JPH0510318B2 - - Google Patents

Info

Publication number
JPH0510318B2
JPH0510318B2 JP21648886A JP21648886A JPH0510318B2 JP H0510318 B2 JPH0510318 B2 JP H0510318B2 JP 21648886 A JP21648886 A JP 21648886A JP 21648886 A JP21648886 A JP 21648886A JP H0510318 B2 JPH0510318 B2 JP H0510318B2
Authority
JP
Japan
Prior art keywords
tube
silicon
outer tube
vapor phase
epitaxial growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP21648886A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6369794A (ja
Inventor
Fumitoshi Toyokawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP21648886A priority Critical patent/JPS6369794A/ja
Publication of JPS6369794A publication Critical patent/JPS6369794A/ja
Publication of JPH0510318B2 publication Critical patent/JPH0510318B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP21648886A 1986-09-12 1986-09-12 気相エピタキシヤル成長装置 Granted JPS6369794A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21648886A JPS6369794A (ja) 1986-09-12 1986-09-12 気相エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21648886A JPS6369794A (ja) 1986-09-12 1986-09-12 気相エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPS6369794A JPS6369794A (ja) 1988-03-29
JPH0510318B2 true JPH0510318B2 (OSRAM) 1993-02-09

Family

ID=16689215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21648886A Granted JPS6369794A (ja) 1986-09-12 1986-09-12 気相エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPS6369794A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0250026U (OSRAM) * 1988-09-28 1990-04-06
FR2655772B1 (fr) * 1989-12-08 1992-01-24 Thomson Composants Microondes Dispositif antipollution pour bati vertical de depot en phase gazeuse.

Also Published As

Publication number Publication date
JPS6369794A (ja) 1988-03-29

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