JPH0489595A - Controlling circuit of x-y stage - Google Patents

Abstract

PURPOSE:To conduct precise and quick control by moving a table so as to place the position of the table right at the center of displaying measures. CONSTITUTION:A displayed region 401 is segmented latticelike and the number of faults at every corresponding position thereof of inspection object which is placed on an X-Y stage 3, is displayed. By designating one of the lattices of the displayed region 401 by a mouse 42 and designating a spreading command displayed on a command display region 403, also by the mouse 42, a region of the designated lattice is spread out and the spread displayed region 404 is also segmented latticelike, and then the number of faults for indicating at what position the faults exist, is displayed. Then, by designating the spreading command, the region is further spread out and the further spread region 405 is displayed again.

Description

[Detailed Description of the Invention] [Industrial Application Field] This invention relates to a control circuit for an XY stage, for example, a control circuit for controlling an XY stage in an inspection device that displays defects in a liquid crystal display panel on an image. Regarding circuits.

U Prior Art] In the inspection of liquid crystal display panels, etc., the object to be inspected is usually mounted on an XY stage that can be moved to any position.
A microscope held on an XY stage and a CCD
It is observed using an optical system such as a camera. When increasing the magnification or performing certain types of processing such as repair processing under observation, it is necessary to move the XY stage to bring a specific part of the object to be inspected to the center of the field of view.

To move the XY stage, instructions are given by operating a manual feed handle or, in the case of an electric type, by operating a switch.

[Problems to be solved by the invention] However, in the conventional manual feed handle system,
This places a heavy burden on the inspection worker and has poor work efficiency. In addition, when observing at high magnification, vibrations and blur caused by handle operations become a problem. Even in the case of an electric type, if the stage movement speed is relatively high, it is often impossible to stop the XY stage at a specific location due to overrun. Especially when observing at high magnification,
There is a strong tendency towards this.

Therefore, the main object of the present invention is to provide a control circuit for an XY stage that can quickly move a specific location of an object to be inspected to the center of the field of view with simple operation.

[Means for solving the problem] The present invention is a control circuit for an XY stage,
A table on which an object to be inspected is placed and movable on a plane; a detection means for detecting the moving position of the table on the plane; a display means for displaying an image corresponding to the inspected object, a specifying means for specifying an arbitrary position of the inspection object on the display surface of the display means, and an arbitrary position of the image corresponding to the inspected object by the specifying means. and control means for moving the table in response to the specified position so that the table position corresponding to the specified position becomes the center of the display means.

[Operation] The control circuit for the XY stage according to the present invention displays the position of the table corresponding to an arbitrary position of the image corresponding to the inspection target displayed on the display means in response to the specified position. Move the table so that it is in the center of the device.

[Embodiment of the Invention] FIG. 1 is an external perspective view of an embodiment of the invention, and FIG.
The figure is also a front view.

Referring to FIGS. 1 and 2, an XY stage 3 movable in the X and Y directions is arranged on the base 2 of the casing 1. A liquid crystal panel as a workpiece is placed on this XY stage 3. In order to inspect the workpiece placed on the XY stage 3, a Z-axis table 4 that is movable only in the Z direction (vertical direction) is provided. This Z-axis table 4 is equipped with an electric revolver 5, a microscope illumination light source 6, and a
A CD camera 7 is also provided. The electric revolver 5 switches lenses with different magnifications, and the microscope illumination light source 6 illuminates the workpiece. The CCD camera 7 images the surface of the workpiece through the lens of the electric revolver 5. Note that, as shown in FIG. 2, a light source 10 for transmitting illumination of the workpiece is provided at the bottom of the XY stage 3.

FIG. 3 is a schematic block diagram of an embodiment of the present invention.

Next, referring to FIG. 3, the electrical configuration of an embodiment of the present invention will be described. The CPU 21 performs overall control according to a program stored in a built-in memory.

That is, the CPU 21 gives a command signal for moving the XY stage 3 in the Y direction to the Y pulse controller 23 via l1022. Y pulse controller 23
generates a Y pulse in response to a command signal. This Y pulse is given to the Y motor driver 24.

The Y motor driver 24 rotates the Y motor 25 by the number of pulses given. The Y motor 25 moves the XY child table in the Y direction. The rotation speed of the Y motor 25 is detected by the Y encoder 26. Y encoder 26 is Y
A pulse signal corresponding to the rotation of the motor 25 is generated and applied to the Y counter 27. The Y counter 27 counts the pulse signals and sends the count output to the CPU 2 via the l1022.
Give to 1.

Similarly, the CPU 21 provides a command signal for moving the XY stage 3 in the X direction to the X motor driver 31 via l1029. The X motor driver 31 rotates the X motor 32 according to the command signal. X motor 3
2 is provided to move the XY stage 3 in the X direction. The rotation speed of the X motor 32 is detected by the X encoder 33, and a pulse signal corresponding to the rotation speed is given to the X counter 34. The X counter 34 counts the pulse signals and sends the count output to the CPU via l1029.
Give to 21. The CPU 21 determines the position of the XY stage 3 in the X direction and the X direction based on the count outputs of the Y counter 27 and the X counter 34.

