JP7383349B2 - Teaching program for image measurement equipment - Google Patents

Description

The present invention relates to a teaching program for an image measuring device.

2. Description of the Related Art Image measurement apparatuses are known that include a sample stage on which a workpiece is placed, an imaging unit that images the workpiece, and a position adjustment mechanism that adjusts the positional relationship between the sample stage and at least a portion of the imaging unit. When measuring a plurality of workpieces using such an image measuring device, automatic measurement using a part program may be performed, for example. Such a part program includes, for example, information regarding measurement points and measurement methods. Generating such a part program is sometimes called teaching.

There are two types of teaching: online teaching, in which a part program is generated by actually measuring a workpiece using an image measuring device, and offline teaching, in which a part program is generated in an environment where neither an image measuring device nor a workpiece is present. do.

In offline teaching, for example, a CAD model of a workpiece may be placed in a virtual space based on CAD data of the workpiece, and an image of this CAD model may be displayed on a display or the like. In such a case, the user may specify a measurement location based on the image of this CAD model. According to such a method, the measurement location can be easily specified.

Japanese Patent Application Publication No. 2001-319219

In conventional offline teaching, for example, a CAD model of a workpiece is placed in a virtual space based on CAD data of the workpiece, and an image of this CAD model is sometimes displayed on a display or the like. In such a case, the user may specify a measurement location based on the image of this CAD model. According to such a method, the measurement location can be easily specified.

However, in such an offline teaching program, it is sometimes difficult to sufficiently judge the suitability of the generated part program. For example, it may be difficult to intuitively determine whether or not there will be interference between the camera and the work during measurement.

The present invention has been made in view of such problems, and aims to provide a teaching program that can intuitively judge the suitability of a generated part program.

A teaching program according to one embodiment of the present invention includes a sample stage on which a workpiece is placed, an imaging unit that images the workpiece, and a position adjustment mechanism that adjusts the positional relationship between the sample stage and at least a portion of the imaging unit. A part program for an image measuring device is generated. Further, this teaching program includes a three-dimensional model generation means, a three-dimensional model image display means, and a simulation execution section. The three-dimensional model generation means includes a three-dimensional model of the image measuring device, a three-dimensional model of the workpiece placed on the sample stage of the image measuring device, and a conical shape indicating the focal position of the objective lens attached to the imaging unit. A three-dimensional model of is generated in virtual space. The three-dimensional model image display means displays a first image corresponding to the three-dimensional model of the image measuring device and the three-dimensional model of the workpiece, and an image of the workpiece that is an image corresponding to the three-dimensional model of the workpiece and is captured by the imaging unit. A second image corresponding to the second image is generated and displayed on the display device. The simulation execution unit executes a measurement simulation based on the generated part program. In addition, in the measurement simulation, the positional relationship between a portion of the three-dimensional model of the image measuring device indicating the sample stage and a portion indicating at least a portion of the imaging unit is adjusted sequentially, and the first The image and the second image are sequentially generated, and the generated first image and second image are sequentially displayed on the display device.

According to such a teaching program, the positional relationship between the imaging unit and the workpiece can be grasped from the first image. Furthermore, the image of the work output from the imaging unit can be grasped by the second image. Therefore, the user can suitably judge the suitability of the generated part program even in an environment where the actual workpiece and image measuring device cannot be visually recognized. For example, when automatic measurement is performed based on a generated part program, it is possible to intuitively judge whether or not a suitable measurement will be performed while avoiding interference between the image measurement device and the workpiece. .

Further, according to such a teaching program, the three-dimensional model of the image measuring device includes a conical three-dimensional model that indicates the focal position of the objective lens attached to the imaging unit. According to such a configuration, the user can intuitively determine the appropriate positional relationship between the workpiece and the imaging unit by visually recognizing the relationship between the three-dimensional model of the workpiece and the conical three-dimensional model in the first image, etc. can be judged.

FIG. 1 is an overall diagram of an image measuring device according to a first embodiment. FIG. 2 is a block diagram showing the configuration of a calculation device 22 of the image measuring device. It is a flowchart of automatic measurement processing by the same image measurement device. FIG. 3 is a schematic diagram for explaining edge detection processing by the image measuring device. It is an overall view of a computer system 2' used for offline teaching. It is a block diagram showing the composition of arithmetic device 22' used for offline teaching. It is an example of the GUI screen of the offline teaching program according to the first embodiment. 7A is an enlarged view of a portion of FIG. 7A. FIG. FIG. 7B is an enlarged view of a portion of FIG. 7B. FIG. 2 is a perspective view of a three-dimensional model 10A of the work 10. FIG. 7B is an enlarged view of a portion of FIG. 7B. FIG. 2 is a functional block diagram of an offline teaching program according to the first embodiment. It is a flowchart which shows an example of the procedure of offline teaching. It is a flowchart of a part program automatic generation program concerning a 1st embodiment. 3 is a flowchart of a simulation video generation program according to the first embodiment.

Next, an image measuring device according to an embodiment will be described in detail with reference to the drawings. Note that the following embodiments are merely examples, and are not intended to limit the present invention. Further, the following drawings are schematic, and some structures may be omitted for convenience of explanation.

[First embodiment]
[Image measuring device]
FIG. 1 is an overall diagram of an image measuring device according to a first embodiment. As shown in FIG. 1, the image measuring device according to this embodiment includes an image measuring device 1 and a computer system 2 connected to the image measuring device 1.

The image measuring machine 1 includes a sample stage 11 on which a workpiece 10 is placed, a Y-axis drive mechanism 12 that adjusts the Y-direction position of the sample stage 11, and a camera 13 that images the workpiece 10 placed on the sample stage 11. , a ring light 14 provided around the camera 13, a Z-axis drive mechanism 15 that adjusts the Z-direction positions of the camera 13 and the ring light 14, and a Z-axis drive mechanism 15 that adjusts the X-direction positions of the camera 13, the ring light 14, and the Z-axis drive mechanism 15. The X-axis drive mechanism 16 includes an X-axis drive mechanism 16, an arm support 17 that supports the X-axis drive mechanism 16, and a vibration isolation table 18 that supports these structures. The upper surface of the sample stage 11 coincides with a horizontal plane (XY plane). The camera 13 includes, for example, an image sensor such as a CCD image sensor or a CMOS image sensor. The Y-axis drive mechanism 12, the Z-axis drive mechanism 15, and the X-axis drive mechanism 16 include, for example, a drive motor, a ball screw for position adjustment, a linear encoder for position detection, and the like. The image data output from the camera 13 is transmitted to the computer system 2 as camera image data. Further, the coordinate data output from the linear encoders included in the Y-axis drive mechanism 12, Z-axis drive mechanism 15, and X-axis drive mechanism 16 is sent to the computer system 2 as camera position data indicating the position of the camera 13 with respect to the sample stage 11. Sent. In the following description, the configuration including the camera 13, ring light 14, and Z-axis drive mechanism 15 may be referred to as an "imaging unit." Further, a configuration including the Y-axis drive mechanism 12, the Z-axis drive mechanism 15, and the X-axis drive mechanism 16 may be referred to as a "position adjustment mechanism."

