JP2002231621A - Exposure system and method of driving its unit - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable units to be driven more easily. SOLUTION: A plurality of units which constitute an exposure system, a control means which controls the drive of the units, and a console unit equipped with a display that communicates with the control means regarding information are provided. Furthermore, a storage means which stores a plurality of drive target positions of the units is provided, data for selecting one from out of a plurality of drive target positions of the units are inputted into the console unit, and the present position and selected drive target position of the unit are displayed graphically on the display.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an LSI, a VLSI
The present invention relates to a semiconductor manufacturing apparatus such as a semiconductor exposure apparatus for manufacturing a semiconductor device such as a semiconductor device and a method of driving a unit thereof.

[0002]

2. Description of the Related Art In recent years, with the advance of miniaturization of semiconductor integrated circuits, high precision of semiconductor manufacturing equipment has been required, and accordingly, measurement of marks on a wafer for alignment and wafer leveling have been required. For a plurality of shots on a wafer, such as focus measurement for performing a focus measurement, various measurements and data processing based on the results are increasing. In order to maintain the accuracy of these processes, it is necessary to optimize various parameters for each function. For this reason, the semiconductor exposure apparatus has a command other than the normal exposure sequence for finding the optimum parameters according to the wafer for performance evaluation and maintenance of the apparatus.

When the unit is driven to a predetermined coordinate by a command or the like, a designated coordinate value is input following the command input from the keyboard, or the drive coordinate is set in a memory in advance, and the drive command is inputted. A method such as designating the memory number as a parameter is used.

[0004]

However, according to such a conventional technique, it is troublesome to specify a coordinate value or a memory number every time a command is activated. If it is difficult to know what value is set in the joystick, drive the stage, etc. with the joystick to the position where the alignment mark can be seen in performance evaluation, etc., and want to immediately store the current coordinates, etc. In the case where it is necessary to input again, or when it is desired to continuously drive a plurality of shots on the wafer, there is a problem that confirmation and correction of the contents of the memory are complicated.

SUMMARY OF THE INVENTION An object of the present invention is to make it easier to drive each unit in a semiconductor manufacturing apparatus in view of the problems of the prior art.

[0006]

In order to achieve the above object, according to the present invention, a plurality of units constituting an apparatus, control means for controlling a driving operation of the units, and transmission and reception of information between the control means are provided. An exposure apparatus including a console unit having a display for performing the operation and a method of driving the unit, comprising a storage unit for storing a plurality of drive target positions of the unit, wherein the console unit is stored by the storage unit in a plurality. Accepting an input for selecting one of the drive target positions of the unit, and graphically displaying the current position of the unit and the drive target position of the selected unit on the display. Features. The graphic display is
It may be a captured image of an actual unit.

Further, the present invention provides a console unit having a plurality of units constituting an apparatus, control means for controlling a driving operation of the units, and a display for exchanging information with the control means. In an exposure apparatus and a method of driving a unit thereof, the console unit graphically displays a current position of the unit and a drive target position of the unit on the display, and when the unit is driven, The current position of the unit may temporally follow the drive of the unit.

The present invention also provides a console unit having a plurality of units constituting an apparatus, control means for controlling the driving operation of the units, and a display for transmitting and receiving information between the control means. And a storage unit for storing a drive target position of the unit, wherein the console unit stores, on the display, a current position of the unit and the storage unit. The drive target position of the unit is graphically displayed, and the drive target position of the unit stored by the storage means is the current position of the unit at the time of storage, or an arbitrary input at the console unit. May be a characteristic of

The present invention also provides a console unit having a plurality of units constituting an apparatus, control means for controlling a driving operation of the units, and a display for exchanging information with the control means. In the exposure apparatus and the method of driving the unit, the console unit graphically displays the current position of the unit and the drive target position of the unit on the display, and records the position history of the unit. It may be characterized in that

[0010] The present invention also provides a console unit having a plurality of units constituting an apparatus, control means for controlling a driving operation of the units, and a display for exchanging information with the control means. In the exposure apparatus and the method of driving the unit, when driving the unit, the console unit graphically displays the current position of the unit on the display, and points an input for driving the unit. Receiving via a device, wherein the control means drives the unit while synchronizing with the movement of the current position of the unit displayed on the display based on the operation of the pointing device. Good.