The CCD camera 7 takes an image of the workpiece placed on the XY stage 3, and its video output is given to the screen switching circuit 41. The screen switching circuit 41 switches between the video signal output from the CCD camera 7 and the computer image signal provided from the CPU 21, and displays the video signal on the monitor television 4o. Note that a command signal is given to the CPU 21 from the mouse 42 via a mouse control circuit 43.

FIG. 4 is a flow diagram for explaining the specific operation of an embodiment of the present invention, and FIG. 5 is a diagram showing an example of a computer image displayed on a monitor screen according to an embodiment of the present invention. It is.

Next, with reference to FIGS. 1 to 5, a specific operation of an embodiment of the present invention will be described.

As shown in FIG. 5, the monitor television 40 includes a display area 401 for displaying the current position of the XY stage 3;
a display area 402 that displays information about the current device status;
Display area 40 where a menu of various execution commands is displayed
3 are provided.

In the information display area 402, the X-direction and X-direction position coordinates, magnification, current mode, etc. on the XY stage are displayed. In the command display area 403, enlargement, reduction, stage movement 1 position storage, etc. are displayed, and each command can be specified using the mouse 42.

The display area 401 is divided into squares, and the number of defects at each position of the inspection target placed on the XY stage 3 is displayed. By specifying any square in this display area 401 with the mouse 42 and further specifying the enlargement command displayed in the command display area 403 with the mouse 42, the area of that square is enlarged. The display area 404 is also divided into squares, and the number of defects is displayed to indicate in which position the defect is present. Furthermore, by specifying any square in the display area 404 with the mouse 42 and specifying an enlargement command, that area is further enlarged, and the enlarged area 4.degree. 5 is displayed.

Next, the operation will be explained with reference to FIG.

The CPU II waits until a designated signal is input from the mouse 42 via the mouse control circuit 43. It is determined whether any position in the display area 401 of the monitor 40 is specified by the mouse 42, and the display area 40
1 is specified, the data (X+, Y+) of the specified area is read. When the XY stage 3 moves, the rotational speed of the Y motor 25 and the X motor 32 and the output of the X encoder 26 and the X encoder 33 are counted by the Y counter 27 and the ffi...!
: is given to CPU21i: via l1022.29. The CPU 21 stores the current position of the stage (Xo, Y
o) and read the specified position data (X,.

The amount of movement of the XY stage 3 in the X direction and the X direction is calculated from the difference between the current position data (Xo, Yo) and the current magnification of the electric ribocill 5. And C.P.
U21 provides a command signal for generating pulses corresponding to the calculated amount to Y pulse controller 23 and X pulse controller 30 via l1022.29.

Accordingly, the Y pulse controller 23 controls the Y motor driver 2.
The X pulse controller 30 applies a driving pulse to the X motor 32 through the X motor driver 31. Thereby, the XY stage 3 moves to the designated position. Furthermore, the CPU
21 is the X on the monitor 43 screen via the screen switching circuit 41.
Update the display of the current position of Y stage 3. CPU21
determines whether or not the processing has been completed, and if not, waits until the position is designated again with the mouse 42. Note that when a position other than the position section of the XY stage 3 is specified using the mouse 42, the specified process is performed.

[Effects of the Invention] As described above, according to the present invention, an image corresponding to the inspection target is displayed on the display surface of the display means, and when an arbitrary position of the inspection target is specified, an image corresponding to the inspection target is displayed at that position. Since the chisel is moved so that the position of the corresponding table is in the center of the display screen, accurate and quick control can be performed.

[Brief explanation of the drawing]

FIG. 1 is an external perspective view of one embodiment of the present invention. Second
The figure is also a front view. FIG. 3 is a schematic block diagram of one embodiment of the present invention. FIG. 4 is a flowchart for explaining the specific operation of one embodiment of the present invention. Fifth
The figure is a diagram showing an example of an image displayed on a monitor screen according to an embodiment of the present invention. In the figure, 3 is the XY stage, 4 is the Z-axis table, and 5 is the
is an electric revolver, 7 is a CCD camera, 21 is a CPU, 2
2.29 is Ilo, 23 is Y pulse controller, 24
is Y motor driver, 25 is Y motor, 26 is Y encoder, 27 is Y counter, 30 is X pulse controller, 31 is X motor driver, 32 is X motor, 33 is X
34 is an X counter, 40 is a monitor television, 41 is a screen switching circuit, 42 is a mouse, and 43 is a mouse control circuit. (2 others) Figure 1 Figure 4 CCOCC camera Figure 3

Claims (1)

[Scope of Claims] A table on which an object to be inspected is placed and movable on a plane, a detection means for detecting a moving position of the table on the plane, and arbitrarily expanding or contracting the range of the object to be inspected. display means for displaying an image corresponding to the inspection object detected by the detection means; designation means for specifying an arbitrary position of the inspection object on the display surface of the display means; and in response to an arbitrary position of the image corresponding to the inspection target being specified by the specifying means, moving the table so that the position of the table corresponding to that position becomes the center of the display means. with control means of
Control circuit for XY stage.