The computer system 2 includes a display device 21, a calculation device 22, and an input device 23. The display device 21 is, for example, a display, a projector, or the like. The arithmetic unit 22 includes an internal CPU and a storage device such as a hard disk. The input device 23 is an operation input device for inputting user operations, and is, for example, a mouse, a keyboard, a joystick (J/S), a touch panel, or the like.

FIG. 2 is a block diagram showing the configuration of the arithmetic device 22 according to this embodiment.

Camera image data input from the camera 13 is stored in an image memory 32 via an interface (hereinafter referred to as I/F) 31. For example, the display control unit 36 generates display image data to be displayed by the display device 21 based on the camera image data stored in the image memory 32, and transmits it to the display device 21.

The CAD data of the workpiece 10 and the image measuring device 1 are developed into image data (hereinafter referred to as "CAD image data") by the CPU 35 via the I/F 33, and then stored in the image memory 32. For example, the display control unit 36 generates display image data based on the CAD image data stored in the image memory 32 and transmits it to the display device 21.

Information input from input devices 23 such as a keyboard, J/S, and mouse is input to the CPU 35 via the I/F 34. The CPU 35 transmits, for example, the position coordinates of the mouse pointer in the image displayed on the display device 21 (hereinafter referred to as "pointer coordinates") to the display control unit 36. The display control unit 36 generates display image data, for example, based on the input pointer coordinates.

The ROM 37 stores, for example, a program for automatic measurement processing using a part program. The part program is used for automatic measurement processing by the image measuring device 1, and includes information such as camera position data (hereinafter referred to as "imaging position data") corresponding to measurement points on the workpiece 10. The storage device 38 stores, for example, CAD data and part programs used for evaluation of measurement results. Data in the storage device 38 is input to the CPU 35 via the I/F 39. The RAM 40 stores various programs and also provides a work area for various processes.

The CPU 35 controls the image measuring device 1 via the I/F 41 using various programs stored in the ROM 37, the storage device 38, the RAM 40, and the ROM 37, etc., and receives the camera image data from the image measuring device 1. and acquires the camera position data, and executes various calculation processes and measurement processes.

[Automatic measurement processing using part program]
Next, an example of automatic measurement processing using a part program will be described with reference to FIGS. 1 to 4.

First, in preparation for automatic measurement processing, the user places the workpiece 10 on the sample stage 11, as shown in FIG. Next, the position and angle of the workpiece 10 with respect to the sample stage 11 (hereinafter referred to as "workpiece position" and "workpiece angle") are adjusted. This establishes the positional relationship between the coordinate system based on the sample stage 11 (hereinafter referred to as the "mechanical coordinate system") and the coordinate system based on the workpiece 10 (hereinafter referred to as the "workpiece coordinate system"). is adjusted. Next, the user obtains the positional relationship between the machine coordinate system and the workpiece coordinate system and inputs it into the image measuring device. Next, the user operates the image measurement device to start automatic measurement processing using the part program.

FIG. 3 is a flowchart showing an example of an automatic measurement program.

In step S101, the camera position is adjusted to the imaging position. For example, the part program includes imaging position data in the workpiece coordinate system. For example, the calculation device 22 converts the imaging position data in the workpiece coordinate system in the part program into the imaging position data in the machine coordinate system based on the relative positional relationship between the machine coordinate system and the workpiece coordinate system, and Send to measuring device 1. The image measuring device 1 drives the Y-axis drive mechanism 12, the Z-axis drive mechanism 15, and the X-axis drive mechanism 16 in accordance with the received imaging position data to adjust the camera position to the imaging position.

In step S102, the camera 13 captures an image of the measurement location included in the workpiece 10. For example, a signal indicating that imaging is to be performed is transmitted to the image measuring device 1, and camera image data acquired by imaging is received. The acquired camera image data can also be displayed on the display device 21.

In step S103, an edge detection tool t is placed on the acquired camera image data. The placement of the edge detection tool t is performed according to the information contained in the part program. For example, the part program includes information such as the type of edge detection tool t, and its size, position, and angle in the camera image. Examples of the types of edge detection tools t include a rectangular edge detection tool t as shown in FIG. 4, an annular edge detection tool, an arcuate edge detection tool, and the like. For example, the rectangular edge detection tool t shown in FIG. 4 includes a box b extending along the contour of the measurement location and a plurality of line segments l included in the box b. In the illustrated example, a plurality of line segments l are arranged along the stretching direction of the box b, and extend in a direction perpendicular to the stretching direction. For example, in an annular edge detection tool, a plurality of line segments l can be arranged radially.

In step S104, edge detection processing is performed. For example, the density (illuminance) at each pixel of the image data is extracted along the line segment l included in the edge detection tool t (FIG. 4) set in step S103, and the point where the change in density (illuminance) is the largest is extracted. is detected as the edge point e. In step S104, a plurality of edge points e are detected corresponding to a plurality of line segments l included in the edge detection tool t. Based on such a plurality of edge points e, the outline, width, center of gravity, etc. of the measurement location can be measured.

In step S105, the part program is checked and it is determined whether imaging has been performed at all imaging positions. If measurements have not been performed at all imaging positions, the process advances to step S101. If measurements have been performed at all imaging positions, the automatic measurement process ends.

[Offline teaching]
Next, offline teaching for generating a part program as described above will be explained.

FIG. 5 is a diagram of a computer system 2' used for offline teaching. The computer system 2' and the display device 21', the arithmetic device 22', and the input device 23' included in the computer system 2' are basically the same as the computer system 2' and the display device 21' included in the computer system 2. , the arithmetic device 22, and the input device 23. However, the computer system 2' is not connected to the image measuring device 1.

FIG. 6 is a block diagram showing the configuration of the arithmetic unit 22' used for offline teaching.

The CAD data of the workpiece 10 and the image measuring device 1 are developed into CAD image data by the CPU 35' via the I/F 33', and then stored in the image memory 32'. The display control unit 36', for example, generates display image data to be displayed by the display device 21' based on the CAD image data stored in the image memory 32, and transmits it to the display device 21'.

Information input from input devices 23' such as a keyboard, J/S, and mouse is input to CPU 35' via I/F 34'. For example, the CPU 35' transmits the pointer coordinates of the mouse pointer to the display control unit 36'. The display control unit 36' generates display image data, for example, based on the input pointer coordinates.