The present invention also provides a console unit having a plurality of units constituting an apparatus, control means for controlling the driving operation of the units, and a display for transmitting and receiving information to and from the control means. In the exposure apparatus and the method of driving the unit, comprising a measuring means for measuring the drive time of the unit, when the unit is driven, the console unit, on the display,
The present position of the unit may be graphically displayed, and the driving time of the unit measured by the measuring means may be displayed as a bar graph along a time axis.

In the above-described exposure apparatus and the method of driving the unit, the console unit preferably displays a button for allowing an operator to confirm whether or not the unit can be driven, and the console unit includes: Preferably, the current position of the unit or the drive target position of the unit is displayed as coordinate values, and the unit preferably includes at least a blade for adjusting an exposure angle of view.

[0013] In a more limited aspect, it is preferable that the apparatus further comprises means for storing a plurality of drive target positions of the unit, and the console section is provided with a plurality of drive target positions of the unit stored by the storage means. From 1
Preferably accepts input to select one,
It is preferable that the console unit displays all of the plurality of drive target positions of the unit stored on the display, and receives an input for selecting one of the drive target units via a pointing device.

[0014] Preferably, the console section graphically displays the current position of the unit by temporally following the drive of the unit while driving the unit. Is
It is preferable that the console unit accepts an input for designating which one of the plurality of units is the operation, and the console unit displays all or one of the plurality of units on the display, and selects one of the units. The input for specifying whether the operation is related to the operation is preferably received via a pointing device, and the drive target position of the unit to be displayed or stored is the current position of the unit at the time of display or storage. Preferably, it is a position or an arbitrary value input in the console unit.

Further, the console unit displays a drive target position of the unit on the display, receives an input for driving the unit via a pointing device, and the control means controls the dragging operation of the pointing device. It is preferable that the unit is driven based on the following. Preferably, the console unit displays a comment attached to a current position of the unit or a drive target position of the unit.

Preferably, the exposure apparatus has a unit for measuring a driving time of the unit, and the console unit displays the driving time of the unit. Preferably, time is displayed as a bar graph along the time axis.

Further, the console unit selects the current position of the unit displayed on the display by using a touch panel or a pointing device such as a mouse, and moves the selected position on the screen to thereby display the movement locus of the unit. Recognizing the coordinates of the selected position at each point, the control means drives the unit in synchronization with the movement of the selected position based on the coordinates. Also, the drive time of each unit is measured, and the console unit displays the measured time on the display. In that case, it is preferable to display the drive time of each selected unit as a bar graph along the time axis.

[0018]

In the exposure apparatus and the method of driving the unit according to the present invention, the current position and the drive target position of the unit such as the blade are graphically displayed on the display of the console unit. Accurately grasped accordingly. In addition, a plurality of drive target positions of the unit are stored, and by selecting one from there,
Since the unit is driven to the drive target position, the drive to the stored drive target position is easily performed. Also, the graphic display of the current position of units such as blades,
It is also performed in the unit driving state, in which case, the display is performed by temporally following the actual driving of the unit,
The unit position at the time of driving is recognized in real time. Since the unit position to be displayed and stored can be any of the current position of the unit at the time of display or storage, or any input value, the convenience of setting and displaying the unit drive target position is high. Further, the selection of the stored unit drive target position and the unit can be easily performed from a display on the display by a pointing device such as a touch panel or a mouse.

Further, the unit is driven in real time simply by selecting and moving the current position of the unit displayed on the display by using a touch panel or a pointing device such as a mouse. Further, since the driving time of each unit is measured and displayed as a bar graph or the like along the time axis, the driving history of each unit can be easily grasped.

Hereinafter, the present invention will be described more specifically through embodiments.

