JPH0510427B2 - - Google Patents

Info

Publication number
JPH0510427B2
JPH0510427B2 JP62046366A JP4636687A JPH0510427B2 JP H0510427 B2 JPH0510427 B2 JP H0510427B2 JP 62046366 A JP62046366 A JP 62046366A JP 4636687 A JP4636687 A JP 4636687A JP H0510427 B2 JPH0510427 B2 JP H0510427B2
Authority
JP
Japan
Prior art keywords
plasma
generation chamber
plasma generation
chamber
reactor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62046366A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63214346A (ja
Inventor
Kyoichi Komachi
Sumio Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP4636687A priority Critical patent/JPS63214346A/ja
Publication of JPS63214346A publication Critical patent/JPS63214346A/ja
Publication of JPH0510427B2 publication Critical patent/JPH0510427B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP4636687A 1987-02-27 1987-02-27 プラズマプロセス装置 Granted JPS63214346A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4636687A JPS63214346A (ja) 1987-02-27 1987-02-27 プラズマプロセス装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4636687A JPS63214346A (ja) 1987-02-27 1987-02-27 プラズマプロセス装置

Publications (2)

Publication Number Publication Date
JPS63214346A JPS63214346A (ja) 1988-09-07
JPH0510427B2 true JPH0510427B2 (cs) 1993-02-09

Family

ID=12745156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4636687A Granted JPS63214346A (ja) 1987-02-27 1987-02-27 プラズマプロセス装置

Country Status (1)

Country Link
JP (1) JPS63214346A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003037503A1 (fr) * 2001-10-30 2003-05-08 Setsu Anzai Appareil a micro-ondes generateur de plasma

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61281872A (ja) * 1985-06-07 1986-12-12 Matsushita Electric Ind Co Ltd 非晶質シリコンゲルマニウム膜の形成方法

Also Published As

Publication number Publication date
JPS63214346A (ja) 1988-09-07

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EXPY Cancellation because of completion of term