The ROM 37' stores, for example, an offline teaching program for generating a part program. The storage device 38' stores, for example, CAD data used for offline teaching, part programs, and the like. Data in the storage device 38' is input to the CPU 35' via the I/F 39'. The RAM 40' not only stores various programs but also provides a work area for various processes.

The CPU 35' executes various calculation processes and measurement processes using various programs stored in, for example, the ROM 37', the storage device 38', the RAM 40', and the ROM 37'.

[Offline teaching program]
Next, a method for generating a part program using an offline teaching program will be described with reference to FIGS. 7A to 10.

In offline teaching according to the present embodiment, the calculation device 22' (FIG. 5), for example, takes in CAD data of the workpiece 10 and the image measuring device 1 (FIG. 1), and measures the workpiece 10 and the image based on this CAD data. An image of a three-dimensional model of the aircraft 1 is generated, and the generated image is displayed on a display device 21' (FIG. 5) such as a display. For example, the user creates a list of measurement points by referring to the image of the three-dimensional model displayed on the display device 21' and selecting the measurement points of the workpiece 10 displayed in this image by clicking or the like. do. The calculation device 22' calculates, for example, the appropriate imaging position for each measurement point, the type, size, position, angle, etc. of the edge detection tool t based on this list of measurement points, and calculates the part program. Output as . The output part program is sent to the image measuring device described with reference to FIG. 1 and the like.

FIG. 7A is an example of a GUI (Graphical User Interface) screen of the offline teaching program. FIG. 7B is an enlarged view of a portion of FIG. 7A. FIG. 8 is an enlarged view of a portion of FIG. 7B. FIG. 9 is a perspective view of a three-dimensional model 10A of the work 10. FIG. 10 is an enlarged view of a portion of FIG. 7B.

As shown in FIG. 7A, the GUI of the offline teaching program according to the present embodiment includes, for example, a window W1 that displays an image of a three-dimensional model placed in a virtual space (hereinafter referred to as "virtual space image I1"). , a window W2 that displays an image of the three-dimensional model 10A (hereinafter referred to as "virtual camera image I2") corresponding to the image of the workpiece 10 output from the camera 13, and a window W3 that displays a list of measurement points. and. Additionally, this GUI includes a palette P1 used for selecting a measurement location, a palette P2 used for lighting control, a measurement execution button B1 used for generating a part program, and a simulation button for executing measurement simulation in virtual space. B2. Note that each component included in the GUI (windows W1, W2, W3, palettes P1, P2, measurement execution button B1, and simulation button B2) can be hidden as appropriate.

For example, as shown in FIG. 7B, the window W1 displays a virtual space image I1, a coordinate axis I11 of the workpiece coordinate system in the virtual space, a coordinate axis I12 of the machine coordinate system in the virtual space, and the position of the three-dimensional model 10A of the workpiece 10. Alternatively, a manipulator I13 used when adjusting the angle is displayed.

The virtual space image I1 is, for example, an image of a three-dimensional model 10A of the workpiece 10 and a three-dimensional model 1A of the image measuring device 1 placed in the virtual space.

The three-dimensional model 1A of the image measuring device 1 includes, for example, a three-dimensional model 11A of the sample stage 11, a three-dimensional model 12A of the Y-axis drive mechanism 12, a three-dimensional model 13A of the camera 13, and a three-dimensional model of the ring light 14. 14A, a three-dimensional model 15A of the Z-axis drive mechanism 15, a three-dimensional model 16A of the X-axis drive mechanism 16, a three-dimensional model 17A of the arm support 17, and a three-dimensional model 18A of the vibration isolation table 18. Be prepared. These three-dimensional models 11A, 12A, 13A, 14A, 15A, 16A, 17A, and 18A each include a plurality of geometric elements that constitute the three-dimensional model. The position of the three-dimensional model 11A in the Y direction with respect to the three-dimensional model 18A is determined according to the Y-coordinate component of the position of the three-dimensional model 13A with respect to the three-dimensional model 11A (hereinafter referred to as the "first virtual camera position"). , will be adjusted accordingly. Similarly, the positions of the three-dimensional models 13A, 14A in the Z direction with respect to the three-dimensional model 18A, and the positions of the three-dimensional models 13A, 14A, 15A with respect to the three-dimensional model 18A in the X direction are the Z coordinate of the first virtual camera position. and the X-coordinate component.

Further, the three-dimensional model 1A of the image measuring device 1 includes a three-dimensional model 19A that indicates the focal position of the objective lens attached to the imaging unit, as shown in FIG. 8, for example. The three-dimensional model 19A has, for example, a conical shape. The height of the cone corresponds to the distance from the surface of the objective lens to the focal point of the objective lens (working distance). The angle of the cone corresponds to the condensing angle of the objective lens. The apex of the cone corresponds to the focal position of the objective lens and the center position of the image captured by the camera 13. Note that in the offline teaching program according to this embodiment, the type of objective lens can also be set. The shape of the three-dimensional model 19A is adjusted depending on the focal position of the objective lens and the like. Furthermore, the three-dimensional model 19A may be a semi-transparent image. For example, the three-dimensional model 19A may be displayed in such a manner that another three-dimensional model provided at a position overlapping with the three-dimensional model 19A can be visually recognized when viewed from the first virtual camera position. Thereby, the positional relationship between the focal position of the objective lens and the workpiece 10 may be more easily recognized.

Further, the virtual space image I1 includes a display 20A that shows a locus of movement of the focal position of the objective lens attached to the imaging unit. The display 20A showing the locus displays, for example, the locus along which the apex of the cone moves when measurement is performed using a part program. The display 20A showing the locus can be expressed by, for example, a sequence of points, a three-dimensional free curve, or other means.

The three-dimensional model 10A of the work 10 includes a plurality of geometric elements. For example, in the example of FIG. 9, a plane element 10a indicating the bottom surface, a plurality of plane elements 10b indicating the side surfaces, a plane element 10c indicating the top surface, and a plurality of linear elements indicating the outlines of these plane elements 10a, 10b, 10c. 10d. Furthermore, in the example of FIG. 9, the three-dimensional model 10A includes a cylindrical element 10e indicating a cylindrical through hole, two circular elements 10f indicating a boundary line between the through hole and the lower surface or the upper surface, and a quadrangular prism-shaped cylindrical element 10e. A plurality of planar elements 10g indicating a through hole, a plurality of linear elements 10h indicating the outline of the through hole and a boundary line between the through hole and the lower surface or the upper surface, two planar elements 10i indicating a notch, and It includes a cylindrical element 10j, and a plurality of linear elements 10k and two circular elements 10l that indicate boundaries between this notch and other elements. Note that the position of the three-dimensional model 10A in the mechanical coordinate system of the virtual space can be adjusted as appropriate.

The coordinate axis I11 (FIG. 7B) includes, for example, an image of an arrow extending along the X-axis, Y-axis, and Z-axis of the workpiece coordinate system in the virtual space. The coordinate axis I12 includes, for example, an image of an arrow extending along the X-axis, Y-axis, and Z-axis of the mechanical coordinate system in the virtual space.

For example, as shown in FIG. 10, the manipulator I13 generates three first images I13a corresponding to the X-axis, Y-axis, or Z-axis in the mechanical coordinate system of the virtual space, and the YZ plane and the ZX plane in the mechanical coordinate system of the virtual space. Alternatively, it includes three second images I13b corresponding to the XY plane and three third images I13c corresponding to the X-axis, Y-axis, or Z-axis in the mechanical coordinate system of the virtual space. The first image I13a can be expressed, for example, as an image of an arrow extending along the X-axis, Y-axis, or Z-axis of the mechanical coordinate system in virtual space. The second image I13b can be expressed, for example, as an image of a combination of two mutually perpendicular arrows extending along the X-axis, Y-axis, or Z-axis of the mechanical coordinate system in the virtual space. The third image I13c can be expressed, for example, as an image of a curved arrow centered on the X-axis, Y-axis, or Z-axis of the mechanical coordinate system in virtual space. In the illustrated example, although the first image I13a, the second image I13b, and the third image I13c correspond to the machine coordinate system of the virtual space, at least one of these images corresponds to the workpiece coordinates of the virtual space. You can also do it.

A virtual camera image I2 is displayed in the window W2 (FIG. 7A). For example, the field of view range of the camera 13 is calculated according to the specified type of objective lens, and the calculated field of view range, the first virtual camera position, and the three-dimensional model 10A of the workpiece 10 in the machine coordinate system of the virtual space are calculated. A virtual camera image I2 is generated according to the position and angle (hereinafter referred to as "virtual work position" and "virtual work angle").

Note that an edge detection tool t as described with reference to FIG. 4 can also be placed in the window W2. Further, the type, position, angle, size, etc. of such an edge detection tool t can also be adjusted in the window W2.

A list of measurement points on the workpiece 10 is displayed in the window W3. The list of measurement points includes, for example, a plurality of geometric elements included in the three-dimensional model 10A of the workpiece 10 (the above-mentioned plane elements 10a, 10b, 10c, 10g, 10i, linear elements 10d, 10h, 10k, cylindrical elements 10e, 10j). , circle elements 10f, 10l, etc.), information such as a name indicating the one corresponding to the measurement location on the workpiece 10 is displayed.

The palette P1 includes a plurality of geometric element selection buttons p1. These plurality of geometric element selection buttons p1 each correspond to a type of geometric element. For example, in the illustrated example, the plurality of geometric element selection buttons p1 correspond to point elements, linear elements, circular elements, plane elements, spherical elements, stepped cylindrical elements, cylindrical elements, conical elements, etc., respectively.

Palette P2 (FIG. 7A) includes a plurality of control bars p2. These plurality of control bars p2 correspond to a plurality of lights provided in the image measuring device 1, respectively. Further, each of these plurality of control bars p2 can be used to adjust the illuminance of each corresponding lighting. For example, in the illustrated example, the plurality of control bars p2 are epi-illumination that illuminates the workpiece 10 from above (in the imaging direction of the camera 13) through the objective lens, and transmitted illumination that illuminates the workpiece 10 from below through the sample stage 11. , and among the plurality of illuminations provided in the ring light 14, one that illuminates the work 10 from one side in the Y direction, one that illuminates the work 10 from the other side in the Y direction, and one that illuminates the work 10 from one side in the X direction. This corresponds to the one that irradiates the workpiece 10 and the one that irradiates the workpiece 10 from the other side in the X direction.

The measurement execution button B1 is used to output the part program automatic generation program. The part program automatic generation program will be described later.

The simulation button B2 is used to execute a simulation video generation program. The simulation video generation program will be described later.

FIG. 11 is a functional block diagram of the offline teaching program. Each configuration shown in FIG. 11 is realized by, for example, an offline teaching program, and the CPU 35', ROM 37', storage device 38', RAM 40', etc. described with reference to FIG.

The offline teaching program according to the present embodiment includes a three-dimensional model generation section G1, a virtual camera position holding section G2, an image generation section G3, an illumination condition adjustment section G4, a pointer coordinate holding section G5, and a pointer coordinate conversion section. G6, a work position adjustment section G7, a measurement point specifying section G8, a measurement point holding section G9, a part program generation section G10, a part program holding section G11, and a simulation execution section G12.

The three-dimensional model generation unit G1 generates a three-dimensional model 1A of the image measuring device 1 and a three-dimensional model 10A of the work 10. The three-dimensional model generation unit G1 includes, for example, a storage device 38' in which CAD data of the work 10 and the image measuring device 1, the first virtual camera position, the virtual work position and the virtual work angle are stored, and this CAD data. at least one of the RAMs 40' holding .

The virtual camera position holding unit G2 holds the position and angle in the virtual space of a virtual camera placed in the virtual space (hereinafter referred to as "second virtual camera position" and "second virtual camera angle"). . This virtual camera is different from the one corresponding to the camera 13 included in the vision measuring device 1, and is placed in the virtual space apart from the three-dimensional model 1A of the vision measuring device 1. The image output from this virtual camera corresponds to the virtual space image I1 displayed in the window W1 of FIG. 7A. Therefore, for example, when this virtual camera approaches the three-dimensional model 10A, the image of the three-dimensional model 10A is enlarged in the virtual space image I1.

The image generation unit G3 (FIG. 11) generates the virtual space image I1 and the virtual camera image I2 of FIG. 7A, and outputs them to the image memory 32' (FIG. 6).

The illumination condition adjustment unit G4 (FIG. 11) adjusts the virtual space image I1 of the three-dimensional model 10A of the workpiece 10 and the three-dimensional model 11A of the sample stage 11, and the virtual camera according to the operation of the palette P2 (FIG. 7A). The display color (illuminance, density) in image I2 is adjusted. For example, when the control bar p2 corresponding to epi-illumination is operated, the plane element 10c (FIG. 9) indicating the top surface of the workpiece 10 and the plane corresponding to the top surface of the three-dimensional model 11A (FIG. 7A) of the sample stage 11 The display color of the element is adjusted in the virtual space image I1 and the virtual camera image I2. Adjustment of the display color is performed, for example, by adjusting information regarding the display color of the three-dimensional model or geometric element in the three-dimensional model generating section G1 or the image generating section G3.

The pointer coordinate holding unit G5 holds pointer coordinates. The pointer coordinates held in the pointer coordinate holding unit G5 are updated as appropriate according to information input from the input device 23' such as a mouse.

The pointer coordinate conversion unit G6 converts the pointer coordinates based on, for example, the pointer coordinates held in the pointer coordinate holding unit G5 and the second virtual camera position and second virtual camera angle held in the virtual camera position holding unit G2. Convert to three-dimensional coordinates (hereinafter referred to as "three-dimensional pointer coordinates") in virtual space. The three-dimensional pointer coordinates are, for example, the intersection of a straight line provided in the virtual space corresponding to the pointer coordinates and a geometric element constituting the three-dimensional model 10A of the workpiece 10 or the three-dimensional model 1A of the image measuring device 1. You can. Further, a straight line provided in the virtual space corresponding to the pointer coordinates passes through the point specified by the second virtual camera position and the pointer coordinates, and points at the second virtual camera angle (for example, the imaging direction of the virtual camera). It can be a straight line that stretches.

The workpiece position adjustment unit G7 adjusts the position and angle ("virtual workpiece position" and "virtual workpiece angle") of the three-dimensional model 10A of the workpiece 10 in the virtual space based on the three-dimensional pointer coordinates and the like.

For example, when the first image I13a corresponding to the X-axis, Y-axis, or Z-axis of the manipulator I13 (FIG. 10) is selected by an operation such as a click, the workpiece position adjustment unit G7 adjusts the three-dimensional model 10A of the workpiece 10. is movable in the X direction, Y direction, or Z direction in virtual space. Similarly, when one of the second images I13b of the manipulator I13 is selected by an operation such as a click, the workpiece position adjustment unit G7 moves the three-dimensional model 10A in the X direction, the Y direction, and the Y direction in the virtual space. and the Z direction, or the Z direction and the X direction. Similarly, when one of the third images I13c of the manipulator I13 is selected by an operation such as a click, the workpiece position adjustment unit G7 rotates the three-dimensional model 10A around the X-axis, Y-axis, or Z-axis in the virtual space. Make it rotatable as a shaft.

Note that the workpiece position adjustment unit G7 (FIG. 11), for example, specifies the bottom surface (the contact surface with the planar element corresponding to the top surface of the sample stage 11) from a plurality of geometric elements constituting the three-dimensional model 10A of the workpiece 10. It is possible to have the function of In such a case, for example, one plane element can be selected as the bottom surface from among the plurality of plane elements 10a, 10b, 10c (FIG. 9) constituting the three-dimensional model 10A. In addition, in such a case, for example, movement in a direction parallel to the plane element indicating the top surface of the sample stage 11, and rotation around a straight line extending in the normal direction of the plane element indicating the top surface of the sample stage 11. It is possible to enable only one movement and disable other movements and rotations. For example, among the plurality of images forming the manipulator I13 (FIG. 10), two first images I13a corresponding to the X-axis and Y-axis, one second image I13b corresponding to the XY plane, and one second image I13b corresponding to the Z-axis. One first image I13a corresponding to the Z axis, two second images I13b corresponding to the YZ plane and the ZX plane, and The two corresponding third images I13c can be rendered invalid.

The measurement point designation unit G8 (FIG. 11) selects, for example, a geometric element corresponding to the measurement point from a plurality of geometric elements included in the three-dimensional model 10A of the workpiece 10. For example, the measurement point designation unit G8 acquires the type of geometric element corresponding to the measurement point by specifying a plurality of geometric element selection buttons p1 included in the palette P1 (FIG. 7A). In addition, the measurement point designation section G8 selects one of the plurality of geometric elements of the type corresponding to the measurement point that is the closest to the three-dimensional pointer coordinates, or one that is the closest to the three-dimensional pointer coordinates and Those whose distance from the three-dimensional pointer coordinates is less than or equal to a predetermined size are highlighted and displayed. The highlighted display is performed, for example, by adjusting information regarding the display color of the three-dimensional model or the geometric element in the three-dimensional model generating section G1 or the image generating section G3 (FIG. 11). When a user performs an operation such as clicking while a certain geometric element is highlighted, this geometric element is selected as the geometric element corresponding to the measurement location.

The measurement point holding section G9 holds a list of geometric elements selected by the measurement point specifying section G8. This list is displayed in the window W3.

The part program generation unit G10 executes the part program automatic generation program in response to a click on the measurement execution button B1. When the part program automatic generation program is executed, a part program is generated based on the list of geometric elements held in the measurement point holding unit G9.

The part program holding unit G11 holds the generated part program.

The simulation execution unit G12 executes a simulation video generation program in response to a click on the simulation button B2. When the simulation video generation program is executed, a measurement simulation in the virtual space is executed based on the part program held in the part program holding unit G11. Furthermore, a plurality of virtual space images I1 and a plurality of virtual camera images I2 showing the operation of the image measuring device 1 when this part program is executed are generated as a simulation video. The generated simulation videos are played in windows W1 and W2, respectively.

[Offline teaching procedure]
Next, an example of a procedure for offline teaching by a user will be described with reference to FIG. 12. FIG. 12 is a flowchart illustrating an example of an offline teaching procedure.

First, in step S201, the user selects the model of the image measuring device 1, the type of objective lens, etc. The arithmetic device 22' generates a three-dimensional model 1A of the image measuring device 1 corresponding to the selected image measuring device 1 and objective lens. Further, the arithmetic device 22' causes the window W1 to display the generated image of the three-dimensional model 1A.

Next, in step S202, the user selects CAD data of the work 10. The arithmetic device 22' generates a three-dimensional model 10A of the workpiece 10 corresponding to the selected CAD data. Further, the arithmetic device 22' causes the window W1 to display the generated image of the three-dimensional model 10A.

Next, in step S203, the user designates either the lower surface, the side surface, or the upper surface of the workpiece 10 as the bottom surface (the surface in contact with the upper surface of the sample stage 11). When the bottom surface of the workpiece 10 is specified, the calculation device 22' calculates the shape so that one of the planar elements 10a, 10b, 10c (FIG. 9) corresponding to this bottom surface contacts the planar element indicating the top surface of the sample stage 11. Adjust the virtual work position and virtual work angle.

Next, in step S204, the user adjusts the virtual work position and virtual work angle. For example, the user selects the image by clicking on the first image I13a, the second image I13b, or the third image I13c included in the manipulator I13, depending on the movement direction or rotation direction of the three-dimensional model 10A of the workpiece 10. Next, the user performs an operation such as dragging on the three-dimensional model 10A on the virtual space image I1, thereby adjusting the virtual work position and virtual work angle.