[0021]

FIG. 1 is a perspective view showing the appearance of a semiconductor exposure apparatus according to one embodiment of the present invention. As shown in FIG. 1, this semiconductor exposure apparatus is disposed inside a temperature control chamber 101 for controlling the environmental temperature of the apparatus main body,
EWS main unit 10 having CPU for controlling the main unit
6. EW for displaying predetermined information in the device
S display device 102, monitor TV10 for displaying image information obtained via imaging means in the device body
5. Operation panel 10 for performing predetermined input to the device
3. It has a console unit including an EWS keyboard 104 and the like. In the figure, 107 is an ON-OFF switch, 1
08 is an emergency stop switch, 109 is various switches, a mouse, etc., 110 is a LAN communication cable, 111 is an exhaust duct for generating heat from the console function, and 112 is an exhaust device for the chamber. The semiconductor exposure apparatus main body is chamber 1
01.

The EWS display 102 is of a thin flat type such as EL, plasma, liquid crystal, etc., is housed in the front of the chamber 101, and is connected to the EWS body 106 by a LAN cable 110. Operation panel 10
3. A keyboard 104, a monitor TV 105, and the like are also installed on the front surface of the chamber 101 so that console operations similar to the conventional console operation can be performed from the front surface of the chamber 101.

FIG. 2 is a diagram showing the internal structure of the apparatus shown in FIG. FIG. 1 shows a stepper as a semiconductor exposure apparatus. In the figure, reference numeral 202 denotes a reticle, and 203 denotes a wafer. When a light beam emitted from a light source device 204 illuminates the reticle 202 through an illumination optical system 205, a pattern on the reticle 202 is exposed by a projection lens 206 to a photosensitive area on the wafer 203. Can be transferred to a layer. The reticle 202 is supported by a reticle stage 207 for holding and moving the reticle 202. Wafer 203
Is exposed while being vacuum-sucked by the wafer chuck 291. The wafer chuck 291 is mounted on the wafer stage 20.
9 allows movement in each axis direction. Above the reticle 202, a reticle optical system 281 for detecting the amount of displacement of the reticle is arranged. Above the wafer stage 209, an off-axis microscope 282 is arranged adjacent to the projection lens 206. Off-axis microscope 282
The main function is to detect the relative position between the internal reference mark and the alignment mark on the wafer 203.
In addition, adjacent to these stepper bodies, peripheral devices such as reticle library 220 and wafer carrier elevator 2
The reticle or wafer 30 is transported to the stepper body by the reticle transport device 221 and the wafer transport device 231.

The chamber 101 is mainly composed of an air conditioner room 210 for controlling the temperature of air, a filter box 213 for filtering fine foreign matters to form a uniform flow of clean air, and a booth 214 for shutting off the environment of the apparatus from the outside. Have been. In the chamber 101, air whose temperature has been adjusted by the cooler 215 and the reheater 216 in the air conditioner room 210 is supplied into the booth 214 via the air filter g by the blower 217. The air supplied to the booth 214 is returned to the air conditioner room 210 from the return port ra.
And circulates in the chamber 101. Normally, the chamber 101 is not strictly a complete circulation system. To maintain the inside of the booth 214 at a positive pressure at all times, about 10% of the amount of circulating air outside the booth 214 is supplied to the outside air provided in the air conditioner room 210. It is introduced from the mouth oa via a blower. In this way, the chamber 101 enables the environment temperature where the apparatus is placed to be kept constant and the air to be kept clean. In addition, the light source device 204 has an intake port sa and an exhaust port e in preparation for cooling of the ultra-high pressure mercury lamp and generation of toxic gas when the laser is abnormal.
a is provided, and a part of the air in the booth 214 is forcibly exhausted to the factory equipment via the light source device 204 and the exclusive exhaust fan provided in the air conditioner room 210. Further, a chemical adsorption filter cf for removing chemical substances in the air is provided so as to be connected to the outside air introduction port oa and the return port ra of the air conditioner room 210, respectively.

