FR2655772B1 - Dispositif antipollution pour bati vertical de depot en phase gazeuse. - Google Patents

Dispositif antipollution pour bati vertical de depot en phase gazeuse.

Info

Publication number
FR2655772B1
FR2655772B1 FR8916268A FR8916268A FR2655772B1 FR 2655772 B1 FR2655772 B1 FR 2655772B1 FR 8916268 A FR8916268 A FR 8916268A FR 8916268 A FR8916268 A FR 8916268A FR 2655772 B1 FR2655772 B1 FR 2655772B1
Authority
FR
France
Prior art keywords
vertical gas
gas deposit
antipollution device
deposit building
building
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR8916268A
Other languages
English (en)
Other versions
FR2655772A1 (fr
Inventor
Durand Jean-Marie
Adet Philippe
Etieve Pascal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thomson Composants Microondes
Original Assignee
Thomson Composants Microondes
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thomson Composants Microondes filed Critical Thomson Composants Microondes
Priority to FR8916268A priority Critical patent/FR2655772B1/fr
Publication of FR2655772A1 publication Critical patent/FR2655772A1/fr
Application granted granted Critical
Publication of FR2655772B1 publication Critical patent/FR2655772B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45582—Expansion of gas before it reaches the substrate
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • C30B25/08—Reaction chambers; Selection of materials therefor
FR8916268A 1989-12-08 1989-12-08 Dispositif antipollution pour bati vertical de depot en phase gazeuse. Expired - Fee Related FR2655772B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8916268A FR2655772B1 (fr) 1989-12-08 1989-12-08 Dispositif antipollution pour bati vertical de depot en phase gazeuse.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8916268A FR2655772B1 (fr) 1989-12-08 1989-12-08 Dispositif antipollution pour bati vertical de depot en phase gazeuse.

Publications (2)

Publication Number Publication Date
FR2655772A1 FR2655772A1 (fr) 1991-06-14
FR2655772B1 true FR2655772B1 (fr) 1992-01-24

Family

ID=9388303

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8916268A Expired - Fee Related FR2655772B1 (fr) 1989-12-08 1989-12-08 Dispositif antipollution pour bati vertical de depot en phase gazeuse.

Country Status (1)

Country Link
FR (1) FR2655772B1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10242057A (ja) * 1997-02-25 1998-09-11 Shin Etsu Handotai Co Ltd 縦型ｃｖｄ装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59107998A (ja) * 1982-12-07 1984-06-22 Fujitsu Ltd 結晶成長装置
DE3485898D1 (de) * 1983-12-09 1992-10-01 Applied Materials Inc Induktiv beheitzter reaktor zur chemischen abscheidung aus der dampfphase.
JPS6369975A (ja) * 1986-09-10 1988-03-30 Nec Corp 気相成長装置
JPS6369794A (ja) * 1986-09-12 1988-03-29 Nec Corp 気相エピタキシヤル成長装置

Also Published As

Publication number Publication date
FR2655772A1 (fr) 1991-06-14

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Legal Events

Date Code Title Description
ST Notification of lapse