JPH0510717A - Position and displacement measuring apparatus - Google Patents
Position and displacement measuring apparatusInfo
- Publication number
- JPH0510717A JPH0510717A JP15929391A JP15929391A JPH0510717A JP H0510717 A JPH0510717 A JP H0510717A JP 15929391 A JP15929391 A JP 15929391A JP 15929391 A JP15929391 A JP 15929391A JP H0510717 A JPH0510717 A JP H0510717A
- Authority
- JP
- Japan
- Prior art keywords
- light
- measured
- reflected
- half mirror
- dut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measurement Of Optical Distance (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、平行光や拡散光など
を投光し、その光をさえぎる物体からの反射光を位置検
出素子に結像させ、その結像点の位置によって被測定物
の位置または変位を測定する装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention projects parallel light, diffused light, etc., forms an image of reflected light from an object which interrupts the light on a position detecting element, and measures the object to be measured depending on the position of the image forming point. And a device for measuring the position or displacement of the.
【０００２】[0002]
【従来の技術】従来の変位測定装置として例えば図４に
示す装置が存在する。図４の装置は、発光源３０と、被
測定物３１に対するスポット状の光ビームを形成する投
光レンズ３２と、被測定物３１からの反射光を収束させ
る受光レンズ３３と、反射光の収束位置に設置され、反
射光の結像位置が変化すると光電流出力も変化する位置
検出素子３４とで構成されている。2. Description of the Related Art As a conventional displacement measuring device, there is a device shown in FIG. 4, for example. The apparatus of FIG. 4 includes a light emitting source 30, a light projecting lens 32 that forms a spot-shaped light beam with respect to the measured object 31, a light receiving lens 33 that converges the reflected light from the measured object 31, and a convergence of the reflected light. The position detecting element 34 is installed at a position and the photocurrent output changes when the image forming position of the reflected light changes.
【０００３】次に、図４の装置によって被測定物３１の
変位を測定する方法を説明する。まず、光源３０は被測
定物３１の変位する方向に対して光を照射し、投光レン
ズ３２はスポット状の光ビームが形成されるよう光を収
束させる。すると光ビームは被測定物３１で反射されて
位置検出素子３４に反射光を結像させる。ここで、被測
定物３１が図４に示すようにΔｙだけ変位したとする
と、その変位に応じて位置検出素子３４上の光結像点も
Δｘだけ変位する。この位置検出素子３４は、光結像点
の位置に応じて出力電流値が変化する素子であるので、
その電流値の変化から被測定物の変位Δｙを知ることが
できる。Next, a method of measuring the displacement of the object 31 to be measured by the apparatus shown in FIG. 4 will be described. First, the light source 30 emits light in the direction in which the object to be measured 31 is displaced, and the light projecting lens 32 converges the light so that a spot-shaped light beam is formed. Then, the light beam is reflected by the object to be measured 31, and the reflected light is imaged on the position detection element 34. Here, if the DUT 31 is displaced by Δy as shown in FIG. 4, the optical imaging point on the position detection element 34 is also displaced by Δx in accordance with the displacement. Since the position detecting element 34 is an element whose output current value changes according to the position of the optical image forming point,
The displacement Δy of the object to be measured can be known from the change in the current value.
【０００４】[0004]
【発明が解決しようとする課題】しかし、従来の装置
は、被測定物の変位方向と同じ方向に向けて検査光を照
射しなければならないため、例えば図４において、被測
定物が左右方向に移動するとその変位を測定できないと
いう問題がある。また、従来の装置は、移動体の変位方
向に装置を設置しなければならない為、被測定物が１方
向に移動し続けるような場合には装置の存在が被測定物
の移動の障害になるという問題もある。However, in the conventional apparatus, since the inspection light must be emitted in the same direction as the displacement direction of the object to be measured, the object to be measured can be moved in the left-right direction in FIG. 4, for example. There is a problem that the displacement cannot be measured when moving. Further, in the conventional device, since the device must be installed in the displacement direction of the moving body, the presence of the device hinders the movement of the measured object when the measured object continues to move in one direction. There is also a problem.
【０００５】ところで、かかる問題点の解決策として、
ファイバ形光電スイッチなどの小スポットのビームを被
測定物に照射して位置を検出する装置も存在する。図５
は、被測定物３１を搬送路３５上において左方向に移動
している場合に、小スポットのビームを被測定物に照射
し反射波の有無によって被測定物の有無を判定する装置
である。By the way, as a solution to this problem,
There is also a device such as a fiber type photoelectric switch which detects a position by irradiating a beam of a small spot on an object to be measured. Figure 5
Is an apparatus for irradiating the object to be measured with a beam of a small spot and determining the presence or absence of the object to be measured based on the presence or absence of a reflected wave when the object to be measured 31 is moving leftward on the transport path 35.
【０００６】しかし、このような装置では、被測定物が
一定範囲内に存在するか否かしか判定できず、被測定物
の広範囲の変位をアナログ量として求めることが出来な
かった。本発明は、かかる問題点に鑑みたものであり、
照射光の光軸と直交する方向に移動する被測定物につい
て、その被測定物の変位量を正確に測定する装置を提供
することを目的とする。However, with such an apparatus, it is only possible to determine whether or not the object to be measured exists within a certain range, and it is not possible to obtain the displacement of the object to be measured in a wide range as an analog amount. The present invention is in view of such problems,
An object of the present invention is to provide an apparatus for accurately measuring the displacement amount of an object to be measured that moves in a direction orthogonal to the optical axis of irradiation light.
【０００７】[0007]
【課題を解決するための手段】上記の問題点を解決する
為、請求項１の発明は、被測定物に照射する検査光を発
生する光源と、この光源の光照射方向に対向して設置さ
れるハーフミラーと、このハーフミラーを通過した検査
光を、一定の広がりを有する光ビームにして被測定物の
移動方向と直交する方向に照射し、被測定物からの反射
光を受ける投受光兼用レンズと、前記ハーフミラーによ
って反射された被測定物からの反射光を受け、その反射
光の結像位置に応じた電気信号を出力する受光素子と、
この受光素子の出力信号を基にして被測定物の位置を検
出する信号処理部とで構成されている。In order to solve the above-mentioned problems, the invention of claim 1 is arranged such that a light source for generating inspection light for irradiating an object to be measured and a light irradiation direction of this light source face each other. The half mirror and the inspection light passing through the half mirror are emitted as a light beam having a certain spread in a direction orthogonal to the moving direction of the DUT, and the light is received and received by the reflected light from the DUT. A dual-purpose lens, a light receiving element that receives the reflected light from the object to be measured reflected by the half mirror, and outputs an electric signal according to the imaging position of the reflected light,
And a signal processing unit that detects the position of the object to be measured based on the output signal of the light receiving element.
【０００８】また、請求項２の発明は、被測定物に照射
する検査光を発生する光源と、この光源の光照射方向に
対向して設置されるハーフミラーと、このハーフミラー
によって反射される検査光を受け、受けた光量に応じた
電気信号を出力する第１の受光素子と、この第１の受光
素子の出力信号を基にして前記光源の出力値を制御する
制御回路と、前記ハーフミラーを通過した検査光を、一
定の広がりを有する光ビームにして被測定物の移動方向
と直交する方向に照射し、被測定物からの反射光を受け
る投受光兼用レンズと、前記ハーフミラーによって反射
された被測定物からの反射光を受け、その反射光の結像
位置に応じた電気信号を出力する第２の受光素子と、こ
の第２の受光素子の出力信号を基にして被測定物の位置
を検出する信号処理部とで構成されている。According to a second aspect of the present invention, a light source for generating an inspection light for irradiating the object to be measured, a half mirror installed to face the light irradiation direction of the light source, and a half mirror for reflecting the light are reflected. A first light receiving element that receives the inspection light and outputs an electric signal according to the received light amount; a control circuit that controls the output value of the light source based on the output signal of the first light receiving element; The inspection light that has passed through the mirror is converted into a light beam having a certain spread, irradiates it in a direction orthogonal to the moving direction of the DUT, and a projection / reception lens that receives reflected light from the DUT and the half mirror. A second light receiving element that receives the reflected light from the object to be measured and outputs an electric signal according to the image forming position of the reflected light, and the measured signal based on the output signal of the second light receiving element. Signal processing to detect the position of an object It is composed of a part.
【０００９】[0009]
【作用】請求項１の発明から説明すると、ハーフミラー
を通過した検査光は、投受光兼用レンズによって一定の
広がりを有する光ビームとなって被測定物に照射され
る。ここで光ビームは一定の広がりを有しているので、
この光ビームは一定範囲内の被測定物に照射され、その
被測定物からの反射光が投受光兼用のレンズに入射され
る。そして、この反射光はハーフミラーで更に反射され
て受光素子の位置に結像する。受光素子は、反射光の結
像位置に応じて出力信号が変化するので、信号処理部
は、受光素子の出力信号を基にして被測定物の位置を求
める。According to the first aspect of the invention, the inspection light that has passed through the half mirror is radiated to the object to be measured as a light beam having a certain spread by the lens for both projecting and receiving light. Since the light beam has a certain spread here,
This light beam irradiates an object to be measured within a certain range, and the reflected light from the object to be measured is incident on a lens that also serves as a light projecting and receiving light. Then, this reflected light is further reflected by the half mirror and forms an image at the position of the light receiving element. Since the output signal of the light receiving element changes according to the image formation position of the reflected light, the signal processing section obtains the position of the DUT based on the output signal of the light receiving element.
【００１０】請求項２の発明もほぼ同様である。ただし
この発明では、検査光の一部が、被測定物に照射される
以前にハーフミラーによって反射され第１の受光素子に
入射される。そして、制御回路は、第１の受光素子の出
力を基にして、光源の出力が一定値になるように光源を
制御する。The invention of claim 2 is almost the same. However, in the present invention, a part of the inspection light is reflected by the half mirror and is incident on the first light receiving element before being irradiated to the object to be measured. Then, the control circuit controls the light source based on the output of the first light receiving element so that the output of the light source becomes a constant value.
【００１１】[0011]
【実施例】図１は、請求項１の発明の一実施例を示すブ
ロック図である。この装置は、被測定物１への検査光を
発生する光源２と、光源２の光照射方向に対向して設置
されるハーフミラー３と、ハーフミラー３を通過した検
査光を平行光線にして被測定物に照射する（受光レンズ
を兼ねた）投受光兼用レンズ４と、位置検出素子（以下
ＰＳＤという）５と、ＰＳＤ５の出力信号を基にして被
測定物の位置を検出する信号処理部６とで構成されてい
る。また、信号処理部６の内部回路は、ＰＳＤ５の２つ
の出力信号ＩA ，ＩB をそれぞれ増幅する信号増幅回路
７，８と、信号増幅回路７，８の出力を減算する減算回
路９と、信号増幅回路７，８の出力を加算する加算回路
１０と、減算回路９の出力を加算回路１０の出力で除算
する除算回路１１とで構成されている（図２参照）。FIG. 1 is a block diagram showing an embodiment of the invention of claim 1. This apparatus includes a light source 2 that generates inspection light for the DUT 1, a half mirror 3 that is installed to face the light irradiation direction of the light source 2, and the inspection light that has passed through the half mirror 3 into parallel rays. A light-transmitting / receiving lens 4 for irradiating an object to be measured (also serving as a light receiving lens), a position detection element (hereinafter referred to as PSD) 5, and a signal processing unit for detecting the position of the object to be measured based on an output signal of PSD 5. 6 and 6. Further, the internal circuit of the signal processing unit 6 includes signal amplification circuits 7 and 8 that amplify the two output signals I A and I B of the PSD 5, respectively, and a subtraction circuit 9 that subtracts the outputs of the signal amplification circuits 7 and 8. It is composed of an adder circuit 10 for adding the outputs of the signal amplifier circuits 7 and 8 and a divider circuit 11 for dividing the output of the subtractor circuit 9 by the output of the adder circuit 10 (see FIG. 2).
【００１２】以上のように構成される図１の装置におい
て、被測定物１の移動量が測定できることを次に説明す
る。図１では、複数の被測定物（１-1，１-2……）が、
検査光の照射方向と直交する方向に一定の間隔をおいて
図１の左方向に移動している。そして、投受光兼用レン
ズ４は、光源２からの検査光を平行光線の光ビームにし
ているので、被測定物がその平行光線の範囲内（ａ−
ａ’間）に入った場合に被測定物からの反射光が生じる
ことになる。ここで、各被測定物の中心点が、光ビーム
の中心位置にある場合（図１の斜線で示す被測定物１-1
の位置）を基準位置として被測定物変位量ｘを検討す
る。被測定物が基準位置にある場合は、反射光が図１の
実線で示す経路をとる。すなわち、反射光は、投受光兼
用レンズ４の中心点Ｏを通ってハーフミラー３のＰ点に
当たり、この点で反射されてＰＳＤ５のＱ点に当たる。
また、被測定物が基準位置よりｘだけ左に変位している
と、反射光は図１の破線の経路をとり、ハーフミラー３
のＰ’点に当たり、この点で反射されてＰＳＤ５のＱ’
点に当たる。It will be described below that the moving amount of the DUT 1 can be measured in the apparatus of FIG. 1 configured as described above. In FIG. 1, a plurality of DUTs ( 1-1 , 1-2 -... )
It moves to the left in FIG. 1 at regular intervals in the direction orthogonal to the irradiation direction of the inspection light. Since the light projecting / receiving lens 4 converts the inspection light from the light source 2 into a parallel light beam, the object to be measured is within the range of the parallel light (a−
When it enters (between a '), reflected light from the object to be measured is generated. Here, in the case where the center point of each DUT is at the center position of the light beam (DUT 1 -1 shown by the diagonal line in FIG. 1)
The displacement amount x of the object to be measured is examined with the position (1) as a reference position. When the DUT is at the reference position, the reflected light takes the path shown by the solid line in FIG. That is, the reflected light passes through the center point O of the lens 4 for both projecting and receiving light, hits the point P of the half mirror 3, is reflected at this point, and hits the point Q of the PSD 5.
When the object to be measured is displaced to the left by x from the reference position, the reflected light takes the path indicated by the broken line in FIG.
It hits the point P'of Q and is reflected at this point, and Q'of PSD5
Hit the point.
【００１３】ここで、被測定物１と投受光兼用レンズ４
の中心Ｏの距離をＬ、ＯＰ間の距離をＬ1 、ＰＱ間の距
離をＬ2 、またＱＱ’間の距離をｘ’として、このＰＳ
Ｄ上の変位ｘ’と被測定物の変位ｘの関係を求めてみ
る。Ｑ点、Ｑ’点のハーフミラーに対する鏡像点を検討
すると明らかなように、Ｌ：ｘ＝（Ｌ1 ＋Ｌ2 ）：ｘ’
の関係が成立する。従って、被測定物の変位量ｘと反
射光の結像位置の変位量Ｘ’との関係は、ｘ＝ＬＸ’／
（Ｌ1 ＋Ｌ2 ） ……（式１）となる。周知のように、
ＰＳＤの全長をＳとすると、ＰＳＤからの２種類の光電
流ＩA ，ＩB とＰＳＤ上の変位ｘ’の関係は、ｘ’＝Ｓ
／２×（ＩA −ＩB ）／（ＩA ＋ＩB ）……（式２）で
あるので、（式２）を（式１）に代入することにより、
被測定物の変位量ｘは、ｘ＝Ｌ／（Ｌ1 ＋Ｌ2 ）×Ｓ／
２×（ＩA −ＩB ）／（ＩA ＋ＩB ）…（式３）とな
る。Here, the object to be measured 1 and the lens 4 for both projecting and receiving light are used.
Assuming that the distance of the center O of the L is L, the distance between the OPs is L 1 , the distance between the PQs is L 2 , and the distance between the QQ's is x ', the PS
The relationship between the displacement x ′ on D and the displacement x of the object to be measured will be calculated. As is clear from examination of the mirror image points of the Q point and Q ′ point for the half mirror, L: x = (L 1 + L 2 ): x ′
The relationship is established. Therefore, the relationship between the displacement amount x of the object to be measured and the displacement amount X ′ of the image formation position of the reflected light is x = LX ′ /
(L 1 + L 2 ) ... (Equation 1) As we all know,
When the total length of the PSD is S, the relationship between the two types of photocurrents I A and I B from the PSD and the displacement x ′ on the PSD is x ′ = S
Since / 2 × (I A -I B ) / (I A + I B) is a ... (Equation 2), by substituting (Equation 2) to (Equation 1),
The displacement amount x of the object to be measured is x = L / (L 1 + L 2 ) × S /
2 × (I A -I B) / (I A + I B) ... a (Equation 3).
【００１４】以上の理論的検討を踏まえて、図１の装置
の動作を改めて説明する。光源２からの検査光のうちハ
ーフミラー３を通過する光は、投受光兼用レンズ４で平
行光線にされてａ−ａ'の範囲内にある被測定物に照射
される。そして、もしａ−ａ'の範囲内に被測定物１が
存在すると、その被測定物１からの反射光が投受光兼用
レンズ４を通ってハーフミラー３に当たる。この反射光
の一部は、ハーフミラー３で反射されＰＳＤ５に結像す
る。ＰＳＤ５は、反射光の結像位置に応じた光電流
ＩA ，ＩB を出力し、減算回路９はＩA −ＩB に比例す
る電圧を、また加算回路１０はＩA ＋ＩB に比例する電
圧を出力する。そして、除算回路１１は、減算回路９の
出力を加算回路１０の出力で除算して出力するので、結
局、除算回路１１は、被測定物１の変位量ｘの値に比例
した電圧を出力することになる（式３参照）。Based on the above theoretical examination, the operation of the apparatus shown in FIG. 1 will be described again. Of the inspection light from the light source 2, the light that passes through the half mirror 3 is collimated by the light-transmitting / receiving lens 4 and is radiated to the DUT within the range aa '. Then, if the DUT 1 is present within the range of aa ′, the reflected light from the DUT 1 passes through the lens 4 for both projecting and receiving light and strikes the half mirror 3. Part of this reflected light is reflected by the half mirror 3 and forms an image on the PSD 5. PSD5 an optical current I A in accordance with the imaging position of the reflected light, and outputs the I B, the subtraction circuit 9 a voltage proportional to I A -I B, also adding circuit 10 is proportional to I A + I B Output voltage. Then, since the division circuit 11 divides the output of the subtraction circuit 9 by the output of the addition circuit 10 and outputs the result, the division circuit 11 eventually outputs a voltage proportional to the value of the displacement amount x of the DUT 1. (See Equation 3).
【００１５】図３は請求項２の発明の一実施例を示すブ
ロック図である。構成は図１の装置とほぼ同じであり、
同種の部分には同じ番号を付している。図３の装置の特
徴は、ハーフミラー３によって反射される検査光を受け
受光量に応じた電気信号を出力する受光素子７を設け、
また、受光素子７の出力信号を基にして光源２の出力値
を制御する制御回路８を設けた点にある。FIG. 3 is a block diagram showing an embodiment of the invention of claim 2. The configuration is almost the same as the device of FIG.
The same number is attached to the same type part. The device of FIG. 3 is characterized in that a light receiving element 7 that receives the inspection light reflected by the half mirror 3 and outputs an electric signal according to the amount of received light is provided.
In addition, a control circuit 8 for controlling the output value of the light source 2 based on the output signal of the light receiving element 7 is provided.
【００１６】信号処理部６が（式３）を利用して被測定
物１の変位量ｘを求める点は上記図１の装置の場合と同
じであるが、本実施例の場合は、制御回路８が光源２の
出力を一定に制御するので、電源電圧や温度の変動に対
しても検査光の光量が変化しないという利点が得られ
る。The point that the signal processing unit 6 obtains the displacement amount x of the DUT 1 by using (Equation 3) is the same as in the case of the apparatus of FIG. 1, but in the case of this embodiment, the control circuit is used. Since 8 controls the output of the light source 2 to be constant, there is an advantage that the light amount of the inspection light does not change even when the power supply voltage or the temperature changes.
【００１７】[0017]
【発明の効果】以上説明したように、本発明では照射光
の光軸に対して直交方向に移動する物体の位置及び変位
を測定することが出来るので被測定物の移動の障害にな
ることがない。また、一定の範囲内の被測定物につい
て、変位量をアナログ量で求めるので、光電スイッチ等
に比べて広範囲で高精度の位置検出ができることにな
る。As described above, according to the present invention, the position and displacement of the object moving in the direction orthogonal to the optical axis of the irradiation light can be measured, which may hinder the movement of the object to be measured. Absent. Further, since the displacement amount of the object to be measured within a certain range is calculated as an analog amount, it is possible to detect the position in a wide range and with high accuracy as compared with a photoelectric switch or the like.
【００１８】さらに、投光用のレンズが受光用のレンズ
に兼用されているので、小型でかつ低コストの装置を実
現しており、また信号処理部の処理内容によっては被測
定物の大きさを測定することもできる。Further, since the lens for projecting light is also used as the lens for receiving light, a compact and low-cost device is realized, and the size of the object to be measured depends on the processing contents of the signal processing section. Can also be measured.
【図１】本発明の一実施例を示す構成図である。FIG. 1 is a configuration diagram showing an embodiment of the present invention.