FIG. 3 is a block diagram showing an electric circuit configuration of the apparatus shown in FIG. In the figure, reference numeral 321 denotes a main unit C built in the EWS main unit 106, which controls the entire apparatus.
It is a PU and comprises a central processing unit such as a microcomputer or a minicomputer. 322 is a wafer stage driving device, and 323 is the off-axis microscope 28.
2 is an alignment detection system, 324 is a reticle stage driving device, 325 is an illumination system such as the light source device 204, 3
26 is a shutter driving device, 327 is a focus detection system,
Reference numeral 328 denotes a Z drive, which is a main body CPU 32
1 is controlled. 329 is the reticle transport device 2
21, a transfer system such as a wafer transfer device 231. 330
Is a console unit having the display 102, the keyboard 104, etc., for giving various commands and parameters relating to the operation of the exposure apparatus to the main body CPU 321. That is, it is for exchanging information with the operator. 331 is a console CPU and 332 is an external memory for storing parameters and the like.

FIGS. 4 to 8 are flowcharts showing the operation in this configuration. The operation of the device will be described with reference to these drawings. When the exposure sequence starts in the main body CPU 321 based on a command from the console CPU 331, the console CPU 331 first monitors in step S401 whether the exposure apparatus main body is in an idle state. When the idle state is detected in step S401, the type of the input command or the pressed button is determined in steps S401 to S406. That is, when it is determined in step S402 that the command is a sequence return command, the process returns to the exposure sequence. If it is determined in step S403 that the button is not a function button, the process proceeds to step S408. If it is determined in step S404 that the button is the read current position button, step 1 in FIG.
Move on to processing. If it is determined in step S405 that the button is the save current position button, the process proceeds to step 2 in FIG. If it is determined in step S406 that the button is the list saving position button, the process shifts to step 3 in FIG. 7; The process proceeds to step 4 in FIG. 8 by regarding the button as a button. In step S408, the other buttons are processed, and the process returns to step S401.

If it is determined in step S403 that the function button has been pressed, a menu of each button is displayed in steps S404 to S407 as shown in FIG. The determination in steps S404 to S407 is performed.

In step 1 of FIG. 5, first, the current position of the designated unit is read out in step S11, and the display 102 is read out in step S12.
The read position is displayed on the scale coordinate system on the screen. The unit is specified by the top window 101 shown in FIG. When the blade 102 is selected, for example, as shown in FIG.
The position of the blade is displayed graphically and numerically. FIG. 9 is an enlarged view showing this state.

In the process of step 2 in FIG. 6, first, in step S201, a menu for selecting either the current position (current position) or the setting position (set position) is displayed as shown in FIG. If it is determined in step S202 that the current position has been selected, the process proceeds to step S2.
03 to S206, the position storage No. designated in step S204. Is stored in the storage area corresponding to
The current position of the unit designated in 205 is read and stored, and the process returns to step S401 in FIG. Step S
If it is determined in step 202 that the current position has not been selected, steps S211 to S217 are performed.
In step S2, the current position input in step S214 and the comment input in step S216 are stored in step S2.
No. 12 of the position memory No. Is stored in the storage area corresponding to. And the process returns to step S401 in FIG.

In the step 3 of FIG. 7, first, in step S31, the stored position information of the designated unit is similarly stored on the above-mentioned reduced scale coordinate system in FIG.
Display as shown. In step S32, the position memory N is located on the left of the position displayed in step S31.
o. Is displayed. In step S33, a coordinate value is displayed on the right of the position displayed in step S31. Also, in step S34, step S31
The comment is displayed below the position indicated by. Then, in step S35, it is determined whether or not all the position information stored for the specified unit has been displayed. If there is undisplayed information, the process returns to step S31. The process returns to step S401.

In step 4 of FIG. 8, first, in step S41, step 3 of FIG.
Execute 5). Next, in step S42, one position is selected from the positions displayed in step S41. In step S43, the graphic at the selected position is blinked to prompt the operator to confirm. In step S44, the drive is started. A button for confirming whether or not to confirm is displayed, and in step S45, the press of the confirmation button is accepted. Next, in step S46, it is determined whether the confirmation button is positive or negative. If negative, the process returns to step S42, and if positive, the process proceeds to step S47. In step S47, the designated unit is driven to the position selected in step S42, and the process returns to step S401 in FIG.

When the current position of the unit displayed on the scale coordinate system shown in FIG. 9 is selected by a touch panel or a pointing device such as a mouse, and the selected position is moved on the screen, the console CPU 331 is displayed.
Recognizes the coordinates of the selected position at each point on its trajectory,
The main body CPU 321 drives the corresponding unit in synchronization with the movement of the selected position based on the coordinates. Thereby, the unit can be moved to a desired position in a real-time sense by dragging. In addition, even when the unit is being driven, information on the position of the unit is always received from the main body CPU 321 and the current position of the unit is displayed by temporally following the actual driving of the unit. At the same time, the history of the drive target position (driven position) is recorded.

The driving time of each unit is measured,
The console CPU 331 displays a timing chart of the drive results of each unit as shown at the bottom of FIG. 10 in response to pressing of the “Log Chart” button in the top window 101 of FIG. Further, by clicking a bar-shaped figure indicating the driving time in the chart, the command content related to the driving is displayed at the bottom of the chart. Further, as shown in FIG. 9, a unit state, for example, a stop state or a driving state, and a movement mode by dragging or by coordinate designation are displayed.

[0034]

According to the present invention, the present position and the drive target position of the unit such as the blade for adjusting the exposure angle of view are graphically displayed on the display of the console unit. And can be accurately grasped as necessary. Further, since a plurality of drive target positions of the unit are stored and one of them is selected to drive the unit to the drive target position, the drive to the stored drive target position can be easily performed. . Also, the graphic display of the current position of the unit is performed even when the unit is driven, and in this case, the display is performed following the actual driving of the unit in time, so the current position of the unit at the time of driving is displayed in real time. You can figure out. Since the position of the unit to be displayed and stored can be either the current position of the unit at the time of display or storage or any input value, the convenience of setting and displaying the drive target position of the unit is improved. high. Further, selection of the stored drive target position of the unit and the unit can be easily performed from a display on the display by a pointing device such as a touch panel or a mouse.

Furthermore, the unit can be driven in a real-time sense only by selecting and moving the current position of the unit such as the blade displayed on the display by using a touch panel or a pointing device such as a mouse. Further, since the driving time of each unit is displayed as a bar graph or the like along the time axis, the driving history of each unit can be easily grasped.

[Brief description of the drawings]

FIG. 1 is a perspective view showing the appearance of a semiconductor exposure apparatus according to one embodiment of the present invention.

FIG. 2 is a diagram showing the internal structure of the device of FIG.

FIG. 3 is a block diagram showing an electric circuit configuration of the device shown in FIG.

FIG. 4 is a flowchart showing the operation of the apparatus of FIG.

FIG. 5 is a flowchart of a process branched from the process of the flowchart of FIG. 4;

FIG. 6 is a flowchart of a process branched from the process of the flowchart of FIG. 4;

FIG. 7 is a flowchart of a process branched from the process of the flowchart of FIG. 4;

FIG. 8 is a flowchart of a process branched from the process of the flowchart of FIG. 4;

FIG. 9 is a diagram showing a screen displayed in the processing of FIGS.

FIG. 10 is a diagram showing the relationship between the screen of FIG.

