23 Driving means 31 Displacement detecting means 32 Scale 33 Detector

Front Page Continuation (72) Inventor Kenji Ono 2200 Shimoguricho, Utsunomiya City, Tochigi Prefecture Mitutoyo Utsunomiya Works Microcode Factory (56) Reference JP-A-1-127903 (JP, A)

Claims (1)

(57) [Claims] 1. A table, which is movably provided on a base and has an upper surface on which an object to be measured is placed, and a measuring element to be involved in the object to be measured placed on the table, and a moving direction of the table. One column that can be moved in the same direction, and one
Of a driving source, a driving means for moving said column and said table by the driving force from the single drive source in opposite directions, the movement direction to either of the said table column Displacement detection means for detecting the relative movement displacement amount of the table and the column, including a detector provided to face the scale on the other side of the scale and the table and the column provided as, A measuring instrument comprising: