JPH0510606B2 - - Google Patents
Info
- Publication number
- JPH0510606B2 JPH0510606B2 JP59067359A JP6735984A JPH0510606B2 JP H0510606 B2 JPH0510606 B2 JP H0510606B2 JP 59067359 A JP59067359 A JP 59067359A JP 6735984 A JP6735984 A JP 6735984A JP H0510606 B2 JPH0510606 B2 JP H0510606B2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- probe
- vehicle
- movable part
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Testing Or Calibration Of Command Recording Devices (AREA)
- Navigation (AREA)
- Sampling And Sample Adjustment (AREA)
- Ventilation (AREA)
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59067359A JPS60211315A (ja) | 1984-04-06 | 1984-04-06 | クリ−ンル−ムの検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59067359A JPS60211315A (ja) | 1984-04-06 | 1984-04-06 | クリ−ンル−ムの検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60211315A JPS60211315A (ja) | 1985-10-23 |
| JPH0510606B2 true JPH0510606B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-02-10 |
Family
ID=13342736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59067359A Granted JPS60211315A (ja) | 1984-04-06 | 1984-04-06 | クリ−ンル−ムの検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60211315A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62203017A (ja) * | 1986-03-04 | 1987-09-07 | Toshiba Eng Co Ltd | 移動式室内環境監視装置 |
| JPS62162626U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1986-04-04 | 1987-10-16 | ||
| JPS637820A (ja) * | 1986-06-27 | 1988-01-13 | Komatsu Ltd | クリ−ンル−ムの防塵フイルタ検査装置 |
| JPS6379188A (ja) * | 1986-09-23 | 1988-04-09 | Yamatake Honeywell Co Ltd | 環境測定デ−タ処理システム |
| JPH01128540A (ja) * | 1987-11-13 | 1989-05-22 | Nec Corp | ウェハー搬送車 |
| US20080215185A1 (en) * | 2006-11-13 | 2008-09-04 | Jacobsen Stephen C | Unmanned ground robotic vehicle having an alternatively extendible and retractable sensing appendage |
| CN105388034B (zh) * | 2015-12-30 | 2018-06-08 | 东旭科技集团有限公司 | 基板颗粒物的取样装置和玻璃基板颗粒物的取样方法 |
| IT201900020248A1 (it) * | 2019-11-04 | 2021-05-04 | Particle Measuring Systems S R L | Dispositivo di monitoraggio mobile per aree a contaminazione controllata |
| US12311550B2 (en) | 2020-12-31 | 2025-05-27 | Sarcos Corp. | Smart control system for a robotic device |
| JPWO2023162038A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 2022-02-22 | 2023-08-31 | ||
| US20250110011A1 (en) * | 2023-09-28 | 2025-04-03 | CertAir LLC | Cleanroom certification and hepa filter scanning |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58142499A (ja) * | 1982-02-18 | 1983-08-24 | 株式会社東芝 | 移動式点検監視システム |
| JPS58186889U (ja) * | 1982-06-08 | 1983-12-12 | 三菱電機株式会社 | エア−シヤワ−室 |
-
1984
- 1984-04-06 JP JP59067359A patent/JPS60211315A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60211315A (ja) | 1985-10-23 |