[Explanation of symbols]

101: temperature control chamber, 102: display device for EWS, 103: operation panel, 104: keyboard for EWS, 105: monitor TV, 106: EWS body, 10
7: ON-OFF switch, 108: emergency stop switch, 109: various switches, mouse, etc. 110: LAN
Communication cable, 111: exhaust duct, 112: exhaust device, 202: reticle, 203: wafer, 204: light source device, 205: illumination optical system, 206: projection lens, 20
7: reticle stage, 209: wafer stage, 28
1: reticle microscope, 282: off-axis microscope, 2
10: air conditioner room, 213: filter box, 214:
Booth, 217: blower, g: air filter, cf: chemical adsorption filter, oa: outside air introduction port, ra: return port, 321: main body CPU, 330: console, 33
1: console CPU, 332: external memory, 601,
701, 801: joystick function window, 6
02: joystick button, 603: end button,
613: rotation button, 604: speed button, 60
5: repeat button, 606, 609 to 612, 702
７０707, 802 to 805: Button.

Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat II (reference) G09G 5/36 510 H01L 21/30 502G

Claims (27)

[Claims] 1. An exposure apparatus comprising: a plurality of units constituting an apparatus; control means for controlling a driving operation of the units; and a console unit having a display for exchanging information with the control means. In the apparatus, there is provided storage means for storing a plurality of drive target positions of the unit, and the console unit accepts an input for selecting one of the drive target positions of the unit stored by the storage means. An exposure apparatus for graphically displaying, on the display, a current position of the unit and a selected drive target position of the unit. 2. An exposure apparatus comprising: a plurality of units constituting an apparatus; control means for controlling a driving operation of the units; and a console unit having a display for exchanging information with the control means. In the apparatus, the console unit graphically displays a current position of the unit and a drive target position of the unit on the display. When the unit is driven, the current position of the unit is determined by driving the unit. Exposure apparatus characterized in that the exposure apparatus temporally follows the exposure. 3. An exposure apparatus comprising: a plurality of units constituting an apparatus; control means for controlling a driving operation of the units; and a console unit having a display for exchanging information with the control means. In the apparatus, there is provided storage means for storing a drive target position of the unit, and the console unit graphically displays, on the display, a current position of the unit and a drive target position of the unit stored by the storage means. The drive target position of the unit stored by the storage means is the current position of the unit at the time of storage,
Alternatively, the exposure apparatus is an arbitrary value input in the console unit. 4. An exposure apparatus comprising: a plurality of units constituting an apparatus; control means for controlling a driving operation of the units; and a console unit having a display for exchanging information with the control means. In the apparatus, the console unit graphically displays a current position of the unit and a drive target position of the unit on the display, and records a position history of the unit. 5. An exposure apparatus comprising: a plurality of units constituting an apparatus; control means for controlling a driving operation of the units; and a console unit having a display for exchanging information with the control means. In the apparatus, when driving the unit, the console unit graphically displays a current position of the unit on the display, and receives an input for driving the unit via a pointing device, An exposure apparatus, wherein the control means drives the unit based on an operation of the pointing device, while synchronizing the movement of a current position of the unit displayed on the display. 6. An exposure apparatus comprising: a plurality of units constituting an apparatus; control means for controlling a driving operation of the units; and a console unit having a display for exchanging information with the control means. The apparatus, further comprising: a measuring unit that measures a driving time of the unit.When the unit is driven, the console unit graphically displays a current position of the unit on the display, and is measured by the measuring unit. An exposure apparatus for displaying the driving time of the unit as a bar graph along a time axis. 7. The exposure apparatus according to claim 1, wherein the console unit displays a button for allowing an operator to confirm whether the unit can be driven. apparatus. 8. The exposure apparatus according to claim 1, wherein the console unit displays a current position of the unit or a drive target position of the unit as coordinate values. 9. The exposure apparatus according to claim 1, wherein the unit includes at least a blade for adjusting an exposure angle of view. 10. The apparatus according to claim 2, further comprising means for storing a plurality of drive target positions of said unit.
The exposure apparatus according to any one of the above. 11. The exposure apparatus according to claim 10, wherein the console unit accepts an input for selecting one of a plurality of drive target positions of the unit stored by the storage unit. . 12. The console unit displays all drive target positions of the unit stored on the display unit on the display, and accepts an input for selecting one of the units via a pointing device. The exposure apparatus according to claim 11, wherein: 13. The unit according to claim 1, wherein, while the unit is being driven, the current position of the unit is graphically displayed while temporally following the drive of the unit. The exposure apparatus according to any one of 1 to 3 to 6. 14. The console unit according to claim 1, wherein the console unit receives an input for designating which of the plurality of units is an operation.