【図２】図１の装置の一部を詳細に示す回路ブロック図
である。FIG. 2 is a circuit block diagram showing in detail a part of the device of FIG.
【図３】本発明の別の実施例を示す構成図である。FIG. 3 is a configuration diagram showing another embodiment of the present invention.
【図４】従来の装置を示す構成図である。FIG. 4 is a configuration diagram showing a conventional device.
【図５】別の従来例を示す構成図である。FIG. 5 is a configuration diagram showing another conventional example.
１-1，１-2 被測定物 ２ 光源 ３ ハーフミラー ４ 投受光兼用レンズ ５ 受光素子 ６ 信号処理部1 -1 , 1 -2 DUT 2 Light source 3 Half mirror 4 Light emitting / receiving lens 5 Light receiving element 6 Signal processing unit
Claims (2)
と、 この光源の光照射方向に対向して設置されるハーフミラ
ーと、 このハーフミラーを通過した検査光を、一定の広がりを
有する光ビームにして被測定物の移動方向と直交する方
向に照射し、被測定物からの反射光を受ける投受光兼用
レンズと、 前記ハーフミラーによって反射された被測定物からの反
射光を受け、その反射光の結像位置に応じた電気信号を
出力する受光素子と、 この受光素子の出力信号を基にして被測定物の位置を検
出する信号処理部とを備えることを特徴とする位置及び
変位測定装置。1. A light source for generating an inspection light for irradiating an object to be measured, a half mirror installed so as to face the light irradiation direction of the light source, and an inspection light passing through the half mirror with a constant spread. A light beam that has a light-receiving / illuminating lens that irradiates in a direction orthogonal to the moving direction of the DUT and receives reflected light from the DUT, and a reflected light from the DUT reflected by the half mirror. A position characterized by including a light-receiving element that outputs an electric signal according to the image-forming position of the reflected light and a signal processing unit that detects the position of the DUT based on the output signal of the light-receiving element. And displacement measuring device.
と、 この光源の光照射方向に対向して設置されるハーフミラ
ーと、 このハーフミラーによって反射される検査光を受け、受
けた光量に応じた電気信号を出力する第１の受光素子
と、 この第１の受光素子の出力信号を基にして前記光源の出
力値を制御する制御回路と、 前記ハーフミラーを通過した検査光を、一定の広がりを
有する光ビームにして被測定物の移動方向と直交する方
向に照射し、被測定物からの反射光を受ける投受光兼用
レンズと、 前記ハーフミラーによって反射された被測定物からの反
射光を受け、その反射光の結像位置に応じた電気信号を
出力する第２の受光素子と、 この第２の受光素子の出力信号を基にして被測定物の位
置を検出する信号処理部とを備えることを特徴とする位
置及び変位測定装置。2. A light source for generating inspection light for irradiating an object to be measured, a half mirror installed to face the light irradiation direction of the light source, and an inspection light reflected by the half mirror. A first light receiving element that outputs an electric signal according to the amount of light, a control circuit that controls the output value of the light source based on the output signal of the first light receiving element, and an inspection light that has passed through the half mirror. , A light-transmitting and receiving lens that emits a light beam having a certain spread in a direction orthogonal to the moving direction of the DUT and receives reflected light from the DUT; and from the DUT reflected by the half mirror. Second light receiving element that receives the reflected light of the second light receiving element and outputs an electric signal corresponding to the image forming position of the reflected light, and a signal that detects the position of the object to be measured based on the output signal of the second light receiving element. With a processing unit Position and displacement measuring apparatus according to symptoms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15929391A JPH0510717A (en) | 1991-07-01 | 1991-07-01 | Position and displacement measuring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15929391A JPH0510717A (en) | 1991-07-01 | 1991-07-01 | Position and displacement measuring apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0510717A true JPH0510717A (en) | 1993-01-19 |
Family
ID=15690632
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15929391A Pending JPH0510717A (en) | 1991-07-01 | 1991-07-01 | Position and displacement measuring apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0510717A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009282195A (en) * | 2008-05-21 | 2009-12-03 | Kyoritsu Denki Kk | Device for measuring diaphragm and shutter speed of digital camera |
-
1991
- 1991-07-01 JP JP15929391A patent/JPH0510717A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009282195A (en) * | 2008-05-21 | 2009-12-03 | Kyoritsu Denki Kk | Device for measuring diaphragm and shutter speed of digital camera |
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