Next, in step S205, the user selects a measurement location. For example, the user selects one geometric element selection button p1 corresponding to the measurement location from among the plurality of geometric element selection buttons p1 included in the palette P1 in FIG. 7A. Next, the user operates the input device 23' such as a mouse to move the mouse pointer on the virtual space image I1 to the vicinity of the measurement location. Accordingly, in the virtual space image I1, the geometric element corresponding to the measurement location is highlighted or otherwise highlighted. The user selects this geometric element as the geometric element corresponding to the measurement location by performing an operation such as clicking in this state. The selected geometric element is, for example, added to the list of measurement points in the above-mentioned window W3. The user checks the window W3 in FIG. 7A to check whether all the necessary measurement points have been selected, and then sequentially selects the measurement points using the same method and displays the list of geometric elements corresponding to the measurement points. generate.

Next, in step S206, the user sets measurement conditions such as illumination. When setting the illumination conditions, for example, the above-mentioned palette P2 is used. When the lighting conditions are set by the user, the display colors of the plurality of geometric elements included in the three-dimensional model 10A of the workpiece 10 change in the virtual space image I1 and virtual camera image I2 displayed in the windows W1 and W2. do. Therefore, the user can adjust the lighting conditions while referring to the virtual space image I1 and the virtual camera image I2.

Next, in step S207, the user executes a simulation of automatic measurement. For example, the above-mentioned simulation button B2 is clicked. Along with this, the arithmetic device 22' executes the simulation video generation program.

Next, in step S208, the user determines whether the generated part program is appropriate. For example, by referring to the simulation video, you can check whether a sufficient number of measurement points (for example, edge point e in Figure 4) can be obtained, whether the measurement points are appropriate, whether a sufficient amount of light can be obtained during measurement, and so on. , it is determined whether a part of the three-dimensional model 1A of the image measuring device 1 (for example, the three-dimensional model 14A of the ring light 14), etc. is interfering with the three-dimensional model 10A of the workpiece 10. If the generated part program is not appropriate, the process advances to step S209, for example. If the generated part program is appropriate, the process advances to step S210.

Next, in step S209, the user edits the generated part program. For example, if the user determines that a sufficient number of measurement points cannot be acquired, the user can adjust the type, position, angle, size, etc. of the edge detection tool t on the top of the window W2 (FIG. 7A). . For example, if the user determines that the measurement location is not appropriate, he or she can modify the measurement location on the windows W1, W2 (FIG. 7A), etc. Further, for example, if the user determines that a sufficient amount of light cannot be obtained during measurement, the user can adjust the illumination conditions using the palette P2 (FIG. 7A) or the like. For example, if the user determines that a part of the three-dimensional model 1A of the image measuring instrument 1 is interfering with the three-dimensional model 10A of the workpiece 10, the user may You can edit your travel route. In addition, for example, the display 20A showing the locus of movement of the focal position of the objective lens can be used to edit the movement path.

Next, in step S210, the user outputs the generated part program. For example, the user clicks the measurement execution button B1. Along with this, the arithmetic device 22' outputs the generated part program. The output part program can be used, for example, in the automatic measurement process described with reference to FIG.

Note that the flowchart in FIG. 12 is a schematic diagram for explanation, and specific aspects can be adjusted as appropriate. For example, if the part program generated in step S208 is not appropriate, the objective lens used in the image measuring device 1 can be replaced.

[Part program automatic generation program]
Next, an example of a part program automatic generation program will be described with reference to FIG. FIG. 13 is a flowchart showing an example of a part program automatic generation program.

In step S301, one geometric element is selected from the list of measurement locations in window W3.

In step S302, the imaging position and the type, size, position, angle, etc. of the edge detection tool are set based on the type, position, size, etc. of the selected geometric element. In this step, for example, the imaging position can be set so that a plurality of measurement points are included in the image acquired by the camera 13. Furthermore, for example, if the measurement location is too large to fit in the image captured by the camera 13, a plurality of imaging positions can be set corresponding to such measurement locations. The imaging position and the type, size, position, angle, etc. of the edge detection tool are held in the part program holding unit G11 (FIG. 11) as part of the part program.

In step S303, it is determined whether all the geometric elements included in the list of measurement points corresponding to window W3 have been selected. In this step, for example, even if a geometric element is not selected in step S301, if it is included in the imaging range set in step S302, it may be determined as a selected geometric element. I can do it. If all geometric elements have not been selected, the process returns to step S301. If all geometric elements have been selected, the part program automatic generation program is ended.

[Simulation video generation program]
Next, an example of a simulation video generation program will be described with reference to FIG. 14. FIG. 14 is a flowchart illustrating an example of a simulation video generation program.

In step S401, a part program automatic generation program is executed to generate a part program.

In step S402, variable K is set to 1.

In step S403, the K-th imaging position and the K+1-th imaging position among the plurality of imaging positions included in the part program are acquired.

In step S404, variable L is set to 0.

In step S405, the first virtual camera position is acquired after a unit time x L has elapsed since the first virtual camera position reached the K-th imaging position.

In step S406, the three-dimensional model 1A of the image measuring device 1 and the three-dimensional model 10A of the workpiece 10 corresponding to the first virtual camera position acquired in step S405 are generated. That is, the Y-coordinate positions of the three-dimensional models 10A and 11A of the workpiece 10 and sample stage 11 in the virtual space are adjusted according to the Y-coordinate component of the first virtual camera position. Also, depending on the component of the Z coordinate of the first virtual camera position, the Z coordinate in the virtual space of the three-dimensional models 13A, 14A of the camera 13 and the ring light 14, and the three-dimensional model 19A indicating the focused position of the objective lens is determined. The position is adjusted. Also, depending on the X coordinate component of the first virtual camera position, the X coordinate of the camera 13, the ring light 14, and the Z-axis drive mechanism 15, and the X coordinate in the virtual space of the three-dimensional model 19A indicating the focal position of the objective lens are The coordinate position is adjusted.

In step S407, a virtual space image I1 and a virtual camera image I2 are generated corresponding to the generated three-dimensional models 1A and 10A. The virtual space image I1 is generated, for example, based on the three-dimensional model generated in step S406, the second virtual camera position, and the second virtual camera angle. Furthermore, a display 20A indicating a locus of movement of the focal position of the objective lens is displayed in the virtual space image I1. The virtual camera image I2 is generated, for example, based on the three-dimensional model generated in step S406. Note that an edge detection tool used for automatic measurement can be displayed on the virtual camera image I2.

In step S408, it is determined whether the imaging position has reached the K+1st imaging position. If the imaging position has not reached the K+1st imaging position, the process advances to step S409. If the imaging position has reached the K+1st imaging position, the process advances to step S410.

In step S409, 1 is added to variable L, and the process returns to step S405.

In step S410, it is determined whether all imaging positions have been selected. If all imaging positions have not been selected, the process advances to step S411. If all imaging positions have been selected, the process advances to step S412.