13. The exposure apparatus according to any one of 13). 15. The console unit displays all or one of the plurality of units on the display,
15. The exposure apparatus according to claim 14, wherein an input for designating one of the operations is received via a pointing device. 16. The drive target position of the unit to be displayed or stored is a current position of the unit at the time of display or storage, or an arbitrary value input in the console unit. The exposure apparatus according to claim 1. 17. The exposure apparatus according to claim 1, wherein the console unit records a history of a drive target position of the unit. 18. The console unit displays a drive target position of the unit on the display, receives an input for driving the unit via a pointing device, and the control unit performs a dragging operation of the pointing device. 7. The exposure apparatus according to claim 1, wherein the unit is driven based on the following. 19. The exposure apparatus according to claim 1, wherein the console section displays a comment attached to a current position of the unit or a drive target position of the unit. apparatus. 20. The apparatus according to claim 1, wherein the exposure apparatus has a unit for measuring a driving time of the unit, and the console unit displays a driving time of the unit. 3. The exposure apparatus according to claim 1. 21. The exposure apparatus according to claim 20, wherein the console unit displays the drive time of the unit as a bar graph along a time axis. 22. An exposure apparatus comprising: a plurality of units constituting an apparatus; control means for controlling a driving operation of the units; and a console unit having a display for exchanging information with the control means. In the method for driving a unit of an apparatus, a plurality of drive target positions of the unit are stored by a storage unit, and one of the drive target positions of the unit stored by the storage unit is selected by the console unit. On the display, accepting input for
A method of driving a unit, wherein a current position of the unit and a selected drive target position of the unit are graphically displayed. 23. An exposure apparatus comprising: a plurality of units constituting an apparatus; control means for controlling a driving operation of the units; and a console unit having a display for exchanging information with the control means. In the method of driving the unit of the apparatus, the console unit graphically displays the current position of the unit and the drive target position of the unit on the display, and when the unit is driven, the current position of the unit is A unit driving method characterized by temporally following the driving of the unit. 24. An exposure apparatus comprising: a plurality of units constituting an apparatus; control means for controlling a driving operation of the units; and a console unit having a display for exchanging information with the control means. In the method of driving a unit of the apparatus, a drive target position of the unit is stored by a storage unit, and a current position of the unit and a drive target of the unit stored by the storage unit are displayed on the display by the console unit. Graphically displaying the position, the drive target position of the unit stored by the storage means is the current position of the unit at the time of storage,
Alternatively, the driving method of the unit is an arbitrary value input in the console unit. 25. An exposure apparatus comprising: a plurality of units constituting an apparatus; control means for controlling a driving operation of the units; and a console unit having a display for exchanging information with the control means. A unit for driving a unit of the apparatus, wherein the console unit graphically displays a current position of the unit and a drive target position of the unit on the display, and records a position history of the unit. Drive method. 26. An exposure apparatus comprising: a plurality of units constituting an apparatus; control means for controlling a driving operation of the units; and a console unit having a display for exchanging information with the control means. In the method of driving a unit of the apparatus, when driving the unit, the console unit graphically displays the current position of the unit on the display on the display, and inputs an input for driving the unit via a pointing device. Receiving, based on the operation of the pointing device, the control means drives the unit while synchronizing with the movement of the current position of the unit displayed on the display. 27. An exposure apparatus comprising: a plurality of units constituting an apparatus; control means for controlling a driving operation of the units; and a console unit having a display for exchanging information with the control means. In a method of driving a unit of the device, a driving time of the unit is measured by a measuring unit, and when the unit is driven, the console unit graphically displays a current position of the unit on the display, A driving method of a unit, wherein the driving time of the unit measured by the measuring means is displayed as a bar graph along a time axis.