In step S411, 1 is added to variable K, and the process returns to step S403.

In step S412, the plurality of output virtual space images I1 and virtual camera images I2 are played back as moving images in windows W1 and W2.

[effect]
In conventional offline teaching, for example, a CAD model of a workpiece is placed in a virtual space based on CAD data of the workpiece, and an image of this CAD model is sometimes displayed on a display or the like. In such a case, the user may specify a measurement location based on the image of this CAD model. According to such a method, the measurement location can be easily specified.

However, in such an offline teaching program, it is sometimes difficult to sufficiently judge the suitability of the generated part program. For example, it may be difficult to intuitively determine whether or not there will be interference between the camera and the work during measurement.

Therefore, in the offline teaching program according to the present embodiment, a simulation of automatic measurement is executed based on the generated part program. Further, when simulating automatic measurement, a video of the virtual space image I1 showing the three-dimensional model 1A of the vision measuring machine 1 and the three-dimensional model 10A of the work 10 is played in the window W1, and the camera 13 is played in the window W2. A moving image of the virtual camera image I2 corresponding to the camera image of the workpiece 10 captured by is played back.

According to such a configuration, it is possible to grasp the positional relationship between each component of the image measuring device 1 (for example, the ring light 14, etc.) and the workpiece 10 by the moving image of the virtual space image I1 played in the window W1, and The image data output from the camera 13 can be grasped by the moving image of the virtual camera image I2 reproduced in W2. Therefore, even in an environment where the user cannot visually confirm the actual workpiece 10 and the image measuring device 1, the user can suitably judge the suitability of the generated part program. For example, when automatic measurement is performed based on a generated part program, it is possible to intuitively judge whether or not a suitable measurement can be performed while avoiding interference between the vision measuring device 1 and the workpiece 10. I can do it.

Furthermore, in the offline teaching program according to the present embodiment, the three-dimensional model 1A of the image measuring device 1 includes a conical three-dimensional model 19A that indicates the focal position of the objective lens. According to such a configuration, the user can intuitively determine the appropriate first virtual camera position by visually checking the relationship between the three-dimensional model 10A of the workpiece 10 and the conical three-dimensional model 19A in the window W1, etc. I can judge. Furthermore, it is possible to intuitively judge whether or not an appropriate objective lens has been selected. Furthermore, when measuring the bottom of a deep hole, for example, it is possible to intuitively judge whether or not a sufficient amount of light can be obtained.

Further, in the offline teaching program according to the present embodiment, the virtual space image I1 that constitutes the moving image of the simulation includes a display 20A showing a trajectory along which the focal position of the objective lens moves. According to such a configuration, the user can grasp at a glance how the positional relationship between the work 10 and a part of the image measuring device 1 (for example, the camera 13 and the ring light 14, etc.) changes during automatic measurement. Therefore, it is possible to easily determine whether or not a part of the three-dimensional model 1A of the image measuring device 1 will interfere with the three-dimensional model 10A of the workpiece 10.

In addition, in conventional offline teaching, when adjusting the position and angle of the CAD model of the workpiece in virtual space, the coordinate data of the CAD model of the workpiece is directly input using input means such as a keyboard, which takes time and effort. . Although it is conceivable to make adjustments using an input means such as a mouse, such an operation may be difficult, for example, when it is desired to move a CAD model of a workpiece in only one direction.

Therefore, the offline teaching program according to the present embodiment specifies the movement direction or rotation axis of the three-dimensional model 10A (FIG. 7A) of the workpiece 10 in the virtual space, and based on the operation using the input device 23' (FIG. 5), A workpiece in which the position of the three-dimensional model 10A of the workpiece 10 in the virtual space is adjusted along a specified movement direction, or the angle of the three-dimensional model 10A of the workpiece 10 in the virtual space is adjusted along a specified rotation axis. A position adjustment section G7 (FIG. 11) is provided.

According to such a configuration, the position and angle of the three-dimensional model 10A in the virtual space can be adjusted easily and intuitively using an input device such as a mouse. For example, when adjusting the three-dimensional coordinates of the three-dimensional model 10A using a two-dimensional input operation such as a mouse, the two-dimensional input operation is converted into a three-dimensional input operation in virtual space, and the three-dimensional model 10A is The position and angle of 10A can be easily adjusted.

For example, when adjusting the position and angle of the three-dimensional model 10A of the work 10 in a three-dimensional virtual space as in the present embodiment, the height position of the three-dimensional model 10A of the work 10 and the three-dimensional If the angle of the contact surface with the model 11A is not set accurately, measurement accuracy may be affected. However, when a user performs such an adjustment, the adjustment may take time.

Therefore, the offline teaching program according to the present embodiment specifies the part (for example, the bottom surface) that indicates the contact part with the sample stage 11 (FIG. 1) of the three-dimensional model 10A (FIG. 7A) of the workpiece 10, and The position and angle in the virtual space of the three-dimensional model 10A of the workpiece 10 are adjusted so that the portion that has been A workpiece position adjustment section G7 (FIG. 11) is provided.

According to such a configuration, the position and angle of the three-dimensional model 10A of the workpiece 10 can be easily adjusted without requiring the user to perform precise positioning.

[Other embodiments]
The offline teaching program and the like according to the first embodiment have been described above. However, the above description is merely an example, and the specific configuration can be changed as appropriate.

[Image measuring device 1]
In the above example, the image measuring device 1 (FIG. 1) is configured such that the sample stage 11 moves in the Y direction depending on the imaging position. However, the offline teaching program described above can handle various image measurement devices. For example, instead of the sample stage 11, it is also possible to handle an image imagining device in which a camera 13, a ring light 14, a Z-axis drive mechanism 15, an X-axis drive mechanism 16, and an arm support 17 are configured to move in the Y direction. . Furthermore, it is also possible to handle image measuring devices equipped with robot arms and the like. Note that an image measuring device including a robot arm or the like includes, for example, a plurality of arm sections, a plurality of joint sections connecting at least two of the plurality of arm sections, and one of the plurality of arm sections. and a connected camera. Furthermore, each joint includes, for example, a driving motor, a rotary encoder for position detection, and the like.

[Display device 21 and input device 23]
In the above example, a display is used as the display device 21, and a device that performs two-dimensional operations such as a mouse is used as the input device 23. However, such a configuration can be modified as appropriate. For example, a configuration such as a head mounted display capable of displaying a three-dimensional image can be used as the display device 21, and a configuration that performs three-dimensional operations can be used as the input device 23.

[Three-dimensional model 19A showing the focus position of the objective lens]
In the above example, the three-dimensional model 19A indicating the focal position of the objective lens had a conical shape. However, the shape of the three-dimensional model 19A can be adjusted as appropriate. For example, the three-dimensional model 19A may include a straight line indicating the optical axis of the objective lens. Further, for example, the three-dimensional model 19A may include a rectangular planar element corresponding to the viewing range of the camera 13. Such a plane element can be, for example, a plane that is in contact with the vertex of the conical three-dimensional model 19A, or a plane that is perpendicular to the central axis of the conical three-dimensional model 19A. Further, the three-dimensional model 19A may include a triangular pyramidal geometric element, a quadrangular pyramidal geometrical element, or another polygonal pyramidal geometrical element instead of the conical element.

[Relationship between workpiece 10 and sample stage 11]
In the above example, the workpiece 10 was placed directly on the sample stage 11. However, for example, it is also possible to place a jig on the sample stage 11, support the workpiece 10 with this jig, and measure the workpiece 10 held by the jig.

In order to generate a part program assuming such a measurement, for example, it is necessary to generate the part program with the three-dimensional model 10A of the workpiece 10 suspended in the air, taking into account the size and shape of the jig. You can also do it. Also, for example, the 3D model of the jig is generated by importing the CAD data of the jig, the position of the 3D model 10A of the workpiece 10 is adjusted using the 3D model of the jig, and the part is placed in this state. You can also generate programs. Furthermore, for example, it is also possible to generate a three-dimensional model of a jig and a workpiece supported by the jig, and to generate a part program using this three-dimensional model as the three-dimensional model of the workpiece.

When a part program is generated with the three-dimensional model 10A of the workpiece 10 floating in the air, for example, the function of specifying the bottom surface of the workpiece position adjustment section G7 can be disabled. According to such a method, a part program can be generated without using CAD data of a jig or the like.

When generating a three-dimensional model of the jig by importing CAD data of the jig, for example, the workpiece position adjustment unit G7 calculates the bottom surface and the shape of the workpiece 10 from a plurality of geometric elements that constitute the three-dimensional model of the jig. It is possible to specify the contact portion with the three-dimensional model 10A. Furthermore, it is also possible to specify the contact portion of the jig with the three-dimensional model from a plurality of geometric elements constituting the three-dimensional model 10A of the workpiece 10. Note that the position adjustment of the three-dimensional model of the jig can also be performed using the manipulator I13 or the like in the same manner as the three-dimensional model 10A of the work 10 described above.

Furthermore, in the above example, when the workpiece 10 or the jig is placed on the sample stage 11, a plane included in the workpiece 10 or the jig comes into contact with the upper surface of the sample stage 11. However, the contact portion of the workpiece 10 or the jig with the sample stage 11 may be a portion other than the planar element. For example, when the workpiece 10 or the jig includes a plurality of curved or spherical legs, the workpiece position adjustment section G7 assumes a plane that is in contact with the plurality of legs included in the workpiece 10 or the jig. , this plane can be designated as the bottom surface.

[Part program automatic generation program]
In the above example, the part program is configured such that the geometric elements displayed in the list of measurement points displayed in window W3 in FIG. 7A are sequentially selected in the order in which they were selected by the user, and the imaging positions are moved in this order. It was being generated. However, for example, the part program automatic generation program described above can also change the order of the imaging positions so that the most efficient measurement can be performed. For example, calculate the order of imaging positions that passes through all imaging positions and minimizes the total movement distance, or minimizes the time required for automatic measurement, and then rearranges the imaging positions according to this order. You can also do that.

[simulation]
In the above example, after steps S401 to S411 in FIG. 14 are all completed, the moving image is played back in step S412. However, such a method is merely an example, and the specific method can be adjusted as appropriate. For example, the operations in steps S401 to S411 (generation of virtual space image I1 and virtual camera image I2) and the operation in step S412 (playback of moving image) can be executed in parallel.

Furthermore, when generating a simulation video, it is also possible to calculate the time required to perform automatic measurements based on the generated part program, for example. Furthermore, the simulation video can be played back in a manner that allows operations such as fast forwarding, slow motion, and pausing. Furthermore, when the simulation video is paused, the second virtual camera position can be adjusted in this state. Furthermore, the simulation video can be made into slow motion at the timing before and after the first virtual camera position reaches the imaging position. Furthermore, the simulation video can be paused at the timing when the first virtual camera position reaches the imaging position. Thereby, the edge detection tool t can be more easily confirmed in the window W2.

[others]
Although several embodiments of the invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, substitutions, and changes can be made without departing from the gist of the invention. These embodiments and their modifications are included within the scope and gist of the invention, as well as within the scope of the invention described in the claims and its equivalents.

DESCRIPTION OF SYMBOLS 1... Image measuring machine, 2... Computer system, 10... Work, 11... Sample stand, 13... Camera, I1... Virtual space image, I2... Virtual camera image, I13... Manipulator, W1, W2... Window.

Claims (4)

A sample stage on which the workpiece is placed;
an imaging unit that images the work;
A teaching program that generates a part program for an image measuring device comprising: a position adjustment mechanism that adjusts a positional relationship between the sample stage and at least a portion of the imaging unit;
computer,
A three-dimensional model of the image measuring device, a three-dimensional model of the workpiece placed on the sample stage of the image measuring device, and a three-dimensional conical shape indicating the focal position of the objective lens attached to the imaging unit. a three-dimensional model generation means for generating the model in virtual space;
a first image corresponding to a three-dimensional model of the image measuring device and a three-dimensional model of the work; and an image corresponding to the three-dimensional model of the work, which corresponds to an image of the work captured by the imaging unit. a three-dimensional model image display means for generating a second image and displaying the second image on a display device;
a simulation execution unit that executes a measurement simulation based on the generated part program;
function as
In the measurement simulation, the positional relationship between a portion of the three-dimensional model of the image measuring device indicating the sample stage and a portion indicating at least a portion of the imaging unit is sequentially adjusted , and the positional relationship is adjusted according to the adjusted positional relationship. A teaching program for an image measuring device, wherein the first image and the second image are sequentially generated using the image measuring device, and the generated first image and the second image are sequentially displayed on the display device. The three-dimensional model generation means calculates a locus of movement of the focal position of the objective lens when measurement is performed using the part program, and converts a sequence of points or a three-dimensional free curve indicating this locus into the virtual space. A teaching program for an image measuring device according to claim 1, wherein the teaching program is generated to: . The computer,
Measurement point specifying means capable of specifying a measurement point of the workpiece corresponding to the geometrical element by selecting at least one of a plurality of geometrical elements included in the three-dimensional model of the workpiece using an input device;
part program generation means for generating a part program based on the specified measurement location;
A teaching program for an image measuring device according to claim 1 or 2, which is made to function as a teaching program for an image measuring device. The teaching program for an image measuring device according to any one of claims 1 to 3, wherein the three-dimensional conical model is displayed as a translucent image.

Images